1377260 六、發明說明： 【發明所屬之技術領域】 本發明係關於以一較大範圍之進料率將小粒徑粉末狀材 料量測入一蒸發裝置。 【先前技術】 存在一種可對正確且精確地持續量測較小數量之粉末狀 材料之需求’例如1到〇微克每秒。電子工業需要量測輸入 至一蒸發區域以用於直接氣相沉積或用於化學氣相沉積 (CVD)中之前驅物的較小數量之微粒材料。亦需要一種可 正確且精確地量測高於三位數等級之材料數量，例如ι〇〇〇 微克每秒。在許多系統中，能用相同之設備量測1到1〇〇〇 微克範圍上的粉末狀材料極為有利。舉例來說，有機發光 二極體（OLED)器件具有一通常含有一主體及摻雜物的發 光層，該主體及摻雜物以相差二到三位數等級的數量沉 積。在OLED的製造中，能使用一種用於主體、共同主體 及摻雜物材料的常見傳輸設計而獨立、持續地量測輸入至 -蒸發區域之粉末狀有機材料係—個極大地有利之處。 已熟知精確量測較小數量的粉末狀材料有其困難。使用 附加材料作為载體及添加劑以促進粉末狀材料之傳輪的系 =已有多種實例。所使用的載體包含惰性氣體、液體及固 體。任何添加劑的使用增加了抽 材枓傳輸的複雜性，因為該 载體或添加劑需要獨立於實際 處理。进目標材枓而添加、移除或 载體的使用亦增加了污染的風險 測材料的製藥業及電子製造業中尤為有害/尤^要置 142697.doc 1377260 在美國專利第3,754,529號中，Fleischner描述一種用於 傳輸與-較佳為沙子的惰性載體混合之粉末狀材料的螺旋 鑽器件。活性材料與沙子之比率據報告為1:9。傳輸一種 ，夕數為惰性載體的混合物增加了該系統之成本及複雜度， 並增加了污染材料進料的潛在可能性。 ' 美國專利申請公開案第2006/0062918號及第2006/ 0177576號使用一種傳統的螺旋鑽設計以量測粉末，其中 • 在一滑膛管中有一模型化螺桿。此量測器件亦可用作一較 大的汽相沉積系統之—部分。特定目標的汽相沉積系統為 經設計以用於製造有機發光二極體（OLED)器件的汽相沉 積系統。一OLED器件包含一基板、一陽極、一由有機複 合物製成的孔傳輸層、一具有適當摻雜物的有機發光層、 一有機電子傳輸層及一陰極。〇LED器件的吸引力在於其 較低的驅動電壓、較高亮度、較大的可視角度以及可用於 王色却> 平面發光顯示器的能力。Tang等人在其美國專利第 鲁 4,769,292號及4,885,211號中描述了此種多層〇LED器件。 在一真空環境中的物理汽相沉積係沉積用於小分子 OLED器件中之有機材料薄膜的原理性方式。此等方法廣 為人知’例如美國專利第2,447,789號中的Barr及歐洲專利 第〇 982 411號中的Tanabe等人。使用於〇lED器件之製造 中的有機材料在以延長的時段維持於理想的速率相關蒸發 溫度或接近該蒸發溫度時通常易於降解。將敏感的有機材 料向高溫暴露可引起該等分子結構的變化以及材料屬性的 相關變化。 142697.doc 1377260 為克服這些材料的熱敏性，僅較小數量的有機材料被載 入於源頭中，該等有機材料將盡可能少的加熱。利用這種 方式，該#料將在其遭受極大降解之前。此方法的局 限在於因為加熱器溫度的限制，可獲得的蒸發速率極低， 以及因為被使用之材料的較小數量，該源頭之操作時間極 短。因此必要的係對該沉積室開孔、拆卸並清理該蒸汽源 頭、重新填充該源頭、在該沉積室中重建真空以及在重新 #作之則對剛導人的有機材料脫氣超過幾個小時。該較低 的〉儿積率以及與重填充一源頭相關的頻繁且耗時之製程將 對OLED製造設備的產量產生大量限制。 將整個有機材料量加熱至大體相同之溫度的一次要後果 f於將諸如摻雜物的額外有機材料與__主體材料混合並不 實用’除非該主體及摻雜物之蒸發表現及汽相壓力極為相 似。此外，獨立源頭的標準使用在該沉積薄膜中產生一種 漸變效果，其中在最靠近該行進基板之源頭中的材料被過 度呈現於緊靠該基板的初始薄膜中，同時在最後一個源頭 中的材料被過度呈現於最後的薄膜表面中。在一單一材料 從各個源頭沉積至一基板上的先前技術多重源頭中此漸變 共同沉積不可避免。當該等終端源頭之任-者的貢獻多於 該:心源頭幾個百分比時’例如當—共同主體被使用時在 s玄沉積薄膜中的漸變尤為明顯。 共同讓與的美國專利申請公開案第2〇〇6/〇〇62918號及第 雇/_2919號藉由將材料量測至一閃火蒸發區域而克服 分離點源頭的許多缺點。美國專利申請公開案第雇/ 142697.doc 1377260 006291 8號教示在一種單一粉末傳輸機構中量測主體及摻 雜物混合物，並使用一歧管以將蒸汽散佈至該基板。美國 專利申請公開案第2006/0062919號揭示將有機蒸汽混合於 該歧管中並將材料之一混合物運送至該基板表面的能力。 然而，這些先前教示都沒有預先考慮到對獨立控制該主體 及摻雜物材料的需求。因此該傳輸機構就設計而言無法量1377260 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to the measurement of a small particle size powder material into an evaporation device at a relatively wide range of feed rates. [Prior Art] There is a need to continuously and accurately measure a small amount of powdery material, for example, 1 to 〇 micrograms per second. The electronics industry needs to measure input to an evaporation zone for direct vapor deposition or a smaller amount of particulate material for precursors in chemical vapor deposition (CVD). There is also a need for a material that can accurately and accurately measure levels above the three-digit level, such as ι 〇〇〇 micrograms per second. In many systems, it is advantageous to be able to measure powdered materials in the range of 1 to 1 microgram using the same equipment. For example, an organic light-emitting diode (OLED) device has a light-emitting layer that typically contains a body and dopants that are deposited in a number that differs by two to three digits. In the manufacture of OLEDs, it is highly advantageous to be able to independently and continuously measure the powdered organic material input to the evaporation zone using a common transport design for the body, common body and dopant materials. It is well known that it is difficult to accurately measure a small amount of powdered material. There are many examples of the use of additional materials as carriers and additives to promote the transfer of powdered materials. The carrier used contains an inert gas, a liquid, and a solid. The use of any additive increases the complexity of the transport of the crucible because the support or additive needs to be independent of the actual treatment. Addition, removal, or use of the carrier in the target material also increases the risk of contamination. The material is particularly harmful in the pharmaceutical and electronics industries. 142697.doc 1377260 In U.S. Patent No. 3,754,529, Fleischner An auger device for transporting a powdered material mixed with an inert carrier, preferably sand, is described. The ratio of active material to sand is reported to be 1:9. The transport of a mixture of inert carriers is an increase in the cost and complexity of the system and increases the potential for contaminating material feed. U.S. Patent Application Publication Nos. 2006/0062918 and 2006/0177576 use a conventional auger design to measure powder, wherein • a modeled screw is present in a skid tube. This measuring device can also be used as part of a larger vapor deposition system. A specific target vapor deposition system is a vapor phase deposition system designed to fabricate organic light emitting diode (OLED) devices. An OLED device comprises a substrate, an anode, a hole transport layer made of an organic compound, an organic light-emitting layer with a suitable dopant, an organic electron transport layer, and a cathode. The attractiveness of 〇LED devices is their low drive voltage, high brightness, large viewing angle, and the ability to be used in a color-controlled display. Such a multilayer germanium LED device is described in U.S. Patent Nos. 4,769,292 and 4,885,211. Physical vapor deposition in a vacuum environment deposits a principled approach to thin films of organic materials used in small molecule OLED devices. Such methods are well known, for example, in Barr of U.S. Patent No. 2,447,789 and Tanabe et al. in European Patent No. 982,411. Organic materials used in the manufacture of 〇lED devices are generally susceptible to degradation when maintained at or near the desired rate-dependent evaporation temperature for extended periods of time. Exposure of sensitive organic materials to high temperatures can cause changes in the molecular structure and related changes in material properties. 