JP2012511812A - 基板処理装置 - Google Patents
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Abstract
Description
本出願は、米国仮特許出願第60/397,895号の利益を主張する米国特許出願第10/624,987号(出願日2003年7月22日)の一部継続出願であり、これら両方の全体が参照することによって本明細書に含まれている。
の実施例である。この実施例は、少なくとも作動部分(モータ巻線及び制御電子部品等)の数を最小化することによって、複雑さの減少、コストの低減及び信頼性の向上を提供する。特に、アクティブかつ閉ループ制御を必要とする自由度の数が最小化され、個別の専用の案内巻線が除去され、制御が分離されるので、この実施例は、従来の2チャンネルモータ増幅器を用いて実施されてもよい。さらに、システムの効率は、いくつかの実施例において受動的磁力の使用の故に向上させられるので、冷却の必要及び操作のコストが減少する。
X=x軸に沿った搬送装置22の位置(m)
Y=y軸に沿った搬送装置22の位置(m)
YF=y軸に沿った搬送装置22の前部の位置(m)
YR=y軸に沿った搬送装置22の後部の位置(m)
z=z軸に沿った搬送装置22の位置(m)
FX=搬送装置22にかかるX方向の全ての力(N)
FY=搬送装置22にかかるY方向の全ての力(N)
FZ=搬送装置22にかかるZ方向の全ての力(N)
MX=x軸周りのモーメント(Nm)
RX=x軸周りの回転(rad)
MY=y軸周りのモーメント(Nm)
RY=y軸周りの回転(rad)
FyF=FyLF+FyRF、FyR=FyLR+FyRR;ここで、FyLF、FyLRは受動的力として与えられ、FyRF、FyRRは、マクスウェル及び/またはローレンツ力として与えられ;
Fz、Mx、Myは、受動的力として与えられる。
FyF=FyLF+FyRF、FyR=FyLR+FyRRは、マクスウェル及び/またはローレンツ力として与えられ;
Fz、Mx、Myは、受動的力として与えられる。
FyF=FyL+FyRは、マクスウェルまたはローレンツ力として与えられ、互いに反対にある側部にある推進巻線及び浮揚巻線によって生成された案相力の間の差として与えられ;
Fz=FzL+FzRは、ローレンツ力として与えられ;
Mx、My、Mzは、位相コミュテーションの開ループ安定化効果によって生成される。
FyF=FyL+FyRは、推進巻線3110、3115によってのみ生成されたマクスウェルまたはローレンツ力として与えられ;
Fz=FzL+FzRは、ローレンツ力として与えられ;
Mx、Myは、浮揚巻線3140、3145の位相コミュテーションの故の開ループ安定化によって生成される。
Fy=FyL+FyRは、推進巻線3210、3215及び浮揚巻線3220、3225の両方によって生成されたマクスウェル力として与えられ;
Fz=FzL+FzRは、ローレンツ力として与えられ;
Myは、浮揚巻線3220、3225の位相コミュテーションの故の開ループ安定化によって生成される。
FyF=FyL/2+FyLR、FyR=FyL/2+FyRRは、浮揚巻線のみによって生成された ローレンツまたはマクスウェル力として与えられ;
FzL、FzRF、FzRRは、ローレンツ力として与えられる。
FyF=FyLF+FyRF、FyR=FyLR+FyRRは、浮揚巻線のみによって生成されたローレンツまたはマクスウェル力として与えられ;
FzF=FzLF+FzRF、FzLR、FzRRは、ローレンツ力として与えられる。
FyF=FyLF+FyRF、FyR=FyLR+FyRRは、ローレンツまたはマクスウェル力として与えられる。すなわち、マクスウェルの定理が使用される場合、これらの力は浮揚巻線によってのみ生成され、ローレンツの定理が使用される場合、これらの力は推進巻線及び浮揚巻線の組み合わせによって生成される;
FzF=FzLF+FzRF、FzLR、FzRRは、ローレンツ力として与えられる。
FyF=FyLF+FyRF、FyR=FyLR+FyRRは。推進巻線及び浮揚巻線の組み合わせによってローレンツ力またはマクスウェル力として与えられ;
FzF=FzLF+FzRF、FzLR、FzRRは、ローレンツ力として与えられる。
FyF=FyLF+FyRF、FyR=FyLR+FyRRは、ローレンツまたはマクスウェル力として与えられ、
MzF=r(FxLF+FxRF)、MzR=(FxLR+FxRR)、r=radius
FzLF、FzRF、FzLR、FzRRは、ローレンツ力として与えられる。
Claims (15)
- 搬送装置の駆動システムであって、
前記搬送装置に接続されている複数の永久マグネットと、
前記複数の永久マグネットのうちの少なくとも1つの磁界に曝されている複数の固定巻線と、
前記固定巻線に電圧を加えて前記搬送装置に磁力を提供する制御システムと、
前記搬送装置の少なくとも片側に近接して設けられて、前記搬送装置の浮揚、ピッチ及びロールの受動的安定化をもたらす強磁性コンポーネントの配列と、
