CN103063129A - 多波长干涉仪、测量设备以及测量方法 - Google Patents

多波长干涉仪、测量设备以及测量方法 Download PDF

Info

Publication number
CN103063129A
CN103063129A CN2012104081013A CN201210408101A CN103063129A CN 103063129 A CN103063129 A CN 103063129A CN 2012104081013 A CN2012104081013 A CN 2012104081013A CN 201210408101 A CN201210408101 A CN 201210408101A CN 103063129 A CN103063129 A CN 103063129A
Authority
CN
China
Prior art keywords
wavelength
measuring
light
frequency
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012104081013A
Other languages
English (en)
Chinese (zh)
Inventor
山田显宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN103063129A publication Critical patent/CN103063129A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02082—Caused by speckles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/50—Pupil plane manipulation, e.g. filtering light of certain reflection angles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN2012104081013A 2011-10-24 2012-10-24 多波长干涉仪、测量设备以及测量方法 Pending CN103063129A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-233345 2011-10-24
JP2011233345A JP5882674B2 (ja) 2011-10-24 2011-10-24 多波長干渉計、計測装置および計測方法

Publications (1)

Publication Number Publication Date
CN103063129A true CN103063129A (zh) 2013-04-24

Family

ID=47048938

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012104081013A Pending CN103063129A (zh) 2011-10-24 2012-10-24 多波长干涉仪、测量设备以及测量方法

Country Status (5)

Country Link
US (1) US9062957B2 (enExample)
EP (1) EP2587213A1 (enExample)
JP (1) JP5882674B2 (enExample)
KR (1) KR20130045189A (enExample)
CN (1) CN103063129A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105939652A (zh) * 2014-02-04 2016-09-14 南加利福尼亚大学 具有相位敏感的b扫描配准的光学相干断层扫描(oct)系统
CN109564089A (zh) * 2016-08-24 2019-04-02 Ckd株式会社 测量装置
CN111693155A (zh) * 2016-06-28 2020-09-22 朗美通技术英国有限公司 光学锁定器

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013082247A1 (en) * 2011-12-01 2013-06-06 University Of Rochester Interferometer, system, and method of use
JP5954979B2 (ja) * 2011-12-15 2016-07-20 キヤノン株式会社 多波長干渉計を有する計測装置
JP2014115228A (ja) * 2012-12-11 2014-06-26 Canon Inc 干渉計測装置、および干渉計測方法
US20150131078A1 (en) * 2013-11-08 2015-05-14 The Boeing Company Synthetic wave laser ranging sensors and methods
CN104748699A (zh) * 2013-12-25 2015-07-01 财团法人金属工业研究发展中心 光学测量系统及方法
US9606235B2 (en) * 2014-01-16 2017-03-28 The Boeing Company Laser metrology system and method
CN107209116B (zh) 2014-12-23 2020-08-07 苹果公司 包括考虑样本内的光学路径长度的变化的光学检查系统和方法
CN112985603B (zh) 2015-09-01 2024-07-02 苹果公司 用于非接触式感测物质的基准开关架构
EP4589271A3 (en) 2016-04-21 2025-07-30 Apple Inc. Optical system for reference switching
WO2019067796A2 (en) 2017-09-29 2019-04-04 Masseta Technologies Llc OPTICAL SAMPLING ARCHITECTURES OF RESOLUTION PATH
WO2019160949A1 (en) 2018-02-13 2019-08-22 Masseta Technologies Llc Integrated photonics device having integrated edge outcouplers
WO2022002497A1 (en) * 2020-06-29 2022-01-06 Asml Netherlands B.V. A signal parameter determination method, a heterodyne interferometer system, a lithographic apparatus and a device manufacturing method
WO2022056142A1 (en) 2020-09-09 2022-03-17 Apple Inc. Optical system for noise mitigation
JP7753730B2 (ja) * 2021-08-31 2025-10-15 セイコーエプソン株式会社 レーザー干渉計
JP7694299B2 (ja) * 2021-09-24 2025-06-18 セイコーエプソン株式会社 レーザー干渉計
US11761750B1 (en) 2022-02-25 2023-09-19 Utah State University Space Dynamics Laboratory Multi-environment Rayleigh interferometer
CN115816293A (zh) * 2023-01-03 2023-03-21 长鑫存储技术有限公司 终点侦测方法、设备和光学侦测装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5106191A (en) * 1989-06-07 1992-04-21 Canon Kabushiki Kaisha Two-frequency distance and displacement measuring interferometer
US5811826A (en) * 1996-02-07 1998-09-22 Massachusetts Institute Of Technology Methods and apparatus for remotely sensing the orientation of an object
US5991034A (en) * 1996-12-27 1999-11-23 Canon Kabushiki Kaisha Interferometer which varies a position to be detected based on inclination of surface to be measured
US6407816B1 (en) * 1998-02-23 2002-06-18 Zygo Corporation Interferometer and method for measuring the refractive index and optical path length effects of air
CN101087990A (zh) * 2004-12-23 2007-12-12 康宁股份有限公司 用于两侧测量的重叠共用路径干涉仪

