WO2015163164A1 - 研磨方法および研磨装置 - Google Patents
研磨方法および研磨装置 Download PDFInfo
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- WO2015163164A1 WO2015163164A1 PCT/JP2015/061224 JP2015061224W WO2015163164A1 WO 2015163164 A1 WO2015163164 A1 WO 2015163164A1 JP 2015061224 W JP2015061224 W JP 2015061224W WO 2015163164 A1 WO2015163164 A1 WO 2015163164A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/013—Devices or means for detecting lapping completion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
- B24B49/05—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation including the measurement of a first workpiece already machined and of another workpiece being machined and to be matched with the first one
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
- B24B37/32—Retaining rings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/03—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent according to the final size of the previously ground workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
Definitions
- the present invention relates to a polishing method and a polishing apparatus for polishing a substrate while measuring the film thickness based on optical information contained in reflected light from the substrate such as a wafer.
- a polishing apparatus In the manufacturing process of semiconductor devices, a polishing apparatus, more specifically, a CMP (Chemical Mechanical Polishing) apparatus is widely used to polish the surface of a wafer.
- a CMP apparatus generally includes a film thickness measuring device for measuring the film thickness of a wafer being polished.
- the CMP apparatus is configured to measure the film thickness while polishing the wafer, detect the polishing end point of the wafer based on the measured value of the film thickness, or control the distribution of the remaining film thickness within the wafer surface.
- the film thickness to be measured in the CMP apparatus is the thickness of the uppermost film to be polished. Unless otherwise specified in this specification, the “film thickness” refers to the “thickness of the film to be polished”. To do.
- An optical film thickness measuring device is known as an example of a film thickness measuring device.
- This optical film thickness measuring device is configured to irradiate the surface of a wafer with light, receive reflected light from the wafer, and determine the thickness of the wafer from the spectrum of the reflected light.
- the spectrum of reflected light changes according to the film thickness of the wafer. Therefore, the optical film thickness measuring instrument can determine the film thickness based on the spectrum.
- FIG. 19 is a cross-sectional view showing the surface structure of the wafer.
- a film 100 (for example, a SiO 2 film) constituting the exposed surface of the wafer is formed on a base layer 101 (for example, a silicon layer).
- a recess 103 is formed in the base layer 101, and the recess 103 is filled with a part of the film 100.
- Reference symbol t1 represents the thickness of the film 100
- reference symbol t2 represents the depth of the recess 103
- reference symbol d2 represents the width of the recess 103
- reference symbol d1 represents the width of the base layer 101 other than the recess 103.
- FIG. 20 is a diagram showing a spectrum of reflected light that changes according to the depth t2 of the recess 103.
- FIG. The vertical axis in FIG. 20 represents the light reflectance (relative reflectance with respect to the reflected light during water polishing of the silicon wafer), and the horizontal axis represents the wavelength of the light.
- the spectrum shown in FIG. 20 is obtained from a simulation of light reflection performed under the condition that the depth t2 of the recess 103 is changed little by little without changing the thickness t1 of the film 100 and the ratio of the width d2 to the width d1. It is what was done. As can be seen from FIG. 20, even if the thickness t1 of the film 100 is the same, the spectrum of the reflected light shifts as the depth t2 of the recess 103 changes.
- FIG. 21 is a diagram showing a spectrum of reflected light that changes according to the width d2 of the recess 103.
- the spectrum shown in FIG. 21 shows that the width d2 of the recess 103 (more specifically, the ratio of the width d2 to the width d1) is changed little by little without changing the thickness t1 of the film 100 and the depth t2 of the recess 103. It was obtained from a simulation of light reflection carried out under the above conditions. As can be seen from FIG. 21, even if the thickness t1 of the film 100 is the same, the spectrum of the reflected light shifts as the width d2 of the recess 103 changes.
- each layer below the film to be polished is collectively referred to as a base layer.
- One embodiment of the present invention provides a plurality of spectrum groups each including a plurality of reference spectra corresponding to different film thicknesses, receives light reflected from the substrate while irradiating the substrate, and selects a spectrum group A sampling spectrum for generating the measurement spectrum for acquiring a film thickness while polishing the substrate, selecting a spectrum group including a reference spectrum that is closest to the sampling spectrum, and generating a sampling spectrum A reference spectrum having a shape closest to the measurement spectrum generated during polishing of the substrate is selected from the selected spectrum group, and a film thickness corresponding to the selected reference spectrum is obtained. Polishing method.
- the reference substrate is polished to obtain at least one spectrum group including a plurality of reference spectra, and the plurality of reference spectra are corrected so that the polishing rate of the reference substrate can be regarded as constant.
- Measurement spectrum for acquiring a plurality of corrected reference spectra corresponding to different film thicknesses, receiving reflected light from the substrate while irradiating the substrate with light, and acquiring the film thickness while polishing the substrate And select a corrected reference spectrum that is closest in shape to the measured spectrum generated during polishing of the substrate from the at least one spectrum group, and obtain a film thickness corresponding to the selected corrected reference spectrum
- Another aspect of the present invention includes a polishing table that supports a polishing pad, a polishing head that presses a substrate against the polishing pad to polish the substrate, and a plurality of spectra each including a plurality of reference spectra corresponding to different film thicknesses.
- a storage device storing a group; and an optical film thickness measuring device for obtaining the film thickness of the substrate, wherein the optical film thickness measuring device reflects light from the substrate while irradiating the substrate with light.
- a sampling spectrum for selecting a spectrum group is generated from the reflected light, a spectrum group including a reference spectrum closest to the sampling spectrum is selected, and a film thickness is obtained while polishing the substrate.
- the influence of the difference in the structure of the underlayer can be eliminated by selecting a spectrum group that includes a reference spectrum that is closest in shape to the sampling spectrum. As a result, a more accurate film thickness can be obtained for the film to be polished.
- FIG. 1 is a diagram showing a polishing apparatus according to an embodiment of the present invention.
- the polishing apparatus includes a polishing table 3 to which a polishing pad 1 having a polishing surface 1 a is attached, a wafer W that is an example of a substrate, and a wafer W that is a polishing pad 1 on the polishing table 3.
- a polishing liquid for example, slurry
- the polishing table 3 is connected to a table motor 19 arranged below the table shaft 3a, and the table motor 19 rotates the polishing table 3 in the direction indicated by the arrow.
- a polishing pad 1 is attached to the upper surface of the polishing table 3, and the upper surface of the polishing pad 1 constitutes a polishing surface 1 a for polishing the wafer W.
- the polishing head 5 is connected to the lower end of the polishing head shaft 16. The polishing head 5 is configured to hold the wafer W on the lower surface thereof by vacuum suction.