142697.doc 1377260 To overcome the heat sensitivity of these materials, only a small amount of organic material is loaded into the source, which will heat as little as possible. In this way, the # material will be before it suffers from extreme degradation. The limitation of this method is that due to the limitation of the heater temperature, the available evaporation rate is extremely low, and because of the small amount of material used, the source operation time is extremely short. It is therefore necessary to open the deposition chamber, disassemble and clean the steam source, refill the source, rebuild the vacuum in the deposition chamber, and degas the newly-conducted organic material for more than a few hours. . This lower rate and the frequent and time consuming process associated with refilling a source will impose significant constraints on the yield of OLED manufacturing equipment. A primary consequence of heating the entire amount of organic material to substantially the same temperature is that it is not practical to mix additional organic materials such as dopants with the __ host material unless the bulk and dopant vaporization and vapor phase pressure Very similar. In addition, the standard use of an independent source produces a gradual effect in the deposited film wherein the material in the source closest to the traveling substrate is overexposed in the initial film against the substrate while the material in the last source Exposed excessively in the final film surface. This gradual co-deposition is unavoidable in prior art multiple sources where a single material is deposited from a single source onto a substrate. When the contribution of any of the terminal sources is more than this: a few percentages of the source of the heart, such as when the common body is used, the gradient in the smectic deposited film is particularly pronounced. U.S. Patent Application Publication No. 2/6/62918 and No. 2/919919, the commonly assigned patents, overcome many of the disadvantages of the source of the separation point by measuring the material to a flash fire evaporation zone. U.S. Patent Application Publication No. 142, 697, doc 1 377 260 006 291 No. 8 teaches measuring a body and a mixture of dopants in a single powder transport mechanism and using a manifold to distribute vapor to the substrate. U.S. Patent Application Publication No. 2006/0062919 discloses the ability to mix organic vapors into the manifold and deliver a mixture of materials to the surface of the substrate. However, none of these prior teachings pre-considered the need to independently control the body and dopant materials. Therefore, the transmission mechanism cannot be designed in terms of quantity.
測於一獨立摻雜物進料所需要的較低速率，即卜⑺微克/ 秒。 美國專利中請公開案第2007/0〇847〇〇號' 美國專利申杜 公開案第鳩/〇157322號、美國專利第M32,887號及美國月 專利第7,〇44,288號揭示使用平行隔開的碟狀物將粉末從一 進^阜移動至—排出埠的粉末進㈣，該等碟狀物在一且 ::界定一容量之内腔的外殼内旋轉，該容量從該輸入埠 4出埠具有-漸增容量。這些粉末進料泵係用於較大 粒：的粉末且不適於在毫克或微克的基礎上量測粉末。 之^有這些發展，仍需要精確控制輪人至—蒸發裝置中 克到微克數量之粉末狀材料的量 【發明内容】 =種對精確控制輸入至一蒸發器件之毫克 的私末之量測及運送的需求。 此目的藉由-種用於量測及装發 現，該裝置包括： “…㈣料的裝置而實 ⑷-用於量測顆粒狀材料的量測裝置，其包含· ω—用於接收微粒材料的儲存器； 3 142697.doc 1377260 (ii)—具有一内部容積並具有用於分別從該儲存器接 收該微粒材料且用於排出該微粒材料之第一及第二開口 外殼； 一* 口的 …（丨⑴一配置於該内部容積中的可旋轉軸，該軸具有一 平=面及-與該第—及第二開口對準的周向槽以便從該健 存器接收微粒材料並排出該微粒材料； =(lv) —具有複數個齒狀物的旋轉攪拌器，其被配置於 該儲存器中並與該旋轉軸配合以流體化该微粒材料並將該 微粒材料自該儲存器傳輸至該周向槽中； " W該可旋轉軸及該内部容積連動使得該微粒材料大 體由該周向槽且不沿著該旋轉軸之剩餘部分傳輸； ⑽相對於該第二開Π配置以便到擦、與該周向槽連 動以移出留在其中的微粒材料，並且回應於該旋轉軸經由 该第二開口運遂經量測之數量的微粒材料的構件； ㈣該可旋轉軸㈣卿構件連動使得該微粒材料在 々開口被极體化成單一微顆粒或微顆粒之較小凝集體， (b)接收並蒸發經f測之微粒材料的閃火蒸發器。 本發明之一優點在於其 ^異工％坆中持續配送微克 數1的粉末並提供受控的 的進枓體積。本發明之另一個優點 可以單—微顆粒或微顆粒之較小凝集的形式配送且 =較大粒徑範圍的微粒材料，包含平均粒徑低於3峨米 之材料以及不能以諸如蟫 liL ^ . 螺釦鑽之其他配送器件配送的流動 性較差的材料。 I42697.doc 丄/zoo 【實施方式】 美國專利中請公開案第2_/_2918號及第2〇〇6/ 77576號使用-種傳統的螺旋鑽設計以量測輸入至一蒸 發裝置的微粒材料，其中在— …、 τ ^ 滑膛官内具有一模型化螺 •丁。圖丨為-種具代表性之先前技賴_結構之一截面 圖’其嫂顯示-在一滑腔螺旋鑽管17内的模型化螺旋鑽螺桿 5。一螺旋鑽結構8之螺旋鑽 在該螺桿螺旋線之螺纹之間= )轉動。 Α '、 的距離以及該螺紋高度係選擇 為足夠大以使得微粒材料 棘，而a # & 个易於搐進該螺紋線並隨其旋 疋T留於水平定向的螺旋鑽管7之底部。該微粒材 料藉由螺旋鑽螺桿5及螺 …材 被線性傳輪之間的相對移動之功效而 “n 平定向中，該微粒材料主要， 者螺旋鑽螺捍5之底部 ㈣主要化 雄碑4日 < 糊袞及刀散的形式行進。螺旌 鑽螺杯5之終端可經構且 ” 9在-較小的長度上呈有一無螺紋部9’該無螺紋部 微粒材料以便形成一:窄的 斿旛钍嬝ΛΛ 的衣形或管形形狀。此類型之蟬 紅鑽結構的—個問題在於不同的排 心之螺 隨著螺旋鑽螺桿5之角度定 …、已破硯察的係 出的材料數量件 %地改變。每個旋轉排 導致被量測之材料的蒸發速率的變化個為可變， 可突出該循環排出。使用—種垂直定2而非上半部’其 粒材料圍繞㈣旋鑽管制_均> __使得該微 出，但仍有循勺勾刀佈可稀釋該循環排 盾以化且該楼旋鑽及搜掉器之機械驅動配置 142697.doc 1377260 更為複雜。此類型的微粒材料進料裝置之一第二問題在於 其大體上只能用於能充分自由流動的材料以便能使該等材 料從一容器以一平滑流灌注。這通常需要過濾該等微粒材 料以便具有一嚴格控制的粒徑範圍。舉例來說，重量大部 分由50微米到100微米之直徑之間的顆粒組成的材料實質 上以一平滑流從一容器灌注。在這個實例中，粒徑之範圍 等於最小的受控粒徑。與之柄似，重量大部分由直徑在 100微米及200微米之間的顆粒組成的材料將實質上以一平 滑流從-容器灌注。不能平滑灌注而相反成團落下的材料 易於在僅供給一較小數量之 I里之材枓之後擠進該螺紋鑽螺桿之 螺紋中並迅速壓緊，形成—抑制螺旋㈣動的固體。 微粒材料流由多種對該等粉末顆粒之形狀、尺寸 及形狀的均一性、内聚力、料 、 、強度、表面積及水含量進行 間接S測的方法說明特徵。由 由於在该等顆粒之間沒有空氣 刀子在同度真空條件下的微粒絲 更f 儆拉材枓流一般比在大氣壓下 材㈣粒之間的複雜相互作用以及在真空條件下下 牛的/爪動性已成為對於能精確/ ,, ,,. 宅克或微克配送的持靖姐 粒材料進料機構研發# ^ ^ ^ 由任何單… 制。微粒材料流係-種不能 下述五徹底說明特徵的複雜現象，宜口r由 下述五個常用方法說明特徵。 豕/…、此由 振動鐘：該方法使用一 於一質量天平上。累積^ ’或槽，其將微粒材料傾瀉 系積的材料暂旦 錄。相對餘時間之累積材料質^场間為函數加以記 息止角…^表更易流動。 m何科經由一漏斗從—固定高 142697.doc ΆΟϋThe lower rate required for a separate dopant feed is measured (i) micrograms per second. U.S. Patent No. 2007/0,847, ', U.S. Patent Application Serial No. 