JP2012512442A - モノリシックな電子光学的tweコンポーネント構造 - Google Patents
モノリシックな電子光学的tweコンポーネント構造 Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
Abstract
【選択図】 図5
Description
Claims (14)
- コアと、コアに隣接するオーバークラッドと少なくとも導波路の一部に接続する少なくとも1個の電極を有する導波路と、導波路に光学的に接続するスポットサイズコンバータとから成り、前記スポットサイズコンバータはコアとコアに隣接するオーバークラッドを備えたモノシリックな光学的デバイスであって、導波路のオーバークラッドはスポットサイズコンバータのオーバークラッドよりも高度にドープされるモノシリックな電子光学的デバイス。
- 導波路のオーバークラッドはスポットサイズコンバータのオーバークラッドよりも厚みの薄い請求項1に記載のモノシリックな電子光学的デバイス。
- 電極は進行波電極から成る請求項1に記載のモノシリックな電子光学的デバイス。
- デバイスはマッハ−ツェンダ型変調器から成る請求項1に記載のモノシリックな電子光学的デバイス。
- 導波路のオーバークラッドとスポットサイズコンバータは選択的なエッチングと、選択的に高度の異なるドーピングを施した領域を再成長させる工程により作製される請求項1に記載のモノシリックな電子光学的デバイス。
- コアと、コアに隣接してオーバークラッドと少なくとも導波路の一部に接続する少なくとも1個の電極を有する導波路と、導波路に光学的に接続しコアとコアに接続するスポットサイズコンバータとから成り、導波路のオーバークラッドはスポットサイズコンバータよりも厚みの薄いモノシリックな電子光学的デバイス。
- 導波路のオーバークラッドはスポットサイズコンバータのオーバークラッドよりも高度にドープされる請求項6に記載のモノシリックな電子光学的デバイス。
- 電極は進行波電極から成る請求項6に記載のモノシリックな電子光学的デバイス。
- デバイスはマッハ−ツェンダ型変調器から成る請求項6に記載のモノシリックな電子光学的デバイス。
- 導波路のオーバークラッドとスポットサイズコンバータは選択的なエッチングと、選択的に厚みを変えた領域を再成長させる工程とにより作製される請求項6に記載のモノシリックな電子光学的デバイス。
- コアを有する導波路とコアに隣接するオーバークラッドと少なくとも導波路の一部に接続する少なくとも1個の電極とコアとコアに隣接するオーバークラッドとを有する導波路と、コアとコアに隣接するオーバークラッドから成る導波路に光学的に接続するスポットサイズコンバータとを有するモノシリックな電子光学的デバイスを製造する方法であって、コアとコアに隣接して高度にドープされた半導体材料から成るオーバークラッドを備えたウエハーを供給する工程と、導波路の電極が形成されるオーバークラッドの個所を覆うマスクをウエハーに載せる工程と、マスクによって覆われないオーバークラッドの少なくとも一部をエッチングによって除く工程と、導波路のオーバークラッドをスポットサイズコンバータのオーバークラッドよりも薄くするためにオーバークラッドのエッチングされた個所を高度にドープされていない厚みも異なる半導体材料で置換する工程と、オーバークラッドの選択的にエッチングされていない個所の上に導波路の電極を形成する工程とから成るモノシリックな電子光学的デバイスを組み立てる方法。
- 電極は進行波電極から成る請求項11に記載の方法。
- デバイスはマッハ−ツェンダ型変調器からなる請求項11に記載の方法。
- オーバークラッドのエッチングされた個所に置換する工程にはオーバークラッドの選択的に厚みを変えた個所に半導体材料を再成長させる工程を含む請求項11に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12290908P | 2008-12-16 | 2008-12-16 | |
US61/122,909 | 2008-12-16 | ||
US12/638,372 | 2009-12-15 | ||
US12/638,372 US9182546B2 (en) | 2008-12-16 | 2009-12-15 | Monolithic optoelectronic TWE-component structure for high frequencies and low optical insertion loss |
PCT/US2009/068107 WO2010071780A1 (en) | 2008-12-16 | 2009-12-15 | Monolithic optoelectronic twe-component structure |
Publications (2)
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JP2012512442A true JP2012512442A (ja) | 2012-05-31 |
JP5879633B2 JP5879633B2 (ja) | 2016-03-08 |
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JP2011542348A Active JP5879633B2 (ja) | 2008-12-16 | 2009-12-15 | モノリシックな電子光学的tweコンポーネント構造 |
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US (2) | US9182546B2 (ja) |
EP (1) | EP2359187B1 (ja) |
JP (1) | JP5879633B2 (ja) |
CN (1) | CN102317854B (ja) |
CA (1) | CA2746369C (ja) |
WO (1) | WO2010071780A1 (ja) |
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EP2538272B1 (en) | 2011-06-20 | 2014-01-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Electro-optic Mach-Zehnder modulator and method for fabricating an electro-optic Mach-Zehnder modulator |
EP2615490B1 (en) | 2012-01-12 | 2016-11-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mach-zehnder modulator arrangement and method for operating a mach-zehnder modulator arrangement |
EP2615489B1 (en) | 2012-01-12 | 2017-09-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mach-zehnder modulator arrangement and method for operating a mach-zehnder modulator arrangement |
EP2629141B1 (en) | 2012-02-15 | 2019-04-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Electro-optic modulator and method of fabricating an electro-optic modulator |
US9244327B2 (en) * | 2013-04-26 | 2016-01-26 | Teraxion Inc. | Mach-Zehnder modulator with backplane voltage equalization |
US10284300B2 (en) * | 2013-06-06 | 2019-05-07 | Acacia Communications, Inc. | Monolithic silicon coherent transceiver with integrated laser and gain elements |
US10928659B2 (en) | 2014-02-24 | 2021-02-23 | Rockley Photonics Limited | Optoelectronic device |
US10222677B2 (en) | 2014-02-24 | 2019-03-05 | Rockley Photonics Limited | Optoelectronic device |
EP3111262B1 (en) | 2014-02-28 | 2022-05-04 | Ciena Corporation | High index element-based spot-size converter for optical mode conversion and evanescent coupling between two waveguides |
US9759864B2 (en) | 2014-02-28 | 2017-09-12 | Ciena Corporation | Spot-size converter for optical mode conversion and coupling between two waveguides |
US10663663B2 (en) | 2014-02-28 | 2020-05-26 | Ciena Corporation | Spot-size converter for optical mode conversion and coupling between two waveguides |
US10921616B2 (en) | 2016-11-23 | 2021-02-16 | Rockley Photonics Limited | Optoelectronic device |
US10216059B2 (en) | 2015-03-05 | 2019-02-26 | Rockley Photonics Limited | Waveguide modulator structures |
US11150494B2 (en) | 2015-03-05 | 2021-10-19 | Rockley Photonics Limited | Waveguide modulator structures |
US10678115B2 (en) | 2015-03-05 | 2020-06-09 | Rockley Photonics Limited | Waveguide modulator structures |
GB2552618B (en) * | 2015-03-05 | 2021-07-28 | Rockley Photonics Ltd | Waveguide modulator structures |
US11101256B2 (en) | 2016-11-23 | 2021-08-24 | Rockley Photonics Limited | Optical modulators |
US11105975B2 (en) | 2016-12-02 | 2021-08-31 | Rockley Photonics Limited | Waveguide optoelectronic device |
EP3548963B1 (en) | 2016-12-02 | 2022-08-03 | Rockley Photonics Limited | Waveguide device and method of doping a waveguide device |
GB2576652B (en) | 2017-07-05 | 2021-12-22 | Rockley Photonics Ltd | Optoelectronic device |
JP2019117286A (ja) * | 2017-12-27 | 2019-07-18 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US10684414B1 (en) | 2019-01-29 | 2020-06-16 | Ciene Corporation | Interconnect between different multi-quantum well waveguides in a semiconductor photonic integrated circuit |
US20200381899A1 (en) | 2019-05-28 | 2020-12-03 | Ciena Corporation | Semiconductor device with Selective Area Epitaxy growth utilizing a mask to suppress or enhance growth at the edges |
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- 2009-12-15 WO PCT/US2009/068107 patent/WO2010071780A1/en active Application Filing
- 2009-12-15 CA CA2746369A patent/CA2746369C/en active Active
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- 2009-12-15 CN CN200980150611.1A patent/CN102317854B/zh active Active
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EP2359187A4 (en) | 2012-08-22 |
CA2746369C (en) | 2017-12-12 |
CA2746369A1 (en) | 2010-06-24 |
US9625648B2 (en) | 2017-04-18 |
WO2010071780A1 (en) | 2010-06-24 |
JP5879633B2 (ja) | 2016-03-08 |
EP2359187B1 (en) | 2019-09-11 |
US9182546B2 (en) | 2015-11-10 |
CN102317854A (zh) | 2012-01-11 |
CN102317854B (zh) | 2014-06-25 |
EP2359187A1 (en) | 2011-08-24 |
US20160103280A1 (en) | 2016-04-14 |
US20100150494A1 (en) | 2010-06-17 |
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