JP2013120126A - 微細構造体、およびその微細構造体を備えた撮像装置 - Google Patents

微細構造体、およびその微細構造体を備えた撮像装置 Download PDF

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Publication number
JP2013120126A
JP2013120126A JP2011268215A JP2011268215A JP2013120126A JP 2013120126 A JP2013120126 A JP 2013120126A JP 2011268215 A JP2011268215 A JP 2011268215A JP 2011268215 A JP2011268215 A JP 2011268215A JP 2013120126 A JP2013120126 A JP 2013120126A
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Japan
Prior art keywords
lattice
lattice region
gravity
center
outer edge
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Pending
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JP2011268215A
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English (en)
Japanese (ja)
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JP2013120126A5 (enExample
Inventor
Takayuki Tejima
隆行 手島
Takahisa Kato
貴久 加藤
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011268215A priority Critical patent/JP2013120126A/ja
Priority to US14/362,361 priority patent/US20140334604A1/en
Priority to PCT/JP2012/007337 priority patent/WO2013084421A1/en
Publication of JP2013120126A publication Critical patent/JP2013120126A/ja
Publication of JP2013120126A5 publication Critical patent/JP2013120126A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/041—Phase-contrast imaging, e.g. using grating interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20075—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring interferences of X-rays, e.g. Borrmann effect
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/10—Scattering devices; Absorbing devices; Ionising radiation filters
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Micromachines (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
JP2011268215A 2011-12-07 2011-12-07 微細構造体、およびその微細構造体を備えた撮像装置 Pending JP2013120126A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011268215A JP2013120126A (ja) 2011-12-07 2011-12-07 微細構造体、およびその微細構造体を備えた撮像装置
US14/362,361 US20140334604A1 (en) 2011-12-07 2012-11-15 Microstructure, and imaging apparatus having the microstructure
PCT/JP2012/007337 WO2013084421A1 (en) 2011-12-07 2012-11-15 Microstructure, and imaging apparatus having the microstructure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011268215A JP2013120126A (ja) 2011-12-07 2011-12-07 微細構造体、およびその微細構造体を備えた撮像装置

Publications (2)

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JP2013120126A true JP2013120126A (ja) 2013-06-17
JP2013120126A5 JP2013120126A5 (enExample) 2015-01-29

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JP2011268215A Pending JP2013120126A (ja) 2011-12-07 2011-12-07 微細構造体、およびその微細構造体を備えた撮像装置

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Country Link
US (1) US20140334604A1 (enExample)
JP (1) JP2013120126A (enExample)
WO (1) WO2013084421A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011162854A (ja) * 2010-02-10 2011-08-25 Canon Inc マイクロ構造体の製造方法および放射線吸収格子
WO2015060093A1 (ja) * 2013-10-25 2015-04-30 コニカミノルタ株式会社 湾曲型格子の製造方法、湾曲型格子、格子ユニット、及びｘ線撮像装置
JP2015127702A (ja) * 2013-11-29 2015-07-09 キヤノン株式会社 構造体、およびその構造体を備えたｘ線トールボット干渉計

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017202312B4 (de) * 2017-02-14 2018-10-04 Siemens Healthcare Gmbh Verfahren zur Herstellung eines Röntgen-Streustrahlenrasters
JP6753342B2 (ja) * 2017-03-15 2020-09-09 株式会社島津製作所 放射線格子検出器およびｘ線検査装置
EP3403581A1 (en) * 2017-05-15 2018-11-21 Koninklijke Philips N.V. Grid-mounting device for slit-scan differential phase contrast imaging
CN113325579A (zh) * 2020-02-28 2021-08-31 苏州苏大维格科技集团股份有限公司 用于呈现增强现实图像的装置和包含该装置的系统
EP3889973A1 (en) * 2020-04-01 2021-10-06 Koninklijke Philips N.V. Focussed grating devices with large aspect ratio

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102184A (en) * 1978-01-27 1979-08-11 Toshiba Corp Collimator device
JPH01276050A (ja) * 1988-03-18 1989-11-06 Philips Gloeilampenfab:Nv Ｘ線検査装置
JPH08447U (ja) * 1991-11-19 1996-03-08 宏三 高橋 特に飲食物に使うふりかけ器
JP2007206075A (ja) * 2006-02-01 2007-08-16 Siemens Ag Ｘ線装置の焦点−検出器装置
JP2011223545A (ja) * 2010-03-26 2011-11-04 Fujifilm Corp 放射線撮影システム、並びに欠陥画素検出装置及び方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5812629A (en) * 1997-04-30 1998-09-22 Clauser; John F. Ultrahigh resolution interferometric x-ray imaging
JP5773624B2 (ja) * 2010-01-08 2015-09-02 キヤノン株式会社 微細構造体の製造方法
US8532252B2 (en) * 2010-01-27 2013-09-10 Canon Kabushiki Kaisha X-ray shield grating, manufacturing method therefor, and X-ray imaging apparatus
JP5627247B2 (ja) * 2010-02-10 2014-11-19 キヤノン株式会社 マイクロ構造体の製造方法および放射線吸収格子
US20130163717A1 (en) * 2010-09-08 2013-06-27 Canon Kabushiki Kaisha Imaging apparatus
JP5804726B2 (ja) * 2011-02-24 2015-11-04 キヤノン株式会社 微細構造体の製造方法
JP6245794B2 (ja) * 2011-07-29 2017-12-13 キヤノン株式会社 遮蔽格子の製造方法
JP2014006194A (ja) * 2012-06-26 2014-01-16 Canon Inc 構造体の製造方法
JP2015064337A (ja) * 2013-08-30 2015-04-09 キヤノン株式会社 微細構造体の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102184A (en) * 1978-01-27 1979-08-11 Toshiba Corp Collimator device
JPH01276050A (ja) * 1988-03-18 1989-11-06 Philips Gloeilampenfab:Nv Ｘ線検査装置
JPH08447U (ja) * 1991-11-19 1996-03-08 宏三 高橋 特に飲食物に使うふりかけ器
JP2007206075A (ja) * 2006-02-01 2007-08-16 Siemens Ag Ｘ線装置の焦点−検出器装置
JP2011223545A (ja) * 2010-03-26 2011-11-04 Fujifilm Corp 放射線撮影システム、並びに欠陥画素検出装置及び方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011162854A (ja) * 2010-02-10 2011-08-25 Canon Inc マイクロ構造体の製造方法および放射線吸収格子
WO2015060093A1 (ja) * 2013-10-25 2015-04-30 コニカミノルタ株式会社 湾曲型格子の製造方法、湾曲型格子、格子ユニット、及びｘ線撮像装置
JPWO2015060093A1 (ja) * 2013-10-25 2017-03-09 コニカミノルタ株式会社 湾曲型格子の製造方法、湾曲型格子、格子ユニット、及びｘ線撮像装置
US9970119B2 (en) 2013-10-25 2018-05-15 Konica Minolta, Inc. Curved grating structure manufacturing method, curved grating structure, grating unit, and x-ray imaging device
JP2015127702A (ja) * 2013-11-29 2015-07-09 キヤノン株式会社 構造体、およびその構造体を備えたｘ線トールボット干渉計

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US20140334604A1 (en) 2014-11-13

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