- the polishing head shaft 16 is moved up and down by a vertical movement mechanism (not shown).
- the polishing of the wafer W is performed as follows.
- the polishing head 5 and the polishing table 3 are rotated in directions indicated by arrows, respectively, and a polishing liquid (slurry) is supplied onto the polishing pad 1 from the polishing liquid supply nozzle 10.
- the polishing head 5 presses the wafer W against the polishing surface 1 a of the polishing pad 1.
- the surface of the wafer W is polished by the mechanical action of abrasive grains contained in the polishing liquid and the chemical action of the polishing liquid.
- FIG. 2 is a cross-sectional view showing the detailed structure of the polishing head 5.
- the polishing head 5 is disposed so as to surround a disk-shaped carrier 6, a circular flexible elastic film 7 that forms a plurality of pressure chambers D1, D2, D3, and D4 below the carrier 6, and a wafer W. And a retainer ring 8 for pressing the polishing pad 1.
- the pressure chambers D1, D2, D3, D4 are formed between the elastic film 7 and the lower surface of the carrier 6.
- the elastic membrane 7 has a plurality of annular partition walls 7a, and the pressure chambers D1, D2, D3, and D4 are partitioned from each other by the partition walls 7a.
- the central pressure chamber D1 is circular, and the other pressure chambers D2, D3, D4 are circular. These pressure chambers D1, D2, D3, D4 are arranged concentrically.
- the polishing head 5 may include only one pressure chamber, or may include five or more pressure chambers.
- the pressure chambers D1, D2, D3, and D4 are connected to fluid lines G1, G2, G3, and G4, and pressurized fluid (for example, pressurized gas such as pressurized air) whose pressure is adjusted is supplied to the fluid lines G1, G2. , G3 and G4, the pressure chambers D1, D2, D3 and D4 are supplied.
- Vacuum lines U1, U2, U3, U4 are connected to the fluid lines G1, G2, G3, G4, and the vacuum lines U1, U2, U3, U4 form negative pressure in the pressure chambers D1, D2, D3, D4. It has come to be.
- the internal pressures of the pressure chambers D1, D2, D3, D4 can be changed independently of each other, so that the corresponding four regions of the wafer W, namely the central part, the inner intermediate part, the outer intermediate part, In addition, the polishing pressure for the peripheral edge can be adjusted independently.
- An annular elastic membrane 9 is disposed between the retainer ring 8 and the carrier 6.
- An annular pressure chamber D5 is formed inside the elastic membrane 9.
- the pressure chamber D5 is connected to the fluid line G5, and pressurized fluid (for example, pressurized air) whose pressure has been adjusted is supplied into the pressure chamber D5 through the fluid line G5.
- a vacuum line U5 is connected to the fluid line G5, and a negative pressure is formed in the pressure chamber D5 by the vacuum line U5.
- the pressure in the pressure chamber D5 is applied to the retainer ring 8, and the retainer ring 8 is configured to directly press the polishing pad 1 independently of the elastic film 7.
- the elastic film 7 presses the wafer W against the polishing pad 1 while the retainer ring 8 presses the polishing pad 1 around the wafer W.
- the carrier 6 is fixed to the lower end of the head shaft 16, and the head shaft 16 is connected to the vertical movement mechanism 20.
- the vertical movement mechanism 20 is configured to raise and lower the head shaft 16 and the polishing head 5 and to position the polishing head 5 at a predetermined height.
- As the vertical movement mechanism 20 that functions as the polishing head positioning mechanism a combination of a servo motor and a ball screw mechanism is used.
- the vertical movement mechanism 20 positions the polishing head 5 at a predetermined height, and in this state, pressurized fluid is supplied to the pressure chambers D1 to D5.
- the elastic film 7 receives the pressure in the pressure chambers D1 to D4 and presses the wafer W against the polishing pad 1, and the retainer ring 8 receives the pressure in the pressure chamber D5 and presses the polishing pad 1. In this state, the wafer W is polished.
- the polishing apparatus includes an optical film thickness measuring device 25 that acquires the film thickness of the wafer W.
- the optical film thickness measuring instrument 25 includes a film thickness sensor 31 that acquires an optical signal that changes according to the film thickness of the wafer W, and a processing unit 32 that determines the film thickness from the optical signal.
- the film thickness sensor 31 is disposed inside the polishing table 3, and the processing unit 32 is connected to the polishing control unit 12.
- the film thickness sensor 31 rotates integrally with the polishing table 3 as indicated by symbol A, and acquires an optical signal of the wafer W held by the polishing head 5.
- the film thickness sensor 31 is connected to the processing unit 32, and an optical signal acquired by the film thickness sensor 31 is sent to the processing unit 32.
- FIG. 3 is a schematic cross-sectional view showing a polishing apparatus provided with an optical film thickness measuring device 25.
- the polishing head shaft 16 is connected to a polishing head motor 18 via a connecting means 17 such as a belt and is rotated. As the polishing head shaft 16 rotates, the polishing head 5 rotates in the direction indicated by the arrow.
- the optical film thickness measuring instrument 25 includes the film thickness sensor 31 and the processing unit 32.
- the film thickness sensor 31 is configured to irradiate the surface of the wafer W with light, receive reflected light from the wafer W, and decompose the reflected light according to the wavelength.
- the film thickness sensor 31 includes a light projecting unit 42 that irradiates a surface to be polished of the wafer W, an optical fiber 43 that receives reflected light returning from the wafer W, and a wavelength of the reflected light from the wafer W. And a spectroscope 44 that measures the intensity of reflected light over a predetermined wavelength range.
- the polishing table 3 is formed with a first hole 50A and a second hole 50B that open on the upper surface thereof.
- the polishing pad 1 has through holes 51 at positions corresponding to the holes 50A and 50B.
- the holes 50A, 50B and the through hole 51 communicate with each other, and the through hole 51 is opened at the polishing surface 1a.
- the first hole 50A is connected to a liquid supply source 55 via a liquid supply path 53 and a rotary joint (not shown), and the second hole 50B is connected to a liquid discharge path 54.
- the light projecting unit 42 includes a light source 47 that emits multi-wavelength light, and an optical fiber 48 connected to the light source 47.
- the optical fiber 48 is an optical transmission unit that guides light emitted from the light source 47 to the surface of the wafer W.
- the tips of the optical fiber 48 and the optical fiber 43 are located in the first hole 50A and are located in the vicinity of the surface to be polished of the wafer W.
- the tips of the optical fiber 48 and the optical fiber 43 are arranged facing the wafer W held by the polishing head 5.
- the polishing table 3 rotates, a plurality of regions of the wafer W are irradiated with light.
