JP2012501252A5 - - Google Patents
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- Publication number
- JP2012501252A5 JP2012501252A5 JP2011525047A JP2011525047A JP2012501252A5 JP 2012501252 A5 JP2012501252 A5 JP 2012501252A5 JP 2011525047 A JP2011525047 A JP 2011525047A JP 2011525047 A JP2011525047 A JP 2011525047A JP 2012501252 A5 JP2012501252 A5 JP 2012501252A5
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- layer
- particles
- translucent film
- meth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims 11
- 239000011230 binding agent Substances 0.000 claims 8
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims 5
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims 5
- 238000005498 polishing Methods 0.000 claims 5
- 239000002131 composite material Substances 0.000 claims 4
- 239000002243 precursor Substances 0.000 claims 4
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims 3
- 239000004721 Polyphenylene oxide Substances 0.000 claims 3
- 239000002253 acid Substances 0.000 claims 3
- 150000001735 carboxylic acids Chemical class 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- 229920000570 polyether Polymers 0.000 claims 3
- 229920000193 polymethacrylate Polymers 0.000 claims 3
- 239000011164 primary particle Substances 0.000 claims 3
- 239000007795 chemical reaction product Substances 0.000 claims 2
- 230000003750 conditioning effect Effects 0.000 claims 2
- 239000006185 dispersion Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 238000007373 indentation Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US9252108P | 2008-08-28 | 2008-08-28 | |
| US61/092,521 | 2008-08-28 | ||
| PCT/US2009/052188 WO2010025003A2 (en) | 2008-08-28 | 2009-07-30 | Structured abrasive article, method of making the same, and use in wafer planarization |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012501252A JP2012501252A (ja) | 2012-01-19 |
| JP2012501252A5 true JP2012501252A5 (https=) | 2012-07-05 |
| JP5351967B2 JP5351967B2 (ja) | 2013-11-27 |
Family
ID=41722203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011525047A Expired - Fee Related JP5351967B2 (ja) | 2008-08-28 | 2009-07-30 | 構造化研磨物品、その製造方法、及びウエハの平坦化における使用 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8251774B2 (https=) |
| EP (1) | EP2327088B1 (https=) |
| JP (1) | JP5351967B2 (https=) |
| KR (1) | KR101602001B1 (https=) |
| CN (1) | CN102138203B (https=) |
| TW (1) | TWI429735B (https=) |
| WO (1) | WO2010025003A2 (https=) |
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105713568B (zh) | 2010-11-01 | 2018-07-03 | 3M创新有限公司 | 用于制备成形陶瓷磨粒的激光法、成形陶瓷磨粒以及磨料制品 |
| WO2013003830A2 (en) | 2011-06-30 | 2013-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particles of silicon nitride |
| US9517546B2 (en) | 2011-09-26 | 2016-12-13 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming |
| CN102492233A (zh) * | 2011-12-05 | 2012-06-13 | 张莉娟 | 复合磨粒、其制备方法及用途 |
| WO2013102177A1 (en) | 2011-12-30 | 2013-07-04 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle and method of forming same |
| PL2797716T3 (pl) | 2011-12-30 | 2021-07-05 | Saint-Gobain Ceramics & Plastics, Inc. | Kompozytowe ukształtowane cząstki ścierne i sposób ich formowania |
| EP2802436B1 (en) | 2012-01-10 | 2019-09-25 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having complex shapes |
| WO2013106602A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| CN102604543B (zh) * | 2012-04-11 | 2014-02-19 | 宣城晶瑞新材料有限公司 | 一种抛光液用高稳定纳米二氧化铈水性浆料制备方法 |
| EP2852473B1 (en) | 2012-05-23 | 2020-12-23 | Saint-Gobain Ceramics & Plastics Inc. | Shaped abrasive particles and methods of forming same |
| EP2866977B8 (en) | 2012-06-29 | 2023-01-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| WO2014047014A1 (en) * | 2012-09-21 | 2014-03-27 | 3M Innovative Properties Company | Incorporating additives into fixed abrasive webs for improved cmp performance |
| CN108015685B (zh) | 2012-10-15 | 2020-07-14 | 圣戈班磨料磨具有限公司 | 具有特定形状的磨粒 |
| WO2014106173A1 (en) | 2012-12-31 | 2014-07-03 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| PL2978566T3 (pl) | 2013-03-29 | 2024-07-15 | Saint-Gobain Abrasives, Inc. | Cząstki ścierne o określonych kształtach i sposoby formowania takich cząstek |
| KR20160015356A (ko) | 2013-06-07 | 2016-02-12 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 기재 내에 리세스를 형성하는 방법, 연마 휠, 및 커버 |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| KR101889698B1 (ko) | 2013-09-30 | 2018-08-21 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성 방법 |
