JP2013514632A - 半導体素子 - Google Patents
半導体素子 Download PDFInfo
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- JP2013514632A JP2013514632A JP2012537202A JP2012537202A JP2013514632A JP 2013514632 A JP2013514632 A JP 2013514632A JP 2012537202 A JP2012537202 A JP 2012537202A JP 2012537202 A JP2012537202 A JP 2012537202A JP 2013514632 A JP2013514632 A JP 2013514632A
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- Prior art keywords
- layer
- feedthrough element
- semiconductor device
- drain contact
- epitaxial
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 60
- 239000000758 substrate Substances 0.000 claims abstract description 67
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 15
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 15
- 238000009792 diffusion process Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 51
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 19
- 229910052721 tungsten Inorganic materials 0.000 claims description 19
- 239000010937 tungsten Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 13
- 229920005591 polysilicon Polymers 0.000 claims description 13
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 10
- 230000004888 barrier function Effects 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 8
- 230000005669 field effect Effects 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 4
- 238000011049 filling Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 description 30
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 239000010936 titanium Substances 0.000 description 9
- 238000002513 implantation Methods 0.000 description 7
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 210000000746 body region Anatomy 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 238000005389 semiconductor device fabrication Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 229910021341 titanium silicide Inorganic materials 0.000 description 2
- VRZFDJOWKAFVOO-UHFFFAOYSA-N [O-][Si]([O-])([O-])O.[B+3].P Chemical compound [O-][Si]([O-])([O-])O.[B+3].P VRZFDJOWKAFVOO-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66681—Lateral DMOS transistors, i.e. LDMOS transistors
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- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
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- H01L29/41725—Source or drain electrodes for field effect devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66659—Lateral single gate silicon transistors with asymmetry in the channel direction, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66681—Lateral DMOS transistors, i.e. LDMOS transistors
- H01L29/66704—Lateral DMOS transistors, i.e. LDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
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Abstract
【選択図】図2
Description
本文書は、少なくとも以下のコンセプトを開示する。
高ドープ基板層上に成長されるエピタキシャル層であって、前記高ドープ基板層及び前記エピタキシャル層の双方は第1の伝導度型であるエピタキシャル層と;
前記エピタキシャル層内の第2の伝導度型のソース領域と;
前記エピタキシャル層内の前記第2の伝導度型のドレイン領域と;
前記ドレイン領域に対するドレイン接点であって、逆バイアス接合及びMOSFET(金属酸化物半導体電界効果トランジスタ)チャンネルにより前記エピタキシャル及び基板層が前記ドレイン接点から隔離されているドレイン接点と;
導電性のトレンチ状のフィードスルー要素であって、前記フィードスルー要素は、前記エピタキシャル層を通過し、前記基板層及び前記ソース領域と接触し、前記フィードスルー要素は、前記ドレイン接点と前記基板層とを電気的に接続するように動作可能であるフィードスルー要素と
を具備した半導体素子。
コンセプト2.
前記フィードスルー要素と接続するゲートシールドを更に具備したコンセプト1の半導体素子。
コンセプト3.
前記ゲートシールドも前記ソース領域に接触しているコンセプト2の半導体素子。
コンセプト4.
前記ゲートシールドはポリシリコンを含んでいるコンセプト2の半導体素子。
コンセプト5.
前記フィードスルー要素はタングステンを含んでいるコンセプト1の半導体素子。
コンセプト6.
前記フィードスルー要素はバリア層を形成するコンフォーマルコーティングを含んでいるコンセプト1の半導体素子。
コンセプト7.
前記コンフォーマルコーティングは窒化チタンを含んでいるコンセプト6の半導体素子。
コンセプト8.
前記素子はフリップチップを含んでいるコンセプト1の半導体素子。
コンセプト9.
前記素子は横方向拡散金属酸化物半導体(LDMOS)素子を含んでいるコンセプト1の半導体素子。
コンセプト10.