鸠/〇 157 322, U.S. Patent No. M32, 887, and U.S. Patent No. 7, 〇 44, 288 disclose the use of parallel spacers. The open disc moves the powder from a feed to a powder that is discharged into the crucible, and the discs rotate in a housing that defines a volume of the inner chamber from which the volume is 埠4 The output has an increasing capacity. These powder feed pumps are used for larger particles: and are not suitable for measuring powder on a milligram or microgram basis. With these developments, it is still necessary to accurately control the amount of powdery material in the range of grams to micrograms in the evaporation device. [Inventive content] = the precise measurement of the milligram of the milligram of precision input to an evaporation device. Delivery needs. This object is used for measuring and loading, the device comprises: "...(4) material device and (4) - a measuring device for measuring granular material, comprising - ω - for receiving particulate material 3 142697.doc 1377260 (ii) - having an internal volume and having first and second open outer casings for receiving the particulate material from the reservoir and for discharging the particulate material, respectively; (丨) a rotatable shaft disposed in the interior volume, the shaft having a flat surface and a circumferential groove aligned with the first and second openings for receiving particulate material from the load and discharging the a particulate material; = (lv) - a rotary agitator having a plurality of teeth disposed in the reservoir and cooperating with the rotating shaft to fluidize the particulate material and transfer the particulate material from the reservoir to The circumferential groove; " W the rotatable shaft and the internal volume are interlocked such that the particulate material is substantially transported by the circumferential groove and not along the remainder of the rotating shaft; (10) relative to the second opening configuration To rub, move with the circumferential groove to move a particulate material retained therein, and responsive to the rotating shaft transporting the measured amount of particulate material through the second opening; (4) the rotatable shaft (4) is interlocked such that the particulate material is poled at the opening of the crucible A small agglomerate of single microparticles or microparticles, (b) a flash evaporator that receives and vaporizes the particulate material measured by f. One of the advantages of the present invention is that it continuously delivers micrograms of 1 in the % The powder provides a controlled volume of the enthalpy. Another advantage of the present invention is that it can be dispensed in the form of small agglomerates of mono- or micro-particles and = a larger particle size range of particulate material, including an average particle size of less than 3 The material of glutinous rice and the less liquid material that can not be distributed by other distribution devices such as 蟫liL ^ screw. I42697.doc 丄/zoo [Embodiment] US Patent No. 2_/_2918 and 2〇〇6/ 77576 uses a conventional auger design to measure the particulate material input to an evaporation device, where there is a modeled screw in the — 、 τ 。 。. Representative The prior art _ _ a sectional view of the structure 'the 嫂 display - a modeled auger screw 5 in a sliding cavity auger pipe 17 . A helical auger structure 8 auger between the screw thread of the screw = Rotating. The distance of Α ', and the height of the thread are selected to be large enough to cause the spinous material of the particulate material, and a # & auger tube 7 which is easy to break into the thread and is left horizontally oriented with its twist T At the bottom of the microparticle material, by the effect of the relative movement between the auger screw 5 and the screw material by the linear transfer wheel, "n-level orientation, the particulate material is mainly, the bottom of the auger screw 5 (four) is mainly The monument is carried out on the 4th < paste and knife form. The terminal end of the threaded screw cup 5 can be constructed and has a non-threaded portion 9' on the smaller length to form a narrow-shaped garment or tube. Shape. The problem with this type of enamel diamond structure is that the different snails of the core are fixed with the angle of the auger screw 5, and the amount of material that has been broken is % changed. The discharge causes the change in the evaporation rate of the material to be measured to be variable, and the circulation can be highlighted. The vertical type 2 is used instead of the upper part 'the grain material surrounds it (4) the spin control _ _ _ _ _ The micro-out, but there is still a scooping knife cloth to dilute the circulation shield and the mechanical drive configuration of the floor spin and the searcher is more complicated. 