JP2015127702A - 構造体、およびその構造体を備えたx線トールボット干渉計 - Google Patents
構造体、およびその構造体を備えたx線トールボット干渉計 Download PDFInfo
- Publication number
- JP2015127702A JP2015127702A JP2014242451A JP2014242451A JP2015127702A JP 2015127702 A JP2015127702 A JP 2015127702A JP 2014242451 A JP2014242451 A JP 2014242451A JP 2014242451 A JP2014242451 A JP 2014242451A JP 2015127702 A JP2015127702 A JP 2015127702A
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- Prior art keywords
- layer
- bonding
- gold
- ray
- bonding layer
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- LFEUVBZXUFMACD-UHFFFAOYSA-H lead(2+);trioxido(oxo)-$l^{5}-arsane Chemical compound [Pb+2].[Pb+2].[Pb+2].[O-][As]([O-])([O-])=O.[O-][As]([O-])([O-])=O LFEUVBZXUFMACD-UHFFFAOYSA-H 0.000 title claims abstract description 25
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Abstract
Description
本発明のその他の側面については、以下で説明する実施の形態で明らかにする。
本実施例では、複数の孔7が互いに交差する2方向に配列された金層2を備える構造体1(図1(a)参照)について説明をする。本実施例の金層と第2の接合層との製造方法を図3を用いて説明する。
本参考例では実施例1と同じ金層と第2の接合層と樹脂層とを用いる。但し、本参考例では、金層のうち、第2の接合層との接面と対向する面(金表面)が曲面側になるように配置する。また、第1と第2の接合層を用いて金層を樹脂層の曲面に接合する代わりに、テープを用いて金層の周囲のみを樹脂層の曲面に接合する。金層の周囲をテープを用いて樹脂層の曲面に接合し、実施例1と同様にゴム風船で加圧すると構造体が形成される。このとき、テープの厚みと第2の接合層の厚みと金層の厚みとの合計が120μmとなるようにする。図5は、樹脂層の曲面の形状と、金層の湾曲形状とを示したグラフであり、(a)は樹脂層の曲面の形状、(b)は樹脂層の曲面の高さに120μm加えたもの、(c)は第2の接合層の水素結合性の表面の形状、をそれぞれグラフにしたものである。図4と図5を比較すると、金層の湾曲形状が樹脂層の曲面の形状とのズレが本参考例の方が大きいことがわかる。
本実施例では、複数の凹部が1方向に配列された金層を備える構造体1(図1(b)参照)について説明をする。
本実施例は、第2の接合層として、クロムとSiO2をこの順に金層に形成したものを用いたことと、第1の接合層をポリオキシエチレンラウリルエーテルを用いて形成したこと以外は実施例2と同様の構成である。SiO2の表面が、水素結合性の表面である。本実施例においても実施例2と同様に、金層の凹部の高さ方向は曲面に対して法線方向に向かった構造体が得られる。
本実施例では、実施例2よりもアスペクト比が低い凹部が1方向に配列された金層を備える構造体(図1(c)参照)について説明をする。本実施例の金層は、120μmの厚みを有する金層に、4μm幅のライン状の凸部9が24μmのピッチで形成した構造を有する。このライン状の凸部の間が凹部である。実施例2と同様に、金層が平面の状態のとき、凹部は垂直方向に形成されている。本実施例でも、金層の凹部の向きは曲面に対して法線方向に向かった構造体が得られる。
本実施例では、実施例1で製造した構造体の金層をX線遮蔽格子として用いたX線トールボット干渉計について、図2を用いて説明をする。
2 金層
3 第2の接合層
4 曲面
5 樹脂層
6 第1の接合層
7 孔
8 凹部
9 凸部
11 水素結合性の表面
Claims (15)
- 樹脂層と第1の接合層と第2の接合層と金層とをこの順番で備え、
前記樹脂層は、曲面を有し、
前記第1の接合層は、水溶性ポリマーを有し、
前記第2の接合層は、水素結合性の表面を有し、
前記樹脂層の前記曲面と前記第1の接合層とが接し、
前記第1の接合層と前記水素結合性の表面とが接していることを特徴とする構造体。 - 前記金層に、複数の孔又は凹部が設けられていることを特徴とする請求項1に記載の構造体。
- 前記複数の孔又は凹部のアスペクト比が7以上60以下であることを特徴とする請求項2に記載の構造体。
- 前記複数の孔又は凹部の夫々の間隔が0.5μm以上10μm以下であることを特徴とする請求項2又は3に記載の構造体。
- 前記水素結合性の表面は、
金属若しくは半金属の酸化物又は金属若しくは半金属の窒化物であることを特徴とする請求項1乃至4のいずれか1項に記載の構造体。 - 前記曲面は球面又はシリンドリカル面であることを特徴とする請求項1乃至5のいずれか1項に記載の構造体。
- 前記複数の孔または凹部は互いに交差する2方向に配列されており、
前記曲面は球面であることを特徴とする請求項6に記載の構造体。 - 前記複数の孔または凹部は1方向に配列されており、
前記曲面はシリンドリカル面であることを特徴とする請求項6に記載の構造体。 - 前記第1の接合層は、ポリビニルアルコールを有することを特徴とする請求項1乃至8のいずれか1項に記載の構造体。
- 前記第2の接合層は複数の層を有することを特徴とする請求項1乃至9のいずれか1項に記載の構造体。
- 前記金層は湾曲形状を有することを特徴とする請求項1乃至10のいずれか1項に記載の構造体。
- X線源からの発散X線を回折することにより干渉パターンを形成する回折格子と、前記干渉パターンを形成する前記発散X線の一部を遮る遮蔽格子と、前記遮蔽格子からの前記発散X線を検出する検出器と、を備え、前記遮蔽格子は、請求項1乃至11のいずれか1項に記載の構造体であることを特徴とするX線トールボット干渉計。
- X線源からの発散X線の一部を遮蔽する線源格子と、
前記線源格子からの前記発散X線を回折することにより干渉パターンを形成する回折格子と、前記回折格子からの前記発散X線を検出する検出器とを備え、前記線源格子は、請求項1乃至11のいずれか1項に記載の構造体であることを特徴とするX線トールボット干渉計。 - 前記干渉パターンを形成する前記発散X線の一部を遮る遮蔽格子を備え、前記遮蔽格子は、前記回折格子と前記検出器との間に配置されることを特徴とする請求項13に記載のX線トールボット干渉計。
- 樹脂層の曲面と、第2の接合層の水素結合性の表面との少なくともいずれかにポリマー水溶液を塗布する工程と、
前記曲面と前記水素結合性の表面とが前記ポリマー水溶液を介して接するように前記樹脂層と前記第2の接合層とを配置する工程と、
前記ポリマー水溶液を乾燥させ、第1の接合層を形成する工程と、を有し、
前記第2の接合層は、前記水素結合性の表面と対向する面において、金層と接する構造体の製造方法。
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