JP2013161969A - 太陽電池の製造方法および太陽電池の製造装置 - Google Patents
太陽電池の製造方法および太陽電池の製造装置 Download PDFInfo
- Publication number
- JP2013161969A JP2013161969A JP2012023252A JP2012023252A JP2013161969A JP 2013161969 A JP2013161969 A JP 2013161969A JP 2012023252 A JP2012023252 A JP 2012023252A JP 2012023252 A JP2012023252 A JP 2012023252A JP 2013161969 A JP2013161969 A JP 2013161969A
- Authority
- JP
- Japan
- Prior art keywords
- cells
- ion implantation
- tray
- mounting table
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 36
- 238000005468 ion implantation Methods 0.000 claims abstract description 111
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 75
- 230000001678 irradiating effect Effects 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 40
- 150000002500 ions Chemical class 0.000 claims description 11
- 239000007924 injection Substances 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 abstract description 25
- 230000032258 transport Effects 0.000 description 49
- 238000004140 cleaning Methods 0.000 description 4
- 239000007943 implant Substances 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67213—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Physical Vapour Deposition (AREA)
Abstract
【解決手段】第1イオン注入工程において、イオンビーム照射領域17に複数のセル4を通し、複数のセル4に対してイオンビームを照射した後、載置台回転工程において、トレイ回転機構20によってトレイ3を90度回転させ、トレイ3の配置を変更する。そして、第2イオン注入工程において、イオンビーム照射領域17を複数のセル4が通るように回転後のトレイ3を搬送する。この第2イオン注入工程では、イオンビーム照射領域17に対する各セル4の配置を第1イオン注入工程とは異なる。これによって、各セル4の面内においてイオン注入量を均一にし、さらには複数のセル4間でイオン注入量を均一にする。
【選択図】図1
Description
Claims (7)
- 少なくとも1方向に複数のセルが並べて配置された載置台を搬送方向に搬送しつつ、前記複数のセルに対してイオンビームを照射することにより前記複数のセルにイオンを注入する太陽電池の製造方法であって、
前記イオンビームの所定の照射領域を前記複数のセルが通るように前記載置台を搬送し、前記複数のセルに対して前記イオンビームを照射する第1イオン注入工程と、
前記載置台を所定角度回転させて前記載置台の配置を変更する載置台回転工程と、
前記照射領域を前記複数のセルが通るように回転後の載置台を搬送し、前記複数のセルに対して前記イオンビームを照射する第2イオン注入工程と、を含む
ことを特徴とする太陽電池の製造方法。 - 前記複数のセルは、前記1方向および前記1方向に直交する方向にそれぞれ複数並べて配置されており、
前記搬送方向に直交する方向における前記照射領域の幅は、前記1方向および前記1方向に直交する方向における前記複数のセルの両端の幅よりも大きい
ことを特徴とする請求項1に記載の太陽電池の製造方法。 - 前記複数のセルは、前記1方向および前記1方向に直交する方向にそれぞれ同数配置されている
ことを特徴とする請求項2に記載の太陽電池の製造方法。 - 前記第2イオン注入工程における前記載置台の搬送方向は、前記第1イオン注入工程における前記載置台の搬送方向と同じ向きである
ことを特徴とする請求項1〜3のいずれか一項に記載の太陽電池の製造方法。 - 前記第2イオン注入工程における前記載置台の搬送方向は、前記第1イオン注入工程における前記載置台の搬送方向と逆向きである
ことを特徴とする請求項1〜3のいずれか一項に記載の太陽電池の製造方法。 - 前記載置台回転工程では、大気圧環境下にて前記載置台を回転させる
ことを特徴とする請求項1〜5のいずれか一項に記載の太陽電池の製造方法。 - 少なくとも1方向に複数のセルが並べて配置される載置台と、
前記載置台上の前記複数のセルにイオンを注入するために、所定の照射領域にイオンビームを照射するビーム発生手段と、
前記イオンビームの前記照射領域を前記複数のセルが通るように前記載置台を搬送する搬送手段と、
前記載置台を所定角度回転させて前記載置台の配置を変更する載置台回転手段と、を備える
ことを特徴とする太陽電池の製造装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012023252A JP2013161969A (ja) | 2012-02-06 | 2012-02-06 | 太陽電池の製造方法および太陽電池の製造装置 |
TW102102655A TW201349548A (zh) | 2012-02-06 | 2013-01-24 | 太陽能電池的製造方法及太陽能電池的製造裝置 |
KR1020130011768A KR101436489B1 (ko) | 2012-02-06 | 2013-02-01 | 태양전지의 제조방법 및 태양전지의 제조장치 |
CN2013100478428A CN103247716A (zh) | 2012-02-06 | 2013-02-06 | 太阳能电池的制造方法及太阳能电池的制造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012023252A JP2013161969A (ja) | 2012-02-06 | 2012-02-06 | 太陽電池の製造方法および太陽電池の製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013161969A true JP2013161969A (ja) | 2013-08-19 |
JP2013161969A5 JP2013161969A5 (ja) | 2014-01-16 |
Family
ID=48927073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012023252A Pending JP2013161969A (ja) | 2012-02-06 | 2012-02-06 | 太陽電池の製造方法および太陽電池の製造装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2013161969A (ja) |
KR (1) | KR101436489B1 (ja) |
CN (1) | CN103247716A (ja) |
