JP5894464B2 - 計測装置 - Google Patents

計測装置 Download PDF

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Publication number
JP5894464B2
JP5894464B2 JP2012045786A JP2012045786A JP5894464B2 JP 5894464 B2 JP5894464 B2 JP 5894464B2 JP 2012045786 A JP2012045786 A JP 2012045786A JP 2012045786 A JP2012045786 A JP 2012045786A JP 5894464 B2 JP5894464 B2 JP 5894464B2
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JP
Japan
Prior art keywords
interference fringe
vibration
interference
calculated
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012045786A
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English (en)
Japanese (ja)
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JP2013181828A5 (enExample
JP2013181828A (ja
Inventor
裕也 西川
裕也 西川
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Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012045786A priority Critical patent/JP5894464B2/ja
Priority to EP13000561.4A priority patent/EP2634528A1/en
Priority to US13/761,349 priority patent/US9052189B2/en
Publication of JP2013181828A publication Critical patent/JP2013181828A/ja
Publication of JP2013181828A5 publication Critical patent/JP2013181828A5/ja
Application granted granted Critical
Publication of JP5894464B2 publication Critical patent/JP5894464B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02076—Caused by motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2012045786A 2012-03-01 2012-03-01 計測装置 Expired - Fee Related JP5894464B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012045786A JP5894464B2 (ja) 2012-03-01 2012-03-01 計測装置
EP13000561.4A EP2634528A1 (en) 2012-03-01 2013-02-04 Measurement apparatus for measuring shape of test object and measurement method
US13/761,349 US9052189B2 (en) 2012-03-01 2013-02-07 Measurement apparatus for measuring shape of test object and measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012045786A JP5894464B2 (ja) 2012-03-01 2012-03-01 計測装置

Publications (3)

Publication Number Publication Date
JP2013181828A JP2013181828A (ja) 2013-09-12
JP2013181828A5 JP2013181828A5 (enExample) 2015-04-16
JP5894464B2 true JP5894464B2 (ja) 2016-03-30

Family

ID=47713816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012045786A Expired - Fee Related JP5894464B2 (ja) 2012-03-01 2012-03-01 計測装置

Country Status (3)

Country Link
US (1) US9052189B2 (enExample)
EP (1) EP2634528A1 (enExample)
JP (1) JP5894464B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023143276A (ja) * 2022-03-25 2023-10-06 株式会社東京精密 表面形状測定装置及び表面形状測定方法
CN116429017A (zh) * 2023-05-10 2023-07-14 东北大学 一种被测体振动的相移数字全息三维测量方法及装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08219738A (ja) 1995-02-16 1996-08-30 Nikon Corp 干渉測定装置
DE19944021A1 (de) * 1998-09-14 2000-05-04 Nikon Corp Interferometrische Vorrichtung und Verfahren zum Vermessen der Oberflächentopographie einer Testoberfläche
JP2000275021A (ja) * 1999-03-25 2000-10-06 Nikon Corp 面形状測定装置
US6495819B1 (en) * 2000-08-08 2002-12-17 Southwest Research Institute Dual-interferometer method for measuring bending of materials
JP2002202112A (ja) * 2000-11-06 2002-07-19 Fujitsu Ltd 形状計測装置
US8531677B2 (en) * 2010-05-27 2013-09-10 Corning Incorporated Frequency-shifting interferometer with selective data processing

Also Published As

Publication number Publication date
EP2634528A1 (en) 2013-09-04
US9052189B2 (en) 2015-06-09
US20130229664A1 (en) 2013-09-05
JP2013181828A (ja) 2013-09-12

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