JP2013186089A - 表面形状の測定方法及び測定装置 - Google Patents

表面形状の測定方法及び測定装置 Download PDF

Info

Publication number
JP2013186089A
JP2013186089A JP2012053684A JP2012053684A JP2013186089A JP 2013186089 A JP2013186089 A JP 2013186089A JP 2012053684 A JP2012053684 A JP 2012053684A JP 2012053684 A JP2012053684 A JP 2012053684A JP 2013186089 A JP2013186089 A JP 2013186089A
Authority
JP
Japan
Prior art keywords
measured
information
measurement
light
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012053684A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013186089A5 (enExample
Inventor
Masataka Nakajima
匡貴 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012053684A priority Critical patent/JP2013186089A/ja
Priority to US13/762,447 priority patent/US20130235385A1/en
Priority to EP13154752.3A priority patent/EP2636988A1/en
Publication of JP2013186089A publication Critical patent/JP2013186089A/ja
Publication of JP2013186089A5 publication Critical patent/JP2013186089A5/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02071—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02088—Matching signals with a database

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Databases & Information Systems (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2012053684A 2012-03-09 2012-03-09 表面形状の測定方法及び測定装置 Withdrawn JP2013186089A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012053684A JP2013186089A (ja) 2012-03-09 2012-03-09 表面形状の測定方法及び測定装置
US13/762,447 US20130235385A1 (en) 2012-03-09 2013-02-08 Surface shape measurement method and measurement apparatus
EP13154752.3A EP2636988A1 (en) 2012-03-09 2013-02-11 Surface shape measurement method and measurement apparatus using wavelength scanning interferometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012053684A JP2013186089A (ja) 2012-03-09 2012-03-09 表面形状の測定方法及び測定装置

Publications (2)

Publication Number Publication Date
JP2013186089A true JP2013186089A (ja) 2013-09-19
JP2013186089A5 JP2013186089A5 (enExample) 2015-04-23

Family

ID=47750444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012053684A Withdrawn JP2013186089A (ja) 2012-03-09 2012-03-09 表面形状の測定方法及び測定装置

Country Status (3)

Country Link
US (1) US20130235385A1 (enExample)
EP (1) EP2636988A1 (enExample)
JP (1) JP2013186089A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017508968A (ja) * 2014-03-05 2017-03-30 シック アイヴィピー エービー 物体の３ｄ特性に関する画像データおよび情報を提供するための画像感知デバイスおよび測定システム

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015169220A1 (zh) * 2014-05-06 2015-11-12 宁波舜宇光电信息有限公司 转光三维成像装置和投射装置及其应用
JP2016020891A (ja) * 2014-06-20 2016-02-04 株式会社リコー 形状計測システムおよび撮像装置
CN104361226A (zh) * 2014-11-05 2015-02-18 哈尔滨工业大学 共焦轴向响应曲线峰值位置提取算法
CN104315994A (zh) * 2014-11-05 2015-01-28 哈尔滨工业大学 共焦轴向响应曲线峰值位置提取算法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003054474A1 (en) * 2001-12-10 2003-07-03 Zygo Corporation Method and apparatus for calibrating a wavelength-tuning interferometer
GB0611807D0 (en) * 2006-06-14 2006-07-26 Univ Huddersfield A near common-path optical fibre interferometer for potentially fast on-line micro/nano scale surface measurement

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017508968A (ja) * 2014-03-05 2017-03-30 シック アイヴィピー エービー 物体の３ｄ特性に関する画像データおよび情報を提供するための画像感知デバイスおよび測定システム

Also Published As

Publication number Publication date
US20130235385A1 (en) 2013-09-12
EP2636988A1 (en) 2013-09-11

Similar Documents

Publication Publication Date Title
US8908186B2 (en) Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry
US20080068617A1 (en) Fast 3d height measurement method and system
EP3012576B1 (en) Method for measuring a contour of an object
US20140063230A1 (en) Cell Feature Extraction and Labeling Thereof
JP5663758B2 (ja) 形状測定方法及び形状測定装置
JP2013186089A (ja) 表面形状の測定方法及び測定装置
ES3002716T3 (en) Method and apparatus for optimizing the optical performance of interferometers
CN106091974A (zh) 一种物体形变测量仪器、方法和设备
EP3012577A1 (en) Measurement method, measurement device, measurement program, and computer-readable recording medium recording measurement program
JP5412959B2 (ja) 光応用計測装置
CN110926360B (zh) 一种全视场外差移相测量自由曲面的装置
US7304745B2 (en) Phase measuring method and apparatus for multi-frequency interferometry
JP4544103B2 (ja) 界面の位置測定方法および位置測定装置
CN1952594A (zh) 形貌测量方法及其测量装置
JP2014092488A (ja) 計測装置及び計測方法
JP5894464B2 (ja) 計測装置
JP5518187B2 (ja) 変形計測方法
JP2020153992A (ja) 白色干渉計による形状測定装置
JP4390957B2 (ja) 縞解析における縞位相決定方法
JP3396284B2 (ja) 位相振幅測定装置
JP2011021991A (ja) 分光立体形状測定装置及び分光立体形状測定方法
Doan¹ et al. Window Wavelet Transform Method to Improve the Accuracy Measurement in White Light
Hu et al. 3D profile measurement by using projection speckle pattern correlation method
CN116007531A (zh) 一种晶圆测量装置及方法
JP2001201326A (ja) 干渉縞測定解析方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150306

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150306

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20150522