JP2012530355A - ニッケル内電極と整合されるセラミック媒体材料及びそれによって得られたコンデンサの製備方法 - Google Patents
ニッケル内電極と整合されるセラミック媒体材料及びそれによって得られたコンデンサの製備方法 Download PDFInfo
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 62
- 239000000463 material Substances 0.000 title claims abstract description 51
- 239000000919 ceramic Substances 0.000 title claims abstract description 46
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000003990 capacitor Substances 0.000 title abstract description 3
- 239000013078 crystal Substances 0.000 claims abstract description 22
- 230000004907 flux Effects 0.000 claims abstract description 20
- 239000000654 additive Substances 0.000 claims abstract description 19
- 230000000996 additive effect Effects 0.000 claims abstract description 16
- 229910004298 SiO 2 Inorganic materials 0.000 claims abstract description 12
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims abstract description 10
- 229910018068 Li 2 O Inorganic materials 0.000 claims abstract description 7
- 229910017702 MgZr Inorganic materials 0.000 claims abstract description 7
- 229910010413 TiO 2 Inorganic materials 0.000 claims abstract description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000005245 sintering Methods 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- 239000002002 slurry Substances 0.000 claims description 3
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 238000003475 lamination Methods 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 238000007639 printing Methods 0.000 claims description 2
- 239000007772 electrode material Substances 0.000 claims 1
- 239000003985 ceramic capacitor Substances 0.000 abstract description 2
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 239000012071 phase Substances 0.000 description 14
- 229910010293 ceramic material Inorganic materials 0.000 description 9
- 239000000126 substance Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 2
- 229910020599 Co 3 O 4 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910017639 MgSi Inorganic materials 0.000 description 1
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 1
- 229910004283 SiO 4 Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000002815 nickel Chemical group 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1236—Ceramic dielectrics characterised by the ceramic dielectric material based on zirconium oxides or zirconates
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Abstract
Description
