JP2012531058A5 - - Google Patents

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Publication number
JP2012531058A5
JP2012531058A5 JP2012516759A JP2012516759A JP2012531058A5 JP 2012531058 A5 JP2012531058 A5 JP 2012531058A5 JP 2012516759 A JP2012516759 A JP 2012516759A JP 2012516759 A JP2012516759 A JP 2012516759A JP 2012531058 A5 JP2012531058 A5 JP 2012531058A5
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JP
Japan
Prior art keywords
substrate
providing
packaging method
recess
component
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JP2012516759A
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English (en)
Japanese (ja)
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JP5638605B2 (ja
JP2012531058A (ja
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Priority claimed from PCT/EP2010/059055 external-priority patent/WO2010149762A2/en
Publication of JP2012531058A publication Critical patent/JP2012531058A/ja
Publication of JP2012531058A5 publication Critical patent/JP2012531058A5/ja
Application granted granted Critical
Publication of JP5638605B2 publication Critical patent/JP5638605B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012516759A 2009-06-25 2010-06-25 生体適合性パッケージング Expired - Fee Related JP5638605B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22052809P 2009-06-25 2009-06-25
US61/220,528 2009-06-25
PCT/EP2010/059055 WO2010149762A2 (en) 2009-06-25 2010-06-25 Biocompatible packaging

Publications (3)

Publication Number Publication Date
JP2012531058A JP2012531058A (ja) 2012-12-06
JP2012531058A5 true JP2012531058A5 (enExample) 2013-02-14
JP5638605B2 JP5638605B2 (ja) 2014-12-10

Family

ID=42646500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012516759A Expired - Fee Related JP5638605B2 (ja) 2009-06-25 2010-06-25 生体適合性パッケージング

Country Status (4)

Country Link
US (2) US9048198B2 (enExample)
EP (1) EP2446478B1 (enExample)
JP (1) JP5638605B2 (enExample)
WO (1) WO2010149762A2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010149762A2 (en) 2009-06-25 2010-12-29 Imec Biocompatible packaging
US9224664B2 (en) 2012-06-06 2015-12-29 The Charles Stark Draper Laboratory, Inc. Bio-implantable hermetic integrated ultra high density device
US9700668B2 (en) * 2013-02-28 2017-07-11 Microchips Biotech, Inc. Implantable medical device for minimally-invasive insertion
US9478959B2 (en) 2013-03-14 2016-10-25 Heraeus Deutschland GmbH & Co. KG Laser welding a feedthrough
JP2017527329A (ja) * 2014-07-01 2017-09-21 インジェクトセンス, インコーポレイテッド 垂直積層構造を備える、気密封止したインプラントセンサ
EP3164061B1 (en) 2014-07-01 2024-09-18 Injectsense, Inc. Methods and devices for implantation of intraocular pressure sensors
US9741617B2 (en) * 2015-11-16 2017-08-22 Amkor Technology, Inc. Encapsulated semiconductor package and method of manufacturing thereof
WO2017090050A1 (en) * 2015-11-29 2017-06-01 Ramot At Tel-Aviv University Ltd. Sensing electrode and method of fabricating the same
US10814133B2 (en) * 2017-02-06 2020-10-27 Zyvex Labs, Llc Methods of fabricating an implantable device
US10804206B2 (en) * 2017-07-31 2020-10-13 Taiwan Semiconductor Manufacturing Co., Ltd. Deep trench protection
DE102017118687A1 (de) * 2017-08-16 2019-02-21 Aesculap Ag Isolation einer Passivierung
WO2020114617A1 (en) 2018-12-07 2020-06-11 Pixium Vision Sa Hermetic packaging of electronic components
CN114258580A (zh) * 2020-01-28 2022-03-29 Tdk电子股份有限公司 制造和钝化管芯的方法
EP3900782B1 (en) 2020-02-21 2023-08-09 Heraeus Medical Components, LLC Ferrule with strain relief spacer for implantable medical device
EP3900783B1 (en) 2020-02-21 2023-08-16 Heraeus Medical Components, LLC Ferrule for non-planar medical device housing
US11786125B2 (en) * 2020-12-15 2023-10-17 DePuy Synthes Products, Inc. Implantable sensor electronics packaging