142697.doc 1377260 is more complicated. This type of particulate material feeding device A second problem is that it can only be used in general for materials that are sufficiently free to flow so that the materials can be poured from a container in a smooth flow. This typically requires filtering the particulate material to have a tightly controlled particle size range. For example, the weight is mostly 50 The material consisting of particles between meters and diameters of 100 microns is substantially perfused from a container in a smooth flow. In this example, the particle size range is equal to the smallest controlled particle size. A material consisting of particles between 100 microns and 200 microns in diameter will essentially permeate from the container in a smooth flow. Materials that cannot be smoothly poured and instead drop in groups are prone to supply only a small amount of material I. After that, it is squeezed into the thread of the threaded drill screw and quickly pressed to form a solid that inhibits the spiral (four) movement. The flow of the particulate material consists of a plurality of uniformity, cohesion, material, strength of the shape, size and shape of the powder particles. The surface area and water content are characterized by indirect S-measurement. The turbulent flow of the pulverized material is generally higher than that of the particulate material under the same vacuum condition due to the absence of air knives between the granules. The complex interaction between the cows and the claws under the vacuum conditions has become the development of the holding material for the accurate /,,,,. ^ ^ ^ By any single system. Particle material flow system - can not be described in the following five thoroughly explain the complex phenomenon of the characteristics, the mouth is r by the following five common methods to illustrate the characteristics. 豕 / ..., this by the vibration clock: the method Use a one-to-one mass balance. Accumulate ^ ' or groove, which temporarily records the material that is poured into the particulate material. The cumulative material in the relative time is a function of the value of the angle of the ... ^ table is easier to flow. m He Ke from a funnel from - fixed high 142697.doc ΆΟϋ
度傾填至一水平工你在I 十作臺上。该微粒材料累積成一錐體且該 錐體之側面與水平面所成之角度為該息止角’其中息止角 越低代表更易流動。此方法提供該材料之形狀、尺寸、空 隙率、内“、流動性、表面積及整體性質的間接量測。 —百=比壓祕指數：—固定數量的微粒材料被輕輕地傾 %配衡里R中並記錄該材料之初始體積及重量。該量 力一擊打式密度測試儀上且在-既定數次的受控 力里擊打後記錄最铢體藉。 私μ, . ^ 、積百刀比壓縮值越低代表更易流 動。此方法提供對測試材料之尺寸及形狀之均一性、可變 形性、表面積、内聚力及水含量的間接量測。 臨界孔直# 一圓柱形料器之底部排出 ^孔直徑的環嵌合。該 /、- 樣本微粒材科而用一固定體藉由經由一漏斗傾渴 在：：二快門釋放操縱桿被慢慢轉動至打開位置。如果 測::；!：試之後可透過該材料樣本看到-開腔則該 成功的。該流動性指數作為該材料自由落下 ，量測，其恤：二料内聚力及梹強度之 、T值越小代表更易流動。 中=轉一固定體積的材料被載入至-半透明的轉鼓 計算突崩之間的平均時間測突崩之總數量； 更易流動。 之間的平均時間越低代表 由[叫等人申請的共同讓與之美國專利申請 970,548號揭不一種以三維截 ’、 蜩不於圖2中的微粒材料 142697.doc 1377260 進料裝置，該裝置克服-些先前遭遇的微粒材料進料限 制。此裝置包含一在内部容積150中並具有一經由一第一 開口 i55從-具有-授拌器之倚存器接收微粒材料之周向 槽⑺的可旋轉軸no。-固定到擦器185隨著一可旋轉轴 no旋轉而與周向槽175連動以便從該周向槽移出微粒材 料、經由一第二開口 160運送經量測的微粒材料至一加熱 閃火蒸發器120。 可旋轉軸170被一馬達（未顯示）轉動。此設計之一裝置 較適宜於在高度真空下進料具有先前技術之螺旋鑽結構所 需之相同狹窄粒徑範圍的微粒材料。自由流動微粒材㈣ 經由第二開口 16〇作為單獨的顆粒或顆粒之較小凝集而進 料。具有較小粒徑或-更寬粒捏分佈的微粒材料可展現塊 狀及突崩流。此等微粒材料將不能被該攪拌器充分流體化 且將不能可靠地從第一開口 155進入周向槽175。任何進入 該周向槽的微粒狀材可在其被麼抵固定刮㈣185時變得 緊密並可作為隨機長度的短桿狀物而離開第二㈤口⑽。 經配送的材料桿狀物之隨機體積在離開一蒸發裝置的蒸汽 通量中產生隨機差異。這些蒸汽通量差異並不理想，因為 其導致沉積膜厚度之差異。 固定刮擦器〗85緊靠加熱閃火蒸發器12〇並可達到一足夠 熔化:些有機粉末的溫度。被熔化的微粒材料不會作為微 克或毫克數ϊ之顆粒之一連續流落至閃火蒸發器，但 易於作為不規則體積累積並落下或流動。因此，儘管圖2 之裝置在運送穩定的經量測數量之微粒材料方面比先前技 142697.doc 12 1377260 術更加以改善，但仍存在一些其無法良好操作的材料。因 此仍然需要精確控制輸入至一蒸發裝置之微克至毫克數量 的微粒材料之量測。 現在參考圖3，其顯示一種用於蒸發微粒材料的裝置之 -實施例的三維截面圖…蒸發裝置19㈣_種用於量測 及蒸發微粒材料的裝置並包含一量測裝置，該量測裝置量 測該微粒材料並包含：—用於接收微粒材料的儲存器；一 具有一内部容積以及第—及第二開口的外殼；—配置於該 内P合積中並具有-平滑表面、一對應於該内部容積之形 狀的形狀及-周向槽的可旋轉軸；以及一冷卻到擦器，該 冷卻刮擦器在其末端具有實質上與該旋轉軸中之周向槽相 同的截Φ。亥里測裝置進一步包含一配置於該儲存器中的 授拌器及-用於使被運送至該閃火蒸發器之微粒材料流體 化的機構。蒸發裝置190進一步包含一接收並蒸發經量測 之微粒材料的閃火蒸發器。這些組件將被更詳細地描述。 此裝置亦被描述於上述由Long等人於⑼⑽年^月14日申請 之/、同讓與的題為r Particulate Μ仙如g andTilt to a level of work, you are on the stage of I. The particulate material accumulates into a cone and the angle of the side of the cone with the horizontal plane is the angle of repose' wherein the lower the angle of repose, the more flowable. This method provides an indirect measurement of the shape, size, void fraction, internal ", flow, surface area and overall properties of the material. - 100 = specific pressure index: - a fixed amount of particulate material is gently balanced The initial volume and weight of the material are recorded in R. The force is recorded on a hit density tester and recorded in the controlled force of a predetermined number of times to record the most corpus lute. Private μ, . ^ , product The lower the compression ratio of the 100-knife ratio, the easier the flow. This method provides indirect measurement of the uniformity, deformability, surface area, cohesion and water content of the size and shape of the test material. Critical hole straight #一柱料器The bottom is discharged into the ring of the diameter of the hole. The /, - sample particle material is cooled by a fixed body by a funnel through: a two shutter release lever is slowly rotated to the open position. ;!: After the test, it can be seen through the sample of the material - the cavity is successful. The fluidity index is freely dropped as the material, and the measurement: the second cohesion and the strength of the crucible, the smaller the T value, the more mobile Medium = turn one fixed The accumulated material is loaded into the semi-transparent drum to calculate the total number of time between the collapses and the total number of collapses; more flowable. The lower the average time between the two represents the common transfer by the [call et al. U.S. Patent Application Serial No. 970,548 discloses a particulate material 142, 697. The volume 150 has a rotatable shaft no of a circumferential groove (7) that receives the particulate material from a dispenser having a first opening i55. - is fixed to the wiper 185 along with a rotatable shaft no Rotating in conjunction with the circumferential groove 175 to remove particulate material from the circumferential groove, transporting the measured particulate material through a second opening 160 to a heated flash evaporator 120. The rotatable shaft 170 is driven by a motor (not shown) Rotating. One of the devices of this design is suitable for feeding a particulate material