JP2013503599A - 電気発生のための方法およびデバイスならびにその製造方法 - Google Patents
電気発生のための方法およびデバイスならびにその製造方法 Download PDFInfo
- Publication number
- JP2013503599A JP2013503599A JP2012526182A JP2012526182A JP2013503599A JP 2013503599 A JP2013503599 A JP 2013503599A JP 2012526182 A JP2012526182 A JP 2012526182A JP 2012526182 A JP2012526182 A JP 2012526182A JP 2013503599 A JP2013503599 A JP 2013503599A
- Authority
- JP
- Japan
- Prior art keywords
- particles
- gas
- particulate structure
- particulate
- charge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 209
- 230000005611 electricity Effects 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title description 18
- 239000002245 particle Substances 0.000 claims abstract description 282
- 238000012546 transfer Methods 0.000 claims abstract description 58
- 239000007789 gas Substances 0.000 claims description 255
- 239000000463 material Substances 0.000 claims description 129
- 238000012986 modification Methods 0.000 claims description 115
- 230000004048 modification Effects 0.000 claims description 115
- 239000000758 substrate Substances 0.000 claims description 93
- 239000002002 slurry Substances 0.000 claims description 59
- 239000007788 liquid Substances 0.000 claims description 58
- 230000005684 electric field Effects 0.000 claims description 53
- 125000006850 spacer group Chemical group 0.000 claims description 53
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 47
- 229910052782 aluminium Inorganic materials 0.000 claims description 46
- 238000000576 coating method Methods 0.000 claims description 46
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 45
- 239000011521 glass Substances 0.000 claims description 42
- 239000011248 coating agent Substances 0.000 claims description 41
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 39
- 229910002804 graphite Inorganic materials 0.000 claims description 30
- 239000010439 graphite Substances 0.000 claims description 30
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 28
- -1 rare earth neodecanoate Chemical class 0.000 claims description 27
- 239000000377 silicon dioxide Substances 0.000 claims description 22
- 230000002829 reductive effect Effects 0.000 claims description 18
- 150000003839 salts Chemical class 0.000 claims description 18
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 16
- 238000001035 drying Methods 0.000 claims description 16
- 239000000126 substance Substances 0.000 claims description 16
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 15
- 239000010455 vermiculite Substances 0.000 claims description 15
- 229910052902 vermiculite Inorganic materials 0.000 claims description 15
- 235000019354 vermiculite Nutrition 0.000 claims description 15
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 14
- 239000012530 fluid Substances 0.000 claims description 14
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 14
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 claims description 14
- 150000002500 ions Chemical class 0.000 claims description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 12
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 239000004094 surface-active agent Substances 0.000 claims description 12
- 229910052734 helium Inorganic materials 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 10
- 239000001307 helium Substances 0.000 claims description 10
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 10
- 238000005507 spraying Methods 0.000 claims description 10
- 229920000642 polymer Polymers 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000004528 spin coating Methods 0.000 claims description 9
- 229910052786 argon Inorganic materials 0.000 claims description 8
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 8
- 239000002904 solvent Substances 0.000 claims description 8
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 7
- 239000000975 dye Substances 0.000 claims description 7
- 229910021389 graphene Inorganic materials 0.000 claims description 7
- 150000002739 metals Chemical class 0.000 claims description 7
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 7
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 6
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 6
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 6
- CRGZYKWWYNQGEC-UHFFFAOYSA-N magnesium;methanolate Chemical compound [Mg+2].[O-]C.[O-]C CRGZYKWWYNQGEC-UHFFFAOYSA-N 0.000 claims description 6
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 claims description 6
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 claims description 6
- 239000010451 perlite Substances 0.000 claims description 6
- 235000019362 perlite Nutrition 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- GGVUYAXGAOIFIC-UHFFFAOYSA-K cerium(3+);2-ethylhexanoate Chemical compound [Ce+3].CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O GGVUYAXGAOIFIC-UHFFFAOYSA-K 0.000 claims description 5
- 235000019329 dioctyl sodium sulphosuccinate Nutrition 0.000 claims description 5
- 239000000178 monomer Substances 0.000 claims description 5
- 238000000465 moulding Methods 0.000 claims description 5
- KBJMLQFLOWQJNF-UHFFFAOYSA-N nickel(ii) nitrate Chemical compound [Ni+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O KBJMLQFLOWQJNF-UHFFFAOYSA-N 0.000 claims description 5
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 5
- 150000004760 silicates Chemical class 0.000 claims description 5
- QBKTXRLYEHZACW-UHFFFAOYSA-K 2-ethylhexanoate;neodymium(3+) Chemical compound [Nd+3].CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O QBKTXRLYEHZACW-UHFFFAOYSA-K 0.000 claims description 4
- CDOUZKKFHVEKRI-UHFFFAOYSA-N 3-bromo-n-[(prop-2-enoylamino)methyl]propanamide Chemical compound BrCCC(=O)NCNC(=O)C=C CDOUZKKFHVEKRI-UHFFFAOYSA-N 0.000 claims description 4
- BDPWLKPVAKYQNL-UHFFFAOYSA-L 7,7-dimethyloctanoate;manganese(2+) Chemical compound [Mn+2].CC(C)(C)CCCCCC([O-])=O.CC(C)(C)CCCCCC([O-])=O BDPWLKPVAKYQNL-UHFFFAOYSA-L 0.000 claims description 4
- YJEUJARPQSLENW-UHFFFAOYSA-M B([O-])([O-])[O-].C(CCCCCC(C)(C)C)(=O)[O-].[Co+4] Chemical compound B([O-])([O-])[O-].C(CCCCCC(C)(C)C)(=O)[O-].[Co+4] YJEUJARPQSLENW-UHFFFAOYSA-M 0.000 claims description 4
- WWKGVZASJYXZKN-UHFFFAOYSA-N Methyl violet 2B Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC(N)=CC=1)=C1C=CC(=[N+](C)C)C=C1 WWKGVZASJYXZKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 claims description 4