本発明は、セラミック媒体材料及びそれによって得られたコンポーネントの製備方法に係り、特にCOG特性を満足し、還元雰囲気において焼結されることができ、且つニッケル内電極と整合可能のセラミック材料、つまり周波低誘電率セラミック媒体材料、及びそれらでMLCC製品を製造することに係る。
電子情報技術が各技術分野における浸透と拡張につれて、MLCCは重要な電子素子としてずっと大規模集積回路と同一のハイレベルの発展スピードを保っている。当面MLCC技術の発展趨勢は製品の小型化、低電圧で大容量化、シート化、高電圧でシリーズ化、内電極のベースメタル化で、そのうちベースメタルのニッケル電極MLCCの大規模な応用がとりわけ人々の注目を引いている。ニッケル電極MLCCは下記複数の主な特徴を有する。(1)ニッケル電極のコストが低く、(2)ニッケル原子または原子団の電気的遷移スピードがパラジウム-銀原子団より小さいため、良好な電気化学安定性を有し、(3)ニッケル電極が半田付け材料に対する耐食性と耐熱性が良く、プロセスの安定性が良く、(4)ニッケル電極MLCCがより小さい等価直列電気抵抗とより良いインピーダンス周波数特性を有する。
本発明の解決しようとする技術問題は、環境保全の要求を満足し、1つの還元雰囲気において焼結されることができる高周波熱安定低誘電率セラミック媒体材料を提供することである。
本発明の主旨は下記通りである。MgZrxSi(1−x)O3体系を主結晶相として採用し、改質添加剤、焼結フラックスを加入して、環境を保全し、材料の分散性が高く、成型プロセスが良いなどの特徴を有し、ニッケル内電極との整合が良好で、高周波性能が安定で、COG特性を満足する1つのセラミック材料を得る。且つMLCC製品を作製する時に、還元雰囲気において1120〜1200℃の温度において焼結を実現することができる。次は実施例と合わせて本発明の内容に対しさらに詳しい記述を行い、実施例において言及する内容は本発明に対する限定でなく、材料の化学式の選択は、地元の条件により結果に対し実質上影響を与えないように適当な措置を取ることができる。
耐還元ニッケル電極高周波低誘電率セラミック媒体材料であって、純度が99.5%以上の原材料を選択採用し、1.0molのMg(OH)2、0.9molのSiO2、0.1molのZrO2という混合比率により、均一にボールミルし、1170℃の温度において該混合物を3時間焙焼してから、主結晶相がMgSi0.9Zr0.1O3である材料を得る。その後、所定比率により表1に示す改質添加剤と焼結フラックスを添加する。
Claims (7)
- 主結晶相と、改質添加剤と、焼結フラックスとから組成され、ニッケル内電極と整合される高周波低誘電率セラミック媒体材料において、
主結晶相の構造式がMgZrxSi(1−x)O3で、そのうち、0.05≦x≦0.15で、改質添加剤がMnO2、Al2O3、CaO、Bi2O3、TiO2のうちの1種または複数種で、焼結フラックスがB2O3、SiO2、ZnO、Li2O、K2O、BaOのうちの1種または複数種であることを特徴とするニッケル内電極と整合される高周波低誘電率セラミック媒体材料。 - モル百分率で、主結晶相が85〜95mol%で、改質添加剤が1.5〜13mol%で、焼結フラックスが1.5〜13mol%であることを特徴とする請求項1に記載のニッケル内電極と整合される高周波低誘電率セラミック媒体材料。
- モル分率で、改質添加剤がセラミック媒体材料全体における組成は、MnO2が0.5〜3.0mol%、Al2O3が1.0〜3.0mol%、CaOが0〜1.0mol%、Bi2O3が0〜5.0mol%、TiO2が0〜1.0mol%であることを特徴とする請求項2に記載のニッケル内電極と整合される高周波低誘電率セラミック媒体材料。
- モル分率で、焼結フラックスがセラミック媒体材料全体における組成は、B2O3が0.5〜3.0mol%、SiO2が0〜3.0mol%、ZnOが1.0〜4.0mol%、Li2Oが0〜1.0mol%、K2Oが0〜1.0mol%、BaOが0〜1.0mol%であることを特徴とする請求項2に記載のニッケル内電極と整合される高周波低誘電率セラミック媒体材料。
- 前記主結晶相が、Mg(OH)2、SiO2及びZrO2を均一にボールミル混合をした後、1050℃〜1200℃の温度において予備焙焼することによって作製されるものであることを特徴とする請求項1又は2に記載のニッケル内電極と整合される高周波低誘電率セラミック媒体材料。
- 獲得されたセラミック媒体材料はCOG特性の要求を満足し、誘電率が8〜12の間にあることを特徴とする請求項1〜5のいずれか1項に記載のニッケル内電極と整合される高周波低誘電率セラミック媒体材料。
- セラミックスラリーの製備と、媒体ダイヤフラムの作製と、内電極及び媒体層の交替重畳印刷と、母材の乾燥と、積層と、切断と、バインダ除去と、焼結と、面取りと、エンドキャッピングと、エンドケーキングと、を含む請求項1〜5のいずれか1項に記載のニッケル内電極と整合される高周波低誘電率セラミック媒体材料によるMLCC作製方法において、
前記内電極材料がニッケルまたはニッケル合金材料で、前記バインダ除去プロセスがMLCCチップの母材を200〜300℃の温度において熱処理することによって、有機接着剤と溶剤を排除することで、前記焼結プロセンスが1120〜1200℃の温度においてMLCCチップを還元雰囲気において2.5〜5時間焼結することで、前記エンドケーキングプロセスが830〜900℃の温度において外電極を熱処理し、さらに電気めっき処理を経ることである、ことを特徴とする請求項1〜5のいずれか1項に記載のニッケル内電極と整合される高周波低誘電率セラミック媒体材料によるMLCC作製方法。
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