- the tips of the optical fiber 48 and the optical fiber 43 are arranged so as to pass through the center of the wafer W held by the polishing head 5.
- water preferably pure water
- the liquid supply path 53 is provided with a valve (not shown) that operates in synchronization with the rotation of the polishing table 3. This valve operates to stop the flow of water or reduce the flow rate of water when the wafer W is not positioned over the through hole 51.
- the optical fiber 48 and the optical fiber 43 are arranged in parallel with each other.
- the tips of the optical fiber 48 and the optical fiber 43 are arranged perpendicular to the surface of the wafer W, and the optical fiber 48 irradiates light to the surface of the wafer W perpendicularly.
- the processing unit 32 During polishing of the wafer W, light is irradiated from the light projecting unit 42 to the wafer W, and reflected light from the wafer W is received by the optical fiber (light receiving unit) 43.
- the spectroscope 44 measures the intensity of the reflected light at each wavelength over a predetermined wavelength range, and sends the obtained light intensity data to the processing unit 32.
- This light intensity data is an optical signal reflecting the film thickness of the wafer W, and is composed of the intensity of the reflected light and the corresponding wavelength.
- the processing unit 32 generates a spectrum representing the light intensity for each wavelength from the light intensity data, and further determines the film thickness of the wafer W from the spectrum.
- FIG. 4 is a schematic diagram for explaining the principle of the optical film thickness measuring instrument 25, and FIG. 5 is a plan view showing the positional relationship between the wafer W and the polishing table 3.
- the wafer W has a lower layer film and an upper layer film formed thereon.
- the upper layer film is, for example, a silicon layer or an insulating film.
- the light projecting unit 42 and the light receiving unit 43 are arranged to face the surface of the wafer W.
- the light projecting unit 42 irradiates light to a plurality of regions including the center of the wafer W every time the polishing table 3 rotates once.
- the light irradiated on the wafer W is reflected at the interface between the medium (water in the example of FIG. 4) and the upper layer film, and the interface between the upper layer film and the lower layer film, and the waves of light reflected at these interfaces interfere with each other. To do.
- the way of interference of the light wave changes according to the thickness of the upper layer film (that is, the optical path length). For this reason, the spectrum generated from the reflected light from the wafer W changes according to the thickness of the upper layer film.
- the spectroscope 44 decomposes the reflected light according to the wavelength, and measures the intensity of the reflected light for each wavelength.
- the processing unit 32 generates a spectrum from the intensity data (optical signal) of the reflected light obtained from the spectroscope 44.
- the spectrum generated from the reflected light from the wafer W to be polished is referred to as a measurement spectrum.
- This measurement spectrum is represented as a line graph (that is, a spectral waveform) indicating the relationship between the wavelength and intensity of light.
- the intensity of light can also be expressed as a relative value such as reflectance or relative reflectance.
- FIG. 6 is a diagram illustrating a measurement spectrum generated by the processing unit 32.
- the horizontal axis represents the wavelength of the light reflected from the wafer
- the vertical axis represents the relative reflectance derived from the intensity of the reflected light.
- the relative reflectance is one index representing the light reflection intensity, and specifically, is a ratio between the light intensity and a predetermined reference intensity.
- the reference intensity is an intensity acquired in advance for each wavelength, and the relative reflectance is calculated at each wavelength. Specifically, the relative reflectance is obtained by dividing the light intensity (measured intensity) at each wavelength by the corresponding reference intensity.
- the reference intensity can be, for example, the intensity of light obtained when a silicon wafer (bare wafer) on which no film is formed is water-polished in the presence of water. In actual polishing, subtract the dark level (background intensity obtained under light-shielded conditions) from the measured intensity to obtain the corrected measured intensity, and further subtract the dark level from the reference intensity to obtain the corrected reference intensity. Then, the relative reflectance is obtained by dividing the corrected actually measured intensity by the corrected reference intensity. Specifically, the relative reflectance R ( ⁇ ) can be obtained using the following equation.
- E ( ⁇ ) is the intensity of light reflected from the wafer at wavelength ⁇
- B ( ⁇ ) is the reference intensity at wavelength ⁇
- D ( ⁇ ) blocks the light.
- the background intensity (dark level) at the wavelength ⁇ obtained in the above state.
- the processing unit 32 is configured to determine the film thickness from a comparison between the measured spectrum and a plurality of reference spectra.
- the optical film thickness measuring instrument 25 is connected to a storage device 58 shown in FIGS. 1 and 3 that stores a plurality of reference spectra.
- FIG. 7 is a diagram illustrating a process for determining a film thickness from a comparison between a measured spectrum and a plurality of reference spectra.
- the processing unit 32 compares the measurement spectrum generated during polishing with a plurality of reference spectra to determine a reference spectrum having the closest shape to the measurement spectrum, and the film thickness associated with the determined reference spectrum. To get.
- the reference spectrum closest in shape to the measurement spectrum is the spectrum having the smallest relative reflectance difference between the reference spectrum and the measurement spectrum.
- the plurality of reference spectra are acquired in advance by polishing a reference wafer having the same or equivalent initial film thickness as a wafer to be polished (hereinafter, sometimes referred to as a target wafer or a target substrate),
- a reference spectrum can be associated with the film thickness when the reference spectrum is acquired. That is, each reference spectrum is acquired at a different film thickness, and a plurality of reference spectra correspond to a plurality of different film thicknesses. Therefore, the current film thickness can be estimated by specifying a reference spectrum that is closest to the measured spectrum.
- a reference wafer having the same or equivalent film thickness as the target wafer is prepared.
- the reference wafer is transferred to a film thickness measuring device (not shown), and the initial film thickness of the reference wafer is measured by the film thickness measuring device.
- the reference wafer is conveyed to the polishing apparatus shown in FIG. 1, and the reference wafer is polished while slurry as a polishing liquid is supplied to the polishing pad 1.
- the surface of the reference wafer is irradiated with light, and the spectrum of reflected light from the reference wafer (ie, the reference spectrum) is acquired.
- the reference spectrum is acquired every time the polishing table 3 rotates once. Thus, multiple reference spectra are acquired during polishing of the reference wafer. After the polishing of the reference wafer is completed, the reference wafer is transferred again to the film thickness measuring instrument, and the film thickness (that is, the final film thickness) of the polished reference wafer is measured.
- FIG. 8 is a graph showing the relationship between the film thickness of the reference wafer and the polishing time.
- the polishing rate of the reference wafer is constant, the film thickness decreases linearly with the polishing time, as shown in FIG.
- the film thickness can be expressed using a linear function including the polishing time as a variable.