- ZOAIGCHJWKDIPJ-UHFFFAOYSA-M caesium acetate Chemical compound [Cs+].CC([O-])=O ZOAIGCHJWKDIPJ-UHFFFAOYSA-M 0.000 claims description 4
- 229920001940 conductive polymer Polymers 0.000 claims description 4
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 claims description 4
- 238000001746 injection moulding Methods 0.000 claims description 4
- ZGIHUCQOMWIMKH-UHFFFAOYSA-L manganese(2+);propanoate Chemical compound [Mn+2].CCC([O-])=O.CCC([O-])=O ZGIHUCQOMWIMKH-UHFFFAOYSA-L 0.000 claims description 4
- SQQMAOCOWKFBNP-UHFFFAOYSA-L manganese(II) sulfate Chemical compound [Mn+2].[O-]S([O-])(=O)=O SQQMAOCOWKFBNP-UHFFFAOYSA-L 0.000 claims description 4
- 229910052752 metalloid Inorganic materials 0.000 claims description 4
- 150000002738 metalloids Chemical class 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 239000012454 non-polar solvent Substances 0.000 claims description 4
- 239000002798 polar solvent Substances 0.000 claims description 4
- 229910052724 xenon Inorganic materials 0.000 claims description 4
- ULUAUXLGCMPNKK-UHFFFAOYSA-K 2-sulfonatobutanedioate Chemical compound [O-]C(=O)CC(C([O-])=O)S([O-])(=O)=O ULUAUXLGCMPNKK-UHFFFAOYSA-K 0.000 claims description 3
- 229910018503 SF6 Inorganic materials 0.000 claims description 3
- ACXHMHKAALGYRW-UHFFFAOYSA-L barium(2+) 3-sulfo-2,2-di(tridecyl)butanedioate Chemical compound C(CCCCCCCCCCCC)C(C(C(=O)[O-])S(=O)(=O)O)(C(=O)[O-])CCCCCCCCCCCCC.[Ba+2] ACXHMHKAALGYRW-UHFFFAOYSA-L 0.000 claims description 3
- 239000000460 chlorine Substances 0.000 claims description 3
- 150000003983 crown ethers Chemical class 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims description 3
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 229910052743 krypton Inorganic materials 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 150000003856 quaternary ammonium compounds Chemical class 0.000 claims description 3
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 claims description 3
- 229960000909 sulfur hexafluoride Drugs 0.000 claims description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 2
- 239000005935 Sulfuryl fluoride Substances 0.000 claims description 2
- 239000003570 air Substances 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 claims description 2
- 238000001125 extrusion Methods 0.000 claims description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims description 2
- 229940099596 manganese sulfate Drugs 0.000 claims description 2
- 239000011702 manganese sulphate Substances 0.000 claims description 2
- 235000007079 manganese sulphate Nutrition 0.000 claims description 2
- 229910052754 neon Inorganic materials 0.000 claims description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 2
- QYSGYZVSCZSLHT-UHFFFAOYSA-N octafluoropropane Chemical compound FC(F)(F)C(F)(F)C(F)(F)F QYSGYZVSCZSLHT-UHFFFAOYSA-N 0.000 claims description 2
- 229960004065 perflutren Drugs 0.000 claims description 2
- OBTWBSRJZRCYQV-UHFFFAOYSA-N sulfuryl difluoride Chemical compound FS(F)(=O)=O OBTWBSRJZRCYQV-UHFFFAOYSA-N 0.000 claims description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims 2
- 229940044609 sulfur dioxide Drugs 0.000 claims 1
- 238000002474 experimental method Methods 0.000 description 89
- 230000037230 mobility Effects 0.000 description 77
- 230000006870 function Effects 0.000 description 50
- 230000008569 process Effects 0.000 description 48
- 239000010410 layer Substances 0.000 description 43
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 27
- 241000894007 species Species 0.000 description 26
- 238000004544 sputter deposition Methods 0.000 description 25
- 230000003993 interaction Effects 0.000 description 24
- 238000005259 measurement Methods 0.000 description 21
- 239000007787 solid Substances 0.000 description 21
- 239000000523 sample Substances 0.000 description 19
- 229920006362 Teflon® Polymers 0.000 description 18
- 238000010438 heat treatment Methods 0.000 description 18
- 230000001965 increasing effect Effects 0.000 description 18
- 239000002105 nanoparticle Substances 0.000 description 17
- 239000010931 gold Substances 0.000 description 15
- 230000001404 mediated effect Effects 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 14
- 239000011572 manganese Substances 0.000 description 13
- 239000007921 spray Substances 0.000 description 13
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 12
- 238000010586 diagram Methods 0.000 description 12
- 229910052737 gold Inorganic materials 0.000 description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 12
- 239000011651 chromium Substances 0.000 description 11
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 11
- 239000010409 thin film Substances 0.000 description 11
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 10
- 238000001816 cooling Methods 0.000 description 10
- 238000000151 deposition Methods 0.000 description 10
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 10
- 230000007935 neutral effect Effects 0.000 description 10
- 230000002441 reversible effect Effects 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 239000000725 suspension Substances 0.000 description 10
- 239000011800 void material Substances 0.000 description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 9
- 239000004020 conductor Substances 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- 238000009826 distribution Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 229910052750 molybdenum Inorganic materials 0.000 description 9
- 239000011733 molybdenum Substances 0.000 description 9
- 229910052759 nickel Inorganic materials 0.000 description 9
- 239000003960 organic solvent Substances 0.000 description 9
- 238000002360 preparation method Methods 0.000 description 9
- 239000010936 titanium Substances 0.000 description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 8
- 238000000137 annealing Methods 0.000 description 8
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 8
- 229910052748 manganese Inorganic materials 0.000 description 8
- 230000010287 polarization Effects 0.000 description 8
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 7
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 6