| USD742196S1 (en) * | 2013-12-16 | 2015-11-03 | 3M Innovative Properties Company | Sanding article with pattern |
| USD742195S1 (en) * | 2013-12-16 | 2015-11-03 | 3M Innovation Properties Company | Sanding article with pattern |
| MX380754B (es) | 2013-12-31 | 2025-03-12 | Saint Gobain Abrasives Inc | Artículo abrasivo que incluye partículas abrasivas perfiladas. |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| EP4306610A3 (en) | 2014-04-14 | 2024-04-03 | Saint-Gobain Ceramics and Plastics, Inc. | Abrasive article including shaped abrasive particles |
| JP6484647B2 (ja) | 2014-04-14 | 2019-03-13 | サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド | 成形研磨粒子を含む研磨物品 |
| WO2015167910A1 (en) * | 2014-05-01 | 2015-11-05 | 3M Innovative Properties Company | Flexible abrasive article and method of using the same |
| US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| KR102420782B1 (ko) * | 2014-10-21 | 2022-07-14 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 연마 예비성형품, 연마 용품, 및 접합된 연마 용품을 제조하는 방법 |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| CN116967949A (zh) | 2015-03-31 | 2023-10-31 | 圣戈班磨料磨具有限公司 | 固定磨料制品和其形成方法 |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| WO2016201104A1 (en) | 2015-06-11 | 2016-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| KR102313436B1 (ko) | 2016-05-10 | 2021-10-19 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자들 및 그 형성 방법 |
| WO2017197006A1 (en) | 2016-05-10 | 2017-11-16 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles and methods of forming same |
| JP2019527148A (ja) | 2016-07-20 | 2019-09-26 | スリーエム イノベイティブ プロパティズ カンパニー | 成形ガラス化研磨凝集体、研磨物品、及び研磨方法 |
| EP4349896A3 (en) | 2016-09-29 | 2024-06-12 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| CN109890564B (zh) | 2016-10-25 | 2022-04-29 | 3M创新有限公司 | 具有成形磨粒的成形玻璃化磨料团聚物、磨料制品和相关方法 |
| KR20180072243A (ko) * | 2016-12-21 | 2018-06-29 | 엠.씨.케이 (주) | 연마체 수지 조성물 및 이에 의해 제조된 패드 |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10865148B2 (en) | 2017-06-21 | 2020-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| US12006464B2 (en) | 2018-03-01 | 2024-06-11 | 3M Innovative Properties Company | Shaped siliceous abrasive agglomerate with shaped abrasive particles, abrasive articles, and related methods |
| EP4081370A4 (en) | 2019-12-27 | 2024-04-24 | Saint-Gobain Ceramics & Plastics Inc. | ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES |
| KR102877276B1 (ko) | 2019-12-27 | 2025-10-28 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| CN114867582B (zh) | 2019-12-27 | 2024-10-18 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
| EP4457054A4 (en) | 2021-12-30 | 2026-01-14 | Saint Gobain Abrasives Inc | ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES |
| CA3241421A1 (en) | 2021-12-30 | 2023-07-06 | Anthony MARTONE | Abrasive articles and methods of forming same |
| EP4457055A4 (en) | 2021-12-30 | 2025-12-24 | Saint Gobain Abrasives Inc | ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES |
| JPWO2024034618A1 (https=) * | 2022-08-09 | 2024-02-15 |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2868772B2 (ja) * | 1988-09-20 | 1999-03-10 | 大日本印刷株式会社 | 研磨テープの製造方法 |
| US5152917B1 (en) | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
| RU2124978C1 (ru) * | 1993-09-13 | 1999-01-20 | Миннесота Майнинг Энд Мэнюфекчуринг Компани | Абразивное изделие, способ его производства, способ его использования для чистовой обработки и рабочий инструмент для его производства |
| KR970701118A (ko) | 1994-02-22 | 1997-03-17 | 로저 로이 템트 | 연마 물품, 이의 제조 방법 및 이를 표면 마무리용으로서 사용하는 방법(abrasive article, a method of making same, and a method of using same for finishing) |
| US5551959A (en) * | 1994-08-24 | 1996-09-03 | Minnesota Mining And Manufacturing Company | Abrasive article having a diamond-like coating layer and method for making same |
| US5645471A (en) | 1995-08-11 | 1997-07-08 | Minnesota Mining And Manufacturing Company | Method of texturing a substrate using an abrasive article having multiple abrasive natures |
| US5958794A (en) | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
| US5624303A (en) | 1996-01-22 | 1997-04-29 | Micron Technology, Inc. | Polishing pad and a method for making a polishing pad with covalently bonded particles |
| US5692950A (en) | 1996-08-08 | 1997-12-02 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| US6121143A (en) * | 1997-09-19 | 2000-09-19 | 3M Innovative Properties Company | Abrasive articles comprising a fluorochemical agent for wafer surface modification |