- the polishing rate can be calculated by dividing the difference between the initial film thickness Tini and the final film thickness Tfin by the polishing time t reaching the final film thickness Tfin.
- the polishing time when each reference spectrum is acquired is calculated from the rotation speed of the polishing table 3. Can do. Alternatively, it is of course possible to more accurately measure the time from the start of polishing until each reference spectrum is acquired. Furthermore, the film thickness corresponding to each reference spectrum can be calculated from the polishing time when each reference spectrum is acquired. In this way, a plurality of reference spectra corresponding to different film thicknesses are acquired. Each reference spectrum can be associated (associated) with a corresponding film thickness. Therefore, the processing unit 32 can determine the current film thickness from the film thickness associated with the reference spectrum by specifying the reference spectrum closest to the measurement spectrum during the polishing of the wafer.
- a reference spectrum can be obtained by light reflection simulation. This simulation is executed by building the structure of the target wafer on a computer and simulating the spectrum obtained when the target wafer is irradiated with light while gradually reducing the film thickness. Thus, it is also possible to acquire a plurality of reference spectra corresponding to different film thicknesses from a simulation on a computer.
- the spectrum of reflected light varies according to the film thickness. Therefore, if the film thickness does not change, the spectrum does not change. However, as shown in FIG. 20 and FIG. 21, even if the film thickness is the same, the spectrum can change depending on the structure of the underlayer of the film.
- the structure of the underlayer may vary from region to region within the surface of the wafer and may vary from wafer to wafer. Such a difference in the structure of the underlayer prevents accurate film thickness measurement.
- the processing unit 32 uses a plurality of spectrum groups each including a plurality of reference spectra corresponding to different film thicknesses. To decide.
- the processing unit 32 is connected to a storage device 58 that stores a plurality of spectrum groups.
- the reference spectra included in these different spectral groups can be obtained from reference spectra generated from light reflected from different areas on the reference wafer, or from reference spectra obtained using multiple reference wafers, or from light reflection simulations. Reference spectrum.
- one reference wafer having the same or equivalent film thickness as the target wafer is used.
- the film thickness of the reference wafer may be larger than the film thickness of the target wafer.
- the thickness of the reference wafer may be slightly smaller than the thickness of the target wafer, as long as it is allowed that the thickness is not accurately obtained at the initial stage of polishing.
- polishing the reference wafer a plurality of regions defined on the reference wafer are irradiated with light, a plurality of reference spectra are generated from the light reflected from the plurality of regions, and the plurality of generated reference spectra are A plurality of spectrum groups are obtained by classifying according to the regions.
- the structure of the underlayer is slightly different for each area of the reference wafer. Therefore, a plurality of spectrum groups reflecting the difference in the structure of the underlayer are acquired.
- a plurality of reference wafers having the same or equivalent film thickness as the target wafer are used.
- the film thickness of the plurality of reference wafers may be larger than the film thickness of the target wafer.
- the thickness of the reference wafer may be slightly smaller than the thickness of the target wafer, as long as it is allowed that the thickness is not accurately obtained at the initial stage of polishing.
- One reference wafer is selected from a plurality of reference wafers, and while the selected reference wafer is polished, the reference wafer is irradiated with light, and a plurality of reference spectra are generated from the light reflected from the reference wafer.
- the above spectrum groups are acquired, and the process of irradiating light to the reference wafer and the one or more spectrum groups are acquired until all the reference wafers are polished while changing the selected reference wafers one by one.
- a plurality of spectrum groups are acquired by repeating the process.
- the structure of the underlayer is slightly different for each reference wafer. Therefore, a plurality of spectrum groups reflecting the difference in the structure of the underlayer are acquired.
- spectrum groups are acquired in a plurality of regions of each reference wafer.
- the processing unit 32 While the target wafer is being polished, the target wafer is irradiated with light as described above.
- the processing unit 32 generates a spectrum from the reflected light returning from the target wafer, and selects a spectrum group including a reference spectrum having a shape closest to the generated spectrum.
- a spectrum used for selecting a spectrum group is referred to as a sampling spectrum.
- the sampling spectrum is a spectrum generated from the light reflected from the wafer W to be polished, like the measurement spectrum.
- the shape contrast between the sampling spectrum and the reference spectrum is performed based on the deviation of the reference spectrum from the sampling spectrum. More specifically, the processing unit 32 calculates the deviation between the two spectra using the following equation.
- ⁇ is the wavelength of light
- ⁇ 1 and ⁇ 2 are the lower limit value and the upper limit value that determine the wavelength range of the spectrum to be monitored
- Rc is the relative reflectance constituting the sampling spectrum
- Rp is a reference It is the relative reflectance constituting the spectrum.
- Rc and Rp are normalized such that the wavelength average is divided, and the measurement area in the vicinity.
- a preprocess such as an average or a time average with measured values of several past steps may be used.
- FIG. 9 is a diagram showing a sampling spectrum and a reference spectrum.
- the above equation (2) is an equation for calculating the deviation of the reference spectrum from the sampling spectrum, and this deviation corresponds to a region (shown by hatching in FIG. 9) surrounded by these two spectra.
- the processing unit 32 determines the reference spectrum having the smallest deviation from the sampling spectrum, that is, the reference spectrum having the closest shape to the sampling spectrum, using the above equation (2). Further, the processing unit 32 selects a spectrum group to which the determined reference spectrum belongs from a plurality of spectrum groups.
- FIG. 10 is a schematic diagram for explaining a process of selecting one spectrum group from a plurality of spectrum groups.
- the storage device 58 (see FIGS. 1 and 3) stores a plurality of spectrum groups as shown in FIG. 10 in advance.
- Each spectrum group includes a plurality of reference spectra corresponding to different film thicknesses of the film to be polished.
- the processing unit 32 generates a sampling spectrum from the light reflected from the target wafer, and determines (selects) one spectrum group including a reference spectrum having a shape closest to the sampling spectrum.
- Examples of a plurality of regions (hereinafter referred to as reference regions) on the wafer surface from which spectrum groups are acquired include a plurality of reference regions defined by a plurality of radius ranges.
- reference regions defined by a plurality of radius ranges.
- the thickness of the underlayer varies in a generally axisymmetric manner within the wafer surface due to the film forming process before polishing and the characteristics of polishing.
- the rotational speeds of the polishing table 3 and the polishing head 5 are set so that the film thickness sensor 31 scans the wafer surface evenly in the circumferential direction and returns to the original position in a predetermined short time. By averaging the spectrum data obtained in the predetermined short time, it is possible to reduce the influence of variations in the structure of the underlayer in the wafer circumferential direction.
