JP5638605B2 - 生体適合性パッケージング - Google Patents

生体適合性パッケージング Download PDF

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Publication number
JP5638605B2
JP5638605B2 JP2012516759A JP2012516759A JP5638605B2 JP 5638605 B2 JP5638605 B2 JP 5638605B2 JP 2012516759 A JP2012516759 A JP 2012516759A JP 2012516759 A JP2012516759 A JP 2012516759A JP 5638605 B2 JP5638605 B2 JP 5638605B2
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JP
Japan
Prior art keywords
substrate
recess
packaging
component
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012516759A
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English (en)
Japanese (ja)
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JP2012531058A5 (enExample
JP2012531058A (ja
Inventor
マリア・オプ・デ・ベーク
エリック・ベイネ
フィリップ・スサン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Interuniversitair Microelektronica Centrum vzw IMEC
Original Assignee
Interuniversitair Microelektronica Centrum vzw IMEC
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Publication of JP2012531058A5 publication Critical patent/JP2012531058A5/ja
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Expired - Fee Related legal-status Critical Current
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Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/68Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6846Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
    • A61B5/6847Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
    • A61B5/686Permanently implanted devices, e.g. pacemakers, other stimulators, biochips
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142Pressure infusion, e.g. using pumps
    • A61M5/14244Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body
    • A61M5/14276Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body specially adapted for implantation
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/18Applying electric currents by contact electrodes
    • A61N1/32Applying electric currents by contact electrodes alternating or intermittent currents
    • A61N1/36Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
    • A61N1/372Arrangements in connection with the implantation of stimulators
    • A61N1/37205Microstimulators, e.g. implantable through a cannula
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/18Applying electric currents by contact electrodes
    • A61N1/32Applying electric currents by contact electrodes alternating or intermittent currents
    • A61N1/36Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
    • A61N1/372Arrangements in connection with the implantation of stimulators
    • A61N1/375Constructional arrangements, e.g. casings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3114Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0247Pressure sensors
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02Details of sensors specially adapted for in-vivo measurements
    • A61B2562/028Microscale sensors, e.g. electromechanical sensors [MEMS]
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/68Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6846Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
    • A61B5/6847Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
    • A61B5/6861Capsules, e.g. for swallowing or implanting
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00General characteristics of the apparatus
    • A61M2205/02General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0244Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00General characteristics of the apparatus
    • A61M2205/82Internal energy supply devices
    • A61M2205/8206Internal energy supply devices battery-operated
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/18Applying electric currents by contact electrodes
    • A61N1/32Applying electric currents by contact electrodes alternating or intermittent currents
    • A61N1/36Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
    • A61N1/372Arrangements in connection with the implantation of stimulators
    • A61N1/375Constructional arrangements, e.g. casings
    • A61N1/3756Casings with electrodes thereon, e.g. leadless stimulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/10251Elemental semiconductors, i.e. Group IV
    • H01L2924/10253Silicon [Si]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/146Mixed devices
    • H01L2924/1461MEMS
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Biomedical Technology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Vascular Medicine (AREA)
  • Anesthesiology (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Medical Informatics (AREA)
  • Pathology (AREA)
  • Surgery (AREA)
  • Biophysics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Prostheses (AREA)
  • Packages (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Dicing (AREA)
JP2012516759A 2009-06-25 2010-06-25 生体適合性パッケージング Expired - Fee Related JP5638605B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22052809P 2009-06-25 2009-06-25
US61/220,528 2009-06-25
PCT/EP2010/059055 WO2010149762A2 (en) 2009-06-25 2010-06-25 Biocompatible packaging

Publications (3)

Publication Number Publication Date
JP2012531058A JP2012531058A (ja) 2012-12-06
JP2012531058A5 JP2012531058A5 (enExample) 2013-02-14
JP5638605B2 true JP5638605B2 (ja) 2014-12-10

Family

ID=42646500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012516759A Expired - Fee Related JP5638605B2 (ja) 2009-06-25 2010-06-25 生体適合性パッケージング

Country Status (4)

Country Link
US (2) US9048198B2 (enExample)
EP (1) EP2446478B1 (enExample)
JP (1) JP5638605B2 (enExample)
WO (1) WO2010149762A2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010149762A2 (en) 2009-06-25 2010-12-29 Imec Biocompatible packaging
US9224664B2 (en) 2012-06-06 2015-12-29 The Charles Stark Draper Laboratory, Inc. Bio-implantable hermetic integrated ultra high density device
US9700668B2 (en) * 2013-02-28 2017-07-11 Microchips Biotech, Inc. Implantable medical device for minimally-invasive insertion
US9478959B2 (en) 2013-03-14 2016-10-25 Heraeus Deutschland GmbH & Co. KG Laser welding a feedthrough
JP2017527329A (ja) * 2014-07-01 2017-09-21 インジェクトセンス, インコーポレイテッド 垂直積層構造を備える、気密封止したインプラントセンサ
EP3164061B1 (en) 2014-07-01 2024-09-18 Injectsense, Inc. Methods and devices for implantation of intraocular pressure sensors
US9741617B2 (en) * 2015-11-16 2017-08-22 Amkor Technology, Inc. Encapsulated semiconductor package and method of manufacturing thereof
WO2017090050A1 (en) * 2015-11-29 2017-06-01 Ramot At Tel-Aviv University Ltd. Sensing electrode and method of fabricating the same
US10814133B2 (en) * 2017-02-06 2020-10-27 Zyvex Labs, Llc Methods of fabricating an implantable device
US10804206B2 (en) * 2017-07-31 2020-10-13 Taiwan Semiconductor Manufacturing Co., Ltd. Deep trench protection
DE102017118687A1 (de) * 2017-08-16 2019-02-21 Aesculap Ag Isolation einer Passivierung
WO2020114617A1 (en) 2018-12-07 2020-06-11 Pixium Vision Sa Hermetic packaging of electronic components
CN114258580A (zh) * 2020-01-28 2022-03-29 Tdk电子股份有限公司 制造和钝化管芯的方法
EP3900782B1 (en) 2020-02-21 2023-08-09 Heraeus Medical Components, LLC Ferrule with strain relief spacer for implantable medical device
EP3900783B1 (en) 2020-02-21 2023-08-16 Heraeus Medical Components, LLC Ferrule for non-planar medical device housing
US11786125B2 (en) * 2020-12-15 2023-10-17 DePuy Synthes Products, Inc. Implantable sensor electronics packaging

