JP5809628B2 - カメラアレイ及びコンパクトな組み込み照明装置を備えた高速光学検査システム - Google Patents

カメラアレイ及びコンパクトな組み込み照明装置を備えた高速光学検査システム Download PDF

Info

Publication number
JP5809628B2
JP5809628B2 JP2012530966A JP2012530966A JP5809628B2 JP 5809628 B2 JP5809628 B2 JP 5809628B2 JP 2012530966 A JP2012530966 A JP 2012530966A JP 2012530966 A JP2012530966 A JP 2012530966A JP 5809628 B2 JP5809628 B2 JP 5809628B2
Authority
JP
Japan
Prior art keywords
inspection system
optical inspection
illumination
camera array
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012530966A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013505464A (ja
JP2013505464A5 (enExample
Inventor
ケース，スティーブン・ケイ
ハウガン，カール・イー
ローズ，スティーブン・エイ
クランツ，デヴィッド・エム
Original Assignee
サイバーオプティクス コーポレーション
サイバーオプティクス コーポレーション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by サイバーオプティクス コーポレーション, サイバーオプティクス コーポレーション filed Critical サイバーオプティクス コーポレーション
Publication of JP2013505464A publication Critical patent/JP2013505464A/ja
Publication of JP2013505464A5 publication Critical patent/JP2013505464A5/ja
Application granted granted Critical
Publication of JP5809628B2 publication Critical patent/JP5809628B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8838—Stroboscopic illumination; synchronised illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

Landscapes

  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2012530966A 2009-09-22 2010-09-21 カメラアレイ及びコンパクトな組み込み照明装置を備えた高速光学検査システム Expired - Fee Related JP5809628B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US24467109P 2009-09-22 2009-09-22
US24461609P 2009-09-22 2009-09-22
US61/244,671 2009-09-22
US61/244,616 2009-09-22
PCT/US2010/049617 WO2011037903A1 (en) 2009-09-22 2010-09-21 High speed optical inspection system with camera array and compact, integrated illuminator

Publications (3)

Publication Number Publication Date
JP2013505464A JP2013505464A (ja) 2013-02-14
JP2013505464A5 JP2013505464A5 (enExample) 2013-10-10
JP5809628B2 true JP5809628B2 (ja) 2015-11-11

Family

ID=43086315

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012530966A Expired - Fee Related JP5809628B2 (ja) 2009-09-22 2010-09-21 カメラアレイ及びコンパクトな組み込み照明装置を備えた高速光学検査システム
JP2012530968A Withdrawn JP2013505465A (ja) 2009-09-22 2010-09-21 高速高解像度三次元太陽電池検査システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012530968A Withdrawn JP2013505465A (ja) 2009-09-22 2010-09-21 高速高解像度三次元太陽電池検査システム

Country Status (5)