- the polishing head 11 rotates 11 times while the polishing table 3 rotates 10 times, and the film thickness sensor 31 is returned to the original on the wafer surface. Return to position. Therefore, by averaging the spectrum data for 10 revolutions of the polishing table 3, the influence of the variation in the structure of the underlayer in the wafer surface can be greatly reduced.
- the structure of the underlying layer of the reference wafer can be measured before or after polishing using a stand-alone film thickness measuring instrument or an in-line film thickness measuring instrument built into the polishing equipment. It can be measured in the state. Therefore, based on the measured distribution of the thickness of the underlayer of one or more reference wafers, the overall thickness of the underlayer is distributed as evenly as possible within the range from the minimum thickness to the maximum thickness. Thus, it is preferable to select a reference region for each reference wafer. The plurality of spectrum groups are respectively acquired in the selected plurality of reference regions.
- each reference wafer it is preferable to define the reference region so that it is distributed as evenly as possible within the surface of each reference wafer. Further, it is more preferable to narrow down the number of spectrum groups in advance by eliminating the spectrum groups having similar reference spectrum shapes.
- the above formula (2) can be used to determine the similarity in shape between reference spectra. When there are local maximum points or local minimum points determined by the structure of the underlayer in the reference spectrum, pay attention to the wavelength of the local maximum point or local minimum point, and the wavelength as a whole is within the range from the wavelength minimum value to the wavelength maximum value.
- the reference region of each reference wafer may be selected so as to be distributed as evenly as possible.
- the step of selecting the spectrum group may be performed when the target wafer is being polished, or may be performed before the target wafer is being polished.
- a spectrum group when polishing a target wafer it is preferable to use a sampling spectrum generated within a preset polishing time. For example, a sampling spectrum generated until a predetermined time elapses from the start of polishing is compared with a plurality of reference spectra in a plurality of spectrum groups, and a spectrum group including a reference spectrum closest to the sampling spectrum is selected. .
- Water polishing is a process in which the target wafer is brought into sliding contact with the polishing pad while pure water is supplied onto the polishing pad instead of slurry.
- the target wafer is water-polished in a state where pure water is present between the target wafer and the polishing pad. Unlike slurry, pure water does not contain abrasive grains and does not have the effect of etching the film of the wafer, so that polishing of the target wafer does not proceed substantially in water polishing.
- the spectrum group is determined using a stand-alone film thickness measuring device or an in-line film thickness measuring device
- the structure of the underlying layer of the target wafer and / or the in-line film thickness measuring device incorporated in the polishing apparatus is used.
- the film thickness can be measured and the corresponding spectrum group can be selected.
- the structure of the underlayer can be regarded as uniform within one lot, one target wafer may be measured for each lot.
- one target is selected from each of the odd-numbered group and even-numbered group.
- the film thickness may be measured on the wafer.
- the processing unit 32 generates a measurement spectrum during polishing of the target wafer, and selects a reference spectrum having a shape closest to the generated measurement spectrum from the selected spectrum group. More specifically, the processing unit 32 determines the reference spectrum having the closest shape to the measured spectrum, that is, the reference spectrum having the smallest deviation from the measured spectrum, using the above formula (2). Get the film thickness associated with. The processing unit 32 monitors the polishing of the target wafer based on the determined film thickness, and determines the polishing end point when the film thickness decreases below a predetermined target value. The processing unit 32 transmits a polishing end point detection signal to the polishing control unit 12, and the polishing control unit 12 receives the polishing end point detection signal and ends polishing of the target wafer.
- the processing unit 32 is configured to obtain a predetermined residual film thickness distribution based on the film thickness determined for each in-plane region of the target wafer at each time point during polishing of the target wafer, for example, The pressure command values for the pressure chambers D1 to D5 are determined. The processing unit 32 transmits these pressure command values to the polishing control unit 12, and the polishing control unit 12 updates the pressure based on the transmitted command values.
- the measurement spectrum may change greatly due to factors such as changes in the temperature and surface shape of the target wafer. For example, in the initial stage of polishing the target wafer, irregularities (or steps) may be formed on the surface. When such irregularities are removed by polishing, the measurement spectrum may change greatly. At the stage where the unevenness remains, the measurement spectrum is relatively unstable due to the state of the unevenness and varies between wafers and within the wafer surface, whereas when the unevenness is removed by polishing, a stable measurement spectrum is obtained. It is often done.
- the processing unit 32 may generate a sampling spectrum again during polishing of the target wafer, and select again a spectrum group including a reference spectrum that is closest in shape to the generated sampling spectrum. Since the sampling spectrum generated during polishing of the target wafer is substantially the same as the measurement spectrum, the measurement spectrum may be used as the sampling spectrum. After the spectrum group is selected again, the processing unit 32 selects a reference spectrum having the shape closest to the measured spectrum from the spectrum group selected again. By selecting the spectrum group again in this way, it is possible to obtain a more accurate film thickness in the latter half of the polishing, which is particularly important for finishing performance.
- a plurality of spectrum groups acquired in an area close to the area where the film thickness of the target wafer should be monitored may be selected in advance.
- a plurality of spectrum groups acquired at the peripheral edge of the reference wafer are selected in advance from all spectrum groups, and the plurality of preselected spectra are selected.
- one spectral group is selected from the group that includes a reference spectrum that is closest in shape to the sampling spectrum.
- the structure of the underlayer is often different for each region in the wafer surface.
- the film thickness sensor 31 scans the same position on the wafer surface in the same direction in the same region within the wafer surface. If the setting of the rotation speed of the polishing table 3 and the polishing head 5 and the average calculation of the spectrum data are used in combination, the influence of the wiring pattern in the measurement region can be reduced. Therefore, it is possible to efficiently and accurately measure the film thickness by selecting in advance several spectral groups acquired in a region close to the region to be monitored.
- the reference spectrum is acquired in advance using a reference wafer or by simulation.
- the reference spectra acquired in this way there are those whose shapes are close to each other among a plurality of spectrum groups. Therefore, in order to shorten the comparison time with the reference spectrum, as described above, it is preferable to exclude one of the spectrum groups including the reference spectrum having a similar shape as a single spectrum group. In this way, the processing unit 32 can compare the sampling spectrum and the reference spectrum in a shorter time.
- FIG. 11 shows an example of the flow of determining the film thickness at each rotation of the polishing table 3 while polishing one wafer, focusing on spectrum selection.
- determining the film thickness of the target wafer based on the comparison between the measurement spectrum (and the sampling spectrum) and the reference spectrum may be to estimate the film thickness. This is because, in the present embodiment, the film thickness of the target wafer is obtained by calculation from the measured value of the initial film thickness of the reference wafer, the measured value of the final film thickness, and information related to the polishing time.
