JP2012508818A5 - - Google Patents

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Publication number
JP2012508818A5
JP2012508818A5 JP2011536324A JP2011536324A JP2012508818A5 JP 2012508818 A5 JP2012508818 A5 JP 2012508818A5 JP 2011536324 A JP2011536324 A JP 2011536324A JP 2011536324 A JP2011536324 A JP 2011536324A JP 2012508818 A5 JP2012508818 A5 JP 2012508818A5
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JP
Japan
Prior art keywords
particulate material
opening
shaft
rotatable shaft
scraping means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011536324A
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English (en)
Japanese (ja)
Other versions
JP2012508818A (ja
JP5221772B2 (ja
Filing date
Publication date
Priority claimed from US12/271,250 external-priority patent/US7972443B2/en
Application filed filed Critical
Publication of JP2012508818A publication Critical patent/JP2012508818A/ja
Publication of JP2012508818A5 publication Critical patent/JP2012508818A5/ja
Application granted granted Critical
Publication of JP5221772B2 publication Critical patent/JP5221772B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011536324A 2008-11-14 2009-11-12 粒子材料の計量及びその気化 Active JP5221772B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/271,250 2008-11-14
US12/271,250 US7972443B2 (en) 2008-11-14 2008-11-14 Metering of particulate material and vaporization thereof
PCT/US2009/006082 WO2010056325A1 (en) 2008-11-14 2009-11-12 Metering of particulate material and vaporization thereof

Publications (3)

Publication Number Publication Date
JP2012508818A JP2012508818A (ja) 2012-04-12
JP2012508818A5 true JP2012508818A5 (enExample) 2012-08-02
JP5221772B2 JP5221772B2 (ja) 2013-06-26

Family

ID=41479216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011536324A Active JP5221772B2 (ja) 2008-11-14 2009-11-12 粒子材料の計量及びその気化

Country Status (7)

Country Link
US (1) US7972443B2 (enExample)
EP (1) EP2352857B1 (enExample)
JP (1) JP5221772B2 (enExample)
KR (1) KR101224564B1 (enExample)
CN (1) CN102282289B (enExample)
TW (1) TWI377260B (enExample)
WO (1) WO2010056325A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
DE102011051261A1 (de) * 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs insbesondere Verdampfungsvorrichtung dazu
CN106119781B (zh) * 2016-07-27 2018-10-30 京东方科技集团股份有限公司 蒸发装置、蒸镀设备和蒸镀方法
CN110615295A (zh) * 2018-06-19 2019-12-27 曹荣华 动态供粉装置
CN110715697B (zh) * 2019-09-25 2021-02-09 北京控制工程研究所 一种带有密封结构的适用于微克级流量的流量测量组件
CN111206228A (zh) * 2020-02-28 2020-05-29 苏州泓沵达仪器科技有限公司 高效纳米真空蒸发源
EP4340969A1 (de) 2021-05-21 2024-03-27 Merck Patent GmbH Verfahren zur kontinuierlichen aufreinigung von mindestens einem funktionalen material und vorrichtung zur kontinuierlichen aufreinigung von mindestens einem funktionalen material

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US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material

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