を含むことを特徴とする駆動システム。 - 請求項1に記載の駆動システムであって、前記強磁性コンポーネントの配列が、前記複数の永久マグネットの他の少なくとも1つ及び1または複数の強磁性エレメントを含むことを特徴とする駆動システム。
- 請求項1に記載の駆動システムであって、前記1または複数の強磁性エレメントが、前記複数の固定巻線の一部として形成されていることを特徴とする駆動システム。
- 請求項1に記載の駆動システムであって、前記固定巻線が前記搬送装置の片側に近接していることを特徴とする駆動システム。
- 請求項1に記載の駆動システムであって、前記固定巻線が前記搬送装置の互いに反対にある側部に近接していることを特徴とする駆動システム。
- 請求項1に記載の駆動システムであって、前記複数の永久マグネットは、前記搬送装置の第1及び第2の互いに反対にある側部に配されている磁性プラテンを含んでいることを特徴とする駆動システム。
- 請求項6に記載の駆動システムであって、前記磁性プラテンが、前記巻線と向き合っている交互に配された磁極を有するマグネットの配列を含むことを特徴とする駆動システム。
- 請求項6に記載の駆動システムであって、前記固定巻線が、
前記搬送装置の前記第1及び第2の対向側部に近接した推進巻線と、
前記搬送装置の前記第1及び第2の対向側部に近接した浮揚巻線と、
を含むことを特徴とする駆動システム。 - 請求項8に記載の駆動システムであって、前記搬送装置の前記第1の対向側部に近接している前記推進及び浮揚巻線が、前記搬送装置の前記第2の対向側部に近接している推進及び浮揚巻線の各々からオフセットしていることを特徴とする駆動システム。
- 請求項8に記載の駆動システムであって、前記制御システムが、前記推進巻線を駆動して前記搬送装置の前記互いに反対にある側部に平行な推進力を生成し、かつ前記浮揚巻線を駆動して前記推進力と垂直な浮揚力を生成する制御電子機器を含むことを特徴とする駆動システム。
- 請求項8に記載の駆動システムであって、前記制御システムが、前記推進巻線を駆動して前記推進及び浮揚力と直交している第1の案内力を生成し、かつ前記浮揚巻線を駆動して前記第1の案内力と反対方向の第2の案内力を生成する制御電子機器を含むことを特徴とする駆動システム。
- 請求項8に記載の駆動システムであって、前記制御システムが、前記推進巻線を駆動して前記推進及び浮揚力と直交する第1及び第2の対向する案内力を生成する制御電子機器を含むことを特徴とする駆動システム。
- 請求項8に記載の駆動システムであって、前記制御システムが、前記推進及び浮揚巻線を駆動して、ローレンツ力として推進及び浮揚力を生成する制御電子機器を含むことを特徴とする駆動システム。
- 請求項8に記載の駆動システムであって、前記制御システムが、前記推進及び浮揚巻線を駆動して、マクスウェル力として案内力を生成する制御電子機器を含むことを特徴とする駆動システム。
- 処理装置であって、
搬送チャンバと、
前記搬送チャンバと連通結合している少なくとも1つの処理モジュールと、
前記搬送チャンバと前記処理モジュールとの間でワークピースを搬送する搬送装置と、
前記搬送チャンバを通して前記搬送装置を移動させるために磁力を提供する駆動システムと、を含み、
前記駆動システムが、
前記搬送装置に接続されている複数の永久マグネットと、
前記複数の永久マグネットのうちの少なくとも1つの磁界に曝されている複数の固定巻線と、
前記固定巻線に電圧を加えて前記搬送装置に磁力を提供する制御システムと、
前記搬送装置の少なくとも片側に近接して設けられて、前記搬送装置の浮揚、ピッチ及びロールの受動的安定化をもたらす強磁性コンポーネントの配列と、
を含むことを特徴とする処理装置。
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KR101841753B1 (ko) | 2006-08-18 | 2018-03-23 | 브룩스 오토메이션 인코퍼레이티드 | 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템 |
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JPH054717A (ja) * | 1991-05-30 | 1993-01-14 | Ntn Corp | 磁気浮上搬送装置 |
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KR101729301B1 (ko) | 2017-04-21 |
US20090162179A1 (en) | 2009-06-25 |
JP2015043457A (ja) | 2015-03-05 |
US8960099B2 (en) | 2015-02-24 |
JP6017508B2 (ja) | 2016-11-02 |
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JP5941677B2 (ja) | 2016-06-29 |
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