JP2013161969A5 - - Google Patents

Download PDF

Info

Publication number
JP2013161969A5
JP2013161969A5 JP2012023252A JP2012023252A JP2013161969A5 JP 2013161969 A5 JP2013161969 A5 JP 2013161969A5 JP 2012023252 A JP2012023252 A JP 2012023252A JP 2012023252 A JP2012023252 A JP 2012023252A JP 2013161969 A5 JP2013161969 A5 JP 2013161969A5
Authority
JP
Japan
Prior art keywords
tray
rotation mechanism
rotates
carrier
lifts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012023252A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013161969A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012023252A priority Critical patent/JP2013161969A/ja
Priority claimed from JP2012023252A external-priority patent/JP2013161969A/ja
Priority to TW102102655A priority patent/TW201349548A/zh
Priority to KR1020130011768A priority patent/KR101436489B1/ko
Priority to CN2013100478428A priority patent/CN103247716A/zh
Publication of JP2013161969A publication Critical patent/JP2013161969A/ja
Publication of JP2013161969A5 publication Critical patent/JP2013161969A5/ja
Pending legal-status Critical Current

Links

JP2012023252A 2012-02-06 2012-02-06 太陽電池の製造方法および太陽電池の製造装置 Pending JP2013161969A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012023252A JP2013161969A (ja) 2012-02-06 2012-02-06 太陽電池の製造方法および太陽電池の製造装置
TW102102655A TW201349548A (zh) 2012-02-06 2013-01-24 太陽能電池的製造方法及太陽能電池的製造裝置
KR1020130011768A KR101436489B1 (ko) 2012-02-06 2013-02-01 태양전지의 제조방법 및 태양전지의 제조장치
CN2013100478428A CN103247716A (zh) 2012-02-06 2013-02-06 太阳能电池的制造方法及太阳能电池的制造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012023252A JP2013161969A (ja) 2012-02-06 2012-02-06 太陽電池の製造方法および太陽電池の製造装置

Publications (2)

Publication Number Publication Date
JP2013161969A JP2013161969A (ja) 2013-08-19
JP2013161969A5 true JP2013161969A5 (https=) 2014-01-16

Family

ID=48927073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012023252A Pending JP2013161969A (ja) 2012-02-06 2012-02-06 太陽電池の製造方法および太陽電池の製造装置

Country Status (4)

Country Link
JP (1) JP2013161969A (https=)
KR (1) KR101436489B1 (https=)
CN (1) CN103247716A (https=)
TW (1) TW201349548A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6088964B2 (ja) * 2013-12-13 2017-03-01 株式会社東芝 半導体製造装置
CN106981540B (zh) * 2017-03-24 2019-07-23 东莞帕萨电子装备有限公司 离子注入跑片方法和离子注入跑片系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000036440A (ko) * 2000-03-14 2000-07-05 이준상 3차원적인 이온주입에 의한 도전영역 형성방법
US20080296510A1 (en) * 2004-01-06 2008-12-04 Yasuhiko Kasama Ion Implantation System and Ion Implantation System
JP2005347543A (ja) * 2004-06-03 2005-12-15 Sharp Corp イオンドーピング方法およびイオンドーピング装置
JP2006279041A (ja) * 2005-03-22 2006-10-12 Applied Materials Inc イオンビームを使用する基板への注入
US8153513B2 (en) 2006-07-25 2012-04-10 Silicon Genesis Corporation Method and system for continuous large-area scanning implantation process
JP4530032B2 (ja) * 2007-11-29 2010-08-25 日新イオン機器株式会社 イオンビーム照射方法およびイオンビーム照射装置
KR20100028203A (ko) * 2008-09-04 2010-03-12 주식회사 동부하이텍 포토레지스트 팝핑을 방지하기 위한 이온주입방법
JP4766156B2 (ja) * 2009-06-11 2011-09-07 日新イオン機器株式会社 イオン注入装置

Similar Documents

Publication Publication Date Title
JP2015502893A5 (https=)
JP2011222960A5 (https=)
TWD159673S (zh) 基板處理裝置用廻轉器
WO2012096466A3 (ko) 박막 증착 장치 및 이를 포함한 기판 처리 시스템
JP2012023289A5 (https=)
JP2012151482A5 (https=)
MX2015009183A (es) Montaje de pedales plegables.
JP2012115757A5 (https=)
JP2014513868A5 (https=)
JP2015226614A5 (https=)
TWD163955S (zh) 機器人之部分
JP2014208883A5 (https=)
WO2012118955A3 (en) Apparatus and process for atomic layer deposition
JP2014522928A5 (https=)
MX376834B (es) Aparato de procesamiento de pvd y metodo de procesamiento de pvd.
JP2015067856A5 (https=)
JP2016122795A5 (https=)
JP2012142543A5 (https=)
JP2015506880A5 (https=)
TWD159674S (zh) 基板處理裝置用廻轉器
JP2015115404A5 (https=)
WO2015063082A3 (en) Supporting device
TWD159675S (zh) 基板處理裝置用廻轉器
JP2013161969A5 (https=)
TWD159676S (zh) 基板處理裝置用廻轉器