JP2013150000A5 - - Google Patents
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- Publication number
- JP2013150000A5 JP2013150000A5 JP2013062296A JP2013062296A JP2013150000A5 JP 2013150000 A5 JP2013150000 A5 JP 2013150000A5 JP 2013062296 A JP2013062296 A JP 2013062296A JP 2013062296 A JP2013062296 A JP 2013062296A JP 2013150000 A5 JP2013150000 A5 JP 2013150000A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- contact
- insulating film
- emitter
- trench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013062296A JP2013150000A (ja) | 2013-03-25 | 2013-03-25 | Igbt |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013062296A JP2013150000A (ja) | 2013-03-25 | 2013-03-25 | Igbt |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011052100A Division JP5568036B2 (ja) | 2011-03-09 | 2011-03-09 | Igbt |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013150000A JP2013150000A (ja) | 2013-08-01 |
JP2013150000A5 true JP2013150000A5 (de) | 2014-07-24 |
Family
ID=49047137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013062296A Pending JP2013150000A (ja) | 2013-03-25 | 2013-03-25 | Igbt |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2013150000A (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016096307A (ja) * | 2014-11-17 | 2016-05-26 | トヨタ自動車株式会社 | 半導体装置 |
US10529839B2 (en) | 2015-05-15 | 2020-01-07 | Fuji Electric Co., Ltd. | Semiconductor device |
JP6192686B2 (ja) | 2015-07-02 | 2017-09-06 | 株式会社豊田中央研究所 | 半導体装置 |
JP2017037921A (ja) | 2015-08-07 | 2017-02-16 | トヨタ自動車株式会社 | Igbt |
JP6540906B2 (ja) | 2016-10-17 | 2019-07-10 | 富士電機株式会社 | 半導体装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01105579A (ja) * | 1987-10-19 | 1989-04-24 | Fujitsu Ltd | 絶縁ゲート型バイポーラトランジスタ |
JPH11345969A (ja) * | 1998-06-01 | 1999-12-14 | Toshiba Corp | 電力用半導体装置 |
JP2002158355A (ja) * | 2000-11-20 | 2002-05-31 | Nec Kansai Ltd | 半導体装置およびその製造方法 |
JP2006120789A (ja) * | 2004-10-20 | 2006-05-11 | Toshiba Corp | 半導体装置 |
JP5383009B2 (ja) * | 2007-07-17 | 2014-01-08 | 三菱電機株式会社 | 半導体装置の設計方法 |
US8222108B2 (en) * | 2009-07-08 | 2012-07-17 | Force Mos Technology Co., Ltd. | Method of making a trench MOSFET having improved avalanche capability using three masks process |
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2013
- 2013-03-25 JP JP2013062296A patent/JP2013150000A/ja active Pending
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