having the same narrow particle size range required by the prior art auger structure under high vacuum. The free flowing particulate material (4) is passed through the second opening 16 The individual particles or particles are less agglomerated to feed. The particulate material having a smaller particle size or a wider particle pinch distribution can exhibit bulk and collapse flow. These particulate materials will not be sufficiently fluidized by the agitator. And it will not be able to reliably enter the circumferential groove 175 from the first opening 155. Any particulate material entering the circumferential groove may become tight when it is abutted against the fixed wiper (4) 185 and may serve as a short rod of random length. Leaving the second (f) mouth (10). The random volume of the material rods dispensed produces a random difference in the steam flux leaving an evaporation device. These vapor flux differences are not ideal because they result in differences in the thickness of the deposited film. The wiper 〗 85 abuts the flash evaporator 12 〇 and can reach a temperature sufficient to melt: some organic powder. The molten particulate material does not continuously flow to the flash evaporator as one of micrograms or milligrams of particles, but is liable to accumulate as an irregular volume and to fall or flow. Thus, while the apparatus of Figure 2 is more improved in transporting a stable, measured amount of particulate material than prior art 142697.doc 12 1377260, there are still materials that do not work well. Therefore, it is still necessary to accurately control the measurement of the microgram to the milligram amount of particulate material input to an evaporation device. Referring now to Figure 3, there is shown a three-dimensional cross-sectional view of an embodiment of an apparatus for vaporizing particulate material. Evaporation apparatus 19 (4) - Apparatus for measuring and evaporating particulate material and comprising a measuring apparatus, the measuring apparatus Measureing the particulate material and comprising: a reservoir for receiving particulate material; an outer casing having an inner volume and first and second openings; - disposed in the inner P-combination and having a - smooth surface, a correspondence The shape of the shape of the inner volume and the rotatable shaft of the circumferential groove; and a cooling to the wiper having a truncated Φ at its end substantially the same as the circumferential groove in the rotating shaft. The kelly device further includes a stirrer disposed in the reservoir and a mechanism for fluidizing particulate material transported to the flash evaporator. The evaporation device 190 further includes a flash evaporator that receives and vaporizes the measured particulate material. These components will be described in more detail. This device is also described in the above-mentioned application by Long et al. (9) (10) on February 14th, and the same as the title of r Particulate Μ仙如g and
Vaporization」的美國專利申請案第號中。 儲存器230用於接收微粒材料β該微粒材料可包含一 單一組分，或可包含兩個或更多個不同的材料組分，各具 有不同的蒸發溫度。雖然未顯示，但儲存器230可包含 在其上具有一較大的儲存及進料裝置以增加可被載入之 微粒材料的體積。此等容器及進料裝置已被以叩等人描述 於美國專利苐7,288,285號中。儲存器23〇處於一外殼24〇中 142697.doc 1377260 並包含一使儲存器23θ中之微粒材料流體化的攪拌器29〇。 外λχ240較好由導熱材料構成，例如铭該材料可被主動 V卻並可將儲存器23〇中之微粒材料維持於一遠低於該微 粒材料之有效蒸發溫度的溫度。 外殼240亦包含一内部容積25〇。一可旋轉軸27〇具有一 平滑表面及一對應於内部容積25〇之形狀的形狀，例如此 貝施例中的圓柱形，並被配置於内部容積25〇中。可旋轉 軸270亦具有一周向槽，在其他圖式中應變得明顯。較佳 的係可旋轉轴270由一諸如鎳或鉬的導熱材料製成，該材 料可主動冷卻並可將該周向槽中的微粒材料維持於—遠低 於該微粒材料之有效蒸發溫度的溫度。諸如氮化鈦或金剛 石狀*厌的硬塗層可有利地塗布至内部容積25〇及可旋轉軸 270。一馬達（未顯示）以一預定速率旋轉可旋轉軸27〇。該 馬達亦可用於旋轉一攪拌器290。外殼24〇亦包含第—及第 —開口，該等開口之性質及功能將變得明顯。蒸發裝置 190亦包含一在一蒸發室2〇〇内的可旋轉閃火蒸發器㈣。 可旋轉閃火蒸發器21 〇經由一磁性偶合件32〇由一驅動軸 325驅動。一輻射遮罩22〇被用於將一加熱蒸發室2〇〇熱隔 離於經冷卻的量測裝置。 。玄進料率均一性在該微粒材料靠近該可旋轉軸之微 粒材料被攪拌器流體化時得到改善，以便穩定地填充—周 向槽275之容積。這可藉由用攪拌器29〇以一可依據於該特 定微粒材料之粒徑及屬性而改變的旋轉速度緩慢攪拌該微 粒材料而完成。圖4更詳細地顯示圖3之裝置之一部分之i 142697.doc 14 1377260 實施例的三維截面圖。此實施例亦被描述於上述由乙叫等 人於2008年11月14日申請之共同讓與的題為「parUcuiateU.S. Patent Application Serial No. 5, to Vaporization. The reservoir 230 is for receiving particulate material β. The particulate material may comprise a single component or may comprise two or more different material components, each having a different evaporation temperature. Although not shown, the reservoir 230 can include a larger storage and feeding device thereon to increase the volume of particulate material that can be loaded. Such containers and feed devices are described in U.S. Patent No. 7,288,285. The reservoir 23 is in a housing 24 142 697.doc 1377260 and includes an agitator 29 流体 that fluidizes the particulate material in the reservoir 23θ. The outer λ 240 is preferably constructed of a thermally conductive material, such as the active V, and maintains the particulate material in the reservoir 23 at a temperature well below the effective evaporation temperature of the particulate material. The outer casing 240 also includes an internal volume 25". A rotatable shaft 27A has a smooth surface and a shape corresponding to the shape of the inner volume 25A, such as the cylindrical shape in the embodiment, and is disposed in the inner volume 25A. The rotatable shaft 270 also has a circumferential groove which should become apparent in other figures. Preferably, the rotatable shaft 270 is made of a thermally conductive material such as nickel or molybdenum which is actively cooled and maintains the particulate material in the circumferential groove - well below the effective evaporation temperature of the particulate material. temperature. A hard coat layer such as