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2890309B2 (ja) * 1988-10-20 1999-05-10 科学技術振興事業団 形態及び機能画像化装置
JPH04331333A (ja) * 1991-05-02 1992-11-19 Canon Inc 波長変化測定装置
JP3005698B2 (ja) 1991-09-10 2000-01-31 株式会社小野測器 スペックルノイズの除去装置
US6018391A (en) * 1997-01-28 2000-01-25 Advantest Corporation Method and apparatus for inspecting foreign matter by examining frequency differences between probing light beam and reference light beam
US6327039B1 (en) * 1998-02-23 2001-12-04 Zygo Corporation Interferometer and method for measuring the refractive index and optical path length effects of air
US7006562B2 (en) * 2000-03-17 2006-02-28 Chien Chou Phase demodulator, phase difference detector, and interferometric system using the phase difference detector
WO2005062941A2 (en) * 2003-12-22 2005-07-14 Bossa Nova Technologies, Llc Multi-channel laser interferometric method and apparatus for detection of ultrasonic motion from a surface
EP2513595B1 (en) * 2009-12-14 2015-02-25 Leica Geosystems AG Method for speckle mitigation in an interferometric distance meter and corresponding distance meter

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5106191A (en) * 1989-06-07 1992-04-21 Canon Kabushiki Kaisha Two-frequency distance and displacement measuring interferometer
US5811826A (en) * 1996-02-07 1998-09-22 Massachusetts Institute Of Technology Methods and apparatus for remotely sensing the orientation of an object
US5991034A (en) * 1996-12-27 1999-11-23 Canon Kabushiki Kaisha Interferometer which varies a position to be detected based on inclination of surface to be measured
US6407816B1 (en) * 1998-02-23 2002-06-18 Zygo Corporation Interferometer and method for measuring the refractive index and optical path length effects of air
CN101087990A (zh) * 2004-12-23 2007-12-12 康宁股份有限公司 用于两侧测量的重叠共用路径干涉仪

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
A. F. FERCHER等: "Rough surface interferometry with a two-wavelength heterodyne speckle interferometer", 《APPLIED OPTICS》, vol. 24, no. 14, 15 July 1985 (1985-07-15), pages 2181 - 2188, XP055050186, DOI: 10.1364/AO.24.002181 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105939652A (zh) * 2014-02-04 2016-09-14 南加利福尼亚大学 具有相位敏感的b扫描配准的光学相干断层扫描(oct)系统
CN105939652B (zh) * 2014-02-04 2018-07-24 南加利福尼亚大学 具有相位敏感的b扫描配准的光学相干断层扫描(oct)系统
CN111693155A (zh) * 2016-06-28 2020-09-22 朗美通技术英国有限公司 光学锁定器
US11835337B2 (en) 2016-06-28 2023-12-05 Lumentum Technology Uk Limited Interferometry assembly having optical paths through different materials
CN109564089A (zh) * 2016-08-24 2019-04-02 Ckd株式会社 测量装置

Also Published As

Publication number Publication date
KR20130045189A (ko) 2013-05-03
US20130100458A1 (en) 2013-04-25
JP5882674B2 (ja) 2016-03-09
JP2013092402A (ja) 2013-05-16
EP2587213A1 (en) 2013-05-01
US9062957B2 (en) 2015-06-23

Similar Documents

Publication Publication Date Title
CN103063129A (zh) 多波长干涉仪、测量设备以及测量方法
CN104634283B (zh) 具有六自由度检测的激光外差干涉直线度测量装置及方法
KR101590241B1 (ko) 광학특성 측정장치 및 광학특성 측정방법
US10591406B2 (en) Symmetric target design in scatterometry overlay metrology
US7230717B2 (en) Pixelated phase-mask interferometer
CN102679912B (zh) 基于差动比较原理的自准直仪
JP6553967B2 (ja) 瞬時位相シフト干渉計
CN110017793A (zh) 一种双通道式抗振动干涉测量装置及方法
CN103162621A (zh) 包括多波长干涉计的测量装置
CN109855743B (zh) 双频激光外差干涉相位测量大尺寸光学平面的装置及方法
EP1717546B1 (en) Interferometer and method of calibrating the interferometer
US7869056B2 (en) Linear displacement and tilting angle measuring device
US6496269B2 (en) Shape measuring apparatus
CN104075655A (zh) 一种使用旋转径向光栅的斐索型同步移相干涉测试装置
US20140160490A1 (en) Interference measuring apparatus and interference measuring method
WO2023281513A1 (en) Correction optical elements for coherent beam combining systems and systems and methods for coherent beam combining using same
KR101407482B1 (ko) 홀 형상 및 깊이 측정 장치 및 방법
KR101373709B1 (ko) 3차원 필름의 주축과 위상차의 측정장치 및 측정방법
CN111174735A (zh) 一种二维直线度和直线位移同时测量干涉装置及测量方法
JP3714853B2 (ja) 位相シフト干渉縞同時撮像装置における平面形状計測方法
CN119934963B (zh) 一种基于偏振光栅的载频干涉检测装置及方法
US20250231019A1 (en) Method for determining a height map using a white light interferometer and white light interferometer for the same
CN111121614A (zh) 一种二维直线度和直线位移同时测量干涉装置
CN120063107A (zh) 一种基于双棱镜干涉仪构型的动态干涉测量装置
US7212289B1 (en) Interferometric measurement device for determining the birefringence in a transparent object

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20130424