- step 1 a sampling spectrum of reflected light is acquired while the polishing table 3 is rotated once at each measurement point of the target wafer.
- step 2 the processing unit 32 determines whether or not the polishing table 3 has been rotated a predetermined number of times NM since the start of polishing of the target wafer.
- the subsequent flow of film thickness estimation differs depending on the magnitude relationship between the current number of rotations of the polishing table 3 and the predetermined number of times NM. In general, there is some variation in initial film thickness (film thickness before polishing) even if the specifications (products, layers, etc.) are the same.
- the predetermined number of times NM is set so that, even if the initial film thickness of the target wafer is the maximum of the variation range, the film thickness can be sufficiently lower than the initial film thickness of the reference wafer by polishing the target wafer. Is done. This is because in the film thickness estimation based on the comparison with the reference spectrum, the film thickness of the target wafer can be determined only within the film thickness range corresponding to the reference spectrum.
- Step 3 described later is performed for all spectrum groups (all reference region candidates) for a long time, so that the calculation load of the processing unit 32 increases and the responsiveness of the processing unit 32 deteriorates. There is a fear.
- the number of times NM is set to an appropriate number in consideration of the fact that the thickness and optical constant of the underlying layer in each region of the wafer surface do not change during polishing. If the sampling spectrum cannot be obtained during a certain number of rotations in the initial polishing stage due to a moving average of the spectrum, the number of rotations may be added to NM.
- step 3 the processing unit 32 determines the sampling spectrum of the reference spectrum belonging to all spectrum groups (all reference region candidates). Calculate the deviation from In this step 3, the reference spectra of all spectrum groups acquired from the start of polishing of the reference wafer until the predetermined number of table rotations NR is reached are subject to deviation calculation. Even if the initial film thickness of the target wafer is the smallest in the variation range, a part of the film thickness candidates corresponding to the reference spectrum can be sufficiently lower than the initial film thickness of the target wafer. Is set as follows.
- the table rotation number NR is set to an appropriate value in consideration of the calculation load and the amount of change in film thickness during NM rotation of the target wafer. If a reference spectrum cannot be obtained during a certain number of rotations in the initial stage of polishing due to a moving average of the spectrum or the like, the reference spectrum for the NR rotation obtained first is the target of deviation calculation.
- step 4 the processing unit 32 selects the smallest one (minimum deviation) from the deviations obtained in step 3 for each measurement point of the target wafer, and the reference spectrum corresponding to the selected minimum deviation belongs. Select a spectrum group, and estimate the film thickness of the target wafer from the measured film thickness and polishing time before and after polishing for the selected spectrum group, and the polishing time (elapsed time from the start of polishing) with respect to the reference spectrum with the minimum deviation. To do. Then, the processing unit 32 stores the selected spectrum group (reference region candidate). Further, the processing unit 32 may store the minimum deviation.
- Steps 5 and 6 when the current number of rotations of the polishing table 3 is equal to the predetermined number NM, one optimum is determined for each measurement point of the target wafer based on the selection result of Step 4 in each past number of table rotations.
- a spectrum group (optimum reference region) is determined.
- 1) The spectrum group (reference region candidate) having the maximum frequency of the minimum deviation obtained in step 4 is set as the optimum spectrum group (optimum reference region), or 2) of the minimum deviations obtained in step 4
- the spectrum group (reference area candidate) corresponding to the smallest one is set as the optimum spectrum group (optimum reference area).
- step 7 the measured spectrum acquired at each measurement point of the target wafer is compared with the reference spectrum belonging to the optimum spectrum group determined in step 6, and the spectrum Deviation is calculated.
- the range of the number of rotations of the reference spectrum to be compared is not the NR rotation at the initial stage of polishing, but should be determined in consideration of the change in film thickness with the progress of polishing. Also good.
- step 8 for each measurement point on the target wafer, the processing unit 32 obtains the polishing time (elapsed time from the start of polishing) with respect to the reference spectrum that minimizes the spectral deviation calculated in step 7, and calculates the film thickness. calculate.
- step 9 the processing unit 32 determines whether or not the polishing should be terminated based on the designated polishing time or the detection of the polishing end point. If the polishing should not be terminated, the processing unit 32 executes step 1 again. If there are enough computing resources, the number of rotations NM and NR can be set sufficiently large in steps 2 to 3. In this case, steps 1 to 5 and 9 are repeated for the entire time during polishing.
- FIG. 12 is a diagram showing a configuration of a database system for managing the above-described spectrum group.
- a spectrum group database 61 is constructed.
- the spectrum group database 61 stores identification information of each spectrum group, reference spectra belonging to each spectrum group, and related film thickness information.
- the data server 60 is connected to one or more polishing apparatuses 70 via a network, and the spectrum group database 61 is shared.
- the reference spectrum acquired by each polishing apparatus 70 and the film thickness information before and after polishing are sent to the data server 60 and registered in the spectrum group database 61 as indicated by the one-dot chain line in FIG. It is preferable that the polishing apparatuses 70 for polishing wafers having the same specifications (the same product and the same layer) share one spectrum group database 61.
- each polishing apparatus 70 When the target wafer is polished by each polishing apparatus 70 to obtain the film thickness, a predetermined spectrum group is automatically downloaded from the spectrum group database 61 before polishing, as shown by the solid line in FIG.
- the spectrum group to be downloaded is specified as part of the polishing recipe, for example.
- Each polishing apparatus 70 selects a spectrum group and calculates a film thickness for each measurement point as described above. In addition, each polishing apparatus 70 stores information on the actually selected spectrum group in the storage area.
- the information on the selected spectrum group is automatically transmitted to the data server 60 and registered as history information in the spectrum group selection history database 62, as shown by the dotted line in FIG.
- the spectrum group selection history database 62 and the spectrum group database 61 are organically coupled using a spectrum group identification number as a common key.
- the spectrum group selection history database 62 may be constructed as an integral part of the spectrum group database 61.
- the data server 60 deletes, from the database 61, a spectrum group that has not been selected for a predetermined period of time or has been selected with a very low frequency based on history information regarding spectrum group selection. Further, the data server 60 ranks each spectrum group based on the selected frequency and adjusts the ease of selection. Further, when polishing the target wafer, if an optimal spectrum group having a sufficiently small deviation represented by the formula (2) cannot be selected at a certain measurement point, the film before and after polishing measured by an in-line film thickness measuring instrument or the like. Along with the thickness information, the data of the measurement point of the wafer can be registered in the database 61 as a new spectrum group. In this way, an efficient database system having a learning function and less unnecessary information can be realized.
