JP2013092402A5 - - Google Patents

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Publication number
JP2013092402A5
JP2013092402A5 JP2011233345A JP2011233345A JP2013092402A5 JP 2013092402 A5 JP2013092402 A5 JP 2013092402A5 JP 2011233345 A JP2011233345 A JP 2011233345A JP 2011233345 A JP2011233345 A JP 2011233345A JP 2013092402 A5 JP2013092402 A5 JP 2013092402A5
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JP
Japan
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light
test
wavelength
test surface
signal
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JP2011233345A
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English (en)
Japanese (ja)
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JP5882674B2 (ja
JP2013092402A (ja
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Priority claimed from JP2011233345A external-priority patent/JP5882674B2/ja
Priority to JP2011233345A priority Critical patent/JP5882674B2/ja
Priority to EP12007158.4A priority patent/EP2587213A1/en
Priority to US13/657,631 priority patent/US9062957B2/en
Priority to KR1020120117694A priority patent/KR20130045189A/ko
Priority to CN2012104081013A priority patent/CN103063129A/zh
Publication of JP2013092402A publication Critical patent/JP2013092402A/ja
Publication of JP2013092402A5 publication Critical patent/JP2013092402A5/ja
Publication of JP5882674B2 publication Critical patent/JP5882674B2/ja
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Expired - Fee Related legal-status Critical Current
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JP2011233345A 2011-10-24 2011-10-24 多波長干渉計、計測装置および計測方法 Expired - Fee Related JP5882674B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011233345A JP5882674B2 (ja) 2011-10-24 2011-10-24 多波長干渉計、計測装置および計測方法
EP12007158.4A EP2587213A1 (en) 2011-10-24 2012-10-16 Multi-wavelength interferometer, measurement apparatus, and measurement method
US13/657,631 US9062957B2 (en) 2011-10-24 2012-10-22 Multi-wavelength interferometer, measurement apparatus, and measurement method
KR1020120117694A KR20130045189A (ko) 2011-10-24 2012-10-23 다파장 간섭계, 측정 장치, 및 측정 방법
CN2012104081013A CN103063129A (zh) 2011-10-24 2012-10-24 多波长干涉仪、测量设备以及测量方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011233345A JP5882674B2 (ja) 2011-10-24 2011-10-24 多波長干渉計、計測装置および計測方法

Publications (3)

Publication Number Publication Date
JP2013092402A JP2013092402A (ja) 2013-05-16
JP2013092402A5 true JP2013092402A5 (enExample) 2015-01-29
JP5882674B2 JP5882674B2 (ja) 2016-03-09

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Application Number Title Priority Date Filing Date
JP2011233345A Expired - Fee Related JP5882674B2 (ja) 2011-10-24 2011-10-24 多波長干渉計、計測装置および計測方法

Country Status (5)

Country Link
US (1) US9062957B2 (enExample)
EP (1) EP2587213A1 (enExample)
JP (1) JP5882674B2 (enExample)
KR (1) KR20130045189A (enExample)
CN (1) CN103063129A (enExample)

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US9518816B2 (en) * 2011-12-01 2016-12-13 University Of Rochester Dual beam splitter interferometer measuring 3 degrees of freedom, system and method of use
JP5954979B2 (ja) * 2011-12-15 2016-07-20 キヤノン株式会社 多波長干渉計を有する計測装置
JP2014115228A (ja) * 2012-12-11 2014-06-26 Canon Inc 干渉計測装置、および干渉計測方法
US20150131078A1 (en) * 2013-11-08 2015-05-14 The Boeing Company Synthetic wave laser ranging sensors and methods
CN104748699A (zh) * 2013-12-25 2015-07-01 财团法人金属工业研究发展中心 光学测量系统及方法
US9606235B2 (en) * 2014-01-16 2017-03-28 The Boeing Company Laser metrology system and method
WO2015120055A1 (en) * 2014-02-04 2015-08-13 University Of Southern California Optical coherence tomography (oct) system with phase-sensitive b-scan registration
CN107209116B (zh) 2014-12-23 2020-08-07 苹果公司 包括考虑样本内的光学路径长度的变化的光学检查系统和方法
KR102159156B1 (ko) 2015-09-01 2020-09-23 애플 인크. 물질의 비접촉 감지를 위한 레퍼런스 스위치 아키텍처
CN109073460B (zh) 2016-04-21 2022-08-23 苹果公司 用于参考切换的光学系统
GB2551968A (en) 2016-06-28 2018-01-10 Oclaro Tech Ltd Optical locker
JP6246875B1 (ja) * 2016-08-24 2017-12-13 Ckd株式会社 計測装置
EP3688446A2 (en) 2017-09-29 2020-08-05 Apple Inc. Resolve path optical sampling architectures
US11226459B2 (en) 2018-02-13 2022-01-18 Apple Inc. Integrated photonics device having integrated edge outcouplers
WO2022002497A1 (en) * 2020-06-29 2022-01-06 Asml Netherlands B.V. A signal parameter determination method, a heterodyne interferometer system, a lithographic apparatus and a device manufacturing method
KR102848259B1 (ko) 2020-09-09 2025-08-20 애플 인크. 노이즈 완화를 위한 광학 시스템
JP7753730B2 (ja) * 2021-08-31 2025-10-15 セイコーエプソン株式会社 レーザー干渉計
JP7694299B2 (ja) * 2021-09-24 2025-06-18 セイコーエプソン株式会社 レーザー干渉計
US11761750B1 (en) 2022-02-25 2023-09-19 Utah State University Space Dynamics Laboratory Multi-environment Rayleigh interferometer
CN115816293A (zh) * 2023-01-03 2023-03-21 长鑫存储技术有限公司 终点侦测方法、设备和光学侦测装置

Family Cites Families (13)

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Publication number Priority date Publication date Assignee Title
JP2890309B2 (ja) * 1988-10-20 1999-05-10 科学技術振興事業団 形態及び機能画像化装置
JP2808136B2 (ja) * 1989-06-07 1998-10-08 キヤノン株式会社 測長方法及び装置
JPH04331333A (ja) * 1991-05-02 1992-11-19 Canon Inc 波長変化測定装置
JP3005698B2 (ja) 1991-09-10 2000-01-31 株式会社小野測器 スペックルノイズの除去装置
US5811826A (en) * 1996-02-07 1998-09-22 Massachusetts Institute Of Technology Methods and apparatus for remotely sensing the orientation of an object
JP3501605B2 (ja) 1996-12-27 2004-03-02 キヤノン株式会社 干渉計及び形状測定装置
US6018391A (en) * 1997-01-28 2000-01-25 Advantest Corporation Method and apparatus for inspecting foreign matter by examining frequency differences between probing light beam and reference light beam
US6327039B1 (en) * 1998-02-23 2001-12-04 Zygo Corporation Interferometer and method for measuring the refractive index and optical path length effects of air
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US7006562B2 (en) * 2000-03-17 2006-02-28 Chien Chou Phase demodulator, phase difference detector, and interferometric system using the phase difference detector
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