JP2013181828A5 - - Google Patents

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Publication number
JP2013181828A5
JP2013181828A5 JP2012045786A JP2012045786A JP2013181828A5 JP 2013181828 A5 JP2013181828 A5 JP 2013181828A5 JP 2012045786 A JP2012045786 A JP 2012045786A JP 2012045786 A JP2012045786 A JP 2012045786A JP 2013181828 A5 JP2013181828 A5 JP 2013181828A5
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JP
Japan
Prior art keywords
interference fringe
light
interference
calculated
test surface
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JP2012045786A
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English (en)
Japanese (ja)
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JP5894464B2 (ja
JP2013181828A (ja
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Priority to JP2012045786A priority Critical patent/JP5894464B2/ja
Priority claimed from JP2012045786A external-priority patent/JP5894464B2/ja
Priority to EP13000561.4A priority patent/EP2634528A1/en
Priority to US13/761,349 priority patent/US9052189B2/en
Publication of JP2013181828A publication Critical patent/JP2013181828A/ja
Publication of JP2013181828A5 publication Critical patent/JP2013181828A5/ja
Application granted granted Critical
Publication of JP5894464B2 publication Critical patent/JP5894464B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012045786A 2012-03-01 2012-03-01 計測装置 Expired - Fee Related JP5894464B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012045786A JP5894464B2 (ja) 2012-03-01 2012-03-01 計測装置
EP13000561.4A EP2634528A1 (en) 2012-03-01 2013-02-04 Measurement apparatus for measuring shape of test object and measurement method
US13/761,349 US9052189B2 (en) 2012-03-01 2013-02-07 Measurement apparatus for measuring shape of test object and measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012045786A JP5894464B2 (ja) 2012-03-01 2012-03-01 計測装置

Publications (3)

Publication Number Publication Date
JP2013181828A JP2013181828A (ja) 2013-09-12
JP2013181828A5 true JP2013181828A5 (enExample) 2015-04-16
JP5894464B2 JP5894464B2 (ja) 2016-03-30

Family

ID=47713816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012045786A Expired - Fee Related JP5894464B2 (ja) 2012-03-01 2012-03-01 計測装置

Country Status (3)

Country Link
US (1) US9052189B2 (enExample)
EP (1) EP2634528A1 (enExample)
JP (1) JP5894464B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023143276A (ja) * 2022-03-25 2023-10-06 株式会社東京精密 表面形状測定装置及び表面形状測定方法
CN116429017A (zh) * 2023-05-10 2023-07-14 东北大学 一种被测体振动的相移数字全息三维测量方法及装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08219738A (ja) 1995-02-16 1996-08-30 Nikon Corp 干渉測定装置
DE19944021A1 (de) * 1998-09-14 2000-05-04 Nikon Corp Interferometrische Vorrichtung und Verfahren zum Vermessen der Oberflächentopographie einer Testoberfläche
JP2000275021A (ja) * 1999-03-25 2000-10-06 Nikon Corp 面形状測定装置
US6495819B1 (en) * 2000-08-08 2002-12-17 Southwest Research Institute Dual-interferometer method for measuring bending of materials
JP2002202112A (ja) * 2000-11-06 2002-07-19 Fujitsu Ltd 形状計測装置
US8531677B2 (en) * 2010-05-27 2013-09-10 Corning Incorporated Frequency-shifting interferometer with selective data processing

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