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5872046A (en) * 1996-04-10 1999-02-16 Texas Instruments Incorporated Method of cleaning wafer after partial saw
US6063696A (en) * 1997-05-07 2000-05-16 Texas Instruments Incorporated Method of reducing wafer particles after partial saw using a superhard protective coating
US6259937B1 (en) * 1997-09-12 2001-07-10 Alfred E. Mann Foundation Implantable substrate sensor
JP3497722B2 (ja) * 1998-02-27 2004-02-16 富士通株式会社 半導体装置及びその製造方法及びその搬送トレイ
JP4809957B2 (ja) * 1999-02-24 2011-11-09 日本テキサス・インスツルメンツ株式会社 半導体装置の製造方法
JP2001085361A (ja) * 1999-09-10 2001-03-30 Oki Electric Ind Co Ltd 半導体装置およびその製造方法
US6953560B1 (en) * 2000-09-28 2005-10-11 Advanced Cardiovascular Systems, Inc. Barriers for polymer-coated implantable medical devices and methods for making the same
US7074720B2 (en) * 2001-06-25 2006-07-11 Matsushita Electric Industrial Co., Ltd. Plasma treating apparatus, plasma treating method and method of manufacturing semiconductor device
JP2003124431A (ja) * 2001-10-17 2003-04-25 Sony Corp ウェーハ状シート、チップ状電子部品、およびそれらの製造方法
JP2003158097A (ja) * 2001-11-22 2003-05-30 Murata Mfg Co Ltd 半導体装置及びその製造方法
DE60335554D1 (de) * 2002-05-20 2011-02-10 Imagerlabs Inc Bilden einer integrierten mehrsegmentschaltung mit isolierten substraten
JP4081666B2 (ja) * 2002-09-24 2008-04-30 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
JP4407800B2 (ja) * 2002-11-27 2010-02-03 セイコーエプソン株式会社 半導体装置の製造方法
JP4544876B2 (ja) 2003-02-25 2010-09-15 三洋電機株式会社 半導体装置の製造方法
US20070010702A1 (en) * 2003-04-08 2007-01-11 Xingwu Wang Medical device with low magnetic susceptibility
US7232957B2 (en) * 2003-09-25 2007-06-19 Sanyo Electric Co., Ltd. Hybrid integrated circuit device and method of manufacturing the same
DE50306688D1 (de) * 2003-12-08 2007-04-12 Fraunhofer Ges Forschung Hybrider Mikrofluidik-Chip und Verfahren zu seiner Herstellung
US7706884B2 (en) * 2003-12-24 2010-04-27 Cardiac Pacemakers, Inc. Baroreflex stimulation synchronized to circadian rhythm
US7169691B2 (en) * 2004-01-29 2007-01-30 Micron Technology, Inc. Method of fabricating wafer-level packaging with sidewall passivation and related apparatus
JP2005244118A (ja) * 2004-02-27 2005-09-08 Toshiba Corp 半導体素子の製造方法およびカメラモジュールの製造方法
US7632307B2 (en) * 2004-12-16 2009-12-15 Advanced Cardiovascular Systems, Inc. Abluminal, multilayer coating constructs for drug-delivery stents
US20070088442A1 (en) * 2005-10-14 2007-04-19 Microchips, Inc. Passive wear-indicating sensor for implantable prosthetic device
WO2008157722A1 (en) * 2007-06-19 2008-12-24 Vertical Circuits, Inc. Wafer level surface passivation of stackable integrated circuit chips
US20080315407A1 (en) * 2007-06-20 2008-12-25 Vertical Circuits, Inc. Three-dimensional circuitry formed on integrated circuit device using two-dimensional fabrication
JP5122911B2 (ja) * 2007-10-25 2013-01-16 株式会社ディスコ 半導体デバイスの製造方法
JP2009176793A (ja) * 2008-01-22 2009-08-06 Disco Abrasive Syst Ltd ウエーハの分割方法
WO2010149762A2 (en) 2009-06-25 2010-12-29 Imec Biocompatible packaging

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