JP2013092756A5 - - Google Patents

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Publication number
JP2013092756A5
JP2013092756A5 JP2012211640A JP2012211640A JP2013092756A5 JP 2013092756 A5 JP2013092756 A5 JP 2013092756A5 JP 2012211640 A JP2012211640 A JP 2012211640A JP 2012211640 A JP2012211640 A JP 2012211640A JP 2013092756 A5 JP2013092756 A5 JP 2013092756A5
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JP
Japan
Prior art keywords
blaze
order
angle
wavelength
grating
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JP2012211640A
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English (en)
Japanese (ja)
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JP6153305B2 (ja
JP2013092756A (ja
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Priority to JP2012211640A priority Critical patent/JP6153305B2/ja
Priority claimed from JP2012211640A external-priority patent/JP6153305B2/ja
Priority to EP12006852.3A priority patent/EP2579071B1/en
Priority to US13/633,343 priority patent/US8774247B2/en
Publication of JP2013092756A publication Critical patent/JP2013092756A/ja
Publication of JP2013092756A5 publication Critical patent/JP2013092756A5/ja
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Publication of JP6153305B2 publication Critical patent/JP6153305B2/ja
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JP2012211640A 2011-10-06 2012-09-26 エシェル型回折格子の製造方法 Active JP6153305B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012211640A JP6153305B2 (ja) 2011-10-06 2012-09-26 エシェル型回折格子の製造方法
EP12006852.3A EP2579071B1 (en) 2011-10-06 2012-10-02 Echelle diffraction grating, excimer laser, manufacturing method of echelle diffraction grating, and ArF excimer laser
US13/633,343 US8774247B2 (en) 2011-10-06 2012-10-02 Echelle diffraction grating, excimer laser, manufacturing method of Echelle diffraction grating, and ArF excimer laser

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011222367 2011-10-06
JP2011222367 2011-10-06
JP2012211640A JP6153305B2 (ja) 2011-10-06 2012-09-26 エシェル型回折格子の製造方法

Publications (3)

Publication Number Publication Date
JP2013092756A JP2013092756A (ja) 2013-05-16
JP2013092756A5 true JP2013092756A5 (enExample) 2015-11-12
JP6153305B2 JP6153305B2 (ja) 2017-06-28

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JP2012211640A Active JP6153305B2 (ja) 2011-10-06 2012-09-26 エシェル型回折格子の製造方法

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US (1) US8774247B2 (enExample)
EP (1) EP2579071B1 (enExample)
JP (1) JP6153305B2 (enExample)

Families Citing this family (15)

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Publication number Priority date Publication date Assignee Title
US9161136B2 (en) * 2012-08-08 2015-10-13 Avaya Inc. Telecommunications methods and systems providing user specific audio optimization
CN103257383B (zh) * 2013-04-16 2015-06-10 华中科技大学 一种可变闪耀角的闪耀光栅和双闪耀光栅制备方法及产品
JP6362364B2 (ja) * 2014-03-10 2018-07-25 キヤノン株式会社 回折格子、および回折格子の製造方法
JP6188743B2 (ja) 2014-06-19 2017-08-30 キヤノン株式会社 複数の光学機能面を有する光学素子、分光装置およびその製造方法
DE102016212361A1 (de) 2016-07-06 2018-01-11 Carl Zeiss Smt Gmbh Optisches Gitter und optische Anordnung damit
JP6414620B2 (ja) * 2017-08-23 2018-10-31 株式会社島津製作所 ブレーズド回折格子およびブレーズド回折格子の製造方法
JP2018139300A (ja) * 2018-04-09 2018-09-06 キヤノン株式会社 レーザ装置、および分光方法
JP7078914B2 (ja) * 2018-09-11 2022-06-01 株式会社島津製作所 ブレーズド回折格子
US10690831B2 (en) * 2018-11-20 2020-06-23 Facebook Technologies, Llc Anisotropically formed diffraction grating device
CN109507775A (zh) * 2018-12-18 2019-03-22 濮阳光电产业技术研究院 有源光缆用带闪耀光栅的硅基光纤固定槽及其制作方法
EP3777549A1 (en) 2019-08-16 2021-02-17 ETH Zurich Food product and method of preparation
JP7581692B2 (ja) * 2020-08-03 2024-11-13 株式会社島津製作所 ブレーズド回折格子およびブレーズド回折格子の製造方法
CN116500719A (zh) * 2023-04-28 2023-07-28 京东方科技集团股份有限公司 一种光波导器件、ar显示装置
CN117821906B (zh) * 2024-01-21 2024-06-04 江苏康美达光学有限公司 一种光学镜片镀膜方法
CN119644497B (zh) * 2024-12-31 2025-09-30 歌尔光学科技有限公司 光栅耦合器以及具有其的衍射光波导和显示设备

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Publication number Priority date Publication date Assignee Title
US4736360A (en) * 1986-07-21 1988-04-05 Polaroid Corporation Bulk optic echelon multi/demultiplexer
WO1998032036A1 (en) * 1997-01-17 1998-07-23 Cymer, Inc. Reflective overcoat for replicated diffraction gratings
US6162495A (en) * 1997-09-29 2000-12-19 Cymer, Inc. Protective overcoat for replicated diffraction gratings
US6511703B2 (en) * 1997-09-29 2003-01-28 Cymer, Inc. Protective overcoat for replicated diffraction gratings
US20010003035A1 (en) * 1998-09-10 2001-06-07 Robert G. Ozarski Diffraction grating and fabrication technique for same
US6067197A (en) * 1998-12-23 2000-05-23 Spectronic Instruments, Inc. Difraction grating having enhanced blaze performance at two wavelengths
JP2000216464A (ja) * 1999-01-22 2000-08-04 Komatsu Ltd 狭帯域化レ―ザ装置に用いられるエシェ―ルグレ―ティング
DE10025214C2 (de) * 2000-05-22 2003-07-17 Zeiss Carl Littrow-Gitter sowie Verwendungen eines Littrow-Gitters
US6449096B1 (en) * 2000-07-13 2002-09-10 Network Photonics, Inc. Diffraction grating with reduced polarization-dependent loss
JP4475501B2 (ja) * 2003-10-09 2010-06-09 インターナショナル・ビジネス・マシーンズ・コーポレーション 分光素子、回折格子、複合回折格子、カラー表示装置、および分波器
US7175773B1 (en) 2004-06-14 2007-02-13 Carl Zeiss Laser Optics Gmbh Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed grating
JP4811032B2 (ja) * 2006-01-30 2011-11-09 株式会社島津製作所 反射型レプリカ光学素子
JP5637702B2 (ja) * 2010-03-09 2014-12-10 キヤノン株式会社 露光装置およびデバイス製造方法

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