JP2013505464A5 - - Google Patents

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Publication number
JP2013505464A5
JP2013505464A5 JP2012530966A JP2012530966A JP2013505464A5 JP 2013505464 A5 JP2013505464 A5 JP 2013505464A5 JP 2012530966 A JP2012530966 A JP 2012530966A JP 2012530966 A JP2012530966 A JP 2012530966A JP 2013505464 A5 JP2013505464 A5 JP 2013505464A5
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JP
Japan
Prior art keywords
inspection system
optical inspection
illumination
camera array
images
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JP2012530966A
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English (en)
Japanese (ja)
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JP2013505464A (ja
JP5809628B2 (ja
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Priority claimed from PCT/US2010/049617 external-priority patent/WO2011037903A1/en
Publication of JP2013505464A publication Critical patent/JP2013505464A/ja
Publication of JP2013505464A5 publication Critical patent/JP2013505464A5/ja
Application granted granted Critical
Publication of JP5809628B2 publication Critical patent/JP5809628B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012530966A 2009-09-22 2010-09-21 カメラアレイ及びコンパクトな組み込み照明装置を備えた高速光学検査システム Expired - Fee Related JP5809628B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US24467109P 2009-09-22 2009-09-22
US24461609P 2009-09-22 2009-09-22
US61/244,671 2009-09-22
US61/244,616 2009-09-22
PCT/US2010/049617 WO2011037903A1 (en) 2009-09-22 2010-09-21 High speed optical inspection system with camera array and compact, integrated illuminator

Publications (3)

Publication Number Publication Date
JP2013505464A JP2013505464A (ja) 2013-02-14
JP2013505464A5 true JP2013505464A5 (enExample) 2013-10-10
JP5809628B2 JP5809628B2 (ja) 2015-11-11

Family

ID=43086315

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012530966A Expired - Fee Related JP5809628B2 (ja) 2009-09-22 2010-09-21 カメラアレイ及びコンパクトな組み込み照明装置を備えた高速光学検査システム
JP2012530968A Withdrawn JP2013505465A (ja) 2009-09-22 2010-09-21 高速高解像度三次元太陽電池検査システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012530968A Withdrawn JP2013505465A (ja) 2009-09-22 2010-09-21 高速高解像度三次元太陽電池検査システム

Country Status (5)

Country Link
JP (2) JP5809628B2 (enExample)
KR (1) KR20120084738A (enExample)
CN (2) CN102656444B (enExample)
DE (1) DE112010003742T5 (enExample)
WO (2) WO2011037903A1 (enExample)

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CN103076330A (zh) * 2013-01-05 2013-05-01 王锦峰 多面阵相机aoi设备及其拍摄图像方法
US20140198185A1 (en) * 2013-01-17 2014-07-17 Cyberoptics Corporation Multi-camera sensor for three-dimensional imaging of a circuit board
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US10126252B2 (en) 2013-04-29 2018-11-13 Cyberoptics Corporation Enhanced illumination control for three-dimensional imaging
US9599572B2 (en) * 2014-04-07 2017-03-21 Orbotech Ltd. Optical inspection system and method
US9927367B2 (en) 2014-05-05 2018-03-27 Arconic Inc. Apparatus and methods for weld measurement
CN106796721B (zh) * 2014-09-11 2021-05-04 赛博光学公司 三维轮廓测量中根据多个相机和源的点云合并
DE102015101252B4 (de) * 2015-01-28 2023-10-19 Chromasens Gmbh Beleuchtungsvorrichtung, optisches Analysesystem sowie Verfahren zum Abtasten einer Oberfläche
CN106706657A (zh) * 2015-11-17 2017-05-24 北大方正集团有限公司 基于喷墨印刷的在线检测系统及方法
US10976535B2 (en) * 2016-03-30 2021-04-13 Optical Wavefront Laboratories Multiple camera microscope imaging with patterned illumination
CN106093068A (zh) * 2016-08-10 2016-11-09 武汉科技大学 锂电池极片表面缺陷检测装置的成像系统及其使用方法
CN106501267A (zh) * 2016-10-18 2017-03-15 凌云光技术集团有限责任公司 用于表面缺陷检测的线性光源装置及系统
CN106525874A (zh) * 2016-11-01 2017-03-22 凌云光技术集团有限责任公司 一种大幅面工业品表面检测系统
CN110100175A (zh) * 2017-02-02 2019-08-06 伊斯梅卡半导体控股公司 用于检查部件的组件和方法
TWI647444B (zh) * 2017-05-12 2019-01-11 廣盈自動化工程股份有限公司 Battery yield automatic detecting device and method thereof
JP6584454B2 (ja) 2017-06-14 2019-10-02 キヤノン株式会社 画像処理装置及び方法
CN109425617A (zh) * 2017-08-31 2019-03-05 菱光科技股份有限公司 光学检测系统及图像处理方法
CN107478661A (zh) * 2017-09-11 2017-12-15 深圳市中天元光学玻璃有限公司 一种玻璃屏幕在线检测装置
WO2019188198A1 (ja) * 2018-03-30 2019-10-03 倉敷紡績株式会社 線状物の３次元計測装置、および、線状物の３次元計測方法
CN109000566B (zh) * 2018-08-15 2020-09-11 深圳科瑞技术股份有限公司 激光扫描三维成像和ccd二维成像组合测量方法及装置
WO2020148749A1 (en) * 2019-01-14 2020-07-23 Orbotech Ltd. Multiplexed image acquisition device for optical system
CN111060516B (zh) * 2019-12-10 2022-03-08 中国工程物理研究院激光聚变研究中心 光学元件亚表面缺陷的多通道原位检测装置及检测方法
JP7373436B2 (ja) * 2020-03-09 2023-11-02 ファスフォードテクノロジ株式会社 ダイボンディング装置および半導体装置の製造方法
KR102856352B1 (ko) * 2020-10-16 2025-09-04 삼성전자주식회사 다채널 액체 파티클 계수기
DE102021104947B4 (de) 2021-03-02 2023-05-25 Gerhard Schubert Gesellschaft mit beschränkter Haftung Scanner, damit ausgestattete Ermittlungs-Vorrichtung sowie Verfahren für deren Betrieb
US20220299438A1 (en) * 2021-03-21 2022-09-22 Skyverse Technology Co,. LTD. Detection Device, Detection Apparatus and Detection Method
CN113075232A (zh) * 2021-03-31 2021-07-06 深圳中科飞测科技股份有限公司 一种检测设备及检测方法
JP2022160288A (ja) * 2021-04-06 2022-10-19 パナソニックＩｐマネジメント株式会社 検査システムおよび画像処理装置
KR102528246B1 (ko) * 2021-04-30 2023-05-03 (주)자비스 배터리 내부 전체 전극 상태 검사 시스템
CN115629076B (zh) * 2022-09-27 2025-02-18 威海华菱光电股份有限公司 一种阵列式图像检测装置
CN116500050B (zh) * 2023-06-28 2024-01-12 四川托璞勒科技有限公司 一种pcb板视觉检测系统
EP4641176A1 (en) * 2024-04-24 2025-10-29 Automatizacion y Sistemas de Inspeccion en Linea Global, S.L. Vision system for an inspection apparatus

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CN1242290C (zh) * 2003-09-18 2006-02-15 中国科学院上海技术物理研究所 一种能使光束光能分布均匀的均化光学组件
WO2009094489A1 (en) * 2008-01-23 2009-07-30 Cyberoptics Corporation High speed optical inspection system with multiple illumination imagery
US20100074515A1 (en) * 2008-02-05 2010-03-25 Kla-Tencor Corporation Defect Detection and Response

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