titanium nitride or diamond-like may be advantageously applied to the inner volume 25 〇 and the rotatable shaft 270. A motor (not shown) rotates the rotatable shaft 27A at a predetermined rate. The motor can also be used to rotate an agitator 290. The outer casing 24 also includes first and first openings, the nature and function of which will become apparent. The evaporation unit 190 also includes a rotatable flash evaporator (4) in an evaporation chamber 2〇〇. The rotatable flash evaporator 21 is driven by a drive shaft 325 via a magnetic coupling member 32. A radiation mask 22 is used to isolate a heated evaporation chamber 2 from the cooled measuring device. . The uniform feed rate uniformity is improved when the particulate material of the particulate material adjacent to the rotatable shaft is fluidized by the agitator to stably fill the volume of the circumferential groove 275. This can be accomplished by slowly agitating the particulate material with a stirrer 29 at a rotational speed that varies depending on the particle size and properties of the particular particulate material. Figure 4 shows in more detail a three-dimensional cross-sectional view of an embodiment of the apparatus of Figure 3, i 142697.doc 14 1377260. This embodiment is also described in the above-mentioned co-contribution entitled "parUcuiate" filed on November 14, 2008 by B. et al.
Material Metering and Vaporization」的美國專利申請案第 12/271，211號中。可旋轉軸27〇具有一與外殼24〇中之一第 一開口 255及一第二開口 26〇對準的狹窄周向槽275。第一 • 開口 255用於從該儲存器接收微粒材料至周向槽275，且第 二開口 260用於從周向槽275排出該微粒材料至一蒸發室 籲 2 0 0。搜拌器2 9 0為-旋轉搜拌器並具有複數個細線搜摔器 齒狀物295且被配置於接收微粒材料的儲存器23〇中。在此 。兒明中Ik著该攪拌器290在順時針方向中旋轉，攪拌器齒 狀物2 9 5流體化該微粒材料之大部但其末端將該微粒材料 從該儲存器輸送至周向槽275中。攪拌器齒狀物295之流體 化及輪送屬性可藉由防止該儲存@中之材料橋跨該周向槽 而用微粒材料均勻填充周向槽275在第一開口 255處的暴露 容積。一在可旋轉軸270之旋轉方向中處於開口 255處的楔 藝形入口 225可幫助將該微粒材料引導至周向槽275中。可旋 轉軸270之尺寸接近外殼24〇中之内部容積的直徑。利用這 種方式，該可旋轉軸270及該内部容積連動以實質上藉由 周向槽275且不沿著可旋轉軸27〇之剩餘部分輸送微^材 料。攪拌器290及可旋轉軸270可例如藉由齒輪連接，以便 在相對的方向中旋轉並藉此從儲存器23〇經由第一開口 255 持續輸送微粒材料至周向槽275中然後到第二開口 26〇，該 微粒材料在該第二開口被排出至蒸發室2〇〇。外殼MO中之 内部容積為一對可旋轉軸27〇的緊密配合件。該旋轉軸"Ο 142697.doc 15 1377260 及該内部容積在可旋轉軸27〇轉動時連動以便移除徑向射 出超過周向槽275的微粒材料❶因此该微粒材料用一高度 控制的材料體積填充該周向槽。一振盪刮擦器285被配^ 於第二開口 260且在其末端具有與周向槽275相同的截面。 振盪到擦盗285與該周向槽在可旋轉軸27〇旋轉時連動以便 移出停留於該周向槽中的微粒材料，迫使該微粒材料離開 第二開口 260。振盪刮擦器285被一致動器235促使沿著其 長度振盪以便在第二開口 2 6 〇流體化該微粒材料使得回應 於方疋轉之軸，經量測數量的排出微粒材料作為較小顆粒， 例如以較小微顆粒之形式或微顆粒之較小凝集體之形式或 者兩者，落入該蒸發室200而非作為隨機長度的桿狀物落 下。該等材料顆粒以一由致動器235控制的頻率及一由可 ^轉軸270之角度速度控制的體積進料率落於可旋轉閃火 热發器210上，並在接觸後蒸發。在圖3中，理想的係可旋 轉閃火蒸發器2H)為-種具有一圓柱形或圓錐形形狀的開 孔網狀玻態碳結構，但亦可採取在表面上具有一系列精細 周向或螺旋槽的固態圓柱體或圓錐體形式。圓錐形可旋轉 閃火蒸發器210可經由-被齒輪接合至可旋轉轴27〇的磁性 偶合件320而旋轉，如圖3所示。相比於該圓錐體固定之情 況可旋轉閃火瘵發器210可有效地將該微粒材料配送於 一更大的加熱區域上。這使得材料顆粒可直接落在可旋轉 閃火蒸發器210之表面i，且相比於該等顆粒落在彼此之 上的情況可更快速地蒸發。以較高的微粒材料進料率，落 在一固定蒸發元件上的顆粒可在其落在先前配送之顆粒上 142697.doc -16- 1377260 時累積。此累積可產生一阻礙閃火蒸發的絕緣層並由於該 微粒材料在升高溫度的長時間停留而導致材料降解。向各 個材料顆粒提供直接進入閃火蒸發器的方式可提供最快速 的蒸發並最小化該微粒材料之降解。 圖5更詳細地顯示根據本發明的圖3之裝置之一部分的截 面圖並顯示本發明的顯著特徵。如圖4所示，該攪拌器 290、儲存器no、可旋轉轴17〇以及第一及第二開口 (255、260)之功能相同。授拌器29〇具有複數個細線搜拌器 齒狀物295並被配置於接收微粒材料的儲存器23〇中。該攪 拌器290在順時針方向t旋轉，使得齒狀物295將微粒材料 傳輸至可旋轉軸270中的周向槽275中。授拌器29〇及可旋 轉軸270可被齒輪連接以便在相對的方向中旋轉並藉此經 由第-開口 255從儲存器23〇持續傳送微粒材料至周向槽 275中然後至第二開口 ，該微粒材料在該第二開口施 排出至蒸發室細中…固定到擦器28〇被整合至—外殼 240以保持冷卻，並在其末 ^ ^ 、另π貝上與周向槽275相同 的截面以便將該周向神φ所人女 “ ㈣心中所含有的微粒材料移出並在可旋 轉軸270在料針方向中 °亥材枓離開第二開口 260。可鉍轉軸27〇以一種理論上以—逆 歇性的動作旋轉，該卩八動 ，向動作的間 将4大。P刀動作破順時針方向 作段打斷。該軸之可逆旋轉與固定到擦… 逆時針動作可發播从 ①° 連動使得該 時針動作可發揮作用㈣掉在第二:= 時該簡單的順 形式配送的微粒材料或使其流體化 :#狀物之 將其打斷成較短的受 I42697.doc -17· uw 控體積。被排出的微粒材料作為較小顆幸立，例如單一微顆 ;或微科粒之較小凝集體或兩者，落入蒸發室酬中而非 =為隨機長度之桿狀物^。轴振盈的頻，及幅度可被改 2以便在第二開口 260最優化地攪拌或流體化微粒材料使 付其作為統一體積的較小顆粒配送，例如單一微顆粒或微 顆粒之較小凝集體，或^者。該等材料顆粒以—由振盡控 制的頻率及-由可旋轉軸270之角度速度控制的體積進料 率落於可旋轉閃火蒸發器210上，並在接觸後蒸發。 圖6為圖3之蒸發裝置之一戴面圖，其顯示該裝置中之一 可旋轉閃火蒸發器。可旋轉閃火蒸發器21〇具有一圓錐形 狀且可看到其磁性偶合件。如前所述，圓錐形閃火蒸發器 210可由網狀玻態碳發泡體、諸如碳化矽發泡體之陶瓷發 泡體或諸如錄發泡體之金屬發泡體構成。圓錐形閃火蒸發 益亦可由一在其表面上具有一系列精細周向或螺旋槽的固 態陶瓷或金屬材料構成。此等溝槽促進精細材料顆粒之停 留直到其從忒旋轉錐表面蒸發。此網狀材料結構，例如玻 態碳之使用已被描述於Long等人申請的上述共同受讓之美 國專利申請案第11/834,039號中。 圖7為圖6之可旋轉間火蒸發器之三維視圖，其顯示用於 在蒸發室2 0 0内旋轉可旋轉閃火蒸發器2丨〇而無需較冷的磁 性驅動結合件以及較熱的蒸發元件之實體接觸或破壞蒸發 室200之蒸汽整體性的磁性偶合件32〇。該偶合包含多個經 由磁性偶合件32〇附接至一旋轉驅動軸325的磁鐵315，該 等磁鐵與附接至可旋轉閃火蒸發器2 1〇的驅動架34〇連動。 142697.doc -18· ^77260 。亥閃火瘵發器及其附接的驅動架被支撐於一陶瓷軸承（圖6 之軸承33 5上）》在較熱的可旋轉閃火蒸發器21〇及冷卻旋 轉驅動軸325之間的非接觸磁性驅動抑制其間的熱流，藉 此使可旋轉閃火蒸發器21()可被來自蒸發室之輕射加熱 而無需使用與該閃火蒸發器一同旋轉的附加加熱元件或使 用滑環以便傳輸能量至該等附加的加熱元件。磁性偶合件 • 320進-步消除對圍繞至可旋轉閃域發器210的旋轉驅動 • 連接進行密封之需求。該磁性偶合件在超過6〇(TC的溫度 亦有效，因為該等磁鐵315被遮蔽並維持冷卻同時該等低 碳鋼驅動架3.接近7〇代之溫度時仍保持其低磁阻性。 【圖式簡單說明】 圖1顯示一種先前技術的粉末進料裝置之終端之一截面 園， 圖2顯示一種不同的粉末進料《置之—部分的三維截面 rg~! · 園， ^ 圖3顯示一種根據本發明的蒸發裝置之-實施例的三維 載面圖； 圖4顯示圖3之蒸發裝置之一實施例經由一不同截面平面 的三維截面圖； 圖5根據本發明更詳細地顯示圖3之一部分的截面圖； 圖6為圖3之蒸發裝置之一截面圖，其顯示該裝置中之_ 可旋轉閃火蒸發器；及 圖7為圖6之可旋轉閃火蒸發器之三維視圖，其顯示一用 於驅動該可旋轉閃火蒸發器的磁性偶合件。 142697.doc •19· 1377260 【主要元件符號說明】 5 螺旋鑽螺桿 7 螺旋鑽管 8 螺旋鑽結構 9 無螺紋部 120 閃火蒸發器 150 内部容積 155 第一開口 160 第二開口 170 可旋轉軸 175 周向槽 185 固定到擦器 190 蒸發裝置 200 蒸發室 210 可旋轉閃火蒸發器 220 輻射遮罩 225 楔形入口 230 儲存器 235 致動器 240 外殼 250 内部容積 255 第一開口 260 第二開口 270 可旋轉轴 142697.doc -20- 1377260U.S. Patent Application Serial No. 12/271,211, the disclosure of which is incorporated herein by reference. The rotatable shaft 27A has a narrow circumferential groove 275 aligned with one of the first opening 255 and the second opening 26'' of the outer casing 24''. The first opening 255 is for receiving particulate material from the reservoir to the circumferential groove 275, and the second opening 260 is for discharging the particulate material from the circumferential groove 275 to an evaporation chamber. The cultivator 2 90 is a rotary sifter and has a plurality of fine wire seeker teeth 295 and is disposed in a reservoir 23 接收 that receives the particulate