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 6
- 239000000370 acceptor Substances 0.000 description 6
- 238000004630 atomic force microscopy Methods 0.000 description 6
- 229910052804 chromium Inorganic materials 0.000 description 6
- 230000000670 limiting effect Effects 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 6
- 239000010937 tungsten Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 5
- 229910052582 BN Inorganic materials 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 230000004913 activation Effects 0.000 description 5
- 238000010351 charge transfer process Methods 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 239000008367 deionised water Substances 0.000 description 5
- 229910021641 deionized water Inorganic materials 0.000 description 5
- 239000011133 lead Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 239000011343 solid material Substances 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000007664 blowing Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 239000012154 double-distilled water Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 230000036961 partial effect Effects 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000002336 sorption--desorption measurement Methods 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 230000005428 wave function Effects 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 229910052688 Gadolinium Inorganic materials 0.000 description 3
- 239000000020 Nitrocellulose Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229920000109 alkoxy-substituted poly(p-phenylene vinylene) Polymers 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- 238000001652 electrophoretic deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000012467 final product Substances 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 3
- 229910052735 hafnium Inorganic materials 0.000 description 3
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 3
- 230000001788 irregular Effects 0.000 description 3
- 229910052746 lanthanum Inorganic materials 0.000 description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 3
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 3
- 239000011777 magnesium Substances 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- 239000002086 nanomaterial Substances 0.000 description 3
- 229920001220 nitrocellulos Polymers 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000001103 potassium chloride Substances 0.000 description 3
- 235000011164 potassium chloride Nutrition 0.000 description 3
- 238000005036 potential barrier Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000005546 reactive sputtering Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910004261 CaF 2 Inorganic materials 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000006091 Macor Substances 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052792 caesium Inorganic materials 0.000 description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 2
- XJHCXCQVJFPJIK-UHFFFAOYSA-M caesium fluoride Chemical compound [F-].[Cs+] XJHCXCQVJFPJIK-UHFFFAOYSA-M 0.000 description 2
- NLSCHDZTHVNDCP-UHFFFAOYSA-N caesium nitrate Chemical compound [Cs+].[O-][N+]([O-])=O NLSCHDZTHVNDCP-UHFFFAOYSA-N 0.000 description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 238000007385 chemical modification Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 238000001962 electrophoresis Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 238000001502 gel electrophoresis Methods 0.000 description 2
- 239000002241 glass-ceramic Substances 0.000 description 2
- TXOKWXJQVFUUDD-UHFFFAOYSA-N haletazole Chemical compound C1=CC(OCCN(CC)CC)=CC=C1C1=NC2=CC(Cl)=CC=C2S1 TXOKWXJQVFUUDD-UHFFFAOYSA-N 0.000 description 2
- 229950005233 haletazole Drugs 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000002427 irreversible effect Effects 0.000 description 2
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000004570 mortar (masonry) Substances 0.000 description 2
- 239000002064 nanoplatelet Substances 0.000 description 2
- JEMDLNFQNCQAKN-UHFFFAOYSA-N nickel;oxomanganese Chemical compound [Ni].[Mn]=O JEMDLNFQNCQAKN-UHFFFAOYSA-N 0.000 description 2
- 238000010943 off-gassing Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000011236 particulate material Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- 239000011550 stock solution Substances 0.000 description 2
- DHEQXMRUPNDRPG-UHFFFAOYSA-N strontium nitrate Chemical compound [Sr+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O DHEQXMRUPNDRPG-UHFFFAOYSA-N 0.000 description 2
- UBXAKNTVXQMEAG-UHFFFAOYSA-L strontium sulfate Chemical compound [Sr+2].[O-]S([O-])(=O)=O UBXAKNTVXQMEAG-UHFFFAOYSA-L 0.000 description 2
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- OBETXYAYXDNJHR-SSDOTTSWSA-M (2r)-2-ethylhexanoate Chemical compound CCCC[C@@H](CC)C([O-])=O OBETXYAYXDNJHR-SSDOTTSWSA-M 0.000 description 1
- SKJCKYVIQGBWTN-UHFFFAOYSA-N (4-hydroxyphenyl) methanesulfonate Chemical compound CS(=O)(=O)OC1=CC=C(O)C=C1 SKJCKYVIQGBWTN-UHFFFAOYSA-N 0.000 description 1
- LHENQXAPVKABON-UHFFFAOYSA-N 1-methoxypropan-1-ol Chemical compound CCC(O)OC LHENQXAPVKABON-UHFFFAOYSA-N 0.000 description 1
- IIZPXYDJLKNOIY-JXPKJXOSSA-N 1-palmitoyl-2-arachidonoyl-sn-glycero-3-phosphocholine Chemical compound CCCCCCCCCCCCCCCC(=O)OC[C@H](COP([O-])(=O)OCC[N+](C)(C)C)OC(=O)CCC\C=C/C\C=C/C\C=C/C\C=C/CCCCC IIZPXYDJLKNOIY-JXPKJXOSSA-N 0.000 description 1
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 description 1
- ZAKVZNJDGLAPHL-UHFFFAOYSA-N 2,3,3-trichlorooxane Chemical compound ClC1OCCCC1(Cl)Cl ZAKVZNJDGLAPHL-UHFFFAOYSA-N 0.000 description 1
- BZSXEZOLBIJVQK-UHFFFAOYSA-N 2-methylsulfonylbenzoic acid Chemical compound CS(=O)(=O)C1=CC=CC=C1C(O)=O BZSXEZOLBIJVQK-UHFFFAOYSA-N 0.000 description 1
- RXXCIBALSKQCAE-UHFFFAOYSA-N 3-methylbutoxymethylbenzene Chemical group CC(C)CCOCC1=CC=CC=C1 RXXCIBALSKQCAE-UHFFFAOYSA-N 0.000 description 1
- XWNSFEAWWGGSKJ-UHFFFAOYSA-N 4-acetyl-4-methylheptanedinitrile Chemical compound N#CCCC(C)(C(=O)C)CCC#N XWNSFEAWWGGSKJ-UHFFFAOYSA-N 0.000 description 1
- NKFIBMOQAPEKNZ-UHFFFAOYSA-N 5-amino-1h-indole-2-carboxylic acid Chemical compound NC1=CC=C2NC(C(O)=O)=CC2=C1 NKFIBMOQAPEKNZ-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 241000870659 Crassula perfoliata var. minor Species 0.000 description 1