- FIG. 13 is a diagram showing a film thickness profile during polishing, estimated using a plurality of spectrum groups, for one target wafer.
- the film thickness profile of FIG. 13 is plotted about every 10 seconds.
- a spectrum group that is, a reference wafer or a reference is usually obtained at a certain measurement point in the plane of the target wafer. The area changes.
- spectrum groups used for film thickness estimation are acquired in a spectrum group A (obtained in the center region of the reference wafer) and a spectrum group B (obtained in the region of the reference wafer in a radius position of approximately 100 mm) at a radius position of approximately 50 mm. For this reason, there is a step in the film thickness profile.
- the polishing rate of the reference wafer used to construct each spectrum group is constant during polishing and the film thickness decreases linearly.
- the polishing rate is not strictly constant in each region within the wafer surface, and the manner in which the polishing rate increases or decreases varies from region to region.
- the film thicknesses of the reference wafer and the target wafer before and after polishing are the same, almost no step is recognized in the early polishing stage and the final polishing stage.
- there is a step in the film thickness profile due to the switching of the spectrum group at a radial position of about 50 mm. If there is a step in the film thickness profile, the control performance may be deteriorated particularly when controlling the distribution (profile) of the remaining film thickness.
- the processing unit 32 corrects the corresponding reference spectrum so that the polishing rate during polishing of the reference wafer can be regarded as constant in each reference region within the surface of the reference wafer.
- FIG. 14 is a diagram for explaining such correction of the reference spectrum.
- the alternate long and short dash line in FIG. 14 is an imaginary line showing the change in film thickness over time when the polishing rate during polishing of the reference wafer is assumed to be constant.
- the film thickness when the polishing rate is assumed to be constant is polished from the initial film thickness (measured film thickness before polishing) indicated by symbol ⁇ to the final film thickness (measured film thickness after polishing). It changes linearly with time.
- the initial film thickness and the final film thickness are measured by a stand-alone or in-line film thickness measuring device.
- the curve indicated by the solid line is an estimated line indicating the change over time of the film thickness of the reference wafer, and reflects the change in the polishing rate.
- This estimated line passes through the initial film thickness and the final film thickness similarly indicated by the symbol ⁇ . The method for obtaining the estimated line will be described later.
- the effect of the corrected reference spectrum obtained in this way will be described with reference to FIG. ⁇ 1 indicates the film thickness of the target wafer at a certain point in time.
- the spectrum corresponding to the film thickness ⁇ 1 corresponds to (or is equal to or close to) the reference spectrum at the point B on the estimated line.
- the film thickness changes linearly, that is, since the polishing rate is assumed to be constant, the calculated film thickness of the target wafer is ⁇ 2, which is different from the actual film thickness ⁇ 1.
- the reference spectrum is corrected as described above, the spectrum corresponding to the film thickness ⁇ 1 corresponds to the corrected reference spectrum at the point D on the virtual line. Therefore, the calculated film thickness is ⁇ 1, and it can be seen that the film thickness of the target wafer is obtained correctly.
- FIG. 16 is a graph showing one method for obtaining the above estimated line.
- the horizontal axis represents the polishing time, and the vertical axis represents the film thickness.
- a plurality of wafers (wafers W1 to W3) having the same specification are polished at different set times, and the film thickness before and after polishing is measured by a stand-alone or in-line film thickness measuring instrument.
- the initial film thickness (measured film thickness before polishing) of the wafers W1 to W3 is equal to that of the reference wafer W4, the initial film thickness is represented by a symbol ⁇ on the vertical axis.
- the final film thickness of wafers W1 to W3 (measured film thickness after polishing, indicated by symbol ⁇ in the figure) and the final film thickness of reference wafer W4 (indicated by symbol ⁇ in the figure) are also plotted on the graph. Then, the above estimated line can be obtained by interpolating the initial film thickness of the reference wafer W4, the final film thickness of the wafers W1 to W3, and the final film thickness of the reference wafer W4.
- the initial film thickness of the wafers W1 to W3 is different from the initial film thickness of the reference wafer W4
- the same operation is performed by adding the deviation from the initial film thickness of the reference wafer W4 to the final film thickness of the wafers W1 to W3. Is possible.
- FIG. 17 is a graph illustrating another method for obtaining an estimated line.
- the spectrum of reflected light from each region during polishing of the reference wafer changes as the film thickness decreases.
- the value obtained by integrating the relative reflectance change ⁇ S per short time ⁇ t approximately coincides with the polishing amount, that is, the thickness reduction amount.
- Rp ( ⁇ , t) is the relative reflectance at the wavelength ⁇ and time t, and pre-processing may be performed as in equation (2).
- S (t) is a relative change amount of the spectrum at time t when the change amount of the spectrum with respect to the total polishing time T is 1, and ⁇ pre and ⁇ post are before and after polishing measured by a stand-alone or in-line film thickness measuring instrument.
- the film thickness that is, the initial film thickness and the final film thickness.
- ⁇ (t) corresponds to the estimated line described above.
- FIG. 18 is a diagram illustrating a result of estimating the film thickness profile by correcting the reference spectrum by the above-described method using the spectral change amount with respect to the target wafer and the spectrum group illustrated in FIG. As can be seen from FIG. 18, the step at the boundary of the spectrum group seen in FIG. 13 is eliminated, and a reliable film thickness profile is obtained.
- the step of the film thickness profile as described above does not occur, and the obtained film thickness profile is relatively correct. Further, if the film thickness after polishing of the reference wafer is equal to the film thickness after polishing of the target wafer, the absolute value of the film thickness for determining the polishing end point is also considered to be correct. However, even in such a case, the film thickness estimation accuracy can be improved by correcting the reference spectrum so that the polishing rate can be considered constant.
- the step of the estimated film thickness profile described above can be improved by utilizing the change in the wavelength of the extreme point (crest or trough) of the measured spectrum during polishing.
- the wavelength of the extreme point does not change linearly as the film thickness of the film to be polished decreases, and it is difficult to express the change in polishing rate as a quantitative value.
- the operation described in FIG. Even if the polishing rate increases or decreases, the influence on the film thickness estimation can be reduced.
- the measurement area in a single measurement can be reduced, and the frequency of wiring patterns and wiring density included in each measurement area increases, resulting in higher accuracy. It is easy to ask for a thick film.
- the present invention is applicable to a polishing method and a polishing apparatus for polishing a substrate while measuring the film thickness based on optical information included in reflected light from the substrate such as a wafer.