TW (1) | TW201349548A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015113511A (ja) * | 2013-12-13 | 2015-06-22 | 株式会社東芝 | 半導体製造装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106981540B (zh) * | 2017-03-24 | 2019-07-23 | 东莞帕萨电子装备有限公司 | 离子注入跑片方法和离子注入跑片系统 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005347543A (ja) * | 2004-06-03 | 2005-12-15 | Sharp Corp | イオンドーピング方法およびイオンドーピング装置 |
JP2009134923A (ja) * | 2007-11-29 | 2009-06-18 | Nissin Ion Equipment Co Ltd | イオンビーム照射方法およびイオンビーム照射装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000036440A (ko) * | 2000-03-14 | 2000-07-05 | 이준상 | 3차원적인 이온주입에 의한 도전영역 형성방법 |
WO2005066385A1 (ja) * | 2004-01-06 | 2005-07-21 | Ideal Star Inc. | イオン注入方法、及び、イオン注入装置 |
US20060289800A1 (en) * | 2005-03-22 | 2006-12-28 | Murrell Adrian J | Implanting a substrate using an ion beam |
US8153513B2 (en) | 2006-07-25 | 2012-04-10 | Silicon Genesis Corporation | Method and system for continuous large-area scanning implantation process |
KR20100028203A (ko) * | 2008-09-04 | 2010-03-12 | 주식회사 동부하이텍 | 포토레지스트 팝핑을 방지하기 위한 이온주입방법 |
JP4766156B2 (ja) * | 2009-06-11 | 2011-09-07 | 日新イオン機器株式会社 | イオン注入装置 |
-
2012
- 2012-02-06 JP JP2012023252A patent/JP2013161969A/ja active Pending
-
2013
- 2013-01-24 TW TW102102655A patent/TW201349548A/zh unknown
- 2013-02-01 KR KR1020130011768A patent/KR101436489B1/ko not_active IP Right Cessation
- 2013-02-06 CN CN2013100478428A patent/CN103247716A/zh active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005347543A (ja) * | 2004-06-03 | 2005-12-15 | Sharp Corp | イオンドーピング方法およびイオンドーピング装置 |
JP2009134923A (ja) * | 2007-11-29 | 2009-06-18 | Nissin Ion Equipment Co Ltd | イオンビーム照射方法およびイオンビーム照射装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015113511A (ja) * | 2013-12-13 | 2015-06-22 | 株式会社東芝 | 半導体製造装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103247716A (zh) | 2013-08-14 |
KR20130090818A (ko) | 2013-08-14 |
KR101436489B1 (ko) | 2014-09-02 |
TW201349548A (zh) | 2013-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2013163622A1 (en) | System architecture for vacuum processing | |
JP2013510447A (ja) | マトリクス構成処理用の複数のワークピースを処理するシステム及び方法 | |
JP2017112252A (ja) | 基板整列方法、基板受取方法、基板液処理方法、基板整列装置、基板受取装置、基板液処理装置、及び基板処理システム | |
CN106165082A (zh) | 基板处理系统 | |
JP2013161969A (ja) | 太陽電池の製造方法および太陽電池の製造装置 | |
JP5892802B2 (ja) | イオン注入方法、搬送容器及びイオン注入装置 | |
CN111755307B (zh) | 半导体晶圆离子注入扫描机器人 | |
JP2019199639A (ja) | 成膜装置および成膜方法 | |
WO2011155199A1 (ja) | 太陽電池製造装置及び太陽電池製造方法 | |
US10559710B2 (en) | System of height and alignment rollers for precise alignment of wafers for ion implantation | |
CN110491799B (zh) | 基片处理装置和基片处理方法 | |
CN110429041B (zh) | 基片处理装置、基片处理系统和基片处理方法 | |
KR20110067488A (ko) | 이온 주입 시스템 | |
JP6266523B2 (ja) | イオン注入装置及びイオン注入方法 | |
JP2005045124A (ja) | ステンシルマスク、荷電粒子照射装置及び方法 | |
JP2011129332A (ja) | イオンビーム照射装置 | |
KR101626467B1 (ko) | 기판처리장치 | |
Satoh et al. | Optima XE single wafer high energy ion implanter | |
KR20130073401A (ko) | 기판처리장치 및 그를 가지는 기판처리시스템 | |
JP2013131367A (ja) | イオン注入装置 | |
US11749554B2 (en) | Multi-wafer deposition tool for reducing residual deposition on transfer blades and methods of operating the same | |
KR20100121982A (ko) | 플라즈마를 이용한 도핑 방법 및 도핑 장치 | |
JP7256712B2 (ja) | イオン注入方法及びイオン注入装置 | |
KR20130073185A (ko) | 마스크조립체, 기판처리장치 및 기판처리시스템 | |
TWI434330B (zh) | 晶圓佈植的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131125 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140617 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150225 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150303 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20150630 |