- 229910001263 D-2 tool steel Inorganic materials 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 229910000737 Duralumin Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910000677 High-carbon steel Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004153 Potassium bromate Substances 0.000 description 1
- 239000004792 Prolene Substances 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 230000005678 Seebeck effect Effects 0.000 description 1
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 description 1
- ULUAUXLGCMPNKK-UHFFFAOYSA-N Sulfobutanedioic acid Chemical compound OC(=O)CC(C(O)=O)S(O)(=O)=O ULUAUXLGCMPNKK-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- ITRGGKFLQODYDH-UHFFFAOYSA-N [Si].[Cr].[Cr].[Cr] Chemical compound [Si].[Cr].[Cr].[Cr] ITRGGKFLQODYDH-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- OBETXYAYXDNJHR-UHFFFAOYSA-N alpha-ethylcaproic acid Natural products CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 1
- SNAAJJQQZSMGQD-UHFFFAOYSA-N aluminum magnesium Chemical compound [Mg].[Al] SNAAJJQQZSMGQD-UHFFFAOYSA-N 0.000 description 1
- 238000004082 amperometric method Methods 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 230000000181 anti-adherent effect Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- ITHZDDVSAWDQPZ-UHFFFAOYSA-L barium acetate Chemical compound [Ba+2].CC([O-])=O.CC([O-])=O ITHZDDVSAWDQPZ-UHFFFAOYSA-L 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- VEASZGAADGZARC-UHFFFAOYSA-L barium(2+);dibromate Chemical compound [Ba+2].[O-]Br(=O)=O.[O-]Br(=O)=O VEASZGAADGZARC-UHFFFAOYSA-L 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- VSGNNIFQASZAOI-UHFFFAOYSA-L calcium acetate Chemical compound [Ca+2].CC([O-])=O.CC([O-])=O VSGNNIFQASZAOI-UHFFFAOYSA-L 0.000 description 1
- 239000001639 calcium acetate Substances 0.000 description 1
- 235000011092 calcium acetate Nutrition 0.000 description 1
- 229960005147 calcium acetate Drugs 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 235000010216 calcium carbonate Nutrition 0.000 description 1
- FNAQSUUGMSOBHW-UHFFFAOYSA-H calcium citrate Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O FNAQSUUGMSOBHW-UHFFFAOYSA-H 0.000 description 1
- 239000001354 calcium citrate Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 159000000007 calcium salts Chemical class 0.000 description 1
- 229910021346 calcium silicide Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910021357 chromium silicide Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 210000001072 colon Anatomy 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 239000002322 conducting polymer Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- AXZAYXJCENRGIM-UHFFFAOYSA-J dipotassium;tetrabromoplatinum(2-) Chemical compound [K+].[K+].[Br-].[Br-].[Br-].[Br-].[Pt+2] AXZAYXJCENRGIM-UHFFFAOYSA-J 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- MJAFSGQKEMZFJZ-UHFFFAOYSA-L disodium;3-sulfo-2,2-di(tridecyl)butanedioate Chemical compound [Na+].[Na+].CCCCCCCCCCCCCC(C([O-])=O)(C(C([O-])=O)S(O)(=O)=O)CCCCCCCCCCCCC MJAFSGQKEMZFJZ-UHFFFAOYSA-L 0.000 description 1
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000005329 float glass Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- VFLRPJJARDQRAC-UHFFFAOYSA-N gallium manganese Chemical compound [Mn].[Ga] VFLRPJJARDQRAC-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000002140 halogenating effect Effects 0.000 description 1
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 1
- 239000004312 hexamethylene tetramine Substances 0.000 description 1
- 235000010299 hexamethylene tetramine Nutrition 0.000 description 1
- 238000001198 high resolution scanning electron microscopy Methods 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000010952 in-situ formation Methods 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000012432 intermediate storage Methods 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000787 lecithin Substances 0.000 description 1
- 235000010445 lecithin Nutrition 0.000 description 1
- 229940067606 lecithin Drugs 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- UEGPKNKPLBYCNK-UHFFFAOYSA-L magnesium acetate Chemical compound [Mg+2].CC([O-])=O.CC([O-])=O UEGPKNKPLBYCNK-UHFFFAOYSA-L 0.000 description 1
- 239000011654 magnesium acetate Substances 0.000 description 1
- 235000011285 magnesium acetate Nutrition 0.000 description 1
- 229940069446 magnesium acetate Drugs 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 1
- 235000019341 magnesium sulphate Nutrition 0.000 description 1
- NNNSKJSUQWKSAM-UHFFFAOYSA-L magnesium;dichlorate Chemical compound [Mg+2].[O-]Cl(=O)=O.[O-]Cl(=O)=O NNNSKJSUQWKSAM-UHFFFAOYSA-L 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 150000002696 manganese Chemical class 0.000 description 1
- ISPYRSDWRDQNSW-UHFFFAOYSA-L manganese(II) sulfate monohydrate Chemical compound O.[Mn+2].[O-]S([O-])(=O)=O ISPYRSDWRDQNSW-UHFFFAOYSA-L 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000005374 membrane filtration Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229960004011 methenamine Drugs 0.000 description 1
- 238000007431 microscopic evaluation Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical class [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 1
- 239000002060 nanoflake Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- LAIZPRYFQUWUBN-UHFFFAOYSA-L nickel chloride hexahydrate Chemical compound O.O.O.O.O.O.[Cl-].[Cl-].[Ni+2] LAIZPRYFQUWUBN-UHFFFAOYSA-L 0.000 description 1
- AOPCKOPZYFFEDA-UHFFFAOYSA-N nickel(2+);dinitrate;hexahydrate Chemical compound O.O.O.O.O.O.[Ni+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O AOPCKOPZYFFEDA-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- WWZKQHOCKIZLMA-UHFFFAOYSA-M octanoate Chemical compound CCCCCCCC([O-])=O WWZKQHOCKIZLMA-UHFFFAOYSA-M 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- UFQXGXDIJMBKTC-UHFFFAOYSA-N oxostrontium Chemical compound [Sr]=O UFQXGXDIJMBKTC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- PIRWNASAJNPKHT-SHZATDIYSA-N pamp Chemical compound C([C@@H](C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CC=1C2=CC=CC=C2NC=1)C(=O)N[C@@H](CC(N)=O)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CC=1C2=CC=CC=C2NC=1)C(=O)N[C@@H](C)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CO)C(=O)N[C@@H](CCCNC(N)=N)C(N)=O)NC(=O)[C@H](CCC(O)=O)NC(=O)[C@H](CO)NC(=O)[C@H](C)NC(=O)[C@@H](NC(=O)[C@H](CC(O)=O)NC(=O)[C@H](CC(C)C)NC(=O)[C@H](CCCNC(N)=N)NC(=O)[C@H](C)N)C(C)C)C1=CC=CC=C1 PIRWNASAJNPKHT-SHZATDIYSA-N 0.000 description 1