高ドープ基板層上に成長されるエピタキシャル層であって、前記高ドープ基板層及び前記エピタキシャル層の双方は第1の伝導度型であるエピタキシャル層と;
前記エピタキシャル層内の第2の伝導度型のソース領域と;
前記エピタキシャル層内の前記第2の伝導度型のドレイン領域と;
金属層に連結されたドレイン接点であって、逆バイアス接合及びMOSFET(金属酸化物半導体電界効果トランジスタ)チャンネルにより前記エピタキシャル及び基板層が前記ドレイン接点から隔離されているドレイン接点と;
導電性のトレンチ状のフィードスルー要素であって、前記フィードスルー要素は、前記エピタキシャル層を通過し、前記基板層と接触し、少なくとも1つの介在層によって前記フィードスルー要素が前記金属層から隔離され、前記ドレイン接点及び前記フィードスルー要素が前記エピタキシャル層によって分離されているフィードスルー要素と;
ゲート構造であって、前記ゲート構造に電位が付加されると電気的経路が形成され、前記電気経路は、前記基板層、前記ドレイン接点、前記エピタキシャル層及び前記フィードスルー要素を含んでいるゲート構造と
を具備した半導体素子。
コンセプト11.
前記フィードスルー要素と接続するゲートシールドを更に具備したコンセプト10の半導体素子。
コンセプト12.
前記ゲートシールドも前記ソース領域に接続しているコンセプト11の半導体素子。
コンセプト13.
前記ゲートシールドはポリシリコンを含み、前記フィードスルー要素はタングステンを含んでいるコンセプト11の半導体素子。
コンセプト14.
前記フィードスルー要素はバリア層を形成するコンフォーマルコーティングを含んでいるコンセプト10の半導体素子。
コンセプト15.
前記素子はフリップチップを含んでいるコンセプト10の半導体素子。
コンセプト16.
前記素子は横方向拡散金属酸化物半導体(LDMOS)素子を含んでいるコンセプト10の半導体素子。
コンセプト17.
半導体素子の作製方法であって、
高ドープ基板層上に成長されたピタキシャル層内においてソース領域及びドレイン領域を形成することであって、前記ソース領域及びドレイン領域の双方は第2の伝導度型であり、前記高ドープ基板層及びピタキシャル層の双方は第1の伝導度型であることと;
ドレイン接点を形成することであって、逆バイアス接合及びMOSFET(金属酸化物半導体電界効果トランジスタ)チャンネルにより前記エピタキシャル及び基板層が前記ドレイン接点から隔離されることと;
導電性のトレンチ状のフィードスルー要素を形成することであって、前記フィードスルー要素は、前記エピタキシャル層を通過し、前記基板層及び前記ソース領域と接触し、前記ドレイン接点と前記基板層とを電気的に接続するように動作可能であることと
を含んだ方法。
コンセプト18.
ゲートシールドを形成することをさらに含み、前記ゲートシールドは前記フィードスルー要素と接触し且つ前記ソース領域と接続するコンセプト17の方法。
コンセプト19.
前記フィードスルー要素を形成することは、
前記介在層内においてトレンチを前記基板層内に延びるように形成することと、
前記トレンチをバリア層でコーティングすることと、
前記トレンチを導電性材料で充填することと、
をさらに含んでいるコンセプト17の方法。
コンセプト20.
前記素子は、フリップチップ及び横方向拡散金属酸化物半導体(LDMOS)素子からなる群から選択されるコンセプト17の方法。
Claims (20)
- 高ドープ基板層上に成長されるエピタキシャル層であって、前記高ドープ基板層及び前記エピタキシャル層の双方は第1の伝導度型であるエピタキシャル層と;
前記エピタキシャル層内の第2の伝導度型のソース領域と;
前記エピタキシャル層内の前記第2の伝導度型のドレイン領域と;
前記ドレイン領域に対するドレイン接点であって、逆バイアス接合及びMOSFET(金属酸化物半導体電界効果トランジスタ)チャンネルにより前記エピタキシャル及び基板層が前記ドレイン接点から隔離されているドレイン接点と;
導電性のトレンチ状のフィードスルー要素であって、前記フィードスルー要素は、前記エピタキシャル層を通過し、前記基板層及び前記ソース領域と接触し、前記フィードスルー要素は、前記ドレイン接点と前記基板層とを電気的に接続するように動作可能であるフィードスルー要素と
を具備した半導体素子。 - 前記フィードスルー要素と接続するゲートシールドを更に具備した請求項1の半導体素子。
- 前記ゲートシールドも前記ソース領域に接触している請求項2の半導体素子。
- 前記ゲートシールドはポリシリコンを含んでいる請求項2の半導体素子。
- 前記フィードスルー要素はタングステンを含んでいる請求項1の半導体素子。
- 前記フィードスルー要素はバリア層を形成するコンフォーマルコーティングを含んでいる請求項1の半導体素子。
- 前記コンフォーマルコーティングは窒化チタンを含んでいる請求項6の半導体素子。