Abstract
Description
1)ステップ4で求められた最小偏差の頻度が最大のスペクトルグループ(参照領域候補)を、最適スペクトルグループ(最適参照領域)とするか、又は
2)ステップ4で求められた最小偏差のうち、最小のものに対応するスペクトルグループ(参照領域候補)を、最適スペクトルグループ(最適参照領域)とする。
1a 研磨面
3 研磨テーブル
3a テーブル軸
5 研磨ヘッド
6 キャリヤ
7 弾性膜
7a 仕切り壁
8 リテーナリング
9 弾性膜
10 研磨液供給ノズル
12 研磨制御部
16 研磨ヘッドシャフト
17 連結手段
18 研磨ヘッドモータ
19 テーブルモータ
20 上下動機構
25 光学式膜厚測定器
31 膜厚センサ
32 処理部
42 投光部
43 受光部(光ファイバー)
44 分光器
47 光源
48 光ファイバー
50A 第1の孔
50B 第2の孔
51 通孔
53 液体供給路
54 液体排出路
55 液体供給源
58 記憶装置
60 データサーバ
61 スペクトルグループデータベース
62 スペクトルグループ選択履歴データベース
70 研磨装置
D1,D2,D3,D4 圧力室
G1,G2,G3,G4 流体ライン
U1,U2,U3,U4 真空ライン
Claims (16)
- 異なる膜厚に対応する複数の参照スペクトルをそれぞれ含む複数のスペクトルグループを用意し、
基板に光を照射しながら、該基板からの反射光を受光し、
スペクトルグループを選択するためのサンプリングスペクトルを前記反射光から生成し、
前記サンプリングスペクトルに最も形状が近い参照スペクトルを含むスペクトルグループを選択し、
前記基板を研磨しながら、膜厚を取得するための測定スペクトルを生成し、
前記基板の研磨中に生成された前記測定スペクトルに最も形状が近い参照スペクトルを前記選択されたスペクトルグループから選択し、
前記選択された参照スペクトルに対応する膜厚を取得することを特徴とする研磨方法。 - 前記スペクトルグループを選択する工程は、前記サンプリングスペクトルからの偏差が最も小さい参照スペクトルを含むスペクトルグループを選択する工程であることを特徴とする請求項1に記載の研磨方法。
- 前記スペクトルグループを選択する工程は、前記基板を研磨しているときに実行されることを特徴とする請求項1に記載の研磨方法。
- 前記スペクトルグループを選択する工程は、予め設定された研磨時間内に生成された前記サンプリングスペクトルを用いて実行されることを特徴とする請求項3に記載の研磨方法。
- 前記スペクトルグループを選択する工程は、前記基板を研磨する前に実行されることを特徴とする請求項1に記載の研磨方法。
- 前記スペクトルグループを選択する工程は、前記基板と研磨パッドとの間に純水が存在した状態で前記基板を水研磨しているときに実行されることを特徴とする請求項5に記載の研磨方法。
- 前記基板の研磨中にサンプリングスペクトルを再度生成し、
前記再度生成されたサンプリングスペクトルに最も形状が近い参照スペクトルを含むスペクトルグループを再度選択する工程をさらに含み、
前記基板の研磨中に生成された測定スペクトルに最も形状が近い参照スペクトルを前記再度選択されたスペクトルグループから選択することを特徴とする請求項1に記載の研磨方法。 - 前記複数のスペクトルグループは、
前記基板の膜厚と同一またはそれよりも大きい膜厚を有する参照基板を研磨しながら、該参照基板上に定義された複数の領域に光を照射し、
前記複数の領域から反射した光から複数の参照スペクトルを生成し、
前記複数の参照スペクトルを前記複数の領域に従って分類することにより取得されることを特徴とする請求項1に記載の研磨方法。 - 前記基板の膜厚を監視すべき領域に近い領域で取得された複数のスペクトルグループを予め選択することを特徴とする請求項8に記載の研磨方法。
- 前記複数のスペクトルグループは、
前記基板の膜厚と同一またはそれよりも大きい膜厚を有する複数の参照基板から1つの参照基板を選択し、
前記選択された参照基板を研磨しながら、該参照基板に光を照射し、
前記参照基板から反射した光から複数の参照スペクトルを生成して1つ以上のスペクトルグループを取得し、
選択される参照基板を1枚ずつ変えながら、前記参照基板に光を照射する工程および1つ以上のスペクトルグループを取得する工程を繰り返すことにより取得することを特徴とする請求項1に記載の研磨方法。 - 前記複数のスペクトルグループにそれぞれ含まれる前記複数の参照スペクトルは、光反射のシミュレーションにより取得されたスペクトルであることを特徴とする請求項1に記載の研磨方法。
- 前記複数のスペクトルグループのうち、互いに形状が近い参照スペクトルを含むスペクトルグループを予め排除する工程をさらに含むことを特徴とする請求項1に記載の研磨方法。
- 前記複数のスペクトルグループが、複数の研磨装置に共通のデータベースに格納されることを特徴とする請求項1に記載の研磨方法。
- 前記共通のデータベースが、前記複数のスペクトルグループの選択に関する履歴情報を含むことを特徴とする請求項13に記載の研磨方法。
- 参照基板を研磨して複数の参照スペクトルを含む少なくとも1つのスペクトルグループを取得し、
前記参照基板の研磨レートが一定とみなせるように前記複数の参照スペクトルを補正して、異なる膜厚に対応する複数の補正参照スペクトルを取得し、
基板に光を照射しながら、該基板からの反射光を受光し、
前記基板を研磨しながら、膜厚を取得するための測定スペクトルを生成し、
前記基板の研磨中に生成された前記測定スペクトルに最も形状が近い補正参照スペクトルを前記少なくとも1つのスペクトルグループから選択し、
前記選択された補正参照スペクトルに対応する膜厚を取得することを特徴とする研磨方法。 - 研磨パッドを支持する研磨テーブルと、
前記研磨パッドに基板を押し付けて前記基板を研磨する研磨ヘッドと、
異なる膜厚に対応する複数の参照スペクトルをそれぞれ含む複数のスペクトルグループが記憶された記憶装置と、
前記基板の膜厚を取得する光学式膜厚測定器とを備え、
前記光学式膜厚測定器は、
基板に光を照射しながら、該基板からの反射光を受光し、
スペクトルグループを選択するためのサンプリングスペクトルを前記反射光から生成し、
前記サンプリングスペクトルに最も形状が近い参照スペクトルを含むスペクトルグループを選択し、
前記基板を研磨しながら、膜厚を取得するための測定スペクトルを生成し、
前記基板の研磨中に生成された前記測定スペクトルに最も形状が近い参照スペクトルを前記選択されたスペクトルグループから選択し、
前記選択された参照スペクトルに対応する膜厚を取得することを特徴とする研磨装置。
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