- LCCNCVORNKJIRZ-UHFFFAOYSA-N parathion Chemical compound CCOP(=S)(OCC)OC1=CC=C([N+]([O-])=O)C=C1 LCCNCVORNKJIRZ-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910001562 pearlite Inorganic materials 0.000 description 1
- XYJRXVWERLGGKC-UHFFFAOYSA-D pentacalcium;hydroxide;triphosphate Chemical compound [OH-].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O XYJRXVWERLGGKC-UHFFFAOYSA-D 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000546 pharmaceutical excipient Substances 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 235000019396 potassium bromate Nutrition 0.000 description 1
- 229940094037 potassium bromate Drugs 0.000 description 1
- VKJKEPKFPUWCAS-UHFFFAOYSA-M potassium chlorate Chemical compound [K+].[O-]Cl(=O)=O VKJKEPKFPUWCAS-UHFFFAOYSA-M 0.000 description 1
- 229910001487 potassium perchlorate Inorganic materials 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000005464 sample preparation method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000005029 sieve analysis Methods 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 229910052604 silicate mineral Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000001632 sodium acetate Substances 0.000 description 1
- 235000017281 sodium acetate Nutrition 0.000 description 1
- XUXNAKZDHHEHPC-UHFFFAOYSA-M sodium bromate Chemical compound [Na+].[O-]Br(=O)=O XUXNAKZDHHEHPC-UHFFFAOYSA-M 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 229910001948 sodium oxide Inorganic materials 0.000 description 1
- BAZAXWOYCMUHIX-UHFFFAOYSA-M sodium perchlorate Chemical compound [Na+].[O-]Cl(=O)(=O)=O BAZAXWOYCMUHIX-UHFFFAOYSA-M 0.000 description 1
- 229910001488 sodium perchlorate Inorganic materials 0.000 description 1
- YWQIGRBJQMNGSN-UHFFFAOYSA-M sodium;1,4-dioxo-1,4-di(tridecoxy)butane-2-sulfonate Chemical compound [Na+].CCCCCCCCCCCCCOC(=O)CC(S([O-])(=O)=O)C(=O)OCCCCCCCCCCCCC YWQIGRBJQMNGSN-UHFFFAOYSA-M 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- FRTABACCYANHFP-UHFFFAOYSA-L strontium chlorate Chemical compound [Sr+2].[O-]Cl(=O)=O.[O-]Cl(=O)=O FRTABACCYANHFP-UHFFFAOYSA-L 0.000 description 1
- UUCCCPNEFXQJEL-UHFFFAOYSA-L strontium dihydroxide Chemical compound [OH-].[OH-].[Sr+2] UUCCCPNEFXQJEL-UHFFFAOYSA-L 0.000 description 1
- FVRNDBHWWSPNOM-UHFFFAOYSA-L strontium fluoride Chemical compound [F-].[F-].[Sr+2] FVRNDBHWWSPNOM-UHFFFAOYSA-L 0.000 description 1
- 229910001637 strontium fluoride Inorganic materials 0.000 description 1
- 229910001866 strontium hydroxide Inorganic materials 0.000 description 1
- RXSHXLOMRZJCLB-UHFFFAOYSA-L strontium;diacetate Chemical compound [Sr+2].CC([O-])=O.CC([O-])=O RXSHXLOMRZJCLB-UHFFFAOYSA-L 0.000 description 1
- 239000006228 supernatant Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
- 150000004772 tellurides Chemical class 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- ALRFTTOJSPMYSY-UHFFFAOYSA-N tin disulfide Chemical compound S=[Sn]=S ALRFTTOJSPMYSY-UHFFFAOYSA-N 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 230000014616 translation Effects 0.000 description 1
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 1
- 235000013337 tricalcium citrate Nutrition 0.000 description 1
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- GPRLSGONYQIRFK-MNYXATJNSA-N triton Chemical compound [3H+] GPRLSGONYQIRFK-MNYXATJNSA-N 0.000 description 1
- ITRNXVSDJBHYNJ-UHFFFAOYSA-N tungsten disulfide Chemical compound S=[W]=S ITRNXVSDJBHYNJ-UHFFFAOYSA-N 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 239000005335 volcanic glass Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
- 150000003751 zinc Chemical class 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- XOOUIPVCVHRTMJ-UHFFFAOYSA-L zinc stearate Chemical compound [Zn+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O XOOUIPVCVHRTMJ-UHFFFAOYSA-L 0.000 description 1
- 150000003754 zirconium Chemical class 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N3/00—Generators in which thermal or kinetic energy is converted into electrical energy by ionisation of a fluid and removal of the charge therefrom
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
- B05D1/005—Spin coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B3/00—Producing shaped articles from the material by using presses; Presses specially adapted therefor
- B28B3/02—Producing shaped articles from the material by using presses; Presses specially adapted therefor wherein a ram exerts pressure on the material in a moulding space; Ram heads of special form
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D13/00—Electrophoretic coating characterised by the process
- C25D13/12—Electrophoretic coating characterised by the process characterised by the article coated
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J45/00—Discharge tubes functioning as thermionic generators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
- H02N11/002—Generators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Electrochemistry (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Hybrid Cells (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Fuel Cell (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ILPCT/IL2009/000831 | 2009-08-27 | ||
| PCT/IL2009/000831 WO2010023669A2 (en) | 2008-08-28 | 2009-08-27 | Device and method for generating electricity |
| US31018810P | 2010-03-03 | 2010-03-03 | |
| US61/310,188 | 2010-03-03 | ||
| US31031310P | 2010-03-04 | 2010-03-04 | |
| US61/310,313 | 2010-03-04 | ||
| PCT/IL2010/000704 WO2011024173A2 (en) | 2009-08-27 | 2010-08-26 | Method and device for generating electricity and method of fabrication thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013503599A true JP2013503599A (ja) | 2013-01-31 |
| JP2013503599A5 JP2013503599A5 (https=) | 2013-09-05 |
Family
ID=43628495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012526182A Pending JP2013503599A (ja) | 2009-08-27 | 2010-08-26 | 電気発生のための方法およびデバイスならびにその製造方法 |
Country Status (13)
| Country | Link |
|---|---|
| US (2) | US9559617B2 (https=) |
| EP (1) | EP2471170A2 (https=) |