- 前記素子はフリップチップを含んでいる請求項1の半導体素子。
- 前記素子は横方向拡散金属酸化物半導体(LDMOS)素子を含んでいる請求項1の半導体素子。
- 高ドープ基板層上に成長されるエピタキシャル層であって、前記高ドープ基板層及び前記エピタキシャル層の双方は第1の伝導度型であるエピタキシャル層と;
前記エピタキシャル層内の第2の伝導度型のソース領域と;
前記エピタキシャル層内の前記第2の伝導度型のドレイン領域と;
金属層に連結されたドレイン接点であって、逆バイアス接合及びMOSFET(金属酸化物半導体電界効果トランジスタ)チャンネルにより前記エピタキシャル及び基板層が前記ドレイン接点から隔離されているドレイン接点と;
導電性のトレンチ状のフィードスルー要素であって、前記フィードスルー要素は、前記エピタキシャル層を通過し、前記基板層と接触し、少なくとも1つの介在層によって前記フィードスルー要素が前記金属層から隔離され、前記ドレイン接点及び前記フィードスルー要素が前記エピタキシャル層によって分離されているフィードスルー要素と;
ゲート構造であって、前記ゲート構造に電位が付加されると電気的経路が形成され、前記電気経路は、前記基板層、前記ドレイン接点、前記エピタキシャル層及び前記フィードスルー要素を含んでいるゲート構造と
を具備した半導体素子。 - 前記フィードスルー要素と接続するゲートシールドを更に具備した請求項10の半導体素子。
- 前記ゲートシールドも前記ソース領域に接続している請求項11の半導体素子。
- 前記ゲートシールドはポリシリコンを含み、前記フィードスルー要素はタングステンを含んでいる請求項11の半導体素子。
- 前記フィードスルー要素はバリア層を形成するコンフォーマルコーティングを含んでいる請求項10の半導体素子。
- 前記素子はフリップチップを含んでいる請求項10の半導体素子。
- 前記素子は横方向拡散金属酸化物半導体(LDMOS)素子を含んでいる請求項10の半導体素子。
- 半導体素子の作製方法であって、
高ドープ基板層上に成長されたピタキシャル層内においてソース領域及びドレイン領域を形成することであって、前記ソース領域及びドレイン領域の双方は第2の伝導度型であり、前記高ドープ基板層及びピタキシャル層の双方は第1の伝導度型であることと;
ドレイン接点を形成することであって、逆バイアス接合及びMOSFET(金属酸化物半導体電界効果トランジスタ)チャンネルにより前記エピタキシャル及び基板層が前記ドレイン接点から隔離されることと;
導電性のトレンチ状のフィードスルー要素を形成することであって、前記フィードスルー要素は、前記エピタキシャル層を通過し、前記基板層及び前記ソース領域と接触し、前記ドレイン接点と前記基板層とを電気的に接続するように動作可能であることと
を含んだ方法。 - ゲートシールドを形成することをさらに含み、前記ゲートシールドは前記フィードスルー要素と接触し且つ前記ソース領域と接続する請求項17の方法。
- 前記フィードスルー要素を形成することは、
前記介在層内においてトレンチを前記基板層内に延びるように形成することと、
前記トレンチをバリア層でコーティングすることと、
前記トレンチを導電性材料で充填することと、
をさらに含んでいる請求項17の方法。 - 前記素子は、フリップチップ及び横方向拡散金属酸化物半導体(LDMOS)素子からなる群から選択される請求項17の方法。
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JP5830023B2 (ja) | 2015-12-09 |
US9443959B2 (en) | 2016-09-13 |
EP2497114A4 (en) | 2014-01-22 |
US20150243779A1 (en) | 2015-08-27 |
EP2497114A2 (en) | 2012-09-12 |
WO2011054009A8 (en) | 2012-01-05 |
KR20120091211A (ko) | 2012-08-17 |
US8604525B2 (en) | 2013-12-10 |
EP2497114B1 (en) | 2020-03-11 |
CN102656697B (zh) | 2015-04-15 |
US9064896B2 (en) | 2015-06-23 |
WO2011054009A3 (en) | 2011-09-15 |
US20110266620A1 (en) | 2011-11-03 |
US20140099765A1 (en) | 2014-04-10 |
WO2011054009A2 (en) | 2011-05-05 |
CN102656697A (zh) | 2012-09-05 |
KR101521423B1 (ko) | 2015-05-19 |
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