JP2013186089A5 - - Google Patents

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Publication number
JP2013186089A5
JP2013186089A5 JP2012053684A JP2012053684A JP2013186089A5 JP 2013186089 A5 JP2013186089 A5 JP 2013186089A5 JP 2012053684 A JP2012053684 A JP 2012053684A JP 2012053684 A JP2012053684 A JP 2012053684A JP 2013186089 A5 JP2013186089 A5 JP 2013186089A5
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JP
Japan
Prior art keywords
measured
information
measurement
setting
surface shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012053684A
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English (en)
Japanese (ja)
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JP2013186089A (ja
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Publication date
Application filed filed Critical
Priority to JP2012053684A priority Critical patent/JP2013186089A/ja
Priority claimed from JP2012053684A external-priority patent/JP2013186089A/ja
Priority to US13/762,447 priority patent/US20130235385A1/en
Priority to EP13154752.3A priority patent/EP2636988A1/en
Publication of JP2013186089A publication Critical patent/JP2013186089A/ja
Publication of JP2013186089A5 publication Critical patent/JP2013186089A5/ja
Withdrawn legal-status Critical Current

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JP2012053684A 2012-03-09 2012-03-09 表面形状の測定方法及び測定装置 Withdrawn JP2013186089A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012053684A JP2013186089A (ja) 2012-03-09 2012-03-09 表面形状の測定方法及び測定装置
US13/762,447 US20130235385A1 (en) 2012-03-09 2013-02-08 Surface shape measurement method and measurement apparatus
EP13154752.3A EP2636988A1 (en) 2012-03-09 2013-02-11 Surface shape measurement method and measurement apparatus using wavelength scanning interferometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012053684A JP2013186089A (ja) 2012-03-09 2012-03-09 表面形状の測定方法及び測定装置

Publications (2)

Publication Number Publication Date
JP2013186089A JP2013186089A (ja) 2013-09-19
JP2013186089A5 true JP2013186089A5 (enExample) 2015-04-23

Family

ID=47750444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012053684A Withdrawn JP2013186089A (ja) 2012-03-09 2012-03-09 表面形状の測定方法及び測定装置

Country Status (3)

Country Link
US (1) US20130235385A1 (enExample)
EP (1) EP2636988A1 (enExample)
JP (1) JP2013186089A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2940079C (en) * 2014-03-05 2018-06-12 Sick Ivp Ab Image sensing device and measuring system for providing image data and information on 3d-characteristics of an object
WO2015169220A1 (zh) * 2014-05-06 2015-11-12 宁波舜宇光电信息有限公司 转光三维成像装置和投射装置及其应用
JP2016020891A (ja) * 2014-06-20 2016-02-04 株式会社リコー 形状計測システムおよび撮像装置
CN104361226A (zh) * 2014-11-05 2015-02-18 哈尔滨工业大学 共焦轴向响应曲线峰值位置提取算法
CN104315994A (zh) * 2014-11-05 2015-01-28 哈尔滨工业大学 共焦轴向响应曲线峰值位置提取算法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003054474A1 (en) * 2001-12-10 2003-07-03 Zygo Corporation Method and apparatus for calibrating a wavelength-tuning interferometer
GB0611807D0 (en) * 2006-06-14 2006-07-26 Univ Huddersfield A near common-path optical fibre interferometer for potentially fast on-line micro/nano scale surface measurement

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