JP2013161969A5 - - Google Patents

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Publication number
JP2013161969A5
JP2013161969A5 JP2012023252A JP2012023252A JP2013161969A5 JP 2013161969 A5 JP2013161969 A5 JP 2013161969A5 JP 2012023252 A JP2012023252 A JP 2012023252A JP 2012023252 A JP2012023252 A JP 2012023252A JP 2013161969 A5 JP2013161969 A5 JP 2013161969A5
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JP
Japan
Prior art keywords
tray
rotation mechanism
rotates
carrier
lifts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012023252A
Other languages
English (en)
Japanese (ja)
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JP2013161969A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012023252A priority Critical patent/JP2013161969A/ja
Priority claimed from JP2012023252A external-priority patent/JP2013161969A/ja
Priority to TW102102655A priority patent/TW201349548A/zh
Priority to KR1020130011768A priority patent/KR101436489B1/ko
Priority to CN2013100478428A priority patent/CN103247716A/zh
Publication of JP2013161969A publication Critical patent/JP2013161969A/ja
Publication of JP2013161969A5 publication Critical patent/JP2013161969A5/ja
Pending legal-status Critical Current

Links

JP2012023252A 2012-02-06 2012-02-06 太陽電池の製造方法および太陽電池の製造装置 Pending JP2013161969A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012023252A JP2013161969A (ja) 2012-02-06 2012-02-06 太陽電池の製造方法および太陽電池の製造装置
TW102102655A TW201349548A (zh) 2012-02-06 2013-01-24 太陽能電池的製造方法及太陽能電池的製造裝置
KR1020130011768A KR101436489B1 (ko) 2012-02-06 2013-02-01 태양전지의 제조방법 및 태양전지의 제조장치
CN2013100478428A CN103247716A (zh) 2012-02-06 2013-02-06 太阳能电池的制造方法及太阳能电池的制造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012023252A JP2013161969A (ja) 2012-02-06 2012-02-06 太陽電池の製造方法および太陽電池の製造装置

Publications (2)

Publication Number Publication Date
JP2013161969A JP2013161969A (ja) 2013-08-19
JP2013161969A5 true JP2013161969A5 (https=) 2014-01-16

Family

ID=48927073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012023252A Pending JP2013161969A (ja) 2012-02-06 2012-02-06 太陽電池の製造方法および太陽電池の製造装置

Country Status (4)

Country Link
JP (1) JP2013161969A (https=)
KR (1) KR101436489B1 (https=)
CN (1) CN103247716A (https=)
TW (1) TW201349548A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6088964B2 (ja) * 2013-12-13 2017-03-01 株式会社東芝 半導体製造装置
CN106981540B (zh) * 2017-03-24 2019-07-23 东莞帕萨电子装备有限公司 离子注入跑片方法和离子注入跑片系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000036440A (ko) * 2000-03-14 2000-07-05 이준상 3차원적인 이온주입에 의한 도전영역 형성방법
KR100816312B1 (ko) * 2004-01-06 2008-03-24 가부시키가이샤 이디알 스타 이온 주입 방법 및 이온 주입 장치
JP2005347543A (ja) * 2004-06-03 2005-12-15 Sharp Corp イオンドーピング方法およびイオンドーピング装置
KR20060102525A (ko) * 2005-03-22 2006-09-27 어플라이드 머티어리얼스, 인코포레이티드 이온빔을 이용한 기판 이온주입
US8153513B2 (en) 2006-07-25 2012-04-10 Silicon Genesis Corporation Method and system for continuous large-area scanning implantation process
JP4530032B2 (ja) * 2007-11-29 2010-08-25 日新イオン機器株式会社 イオンビーム照射方法およびイオンビーム照射装置
KR20100028203A (ko) * 2008-09-04 2010-03-12 주식회사 동부하이텍 포토레지스트 팝핑을 방지하기 위한 이온주입방법
JP4766156B2 (ja) * 2009-06-11 2011-09-07 日新イオン機器株式会社 イオン注入装置

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