KR101602001B1 - 구조화된 연마 용품, 그 제조 방법, 및 웨이퍼 평탄화에서의 사용 - Google Patents

구조화된 연마 용품, 그 제조 방법, 및 웨이퍼 평탄화에서의 사용 Download PDF

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Publication number
KR101602001B1
KR101602001B1 KR1020117006536A KR20117006536A KR101602001B1 KR 101602001 B1 KR101602001 B1 KR 101602001B1 KR 1020117006536 A KR1020117006536 A KR 1020117006536A KR 20117006536 A KR20117006536 A KR 20117006536A KR 101602001 B1 KR101602001 B1 KR 101602001B1
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South Korea
Prior art keywords
abrasive
meth
acrylate
delete delete
wafer
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Expired - Fee Related
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Korean (ko)
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KR20110055686A (ko
Inventor
윌리엄 디 조셉
줄리 와이 첸
지미 알 주니어 바란
존 제이 개글리아디
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쓰리엠 이노베이티브 프로퍼티즈 컴파니
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
KR1020117006536A 2008-08-28 2009-07-30 구조화된 연마 용품, 그 제조 방법, 및 웨이퍼 평탄화에서의 사용 Expired - Fee Related KR101602001B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9252108P 2008-08-28 2008-08-28
US61/092,521 2008-08-28

Publications (2)

Publication Number Publication Date
KR20110055686A KR20110055686A (ko) 2011-05-25
KR101602001B1 true KR101602001B1 (ko) 2016-03-17

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KR1020117006536A Expired - Fee Related KR101602001B1 (ko) 2008-08-28 2009-07-30 구조화된 연마 용품, 그 제조 방법, 및 웨이퍼 평탄화에서의 사용

Country Status (7)

Country Link
US (1) US8251774B2 (https=)
EP (1) EP2327088B1 (https=)
JP (1) JP5351967B2 (https=)
KR (1) KR101602001B1 (https=)
CN (1) CN102138203B (https=)
TW (1) TWI429735B (https=)
WO (1) WO2010025003A2 (https=)

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CN108262695A (zh) 2011-06-30 2018-07-10 圣戈本陶瓷及塑料股份有限公司 包括氮化硅磨粒的磨料制品
EP2760639B1 (en) 2011-09-26 2021-01-13 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming
CN102492233A (zh) * 2011-12-05 2012-06-13 张莉娟 复合磨粒、其制备方法及用途
EP2797716B1 (en) 2011-12-30 2021-02-17 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
KR102074138B1 (ko) 2011-12-30 2020-02-07 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자 및 이의 형성방법
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US10106714B2 (en) 2012-06-29 2018-10-23 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
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KR101736085B1 (ko) 2012-10-15 2017-05-16 생-고뱅 어브레이시브즈, 인코포레이티드 특정한 형태들을 가진 연마 입자들 및 이러한 입자들을 형성하는 방법들
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TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
US10711171B2 (en) 2015-06-11 2020-07-14 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN121249321A (zh) 2016-05-10 2026-01-02 圣戈本陶瓷及塑料股份有限公司 磨料颗粒及其形成方法
US11718774B2 (en) 2016-05-10 2023-08-08 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles and methods of forming same
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KR20180072243A (ko) * 2016-12-21 2018-06-29 엠.씨.케이 (주) 연마체 수지 조성물 및 이에 의해 제조된 패드
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
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WO2021133876A1 (en) 2019-12-27 2021-07-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
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US12508688B2 (en) 2021-12-30 2025-12-30 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same
CN118541241A (zh) 2021-12-30 2024-08-23 圣戈班磨料磨具有限公司 磨料制品及其形成方法
TW202421734A (zh) * 2022-08-09 2024-06-01 日商力森諾科股份有限公司 研磨液、研磨液套組及研磨方法

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Also Published As

Publication number Publication date
EP2327088A2 (en) 2011-06-01
JP5351967B2 (ja) 2013-11-27
JP2012501252A (ja) 2012-01-19
TWI429735B (zh) 2014-03-11
CN102138203B (zh) 2015-02-04
WO2010025003A3 (en) 2010-04-22
EP2327088A4 (en) 2017-06-14
KR20110055686A (ko) 2011-05-25
EP2327088B1 (en) 2019-01-09
TW201012908A (en) 2010-04-01
WO2010025003A2 (en) 2010-03-04
CN102138203A (zh) 2011-07-27
US8251774B2 (en) 2012-08-28
US20100056024A1 (en) 2010-03-04

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