JP2013258283A5 - - Google Patents

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Publication number
JP2013258283A5
JP2013258283A5 JP2012133273A JP2012133273A JP2013258283A5 JP 2013258283 A5 JP2013258283 A5 JP 2013258283A5 JP 2012133273 A JP2012133273 A JP 2012133273A JP 2012133273 A JP2012133273 A JP 2012133273A JP 2013258283 A5 JP2013258283 A5 JP 2013258283A5
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JP
Japan
Prior art keywords
control unit
exposure
exposure amount
time
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012133273A
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English (en)
Japanese (ja)
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JP2013258283A (ja
JP6066592B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2012133273A external-priority patent/JP6066592B2/ja
Priority to JP2012133273A priority Critical patent/JP6066592B2/ja
Priority to US13/901,647 priority patent/US9946169B2/en
Priority to CN201510685960.0A priority patent/CN105242498A/zh
Priority to CN201310222560.7A priority patent/CN103488053B/zh
Priority to KR1020130066235A priority patent/KR101697231B1/ko
Publication of JP2013258283A publication Critical patent/JP2013258283A/ja
Publication of JP2013258283A5 publication Critical patent/JP2013258283A5/ja
Priority to KR1020170004131A priority patent/KR101839358B1/ko
Publication of JP6066592B2 publication Critical patent/JP6066592B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012133273A 2012-06-12 2012-06-12 露光装置及びデバイス製造方法 Active JP6066592B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2012133273A JP6066592B2 (ja) 2012-06-12 2012-06-12 露光装置及びデバイス製造方法
US13/901,647 US9946169B2 (en) 2012-06-12 2013-05-24 Exposure apparatus and device manufacturing method
CN201510685960.0A CN105242498A (zh) 2012-06-12 2013-06-06 曝光设备和装置制造方法
CN201310222560.7A CN103488053B (zh) 2012-06-12 2013-06-06 曝光设备和装置制造方法
KR1020130066235A KR101697231B1 (ko) 2012-06-12 2013-06-11 노광 장치 및 디바이스 제조 방법
KR1020170004131A KR101839358B1 (ko) 2012-06-12 2017-01-11 노광 장치 및 디바이스 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012133273A JP6066592B2 (ja) 2012-06-12 2012-06-12 露光装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2013258283A JP2013258283A (ja) 2013-12-26
JP2013258283A5 true JP2013258283A5 (OSRAM) 2015-07-30
JP6066592B2 JP6066592B2 (ja) 2017-01-25

Family

ID=49715063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012133273A Active JP6066592B2 (ja) 2012-06-12 2012-06-12 露光装置及びデバイス製造方法

Country Status (4)

Country Link
US (1) US9946169B2 (OSRAM)
JP (1) JP6066592B2 (OSRAM)
KR (2) KR101697231B1 (OSRAM)
CN (2) CN103488053B (OSRAM)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003258559A (ja) * 2002-03-04 2003-09-12 Matsushita Electric Ind Co Ltd ポップノイズ防止用ミュート回路およびスピーカー駆動回路
JP6438219B2 (ja) * 2014-06-17 2018-12-12 キヤノン株式会社 ステージ装置、リソグラフィ装置、物品の製造方法、および決定方法
CN117837838A (zh) 2016-07-28 2024-04-09 莱施菲公司 人造睫毛嫁接物
US9835959B1 (en) * 2016-10-17 2017-12-05 Cymer, Llc Controlling for wafer stage vibration
CA3195110C (en) 2016-12-20 2023-10-31 Lashify, Inc. Applicators and cases for artificial lash extensions
JP7005183B2 (ja) * 2017-06-19 2022-01-21 キヤノン株式会社 露光方法、露光装置および、物品製造方法
USD863679S1 (en) 2018-10-19 2019-10-15 Lashify, Inc. False eyelash applicator
CA3116582A1 (en) 2018-10-19 2020-04-23 Lashify, Inc. Cases for storing lash extensions and methods of use and manufacture thereof
JP1670874S (OSRAM) 2018-10-19 2020-10-26
USD995914S1 (en) 2022-07-20 2023-08-15 Lashify, Inc. Combined tweezer and applicator for artificial lash extensions
USD984050S1 (en) 2022-07-20 2023-04-18 Lashify, Inc. Combined curler and applicator for natural lashes and artificial lash extensions
USD980521S1 (en) 2022-07-20 2023-03-07 Lashify, Inc. Artificial lash extension separating comb
USD1072354S1 (en) 2024-01-08 2025-04-22 Lashify, Inc. Rounded tweezer and applicator for artificial lash extensions

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5760878A (en) 1995-08-30 1998-06-02 Canon Kabushiki Kaisha Exposure apparatus and alignment discrimination method
JP3564833B2 (ja) * 1995-11-10 2004-09-15 株式会社ニコン 露光方法
JPH09219361A (ja) * 1996-02-09 1997-08-19 Nikon Corp 露光装置
JPH10199795A (ja) * 1997-01-14 1998-07-31 Nikon Corp 走査露光方法及び装置
JPH1187233A (ja) * 1997-09-08 1999-03-30 Canon Inc 投影露光装置
JP4194160B2 (ja) 1998-02-19 2008-12-10 キヤノン株式会社 投影露光装置
JP4272750B2 (ja) 1998-06-23 2009-06-03 キヤノン株式会社 露光装置及び除振装置、システム同定装置及びその方法
JP2001291662A (ja) * 2000-02-04 2001-10-19 Nikon Corp 露光方法及び露光装置、並びにデバイス製造方法
JP2002110526A (ja) * 2000-10-03 2002-04-12 Canon Inc 走査露光方法及び走査露光装置
KR100629390B1 (ko) 2004-09-21 2006-09-29 삼성전자주식회사 광학계 위치제어수단을 갖는 반도체 제조용 노광장치 및이를 이용한 노광방법
US7417714B2 (en) 2004-11-02 2008-08-26 Nikon Corporation Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
WO2006128713A2 (en) 2005-06-02 2006-12-07 Carl Zeiss Smt Ag Optical imaging arrangement
US7804579B2 (en) 2007-06-21 2010-09-28 Asml Netherlands B.V. Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product

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