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5872046A (en) * 1996-04-10 1999-02-16 Texas Instruments Incorporated Method of cleaning wafer after partial saw
US6063696A (en) * 1997-05-07 2000-05-16 Texas Instruments Incorporated Method of reducing wafer particles after partial saw using a superhard protective coating
US6259937B1 (en) * 1997-09-12 2001-07-10 Alfred E. Mann Foundation Implantable substrate sensor
JP3497722B2 (ja) * 1998-02-27 2004-02-16 富士通株式会社 半導体装置及びその製造方法及びその搬送トレイ
JP4809957B2 (ja) * 1999-02-24 2011-11-09 日本テキサス・インスツルメンツ株式会社 半導体装置の製造方法
JP2001085361A (ja) * 1999-09-10 2001-03-30 Oki Electric Ind Co Ltd 半導体装置およびその製造方法
US6953560B1 (en) * 2000-09-28 2005-10-11 Advanced Cardiovascular Systems, Inc. Barriers for polymer-coated implantable medical devices and methods for making the same
US7074720B2 (en) * 2001-06-25 2006-07-11 Matsushita Electric Industrial Co., Ltd. Plasma treating apparatus, plasma treating method and method of manufacturing semiconductor device
JP2003124431A (ja) * 2001-10-17 2003-04-25 Sony Corp ウェーハ状シート、チップ状電子部品、およびそれらの製造方法
JP2003158097A (ja) * 2001-11-22 2003-05-30 Murata Mfg Co Ltd 半導体装置及びその製造方法
DE60335554D1 (de) * 2002-05-20 2011-02-10 Imagerlabs Inc Bilden einer integrierten mehrsegmentschaltung mit isolierten substraten
JP4081666B2 (ja) * 2002-09-24 2008-04-30 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
JP4407800B2 (ja) * 2002-11-27 2010-02-03 セイコーエプソン株式会社 半導体装置の製造方法
JP4544876B2 (ja) 2003-02-25 2010-09-15 三洋電機株式会社 半導体装置の製造方法
US20070010702A1 (en) * 2003-04-08 2007-01-11 Xingwu Wang Medical device with low magnetic susceptibility
US7232957B2 (en) * 2003-09-25 2007-06-19 Sanyo Electric Co., Ltd. Hybrid integrated circuit device and method of manufacturing the same
DE50306688D1 (de) * 2003-12-08 2007-04-12 Fraunhofer Ges Forschung Hybrider Mikrofluidik-Chip und Verfahren zu seiner Herstellung
US7706884B2 (en) * 2003-12-24 2010-04-27 Cardiac Pacemakers, Inc. Baroreflex stimulation synchronized to circadian rhythm
US7169691B2 (en) * 2004-01-29 2007-01-30 Micron Technology, Inc. Method of fabricating wafer-level packaging with sidewall passivation and related apparatus
JP2005244118A (ja) * 2004-02-27 2005-09-08 Toshiba Corp 半導体素子の製造方法およびカメラモジュールの製造方法
US7632307B2 (en) * 2004-12-16 2009-12-15 Advanced Cardiovascular Systems, Inc. Abluminal, multilayer coating constructs for drug-delivery stents
US20070088442A1 (en) * 2005-10-14 2007-04-19 Microchips, Inc. Passive wear-indicating sensor for implantable prosthetic device
WO2008157722A1 (en) * 2007-06-19 2008-12-24 Vertical Circuits, Inc. Wafer level surface passivation of stackable integrated circuit chips
US20080315407A1 (en) * 2007-06-20 2008-12-25 Vertical Circuits, Inc. Three-dimensional circuitry formed on integrated circuit device using two-dimensional fabrication
JP5122911B2 (ja) * 2007-10-25 2013-01-16 株式会社ディスコ 半導体デバイスの製造方法
JP2009176793A (ja) * 2008-01-22 2009-08-06 Disco Abrasive Syst Ltd ウエーハの分割方法
WO2010149762A2 (en) 2009-06-25 2010-12-29 Imec Biocompatible packaging

Also Published As

Publication number Publication date
EP2446478A2 (en) 2012-05-02
US10271796B2 (en) 2019-04-30
US9048198B2 (en) 2015-06-02
EP2446478B1 (en) 2018-09-12
WO2010149762A3 (en) 2011-04-21
WO2010149762A2 (en) 2010-12-29
US20120209100A1 (en) 2012-08-16
US20150297136A1 (en) 2015-10-22
JP2012531058A (ja) 2012-12-06

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