| JP (1) | JP2013503599A (https=) |
| KR (1) | KR20120108966A (https=) |
| CN (1) | CN102484435A (https=) |
| AR (1) | AR077982A1 (https=) |
| AU (1) | AU2010288080A1 (https=) |
| BR (1) | BR112012004203A2 (https=) |
| CA (1) | CA2770399A1 (https=) |
| MX (1) | MX2012002417A (https=) |
| RU (1) | RU2538758C2 (https=) |
| TW (1) | TW201117233A (https=) |
| WO (1) | WO2011024173A2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015033261A (ja) * | 2013-08-05 | 2015-02-16 | 情報力株式会社 | 発電装置 |
| JP2018195790A (ja) * | 2017-05-22 | 2018-12-06 | 株式会社東芝 | 発電素子、発電モジュール、発電装置及び発電システム |
Families Citing this family (70)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10670001B2 (en) * | 2008-02-21 | 2020-06-02 | Clean Energy Labs, Llc | Energy conversion system including a ballistic rectifier assembly and uses thereof |
| GB2463117A (en) * | 2008-09-08 | 2010-03-10 | Landa Lab Ltd | Generating electricity from the thermal motion of gas molecules |
| CN102484435A (zh) | 2009-08-27 | 2012-05-30 | 兰达实验室（2012）有限公司 | 用于产生电的方法和装置及该装置制造方法 |
| JP6122841B2 (ja) * | 2011-05-12 | 2017-04-26 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | バッテリー活物質合成用の前駆体調合物 |
| CN103043654B (zh) * | 2011-10-12 | 2014-12-10 | 国家纳米科学中心 | 一种含有石墨烯和/或氧化石墨烯的薄膜及其制备方法 |
| KR20140128975A (ko) * | 2011-12-29 | 2014-11-06 | 엘화 엘엘씨 | 그래핀 그리드를 갖는 전자적 디바이스 |
| KR101384416B1 (ko) | 2012-01-26 | 2014-04-10 | 고려대학교 산학협력단 | 복합 유체의 액적증발 기반 기전력 발생/수집 장치 및 방법 |
| WO2013111970A1 (ko) * | 2012-01-26 | 2013-08-01 | 고려대학교 산학협력단 | 복합 유체의 액적증발 기반 기전력 발생/수집 장치 및 방법 |
| US9759602B2 (en) * | 2012-02-27 | 2017-09-12 | Voxtel, Inc | Avalanche photodiode receiver |
| WO2014025695A1 (en) * | 2012-08-06 | 2014-02-13 | Tionesta Applied Research Corporation | Energizing energy converters by stimulating three-body association radiation reactions |
| TWI524825B (zh) | 2012-10-29 | 2016-03-01 | 財團法人工業技術研究院 | 碳材導電膜的轉印方法 |
| US10807119B2 (en) | 2013-05-17 | 2020-10-20 | Birmingham Technologies, Inc. | Electrospray pinning of nanograined depositions |
| US10559864B2 (en) | 2014-02-13 | 2020-02-11 | Birmingham Technologies, Inc. | Nanofluid contact potential difference battery |
| TWI622069B (zh) * | 2014-05-09 | 2018-04-21 | 淡江大學 | Composite electrode manufacturing method |
| US20160087148A1 (en) | 2014-09-19 | 2016-03-24 | National Cheng Kung University | Non-metallic semiconductor quantum dot and method of carrying out chemical reaction or photoluminescence reaction by using the same |
| CN104796038B (zh) * | 2015-02-27 | 2017-03-15 | 东南大学 | 一种基于荷电团簇迁移的动能‑电能转换装置 |
| RU2597255C1 (ru) * | 2015-03-11 | 2016-09-10 | Игорь Александрович Малыхин | Способ получения электроэнергии за счет свободнодисперсных систем как электроактивных сред |
| US10147860B2 (en) | 2015-04-19 | 2018-12-04 | Reebeez, Inc. | Lightweight thermionic microengines for aerial vehicles |
| US20160315562A1 (en) * | 2015-04-22 | 2016-10-27 | Everywhere Energy Inc. | Energy harvesting systems, apparatus, and methods |
| WO2017062498A1 (en) * | 2015-10-05 | 2017-04-13 | Tionesta Applied Research Corporation | Generator of transient, heavy electrons and application to transmuting radioactive fission products |
| US10435797B2 (en) | 2016-06-26 | 2019-10-08 | Global Graphene Group, Inc. | Electrochemical production of graphene sheets from coke or coal |
| US10081550B2 (en) | 2016-06-26 | 2018-09-25 | Nanotek Instruments, Inc. | Direct ultrasonication production of graphene sheets from coke or coal |
| US11121360B2 (en) | 2016-07-15 | 2021-09-14 | Nanotek Instruments Group, Llc | Supercritical fluid production of graphene-based supercapacitor electrode from coke or coal |
| US10081551B2 (en) | 2016-07-15 | 2018-09-25 | Nanotek Instruments, Inc. | Supercritical fluid process for producing graphene from coke or coal |
| TWI642212B (zh) | 2016-08-11 | 2018-11-21 | 財團法人工業技術研究院 | 一種熱電轉換裝置 |
| CN109791823B (zh) * | 2016-09-29 | 2021-02-23 | 京瓷株式会社 | 电阻器、具备该电阻器的电路基板和电子装置 |
| GB2560363B (en) * | 2017-03-09 | 2019-09-11 | Ionech Ltd | Energy storage and conversion |
| CN106964199B (zh) * | 2017-05-04 | 2022-08-09 | 浙江金海高科股份有限公司 | 驻极体材料的液体充电方法和装置 |
| US10424441B2 (en) * | 2017-07-05 | 2019-09-24 | Honeywell International Inc. | Ultra-high charge density electrets and method of making same |
| US11170984B2 (en) | 2017-07-24 | 2021-11-09 | Spark Thermionics, Inc. | Small gap device system and method of fabrication |
| DK201870349A1 (en) | 2018-01-24 | 2019-10-23 | Apple Inc. | Devices, Methods, and Graphical User Interfaces for System-Wide Behavior for 3D Models |
| JP6524567B1 (ja) * | 2018-02-28 | 2019-06-05 | 株式会社Ｇｃｅインスティチュート | 熱電素子、熱電装置、及び熱電素子の形成方法 |
| AT521191B1 (de) * | 2018-04-25 | 2020-02-15 | Gs Gruber Schmidt | Dimethylether und Dibuthylether als Brennstoff für die Erzeugung von elektrischer und thermischer Energie mit Hillfe eines Plasmagenerators |
| WO2019226343A2 (en) * | 2018-05-07 | 2019-11-28 | Tionesta Applied Research Corporation | Systems to generate transient, elevated effective mass electron quasiparticles for transmuting radioactive fission products and related methods |
| AT521022B1 (de) * | 2018-06-13 | 2019-10-15 | Gs Gruber Schmidt Gmbh | Erzeugung von Dimethylether aus Kohlendioxid und Wasserstoff mit Hilfe eines thermoionischen und magnetohydrodynamischen Generators |
| GB201812508D0 (en) * | 2018-07-31 | 2018-09-12 | Nicoventures Holdings Ltd | Aerosol generation |
| GB201812509D0 (en) * | 2018-07-31 | 2018-09-12 | Nicoventures Holdings Ltd | Aerosol generation |
| GB201814767D0 (en) | 2018-09-11 | 2018-10-24 | Ionech Ltd | Energy storage and conversion |
| WO2020117351A2 (en) * | 2018-09-18 | 2020-06-11 | Northwestern University | Liquid flow induced power generation using nanoscale metal layers |
| WO2020069746A1 (en) * | 2018-10-04 | 2020-04-09 | Ion-Energy B.V. | Device for converting energy in the atmosphere and method for manufacturing the same |
| US10950706B2 (en) | 2019-02-25 | 2021-03-16 | Birmingham Technologies, Inc. | Nano-scale energy conversion device |
| US11101421B2 (en) | 2019-02-25 | 2021-08-24 | Birmingham Technologies, Inc. | Nano-scale energy conversion device |
| US11244816B2 (en) | 2019-02-25 | 2022-02-08 | Birmingham Technologies, Inc. | Method of manufacturing and operating nano-scale energy conversion device |
| JP6598339B1 (ja) * | 2019-04-17 | 2019-10-30 | 株式会社Ｇｃｅインスティチュート | 発電素子、発電装置、電子機器、及び発電素子の製造方法 |