Country Link
JP (2) JP5809628B2 (enExample)
KR (1) KR20120084738A (enExample)
CN (2) CN102656444B (enExample)
DE (1) DE112010003742T5 (enExample)
WO (2) WO2011037903A1 (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120133920A1 (en) * 2009-09-22 2012-05-31 Skunes Timothy A High speed, high resolution, three dimensional printed circuit board inspection system
CN102253051A (zh) * 2011-05-03 2011-11-23 3i系统公司 一种线扫描探测器检测太阳能电池片缺陷的系统
CN103076330A (zh) * 2013-01-05 2013-05-01 王锦峰 多面阵相机aoi设备及其拍摄图像方法
US20140198185A1 (en) * 2013-01-17 2014-07-17 Cyberoptics Corporation Multi-camera sensor for three-dimensional imaging of a circuit board
KR101351000B1 (ko) * 2013-04-10 2014-01-15 주식회사 미루시스템즈 복수 개의 검사 모드를 가지는 인라인 카메라 검사 장치
US10126252B2 (en) 2013-04-29 2018-11-13 Cyberoptics Corporation Enhanced illumination control for three-dimensional imaging
US9599572B2 (en) * 2014-04-07 2017-03-21 Orbotech Ltd. Optical inspection system and method
US9927367B2 (en) 2014-05-05 2018-03-27 Arconic Inc. Apparatus and methods for weld measurement
CN106796721B (zh) * 2014-09-11 2021-05-04 赛博光学公司 三维轮廓测量中根据多个相机和源的点云合并
DE102015101252B4 (de) * 2015-01-28 2023-10-19 Chromasens Gmbh Beleuchtungsvorrichtung, optisches Analysesystem sowie Verfahren zum Abtasten einer Oberfläche
CN106706657A (zh) * 2015-11-17 2017-05-24 北大方正集团有限公司 基于喷墨印刷的在线检测系统及方法
US10976535B2 (en) * 2016-03-30 2021-04-13 Optical Wavefront Laboratories Multiple camera microscope imaging with patterned illumination
CN106093068A (zh) * 2016-08-10 2016-11-09 武汉科技大学 锂电池极片表面缺陷检测装置的成像系统及其使用方法
CN106501267A (zh) * 2016-10-18 2017-03-15 凌云光技术集团有限责任公司 用于表面缺陷检测的线性光源装置及系统
CN106525874A (zh) * 2016-11-01 2017-03-22 凌云光技术集团有限责任公司 一种大幅面工业品表面检测系统
CN110100175A (zh) * 2017-02-02 2019-08-06 伊斯梅卡半导体控股公司 用于检查部件的组件和方法
TWI647444B (zh) * 2017-05-12 2019-01-11 廣盈自動化工程股份有限公司 Battery yield automatic detecting device and method thereof
JP6584454B2 (ja) 2017-06-14 2019-10-02 キヤノン株式会社 画像処理装置及び方法
CN109425617A (zh) * 2017-08-31 2019-03-05 菱光科技股份有限公司 光学检测系统及图像处理方法
CN107478661A (zh) * 2017-09-11 2017-12-15 深圳市中天元光学玻璃有限公司 一种玻璃屏幕在线检测装置
WO2019188198A1 (ja) * 2018-03-30 2019-10-03 倉敷紡績株式会社 線状物の３次元計測装置、および、線状物の３次元計測方法
CN109000566B (zh) * 2018-08-15 2020-09-11 深圳科瑞技术股份有限公司 激光扫描三维成像和ccd二维成像组合测量方法及装置
WO2020148749A1 (en) * 2019-01-14 2020-07-23 Orbotech Ltd. Multiplexed image acquisition device for optical system
CN111060516B (zh) * 2019-12-10 2022-03-08 中国工程物理研究院激光聚变研究中心 光学元件亚表面缺陷的多通道原位检测装置及检测方法
JP7373436B2 (ja) * 2020-03-09 2023-11-02 ファスフォードテクノロジ株式会社 ダイボンディング装置および半導体装置の製造方法
KR102856352B1 (ko) * 2020-10-16 2025-09-04 삼성전자주식회사 다채널 액체 파티클 계수기
DE102021104947B4 (de) 2021-03-02 2023-05-25 Gerhard Schubert Gesellschaft mit beschränkter Haftung Scanner, damit ausgestattete Ermittlungs-Vorrichtung sowie Verfahren für deren Betrieb
US20220299438A1 (en) * 2021-03-21 2022-09-22 Skyverse Technology Co,. LTD. Detection Device, Detection Apparatus and Detection Method
CN113075232A (zh) * 2021-03-31 2021-07-06 深圳中科飞测科技股份有限公司 一种检测设备及检测方法
JP2022160288A (ja) * 2021-04-06 2022-10-19 パナソニックＩｐマネジメント株式会社 検査システムおよび画像処理装置
KR102528246B1 (ko) * 2021-04-30 2023-05-03 (주)자비스 배터리 내부 전체 전극 상태 검사 시스템
CN115629076B (zh) * 2022-09-27 2025-02-18 威海华菱光电股份有限公司 一种阵列式图像检测装置
CN116500050B (zh) * 2023-06-28 2024-01-12 四川托璞勒科技有限公司 一种pcb板视觉检测系统
EP4641176A1 (en) * 2024-04-24 2025-10-29 Automatizacion y Sistemas de Inspeccion en Linea Global, S.L. Vision system for an inspection apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1577388A (en) 1923-05-19 1926-03-16 Hilger Ltd Adam Projection apparatus
JP4558112B2 (ja) * 1998-10-13 2010-10-06 山形カシオ株式会社 部品搭載装置用の照明装置とその照明装置を備える部品搭載装置
GB9828109D0 (en) * 1998-12-19 1999-02-17 Kestra Ltd Inspection equipment and methods of inspection
GB2375392B (en) 2000-01-07 2004-12-15 Cyberoptics Corp Phase profilometry system with telecentric projector
CN1242290C (zh) * 2003-09-18 2006-02-15 中国科学院上海技术物理研究所 一种能使光束光能分布均匀的均化光学组件
WO2009094489A1 (en) * 2008-01-23 2009-07-30 Cyberoptics Corporation High speed optical inspection system with multiple illumination imagery
US20100074515A1 (en) * 2008-02-05 2010-03-25 Kla-Tencor Corporation Defect Detection and Response

Also Published As

Publication number Publication date
WO2011037903A1 (en) 2011-03-31
KR20120084738A (ko) 2012-07-30
CN102498387A (zh) 2012-06-13
JP2013505464A (ja) 2013-02-14
DE112010003742T5 (de) 2013-06-06
WO2011037905A1 (en) 2011-03-31
CN102656444B (zh) 2016-08-03
CN102656444A (zh) 2012-09-05
JP2013505465A (ja) 2013-02-14

Similar Documents

Publication Publication Date Title
JP5809628B2 (ja) カメラアレイ及びコンパクトな組み込み照明装置を備えた高速光学検査システム
US8670031B2 (en) High speed optical inspection system with camera array and compact, integrated illuminator
US8681211B2 (en) High speed optical inspection system with adaptive focusing
US8872912B2 (en) High speed distributed optical sensor inspection system
US20120133920A1 (en) High speed, high resolution, three dimensional printed circuit board inspection system
US8388204B2 (en) High speed, high resolution, three dimensional solar cell inspection system
US20110175997A1 (en) High speed optical inspection system with multiple illumination imagery
US20040141175A1 (en) Method and apparatus for uniform lighting source
US7787159B2 (en) Achieving convergent light rays emitted by planar array of light sources
JP2013505464A5 (enExample)
US20140368835A1 (en) Three-dimensional shape measuring apparatus
JPWO2018088423A1 (ja) 光学検査装置
US8894259B2 (en) Dark field illuminator with large working area
CN104266609B (zh) 连续扫描型计测装置
JP6198312B2 (ja) ３次元測定装置、３次元測定方法および基板の製造方法
WO2009094489A1 (en) High speed optical inspection system with multiple illumination imagery
CN102639989B (zh) 具有自适应聚焦的高速光学检查系统
US20250146812A1 (en) Arrangement for optical measurements and related method
JP6067407B2 (ja) 検査装置
US11575814B2 (en) Image capturing device and appearance inspecting device including the same
CN114026409A (zh) 外观检查装置及外观检查方法
KR20060041150A (ko) 균일한 광원을 위한 방법 및 장치

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130822

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130822

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140225

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140311

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20140611

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20140618

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20140702

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20140709

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140718

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20141104

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20150202

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20150304

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20150305

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150402

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150818

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150911

R150 Certificate of patent or registration of utility model

Ref document number: 5809628

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees