JP2013222856A - 研磨装置および研磨方法 - Google Patents

研磨装置および研磨方法 Download PDF

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Publication number
JP2013222856A
JP2013222856A JP2012094114A JP2012094114A JP2013222856A JP 2013222856 A JP2013222856 A JP 2013222856A JP 2012094114 A JP2012094114 A JP 2012094114A JP 2012094114 A JP2012094114 A JP 2012094114A JP 2013222856 A JP2013222856 A JP 2013222856A
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JP
Japan
Prior art keywords
polishing
wafer
film thickness
film
sensor head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012094114A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013222856A5 (https=
Inventor
Yoichi Kobayashi
洋一 小林
Katsutoshi Ono
勝俊 大野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2012094114A priority Critical patent/JP2013222856A/ja
Priority to KR1020130039204A priority patent/KR20130117334A/ko
Priority to TW102113034A priority patent/TW201343324A/zh
Priority to US13/864,181 priority patent/US20130273814A1/en
Publication of JP2013222856A publication Critical patent/JP2013222856A/ja
Publication of JP2013222856A5 publication Critical patent/JP2013222856A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B24B49/105—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means using eddy currents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
    • H10P74/238—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP2012094114A 2012-04-17 2012-04-17 研磨装置および研磨方法 Pending JP2013222856A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012094114A JP2013222856A (ja) 2012-04-17 2012-04-17 研磨装置および研磨方法
KR1020130039204A KR20130117334A (ko) 2012-04-17 2013-04-10 연마 장치 및 연마 방법
TW102113034A TW201343324A (zh) 2012-04-17 2013-04-12 研磨裝置及研磨方法
US13/864,181 US20130273814A1 (en) 2012-04-17 2013-04-16 Polishing apparatus and polishing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012094114A JP2013222856A (ja) 2012-04-17 2012-04-17 研磨装置および研磨方法

Publications (2)

Publication Number Publication Date
JP2013222856A true JP2013222856A (ja) 2013-10-28
JP2013222856A5 JP2013222856A5 (https=) 2014-10-23

Family

ID=49325509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012094114A Pending JP2013222856A (ja) 2012-04-17 2012-04-17 研磨装置および研磨方法

Country Status (4)

Country Link
US (1) US20130273814A1 (https=)
JP (1) JP2013222856A (https=)
KR (1) KR20130117334A (https=)
TW (1) TW201343324A (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015163164A1 (ja) * 2014-04-22 2015-10-29 株式会社 荏原製作所 研磨方法および研磨装置
WO2016163352A1 (ja) * 2015-04-08 2016-10-13 株式会社 荏原製作所 膜厚測定方法、膜厚測定装置、研磨方法、および研磨装置
KR20160142060A (ko) * 2015-06-02 2016-12-12 주식회사 케이씨텍 화학 기계적 연마 장치
JP2019217617A (ja) * 2018-06-22 2019-12-26 株式会社荏原製作所 渦電流センサの軌道を特定する方法、基板の研磨の進行度を算出する方法、基板研磨装置の動作を停止する方法および基板研磨の進行度を均一化する方法、これらの方法を実行するためのプログラムならびに当該プログラムが記録された非一過性の記録媒体
KR20210040267A (ko) 2019-10-03 2021-04-13 가부시키가이샤 에바라 세이사꾸쇼 기판 연마 장치, 막 두께 맵 작성 방법, 및 기판의 연마 방법

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102326730B1 (ko) * 2014-03-12 2021-11-17 가부시키가이샤 에바라 세이사꾸쇼 막 두께 측정값의 보정 방법, 막 두께 보정기 및 와전류 센서
JP2018083267A (ja) * 2016-11-25 2018-05-31 株式会社荏原製作所 研磨装置及び研磨方法
JP6829653B2 (ja) * 2017-05-17 2021-02-10 株式会社荏原製作所 研磨装置および研磨方法
JP6948868B2 (ja) * 2017-07-24 2021-10-13 株式会社荏原製作所 研磨装置および研磨方法
JP7084811B2 (ja) 2018-07-13 2022-06-15 株式会社荏原製作所 研磨装置および研磨方法
JP7316785B2 (ja) * 2018-12-26 2023-07-28 株式会社荏原製作所 光学式膜厚測定システムの洗浄方法
JP7221736B2 (ja) * 2019-03-04 2023-02-14 株式会社荏原製作所 研磨方法および研磨装置
JP7680347B2 (ja) * 2021-12-24 2025-05-20 株式会社荏原製作所 膜厚測定方法および膜厚測定装置
JP7696822B2 (ja) * 2021-12-28 2025-06-23 株式会社荏原製作所 研磨装置および研磨方法
JP7783107B2 (ja) * 2022-03-30 2025-12-09 株式会社荏原製作所 ワークピースの研磨方法および研磨装置

Citations (4)

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JP2003145419A (ja) * 2001-11-20 2003-05-20 Fujitsu Ltd 研磨装置
JP2005121616A (ja) * 2003-10-20 2005-05-12 Ebara Corp 渦電流センサ
JP2011023579A (ja) * 2009-07-16 2011-02-03 Ebara Corp 研磨方法および装置
JP2011205070A (ja) * 2010-03-02 2011-10-13 Ebara Corp 研磨監視方法、研磨方法、研磨監視装置、および研磨装置

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US20040242121A1 (en) * 2003-05-16 2004-12-02 Kazuto Hirokawa Substrate polishing apparatus
JP4641395B2 (ja) * 2004-08-17 2011-03-02 Ｏｋｉセミコンダクタ株式会社 半導体装置の研削方法、及び研削装置
CN101511539B (zh) * 2006-09-12 2012-08-22 株式会社荏原制作所 研磨装置及研磨方法
JP5006883B2 (ja) * 2006-10-06 2012-08-22 株式会社荏原製作所 加工終点検知方法および加工装置
JP5080933B2 (ja) * 2007-10-18 2012-11-21 株式会社荏原製作所 研磨監視方法および研磨装置
JP2009158749A (ja) * 2007-12-27 2009-07-16 Ricoh Co Ltd 化学機械研磨方法及び化学機械研磨装置
JP5980476B2 (ja) * 2010-12-27 2016-08-31 株式会社荏原製作所 ポリッシング装置およびポリッシング方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003145419A (ja) * 2001-11-20 2003-05-20 Fujitsu Ltd 研磨装置
JP2005121616A (ja) * 2003-10-20 2005-05-12 Ebara Corp 渦電流センサ
JP2011023579A (ja) * 2009-07-16 2011-02-03 Ebara Corp 研磨方法および装置
JP2011205070A (ja) * 2010-03-02 2011-10-13 Ebara Corp 研磨監視方法、研磨方法、研磨監視装置、および研磨装置

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2015163164A1 (ja) * 2014-04-22 2017-04-13 株式会社荏原製作所 研磨方法および研磨装置
KR102131090B1 (ko) * 2014-04-22 2020-07-07 가부시키가이샤 에바라 세이사꾸쇼 연마 방법 및 연마 장치
US10399203B2 (en) 2014-04-22 2019-09-03 Ebara Corporation Polishing method and polishing apparatus
WO2015163164A1 (ja) * 2014-04-22 2015-10-29 株式会社 荏原製作所 研磨方法および研磨装置
KR20160147823A (ko) * 2014-04-22 2016-12-23 가부시키가이샤 에바라 세이사꾸쇼 연마 방법 및 연마 장치
US10256104B2 (en) 2015-04-08 2019-04-09 Ebara Corporation Film thickness measuring method, film thickness measuring apparatus, polishing method, and polishing apparatus
JP2016200459A (ja) * 2015-04-08 2016-12-01 株式会社荏原製作所 膜厚測定方法、膜厚測定装置、研磨方法、および研磨装置
WO2016163352A1 (ja) * 2015-04-08 2016-10-13 株式会社 荏原製作所 膜厚測定方法、膜厚測定装置、研磨方法、および研磨装置
KR20160142060A (ko) * 2015-06-02 2016-12-12 주식회사 케이씨텍 화학 기계적 연마 장치
KR102313560B1 (ko) 2015-06-02 2021-10-18 주식회사 케이씨텍 화학 기계적 연마 장치
JP2019217617A (ja) * 2018-06-22 2019-12-26 株式会社荏原製作所 渦電流センサの軌道を特定する方法、基板の研磨の進行度を算出する方法、基板研磨装置の動作を停止する方法および基板研磨の進行度を均一化する方法、これらの方法を実行するためのプログラムならびに当該プログラムが記録された非一過性の記録媒体
JP7083279B2 (ja) 2018-06-22 2022-06-10 株式会社荏原製作所 渦電流センサの軌道を特定する方法、基板の研磨の進行度を算出する方法、基板研磨装置の動作を停止する方法および基板研磨の進行度を均一化する方法、これらの方法を実行するためのプログラムならびに当該プログラムが記録された非一過性の記録媒体
US11376704B2 (en) 2018-06-22 2022-07-05 Ebara Corporation Method of identifying trajectory of eddy current sensor, method of calculating substrate polishing progress, method of stopping operation of substrate polishing apparatus, method of regularizing substrate polishing progress, program for executing the same, and non-transitory recording medium that records program
KR20210040267A (ko) 2019-10-03 2021-04-13 가부시키가이샤 에바라 세이사꾸쇼 기판 연마 장치, 막 두께 맵 작성 방법, 및 기판의 연마 방법
US11833636B2 (en) 2019-10-03 2023-12-05 Ebara Corporation Substrate polishing apparatus, method of creating thickness map, and method of polishing a substrate

Also Published As

Publication number Publication date
KR20130117334A (ko) 2013-10-25
US20130273814A1 (en) 2013-10-17
TW201343324A (zh) 2013-11-01

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