| US11081285B2 (en) * | 2019-05-08 | 2021-08-03 | Deborah Duen Ling Chung | Electrically conductive electret and associated electret-based power source and self-powered structure |
| US11046578B2 (en) | 2019-05-20 | 2021-06-29 | Birmingham Technologies, Inc. | Single-nozzle apparatus for engineered nano-scale electrospray depositions |
| US11124864B2 (en) | 2019-05-20 | 2021-09-21 | Birmingham Technologies, Inc. | Method of fabricating nano-structures with engineered nano-scale electrospray depositions |
| KR20220034894A (ko) | 2019-07-19 | 2022-03-18 | 에바텍 아크티엔게젤샤프트 | 압전 코팅 및 증착 공정 |
| MX2022002046A (es) | 2019-08-20 | 2022-04-25 | Calagen Inc | Circuito para producir energia electrica. |
| US11677338B2 (en) | 2019-08-20 | 2023-06-13 | Calagen, Inc. | Producing electrical energy using an etalon |
| US11942879B2 (en) * | 2019-08-20 | 2024-03-26 | Calagen, Inc. | Cooling module using electrical pulses |
| CN110829897A (zh) * | 2019-09-23 | 2020-02-21 | 西安交通大学 | 一种基于氢离子浓差电池的热电转换装置 |
| US12005391B2 (en) | 2019-12-11 | 2024-06-11 | Brookhaven Science Associates, Llc | Method for trapping noble gas atoms and molecules in oxide nanocages |
| US11791142B2 (en) * | 2020-01-23 | 2023-10-17 | Spark Thermionics, Inc. | Small gap device system and method of fabrication |
| CN111468349B (zh) * | 2020-03-31 | 2025-06-20 | 广东工业大学 | 马口铁节能环保处理系统 |
| US11649525B2 (en) | 2020-05-01 | 2023-05-16 | Birmingham Technologies, Inc. | Single electron transistor (SET), circuit containing set and energy harvesting device, and fabrication method |
| US20210399190A1 (en) * | 2020-06-19 | 2021-12-23 | Birmingham Technologies, Inc. | Apparatus Including Thermal Energy Harvesting Thermionic Device, and Related Methods |
| US11574745B2 (en) | 2020-09-21 | 2023-02-07 | Austin Lo | System and method for energy conversion using an aneutronic nuclear fuel |
| US11417506B1 (en) | 2020-10-15 | 2022-08-16 | Birmingham Technologies, Inc. | Apparatus including thermal energy harvesting thermionic device integrated with electronics, and related systems and methods |
| US11798698B2 (en) | 2020-12-04 | 2023-10-24 | Austin Lo | Heavy ion plasma energy reactor |
| TWI786557B (zh) * | 2021-02-26 | 2022-12-11 | 國立臺灣科技大學 | 超薄奈米發電總成及其應用 |
| US11450443B1 (en) | 2021-03-16 | 2022-09-20 | Austin Lo | Structured plasma cell energy converter for a nuclear reactor |
| CN115466474A (zh) * | 2021-06-10 | 2022-12-13 | 香港理工大学 | 湿气发电材料及装置 |
| US11616186B1 (en) | 2021-06-28 | 2023-03-28 | Birmingham Technologies, Inc. | Thermal-transfer apparatus including thermionic devices, and related methods |
| JP7653867B2 (ja) * | 2021-08-25 | 2025-03-31 | 株式会社東芝 | 熱電子発電素子及び熱電子発電モジュール |
| WO2024015976A1 (en) * | 2022-07-15 | 2024-01-18 | University Of Florida Research Foundation, Inc. | Heat transfer enhancement using parametric electrostatic forcing |
| CN115304436A (zh) * | 2022-08-03 | 2022-11-08 | 西藏浏河化工发展有限公司 | 一种改性高氯酸钾生产工艺 |
| CN115259072A (zh) * | 2022-08-09 | 2022-11-01 | 广东墨睿科技有限公司 | Go增强自驱动吸湿起电器件及制法与微型器件功能系统 |
| US12308764B2 (en) * | 2022-11-14 | 2025-05-20 | Amrita Vishwa Vidyapeetham | Tubular hydro-voltaic device |
| CN118328834B (zh) * | 2024-06-12 | 2024-08-30 | 电子科技大学 | 一种电化学-离子梯度耦合增强自供能柔性应变传感器 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04172977A (ja) * | 1990-11-07 | 1992-06-19 | Agency Of Ind Science & Technol | 発電装置 |
| JP2003250285A (ja) * | 2002-02-22 | 2003-09-05 | Jgs:Kk | 熱発電装置、熱発電システムおよび熱発電方法 |
| JP2005143286A (ja) * | 2003-11-07 | 2005-06-02 | Crf Soc Consortile Per Azioni | 多孔性半導体材料マトリクス状燃焼器を含む発電装置 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3214616A (en) * | 1962-07-13 | 1965-10-26 | Westinghouse Electric Corp | Magnetohydrodynamic generator |
| US3355605A (en) * | 1963-09-23 | 1967-11-28 | American Radiator & Standard | Crossed field plasma device |
| US4281280A (en) * | 1978-12-18 | 1981-07-28 | Richards John A | Thermal electric converter |
| JPS63169655A (ja) * | 1987-01-08 | 1988-07-13 | Minolta Camera Co Ltd | 感光体 |
| CN1058676A (zh) | 1990-07-14 | 1992-02-12 | 贺鑫 | 静电发电法 |
| RU2065246C1 (ru) * | 1993-07-12 | 1996-08-10 | Андрей Порфирьевич Макашев | Электрогазодинамический генератор-2 |
| US6064137A (en) | 1996-03-06 | 2000-05-16 | Borealis Technical Limited | Method and apparatus for a vacuum thermionic converter with thin film carbonaceous field emission |
| CN1138775A (zh) | 1996-04-09 | 1996-12-25 | 徐贻诚 | 结构引发非平衡电离热电子发电器 |
| US7658772B2 (en) * | 1997-09-08 | 2010-02-09 | Borealis Technical Limited | Process for making electrode pairs |
| US6294858B1 (en) * | 1998-02-26 | 2001-09-25 | Sandia Corporation | Microminiature thermionic converters |
| DE19848852A1 (de) * | 1998-10-22 | 1999-07-29 | Alexander Dr Ing Luchinskiy | Verfahren zur Erzeugung elektrischer Energie |
| US6181049B1 (en) | 1999-02-12 | 2001-01-30 | General Atomics | Multiple cell thermionic converter having apertured tubular intercell connectors |
| JP4422917B2 (ja) * | 1999-03-11 | 2010-03-03 | エネコ インコーポレイテッド | ハイブリッド熱電子エネルギー変換器およびその方法 |
| US7109408B2 (en) | 1999-03-11 | 2006-09-19 | Eneco, Inc. | Solid state energy converter |
| US6649823B2 (en) | 1999-05-04 | 2003-11-18 | Neokismet, L.L.C. | Gas specie electron-jump chemical energy converter |
| NL1014590C2 (nl) | 2000-03-09 | 2001-09-11 | Corus Staal Bv | Batterij omvattende meerdere in serie geschakelde galvanische cellen. |
| US6596396B2 (en) | 2000-08-09 | 2003-07-22 | Mitsubishi Gas Chemical Company, Inc. | Thin-film-like particles having skeleton constructed by carbons and isolated films |
| US20070042667A1 (en) * | 2002-03-08 | 2007-02-22 | Chien-Min Sung | Diamond-like carbon energy conversion devices and methods thereof |
| US20070126312A1 (en) | 2002-03-08 | 2007-06-07 | Chien-Min Sung | DLC field emission with nano-diamond impregnated metals |
| JP2003343237A (ja) * | 2002-05-30 | 2003-12-03 | Denso Corp | 内燃機関の排ガス浄化装置およびその製造方法 |
| DE10228222B4 (de) | 2002-06-25 | 2006-07-06 | MetaModul Gesellschaft für Forschung, Entwicklung und Systemanalyse mbH | Energiekonverter |
| US6946596B2 (en) * | 2002-09-13 | 2005-09-20 | Kucherov Yan R | Tunneling-effect energy converters |
| CA2437304A1 (en) | 2003-08-14 | 2005-02-14 | The Governors Of The University Of Alberta | Apparatus and method for producing electrical energy from fluid energy |
| ITTO20031043A1 (it) | 2003-12-24 | 2005-06-25 | Fiat Ricerche | Generatore elettrico a microcombustione. |
| JP2005203131A (ja) * | 2004-01-13 | 2005-07-28 | Hitachi Ltd | エネルギーデバイス |
| KR100542677B1 (ko) * | 2004-06-25 | 2006-01-11 | 삼성에스디아이 주식회사 | 이차 전지 |
| US7495378B2 (en) * | 2004-07-15 | 2009-02-24 | Ngk Insulators, Ltd. | Dielectric device |
| DE102004037542A1 (de) * | 2004-08-03 | 2006-02-23 | Chemetall Gmbh | Verfahren zum Schützen einer metallischen Oberfläche mit einer korrosionsinhibierenden Beschichtung |
| RU53818U1 (ru) | 2005-02-14 | 2006-05-27 | Александр Иванович Груздев | Батарея электрических накопителей энергии |
| JP2008305987A (ja) * | 2007-06-07 | 2008-12-18 | Sumitomo Chemical Co Ltd | 熱電変換モジュール |
| GB2463117A (en) | 2008-09-08 | 2010-03-10 | Landa Lab Ltd | Generating electricity from the thermal motion of gas molecules |
| CN102484435A (zh) * | 2009-08-27 | 2012-05-30 | 兰达实验室（2012）有限公司 | 用于产生电的方法和装置及该装置制造方法 |
-
2010
- 2010-08-26 CN CN2010800381643A patent/CN102484435A/zh active Pending
- 2010-08-26 WO PCT/IL2010/000704 patent/WO2011024173A2/en not_active Ceased
- 2010-08-26 JP JP2012526182A patent/JP2013503599A/ja active Pending
- 2010-08-26 US US13/392,571 patent/US9559617B2/en not_active Expired - Fee Related
- 2010-08-26 AU AU2010288080A patent/AU2010288080A1/en not_active Abandoned
- 2010-08-26 KR KR1020127007925A patent/KR20120108966A/ko not_active Withdrawn
- 2010-08-26 TW TW099128772A patent/TW201117233A/zh unknown
- 2010-08-26 BR BR112012004203A patent/BR112012004203A2/pt not_active IP Right Cessation
- 2010-08-26 CA CA2770399A patent/CA2770399A1/en not_active Abandoned
- 2010-08-26 RU RU2012112118/07A patent/RU2538758C2/ru not_active IP Right Cessation
- 2010-08-26 MX MX2012002417A patent/MX2012002417A/es active IP Right Grant
- 2010-08-26 AR ARP100103132A patent/AR077982A1/es unknown
- 2010-08-26 EP EP10771217A patent/EP2471170A2/en not_active Withdrawn
-
2017
- 2017-01-18 US US15/408,495 patent/US20170133956A1/en not_active Abandoned
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04172977A (ja) * | 1990-11-07 | 1992-06-19 | Agency Of Ind Science & Technol | 発電装置 |
| JP2003250285A (ja) * | 2002-02-22 | 2003-09-05 | Jgs:Kk | 熱発電装置、熱発電システムおよび熱発電方法 |
| JP2005143286A (ja) * | 2003-11-07 | 2005-06-02 | Crf Soc Consortile Per Azioni | 多孔性半導体材料マトリクス状燃焼器を含む発電装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015033261A (ja) * | 2013-08-05 | 2015-02-16 | 情報力株式会社 | 発電装置 |
| JP2018195790A (ja) * | 2017-05-22 | 2018-12-06 | 株式会社東芝 | 発電素子、発電モジュール、発電装置及び発電システム |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102484435A (zh) | 2012-05-30 |
| TW201117233A (en) | 2011-05-16 |
| US20120153772A1 (en) | 2012-06-21 |
| WO2011024173A2 (en) | 2011-03-03 |
| US20170133956A1 (en) | 2017-05-11 |
| AR077982A1 (es) | 2011-10-05 |
| US9559617B2 (en) | 2017-01-31 |
| KR20120108966A (ko) | 2012-10-05 |
| AU2010288080A1 (en) | 2012-04-05 |
| CA2770399A1 (en) | 2011-03-03 |
| RU2012112118A (ru) | 2013-10-10 |
| RU2538758C2 (ru) | 2015-01-10 |
| BR112012004203A2 (pt) | 2019-09-24 |
| MX2012002417A (es) | 2012-06-19 |
| EP2471170A2 (en) | 2012-07-04 |
| WO2011024173A3 (en) | 2011-11-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2013503599A (ja) | 電気発生のための方法およびデバイスならびにその製造方法 | |
| CN102318179B (zh) | 用于产生电力的装置及方法 | |
| Sun et al. | Surface functionalization of single-layered Ti3C2T x MXene and its application in multilevel resistive memory | |
| Zhu et al. | Plasma-introduced oxygen defects confined in Li4Ti5O12 nanosheets for boosting lithium-ion diffusion | |
| Shinde et al. | Single-step hydrothermal synthesis of WO3-MnO2 composite as an active material for all-solid-state flexible asymmetric supercapacitor | |
| Wang et al. | Metal oxide hollow nanostructures for lithium‐ion batteries | |
| Ghorai et al. | Superior charge storage performance of WS 2 quantum dots in a flexible solid state supercapacitor | |
| Qiu et al. | Au@ MnO2 core–shell nanomesh electrodes for transparent flexible supercapacitors | |
| CN103862031B (zh) | 与有序多孔载体或粗糙表面结合制备的复合纳米金属材料及方法 | |
| Bencheikh et al. | High performance silicon nanowires/ruthenium nanoparticles micro-supercapacitors | |
| He et al. | Electrochemical fabrication of metal nanowires | |
| Lv et al. | Ultrafast charge/discharge solid-state thin-film supercapacitors via regulating the microstructure of transition-metal-oxide | |
| Saha et al. | Band gap modified boron doped NiO/Fe 3 O 4 nanostructure as the positive electrode for high energy asymmetric supercapacitors | |
| Nguyen et al. | Resistive switching effect and magnetic properties of iron oxide nanoparticles embedded-polyvinyl alcohol film | |
| US20140050910A1 (en) | Rapid macro-scale synthesis of free-standing graphene, high performance, binder-free graphene anode material, and methods of synthesizing the anode material | |
| Shin et al. | One-step transformation of MnO 2 into MnO 2− x@ carbon nanostructures for high-performance supercapacitors using structure-guided combustion waves | |
| WO2011063103A1 (en) | Semiconductor coated microporous graphene scaffolds | |
| Singh et al. | Nanoporous gold–copper oxide based all-solid-state micro-supercapacitors | |
| Bai et al. | A one-step template-free approach to achieve tapered silicon nanowire arrays with controllable filling ratios for solar cell applications | |
| KR101146914B1 (ko) | 액중 전기폭발에 의한 반도체 나노 분말 제조 방법 및 장치 | |
| Wang et al. | Preparing non-volatile resistive switching memories by tuning the content of Au@ air@ TiO 2-h yolk–shell microspheres in a poly (3-hexylthiophene) layer | |
| Kim et al. | Preparation and electrochemical performance of CNT electrode with deposited titanium dioxide for electrochemical capacitor | |
| US20260121130A1 (en) | High-density ad ultra-fast energy storage devices based on monolayers of metal nanoparticles and oxide thin films | |
| Gerasimov et al. | Physicochemical and Electrophysical Properties of Metal/Semiconductor Containing Nanostructured Composites | |
| Efficiency | High-Performance NiCo |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130710 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130710 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130712 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140930 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20150703 |