material. here . In the first embodiment, the agitator 290 is rotated in a clockwise direction, and the agitator teeth 259 fluidize most of the particulate material but the end thereof transports the particulate material from the reservoir to the circumferential groove 275. . The fluidization and transfer properties of the agitator teeth 295 can uniformly fill the exposed volume of the circumferential groove 275 at the first opening 255 with particulate material by preventing the material in the reservoir from bridging the circumferential groove. A wedge shaped inlet 225 at opening 255 in the direction of rotation of the rotatable shaft 270 can assist in directing the particulate material into the circumferential groove 275. The size of the rotatable shaft 270 is close to the diameter of the inner volume in the outer casing 24〇. In this manner, the rotatable shaft 270 and the interior volume are interlocked to deliver the micro-material substantially by the circumferential groove 275 and not along the remainder of the rotatable shaft 27〇. The agitator 290 and the rotatable shaft 270 can be coupled, for example, by gears to rotate in opposite directions and thereby continuously transport particulate material from the reservoir 23 through the first opening 255 into the circumferential groove 275 and then to the second opening 26〇, the particulate material is discharged to the evaporation chamber 2〇〇 at the second opening. The internal volume in the outer casing MO is a close fitting of a pair of rotatable shafts 27〇. The rotating shaft " 697 142697.doc 15 1377260 and the internal volume are interlocked as the rotatable shaft 27 is rotated to remove particulate material that radially exits the circumferential groove 275, so that the particulate material uses a height-controlled material volume Fill the circumferential groove. An oscillating wiper 285 is fitted to the second opening 260 and has the same cross section at its end as the circumferential groove 275. The oscillating to wiper 285 interlocks with the circumferential groove as the rotatable shaft 27 turns to remove the particulate material remaining in the circumferential groove, forcing the particulate material away from the second opening 260. The oscillating wiper 285 is urged by the actuator 235 to oscillate along its length to fluidize the particulate material at the second opening 26 such that the measured amount of discharged particulate material is measured as smaller particles in response to the axis of the square turn. For example, in the form of smaller microparticles or smaller aggregates of microparticles or both, fall into the evaporation chamber 200 rather than falling as a rod of random length. The particles of material fall onto the rotatable flash firer 210 at a frequency controlled by the actuator 235 and a volumetric feed rate controlled by the angular velocity of the spindle 270 and evaporate upon contact. In Fig. 3, the ideal rotatable flash evaporator 2H) is an open-cell network glassy carbon structure having a cylindrical or conical shape, but may also have a series of fine circumferential directions on the surface. Or a solid cylindrical or conical form of a spiral groove. The conical rotatable flash fire evaporator 210 is rotatable via a magnetic coupling 320 that is geared to the rotatable shaft 27A, as shown in FIG. The rotatable flasher 210 can effectively dispense the particulate material onto a larger heated area than if the cone were fixed. This allows the material particles to fall directly onto the surface i of the rotatable flash fire evaporator 210 and evaporate more quickly than if the particles landed on each other. At higher particulate material feed rates, particles falling on a fixed evaporation element can accumulate as they fall on previously dispensed particles 142697.doc -16 - 1377260. This accumulation can result in an insulating layer that hinders flash evaporation and material degradation due to the long-term residence of the particulate material at elevated temperatures. Providing direct access to the flash evaporator to each of the material particles provides the fastest evaporation and minimizes degradation of the particulate material. Figure 5 shows in more detail a cross-sectional view of a portion of the apparatus of Figure 3 in accordance with the present invention and shows salient features of the present invention. As shown in Fig. 4, the agitator 290, the reservoir no, the rotatable shaft 17A, and the first and second openings (255, 260) have the same function. The agitator 29 has a plurality of fine wire picker teeth 295 and is disposed in a reservoir 23 of the receiving particulate material. The agitator 290 rotates in a clockwise direction t such that the teeth 295 transport the particulate material into the circumferential grooves 275 in the rotatable shaft 270. The agitator 29 and the rotatable shaft 270 can be geared for rotation in opposite directions and thereby continuously transport particulate material from the reservoir 23 through the first opening 255 into the circumferential groove 275 and then to the second opening, The particulate material is discharged to the evaporation chamber in the second opening... fixed to the wiper 28 and integrated into the outer casing 240 to maintain cooling, and at the end thereof, the same as the circumferential groove 275 The cross-section is such that the particulate material contained in the heart of the "fourth" female body is removed and exits the second opening 260 in the