| US6329058B1 (en) | 1998-07-30 | 2001-12-11 | 3M Innovative Properties Company | Nanosize metal oxide particles for producing transparent metal oxide colloids and ceramers |
| US6458018B1 (en) * | 1999-04-23 | 2002-10-01 | 3M Innovative Properties Company | Abrasive article suitable for abrading glass and glass ceramic workpieces |
| US6213845B1 (en) | 1999-04-26 | 2001-04-10 | Micron Technology, Inc. | Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies and methods for making and using same |
| US6290572B1 (en) | 2000-03-23 | 2001-09-18 | Micron Technology, Inc. | Devices and methods for in-situ control of mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies |
| CN101092024A (zh) | 2000-04-28 | 2007-12-26 | 3M创新有限公司 | 研磨制品以及研磨玻璃的方法 |
| US6497957B1 (en) | 2000-10-04 | 2002-12-24 | Eastman Kodak Company | Antireflection article of manufacture |
| US20020072296A1 (en) | 2000-11-29 | 2002-06-13 | Muilenburg Michael J. | Abrasive article having a window system for polishing wafers, and methods |
| CN100379522C (zh) | 2000-12-01 | 2008-04-09 | 东洋橡膠工业株式会社 | 研磨垫及其制造方法和研磨垫用缓冲层 |
| JP2002254316A (ja) * | 2001-02-28 | 2002-09-10 | Hitachi Maxell Ltd | 研磨シ―ト |
| US6884723B2 (en) | 2001-12-21 | 2005-04-26 | Micron Technology, Inc. | Methods for planarization of group VIII metal-containing surfaces using complexing agents |
| US6949128B2 (en) | 2001-12-28 | 2005-09-27 | 3M Innovative Properties Company | Method of making an abrasive product |
| US6935922B2 (en) | 2002-02-04 | 2005-08-30 | Kla-Tencor Technologies Corp. | Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing |
| US7131889B1 (en) | 2002-03-04 | 2006-11-07 | Micron Technology, Inc. | Method for planarizing microelectronic workpieces |
| US20040005769A1 (en) | 2002-07-03 | 2004-01-08 | Cabot Microelectronics Corp. | Method and apparatus for endpoint detection |
| US20040127045A1 (en) | 2002-09-12 | 2004-07-01 | Gorantla Venkata R. K. | Chemical mechanical planarization of wafers or films using fixed polishing pads and a nanoparticle composition |
| US7066801B2 (en) | 2003-02-21 | 2006-06-27 | Dow Global Technologies, Inc. | Method of manufacturing a fixed abrasive material |
| US6910951B2 (en) | 2003-02-24 | 2005-06-28 | Dow Global Technologies, Inc. | Materials and methods for chemical-mechanical planarization |
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| US20060030156A1 (en) | 2004-08-05 | 2006-02-09 | Applied Materials, Inc. | Abrasive conductive polishing article for electrochemical mechanical polishing |
| US7591865B2 (en) * | 2005-01-28 | 2009-09-22 | Saint-Gobain Abrasives, Inc. | Method of forming structured abrasive article |
| BRPI0608938A2 (pt) * | 2005-04-08 | 2010-02-17 | Saint Gobain Abrasives Inc | artigo abrasivo que apresenta cromóforo ativado por meio de reação |
| US7344574B2 (en) * | 2005-06-27 | 2008-03-18 | 3M Innovative Properties Company | Coated abrasive article, and method of making and using the same |
| US20070066186A1 (en) * | 2005-09-22 | 2007-03-22 | 3M Innovative Properties Company | Flexible abrasive article and methods of making and using the same |
| JP2007273910A (ja) * | 2006-03-31 | 2007-10-18 | Fujifilm Corp | 研磨用組成液 |
| KR100772034B1 (ko) * | 2006-12-08 | 2007-10-31 | 주식회사 썬텍인더스트리 | 코팅된 3차원 연마재 구조물을 갖는 연마포지의 제조방법 |
| US7497885B2 (en) | 2006-12-22 | 2009-03-03 | 3M Innovative Properties Company | Abrasive articles with nanoparticulate fillers and method for making and using them |
| US8083820B2 (en) | 2006-12-22 | 2011-12-27 | 3M Innovative Properties Company | Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same |
| JP5274647B2 (ja) * | 2008-04-18 | 2013-08-28 | サンーゴバン アブレイシブズ，インコーポレイティド | 高空隙率研摩材物品およびその製造方法 |
-
2009
- 2009-07-30 JP JP2011525047A patent/JP5351967B2/ja not_active Expired - Fee Related
- 2009-07-30 CN CN200980134338.3A patent/CN102138203B/zh not_active Expired - Fee Related
- 2009-07-30 EP EP09810426.8A patent/EP2327088B1/en not_active Not-in-force
- 2009-07-30 KR KR1020117006536A patent/KR101602001B1/ko not_active Expired - Fee Related
- 2009-07-30 WO PCT/US2009/052188 patent/WO2010025003A2/en not_active Ceased
- 2009-08-11 TW TW098126988A patent/TWI429735B/zh not_active IP Right Cessation
- 2009-08-12 US US12/539,798 patent/US8251774B2/en not_active Expired - Fee Related
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