JP2011238952A5 - - Google Patents

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Publication number
JP2011238952A5
JP2011238952A5 JP2011152232A JP2011152232A JP2011238952A5 JP 2011238952 A5 JP2011238952 A5 JP 2011238952A5 JP 2011152232 A JP2011152232 A JP 2011152232A JP 2011152232 A JP2011152232 A JP 2011152232A JP 2011238952 A5 JP2011238952 A5 JP 2011238952A5
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JP
Japan
Prior art keywords
alumina
abrasive
particles
content
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011152232A
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English (en)
Japanese (ja)
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JP2011238952A (ja
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Publication date
Priority claimed from US09/413,518 external-priority patent/US6258137B1/en
Application filed filed Critical
Publication of JP2011238952A publication Critical patent/JP2011238952A/ja
Publication of JP2011238952A5 publication Critical patent/JP2011238952A5/ja
Pending legal-status Critical Current

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JP2011152232A 1999-10-06 2011-07-08 Ｃｍｐ生成物 Pending JP2011238952A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/413,518 US6258137B1 (en) 1992-02-05 1999-10-06 CMP products
US09/413,518 1999-10-06

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006000173A Division JP2006186381A (ja) 1999-10-06 2006-01-04 Ｃｍｐ生成物

Publications (2)

Publication Number Publication Date
JP2011238952A JP2011238952A (ja) 2011-11-24
JP2011238952A5 true JP2011238952A5 (https=) 2012-10-18

Family

ID=23637528

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2001528524A Withdrawn JP2003511850A (ja) 1999-10-06 2000-08-30 Ｃｍｐ生成物
JP2006000173A Withdrawn JP2006186381A (ja) 1999-10-06 2006-01-04 Ｃｍｐ生成物
JP2011152232A Pending JP2011238952A (ja) 1999-10-06 2011-07-08 Ｃｍｐ生成物

Family Applications Before (2)

Application Number Title Priority Date Filing Date
JP2001528524A Withdrawn JP2003511850A (ja) 1999-10-06 2000-08-30 Ｃｍｐ生成物
JP2006000173A Withdrawn JP2006186381A (ja) 1999-10-06 2006-01-04 Ｃｍｐ生成物

Country Status (12)

Country Link
US (1) US6258137B1 (https=)
EP (1) EP1228161A1 (https=)
JP (3) JP2003511850A (https=)
KR (1) KR100485205B1 (https=)
CN (1) CN100396749C (https=)
AU (1) AU754060B2 (https=)
BR (1) BR0014533A (https=)
CA (1) CA2382724C (https=)
RU (1) RU2235747C2 (https=)
TW (1) TWI261068B (https=)
WO (1) WO2001025366A1 (https=)
ZA (1) ZA200201091B (https=)

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