direction of the needle in the direction of the needle of the rotatable shaft 270. The shaft can be rotated in a theoretical manner. Rotate with the action of the reverse action, the movement of the movement will be 4 large. The movement of the P knife will be interrupted in a clockwise direction. The reversible rotation of the shaft and the fixation to the wipe... Counterclockwise action can be broadcast The interlocking action from 1° makes the hour hand action work. (4) When the second:= is dropped, the simple cis-formed particulate material is fluidized or fluidized: #状的断断为为短的被 I42697.doc -17· uw control volume. The discharged particulate material is used as Small particles, such as a single microparticle; or a smaller agglomerate of micrograin or both, fall into the evaporation chamber instead of = a rod of random length ^. The frequency and amplitude of the shaft vibration It is modified 2 to optimally agitate or fluidize the particulate material at the second opening 260 to dispense it as a smaller volume of uniform volume, such as a single agglomerate or a smaller agglomerate of microparticles, or the like. The particles fall on the rotatable flash evaporator 210 at a frequency controlled by the vibration and - a volumetric feed rate controlled by the angular velocity of the rotatable shaft 270, and evaporate after contact. Figure 6 is an evaporation device of Figure 3. A wear mask showing one of the rotatable flash evaporators in the device. The rotatable flash evaporator 21 has a conical shape and can see its magnetic coupling. As previously described, cone flash evaporation The device 210 may be composed of a reticulated glassy carbon foam, a ceramic foam such as a tantalum carbide foam, or a metal foam such as a foamed foam. The conical flash fire evaporation may also have one on its surface. a series of fine circumferential or spiral grooves of solid ceramic or gold The composition of the material promotes the retention of the fine material particles until they evaporate from the surface of the crucible rotating cone. The use of this web material structure, such as glassy carbon, has been described in the above-mentioned commonly assigned US patent filed by Long et al. Application No. 11/834,039. Figure 7 is a three-dimensional view of the rotatable interstitial evaporator of Figure 6 showing the rotation of the rotatable flash evaporator 2 in the evaporation chamber 200 without cold The magnetic drive coupling and the magnetic coupling element of the relatively hot evaporation element contact or destroy the vapor coupling integrity 32 of the evaporation chamber 200. The coupling includes a plurality of magnetic couplings 32 attached to a rotary drive shaft 325 via the magnetic coupling 32 Magnets 315 are associated with the drive frame 34A attached to the rotatable flash evaporator 2 1 . 142697.doc -18· ^77260. The flashing torch and its attached drive frame are supported on a ceramic bearing (on bearing 33 5 of Figure 6) between the hotter rotatable flash evaporator 21 and the cooling rotary drive shaft 325 The non-contact magnetic drive suppresses heat flow therebetween, whereby the rotatable flash evaporator 21() can be heated by light from the evaporation chamber without the use of additional heating elements rotating with the flash evaporator or using a slip ring Energy is transferred to the additional heating elements. Magnetic Couplings • 320-step elimination eliminates the need for a rotary drive around the rotatable flash generator 210. The magnetic coupling is also effective at temperatures above 6 〇 (TC is also effective because the magnets 315 are shielded and maintained cool while the low carbon steel drive cages maintain their low reluctance when approaching the temperature of 7 generations. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows a cross-section of a terminal of a prior art powder feeding device, and Fig. 2 shows a different powder feed "a three-dimensional cross-section of the portion of the powder rg~! · Garden, ^ Figure 3 A three-dimensional cross-sectional view showing an embodiment of an evaporation device according to the present invention; FIG. 4 shows a three-dimensional cross-sectional view of an embodiment of the evaporation device of FIG. 3 via a different cross-sectional plane; FIG. 5 shows a diagram in more detail according to the present invention. Figure 3 is a cross-sectional view of one of the evaporation devices of Figure 3, showing the rotatable flash fire evaporator in the device; and Figure 7 is a three-dimensional view of the rotatable flash fire evaporator of Figure 6. It shows a magnetic coupling for driving the rotatable flash evaporator. 142697.doc •19· 1377260 [Main component symbol description] 5 Auger screw 7 Auger pipe 8 Auger structure 9 Unthreaded part 120 Flash Fire evaporation 150 150 internal volume 155 first opening 160 second opening 170 rotatable shaft 175 circumferential groove 185 fixed to wiper 190 evaporation device 200 evaporation chamber 210 rotatable flash evaporator 220 radiation mask 225 wedge inlet 230 reservoir 235 Actuator 240 housing 250 internal volume 255 first opening 260 second opening 270 rotatable shaft 142697.doc -20- 1377260
275 280 285 290 295 315 320 325 335 340 周向槽 固定刮擦器 振盪到擦器 攪拌器 攪拌器齒狀物 磁鐵 磁性偶合件 驅動軸 軸承 驅動架275 280 285 290 295 315 320 325 335 340 Circumferential groove Fixed wiper Oscillation to wiper Stirrer Stirrer magnet Magnet Magnetic coupling Drive shaft Bearing Drive frame
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