JP2012514871A5 - - Google Patents

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JP2012514871A5
JP2012514871A5 JP2011545386A JP2011545386A JP2012514871A5 JP 2012514871 A5 JP2012514871 A5 JP 2012514871A5 JP 2011545386 A JP2011545386 A JP 2011545386A JP 2011545386 A JP2011545386 A JP 2011545386A JP 2012514871 A5 JP2012514871 A5 JP 2012514871A5
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target
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measurement target
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JP5635011B2 (ja
JP2012514871A (ja
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JP2011545386A 2009-01-08 2010-01-04 光散乱計測ターゲット設計の最適化 Active JP5635011B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/350,826 US8214771B2 (en) 2009-01-08 2009-01-08 Scatterometry metrology target design optimization
US12/350,826 2009-01-08
PCT/US2010/020046 WO2010080732A2 (en) 2009-01-08 2010-01-04 Scatterometry metrology target design optimization

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JP2014210497A Division JP5855728B2 (ja) 2009-01-08 2014-10-15 計測ターゲットを設計するための方法、装置および媒体

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JP2012514871A JP2012514871A (ja) 2012-06-28
JP2012514871A5 true JP2012514871A5 (https=) 2014-06-05
JP5635011B2 JP5635011B2 (ja) 2014-12-03

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JP2011545386A Active JP5635011B2 (ja) 2009-01-08 2010-01-04 光散乱計測ターゲット設計の最適化
JP2014210497A Active JP5855728B2 (ja) 2009-01-08 2014-10-15 計測ターゲットを設計するための方法、装置および媒体
JP2015240051A Pending JP2016066093A (ja) 2009-01-08 2015-12-09 計測ターゲットを設計するための方法、装置および媒体

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JP2014210497A Active JP5855728B2 (ja) 2009-01-08 2014-10-15 計測ターゲットを設計するための方法、装置および媒体
JP2015240051A Pending JP2016066093A (ja) 2009-01-08 2015-12-09 計測ターゲットを設計するための方法、装置および媒体

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US (1) US8214771B2 (https=)
EP (1) EP2386114B1 (https=)
JP (3) JP5635011B2 (https=)
KR (1) KR101281301B1 (https=)
WO (1) WO2010080732A2 (https=)

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