KR101224564B1 - 미립자 재료의 계량 및 기화 - Google Patents

미립자 재료의 계량 및 기화 Download PDF

Info

Publication number
KR101224564B1
KR101224564B1 KR1020117013478A KR20117013478A KR101224564B1 KR 101224564 B1 KR101224564 B1 KR 101224564B1 KR 1020117013478 A KR1020117013478 A KR 1020117013478A KR 20117013478 A KR20117013478 A KR 20117013478A KR 101224564 B1 KR101224564 B1 KR 101224564B1
Authority
KR
South Korea
Prior art keywords
particulate material
metering
rotatable shaft
opening
particulate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020117013478A
Other languages
English (en)
Korean (ko)
Other versions
KR20110083745A (ko
Inventor
토마스 윌리엄 폴론
마이클 롱
Original Assignee
글로벌 오엘이디 테크놀러지 엘엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 글로벌 오엘이디 테크놀러지 엘엘씨 filed Critical 글로벌 오엘이디 테크놀러지 엘엘씨
Publication of KR20110083745A publication Critical patent/KR20110083745A/ko
Application granted granted Critical
Publication of KR101224564B1 publication Critical patent/KR101224564B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G65/00—Loading or unloading
    • B65G65/30—Methods or devices for filling or emptying bunkers, hoppers, tanks, or like containers, of interest apart from their use in particular chemical or physical processes or their application in particular machines, e.g. not covered by a single other subclass
    • B65G65/34—Emptying devices
    • B65G65/40—Devices for emptying otherwise than from the top
    • B65G65/48—Devices for emptying otherwise than from the top using other rotating means, e.g. rotating pressure sluices in pneumatic systems
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/10—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation
    • G01F11/12—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation of the valve type, i.e. the separating being effected by fluid-tight or powder-tight movements
    • G01F11/20—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation of the valve type, i.e. the separating being effected by fluid-tight or powder-tight movements wherein the measuring chamber rotates or oscillates
    • G01F11/24—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation of the valve type, i.e. the separating being effected by fluid-tight or powder-tight movements wherein the measuring chamber rotates or oscillates for fluent solid material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
KR1020117013478A 2008-11-14 2009-11-12 미립자 재료의 계량 및 기화 Active KR101224564B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/271,250 2008-11-14
US12/271,250 US7972443B2 (en) 2008-11-14 2008-11-14 Metering of particulate material and vaporization thereof
PCT/US2009/006082 WO2010056325A1 (en) 2008-11-14 2009-11-12 Metering of particulate material and vaporization thereof

Publications (2)

Publication Number Publication Date
KR20110083745A KR20110083745A (ko) 2011-07-20
KR101224564B1 true KR101224564B1 (ko) 2013-01-21

Family

ID=41479216

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117013478A Active KR101224564B1 (ko) 2008-11-14 2009-11-12 미립자 재료의 계량 및 기화

Country Status (7)

Country Link
US (1) US7972443B2 (enExample)
EP (1) EP2352857B1 (enExample)
JP (1) JP5221772B2 (enExample)
KR (1) KR101224564B1 (enExample)
CN (1) CN102282289B (enExample)
TW (1) TWI377260B (enExample)
WO (1) WO2010056325A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
DE102011051261A1 (de) * 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs insbesondere Verdampfungsvorrichtung dazu
CN106119781B (zh) * 2016-07-27 2018-10-30 京东方科技集团股份有限公司 蒸发装置、蒸镀设备和蒸镀方法
CN110615295A (zh) * 2018-06-19 2019-12-27 曹荣华 动态供粉装置
CN110715697B (zh) * 2019-09-25 2021-02-09 北京控制工程研究所 一种带有密封结构的适用于微克级流量的流量测量组件
CN111206228A (zh) * 2020-02-28 2020-05-29 苏州泓沵达仪器科技有限公司 高效纳米真空蒸发源
EP4340969A1 (de) 2021-05-21 2024-03-27 Merck Patent GmbH Verfahren zur kontinuierlichen aufreinigung von mindestens einem funktionalen material und vorrichtung zur kontinuierlichen aufreinigung von mindestens einem funktionalen material

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6734142B2 (en) * 2001-04-23 2004-05-11 Monsanto Technology Llc Ammonium glyphosate compositions and process for their preparation
US20070026146A1 (en) * 2005-07-27 2007-02-01 Eastman Kodak Company Vaporizing material at a uniform rate
US20070092645A1 (en) * 2005-10-24 2007-04-26 Eastman Kodak Company Delivering particulate material to a vaporization zone

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2191255A (en) * 1934-11-16 1940-02-20 Extractol Process Ltd Process in continuous extraction systems of continuously removing from solvent-treated materials, solvents of lower specific gravity
US2233109A (en) * 1936-10-01 1941-02-25 Prest O Lite Co Inc Apparatus for producing gas and a dry residue by the reaction of a solid and a liquid
US2241425A (en) * 1936-12-21 1941-05-13 Universal Royalty And Dev Comp Apparatus for vaporizing and spraying thick liquids
US2190592A (en) * 1937-12-04 1940-02-13 Clayton Benjamin Process of and apparatus for producing soap of desired moisture content
US2392764A (en) * 1940-09-14 1946-01-08 Standard Oil Dev Co Handling pulverulent materials
US2743158A (en) * 1944-05-26 1956-04-24 Albert D Webb Process for producing uranium pentachloride
US2447789A (en) 1945-03-23 1948-08-24 Polaroid Corp Evaporating crucible for coating apparatus
US2665168A (en) * 1948-04-19 1954-01-05 Clellan Ross Pleasants Atmospheric conditioning method and apparatus
US2771836A (en) * 1951-03-31 1956-11-27 Lawrence C Denehie Corn popping machine
US3754529A (en) * 1970-06-08 1973-08-28 Nat Beryllia Corp Apparatus for continuously depositing beryllia through vaporization of a basic formate
US4517316A (en) * 1984-01-24 1985-05-14 Dasurat Enterprises Pte Ltd. Porous irrigation pipe prepared from particulate elastomer and thermoplastic binder containing controlled moisture content
US4532272A (en) * 1984-06-28 1985-07-30 Phillips Petroleum Company Creation and maintenance of the bed of a particle form evaporator
US4885211A (en) 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
US4769292A (en) 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
US4869292A (en) * 1988-05-09 1989-09-26 Sulwer Michael T Brake bleeder check valve
WO1990015768A1 (de) 1989-06-14 1990-12-27 Spido Technik Gmbh Entwicklung Dosiervorrichtung für körniges oder pulverförmiges schüttgut
US5090498A (en) * 1989-11-10 1992-02-25 M-I Drilling Fluids Company Water wash/oil wash cyclonic column tank separation system
US5709827A (en) * 1992-08-11 1998-01-20 E. Khashoggi Industries Methods for manufacturing articles having a starch-bound cellular matrix
US6383301B1 (en) * 1998-08-04 2002-05-07 E. I. Du Pont De Nemours And Company Treatment of deagglomerated particles with plasma-activated species
JP2000068055A (ja) 1998-08-26 2000-03-03 Tdk Corp 有機ｅｌ素子用蒸発源、この有機ｅｌ素子用蒸発源を用いた有機ｅｌ素子の製造装置および製造方法
US6685762B1 (en) * 1998-08-26 2004-02-03 Superior Micropowders Llc Aerosol method and apparatus for making particulate products
IT1310745B1 (it) * 1999-11-26 2002-02-22 Lawer Spa Dispositivo per l'erogazione dosata di prodotti scorrevoli.
JP2003193218A (ja) * 2001-12-27 2003-07-09 Shin Meiwa Ind Co Ltd 蒸発材料フィーダ装置
US7044288B2 (en) 2002-04-09 2006-05-16 K-Tron Technologies, Inc. Bulk material pump feeder with reduced disk jamming
US6832887B2 (en) 2002-04-09 2004-12-21 K-Tron Technologies, Inc. Bulk material pump feeder
CN100531573C (zh) * 2002-08-31 2009-08-26 孟山都技术公司 含有二羧酸组分的干燥农药组合物的制备方法
US7501152B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US7288286B2 (en) * 2004-09-21 2007-10-30 Eastman Kodak Company Delivering organic powder to a vaporization zone
US7288285B2 (en) * 2004-09-21 2007-10-30 Eastman Kodak Company Delivering organic powder to a vaporization zone
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US7625601B2 (en) 2005-02-04 2009-12-01 Eastman Kodak Company Controllably feeding organic material in making OLEDs
US7625602B2 (en) * 2005-05-03 2009-12-01 Eastman Kodak Company Controllably feeding powdered or granular material
CN101304933B (zh) * 2005-10-12 2012-09-05 克特朗技术公司 盘片堵塞减少的块状材料泵送器、柔性盘片
US7638168B2 (en) * 2005-11-10 2009-12-29 Eastman Kodak Company Deposition system using sealed replenishment container
US20090081365A1 (en) * 2007-09-20 2009-03-26 Cok Ronald S Deposition apparatus for temperature sensitive materials
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6734142B2 (en) * 2001-04-23 2004-05-11 Monsanto Technology Llc Ammonium glyphosate compositions and process for their preparation
US20070026146A1 (en) * 2005-07-27 2007-02-01 Eastman Kodak Company Vaporizing material at a uniform rate
US20070092645A1 (en) * 2005-10-24 2007-04-26 Eastman Kodak Company Delivering particulate material to a vaporization zone

Also Published As

Publication number Publication date
CN102282289B (zh) 2013-01-09
JP2012508818A (ja) 2012-04-12
WO2010056325A1 (en) 2010-05-20
TWI377260B (en) 2012-11-21
CN102282289A (zh) 2011-12-14
EP2352857B1 (en) 2014-02-12
KR20110083745A (ko) 2011-07-20
JP5221772B2 (ja) 2013-06-26
US7972443B2 (en) 2011-07-05
EP2352857A1 (en) 2011-08-10
TW201037096A (en) 2010-10-16
US20100122658A1 (en) 2010-05-20

Similar Documents

Publication Publication Date Title
KR101224563B1 (ko) 미립자 재료 계량 및 기화
KR101224564B1 (ko) 미립자 재료의 계량 및 기화
KR101224562B1 (ko) 미립자 재료 계량 및 기화
JP5189658B2 (ja) 粉末を精密に計量する気化装置
CN101111626A (zh) 向热表面供给颗粒材料
EP2398932B1 (en) Simplified powder feeding and vaporization apparatus

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20110613

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
A302 Request for accelerated examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20120919

Comment text: Request for Examination of Application

PA0302 Request for accelerated examination

Patent event date: 20120919

Patent event code: PA03022R01D

Comment text: Request for Accelerated Examination

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20121004

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20130103

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20130115

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20130116

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20151218

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20151218

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20161220

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20161220

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20171219

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20171219

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20200103

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20200103

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 20210107

Start annual number: 9

End annual number: 9

PR1001 Payment of annual fee

Payment date: 20230105

Start annual number: 11

End annual number: 11