JP2012227512A - 半導体発光素子 - Google Patents
半導体発光素子 Download PDFInfo
- Publication number
- JP2012227512A JP2012227512A JP2012025525A JP2012025525A JP2012227512A JP 2012227512 A JP2012227512 A JP 2012227512A JP 2012025525 A JP2012025525 A JP 2012025525A JP 2012025525 A JP2012025525 A JP 2012025525A JP 2012227512 A JP2012227512 A JP 2012227512A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light emitting
- semiconductor
- electrode
- emitting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 206
- 239000000463 material Substances 0.000 claims abstract description 23
- 238000000605 extraction Methods 0.000 claims description 21
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 15
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 8
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 7
- 239000003989 dielectric material Substances 0.000 claims description 5
- 229910004541 SiN Inorganic materials 0.000 claims description 2
- 230000008901 benefit Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 285
- 239000010408 film Substances 0.000 description 88
- 239000000758 substrate Substances 0.000 description 44
- 150000004767 nitrides Chemical class 0.000 description 41
- 229910052751 metal Inorganic materials 0.000 description 27
- 239000002184 metal Substances 0.000 description 26
- 238000007789 sealing Methods 0.000 description 10
- 230000001681 protective effect Effects 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 230000001419 dependent effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000000945 filler Substances 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 230000005496 eutectics Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000011342 resin composition Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- 239000004606 Fillers/Extenders Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 229910020068 MgAl Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/42—Transparent materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Led Devices (AREA)
- Led Device Packages (AREA)
Abstract
【解決手段】第一半導体層と、第一半導体層と異なる導電性を有する第二半導体層と、第一半導体層及び第二半導体層の間に設けられる活性領域と、第一半導体層上に設けられる透光性導電層13と、透光性導電層13の上に設けられる反射構造20と、反射構造20の上に設けられ、第一半導体層と電気的に接続される第一電極とを備える半導体発光素子であって、反射構造20が、少なくとも反射層16を有し、透光性導電層13と反射構造20との間に、中間層17を介在させており、中間層17を、反射層16よりもイオン化傾向の大きい材料で構成している。これにより、半導体発光素子の使用の経過と共に順方向電圧が上昇する事態を、透光性導電層13と反射構造20との間に介在された中間層17によって抑制でき、信頼性及び耐久性を向上できる利点が得られる。
【選択図】図2
Description
透光性導電層のシート抵抗を抑制できる。
さらにまた第11の半導体発光素子は、第一半導体層と、前記第一半導体層と異なる導電性を有する第二半導体層と、前記第一半導体層及び第二半導体層の間に設けられる活性領域と、前記第一半導体層上に設けられる透光性導電層13と、前記透光性導電層13の上に設けられる反射構造20と、前記反射構造20の上に設けられ、前記第一半導体層と電気的に接続される第一電極と、を備える半導体発光素子であって、前記透光性導電層13と反射構造20との間に、中間層17を介在させており、前記中間層17を、Nb2O5、Al2O3、TiO2、SiNのいずれかとすることができる。
(実施の形態1)
(発光素子)
(成長基板)
(半導体層)
(発光素子構造)
(窒化物半導体層)
(光反射構造)
本発明の発光素子の基本的な構造について具体的には、半導体層の互いに対向する2つの主面は、一方を光取り出し側、他方を光反射側とする。この光反射側には、光反射構造が設けられ、特に活性層等の発光構造を有する領域に設けられる。
(透光性導電層13)
(反射構造20)
(誘電体多層膜4)
(絶縁性膜)
(反射層16)
また誘電体多層膜4の下面には、反射層16が形成される。反射層16の屈折率は半導体構造11の屈折率よりも低くする。このようにすることで、発光層8から反射層16側へと進行した光を、光取り出し側へと高効率に反射させることができる。具体的には屈折率が1.45〜1.68であることが好ましい。この範囲であれば、半導体構造11からの所定の角度でもって反射層16へと入射した光を有効に反射できる。
(電極)
(保護膜)
(発光装置)
(添加部材)
(中間層17)
(耐久試験)
(シェア試験)
3…電極
3A…第1の電極(n型パッド電極)
3B…第2の電極(p型パッド電極)
4…誘電体多層膜
4a…1組の誘電体
4n、4m…材料膜
5…成長基板(サファイヤ基板)
6…第1の窒化物半導体層(n型半導体層)
7…第2の窒化物半導体層(p型半導体層)
8…活性層(発光層)
9…配線基板(サブマウント基板)
10…発光素子(窒化物半導体素子)
11…半導体構造(窒化物半導体層)
13…透光性導電層(透光性電極、ITO)
16…反射層(絶縁性膜)
17…中間層
18…光取り出し面
20…反射構造
23…金属電極層
35…開口部(導通部)
50…LED
52、53…リード
54…樹脂レンズ(レンズ部)
Claims (11)
- 第一半導体層と、
前記第一半導体層と異なる導電性を有する第二半導体層と、
前記第一半導体層及び第二半導体層の間に設けられる活性領域と、
前記第一半導体層上に設けられる透光性導電層(13)と、
前記透光性導電層(13)の上に設けられる反射構造(20)と、
前記反射構造(20)の上に設けられ、前記第一半導体層と電気的に接続される第一電極と、を備える半導体発光素子であって、
前記反射構造(20)が、少なくとも反射層(16)を有し、
前記透光性導電層(13)と反射構造(20)との間に、中間層(17)を介在させており、
前記中間層(17)が、前記反射層(16)よりもイオン化傾向の大きい材料で構成されてなることを特徴とする半導体発光素子。 - 請求項1に記載の半導体発光素子において、
前記反射構造(20)が、前記反射層(16)上であって複数の誘電体より構成される誘電体多層膜(4)を有しており、
前記誘電体多層膜(4)の膜厚が、前記反射層(16)の膜厚よりも小さいことを特徴とする半導体発光素子。 - 請求項2に記載の半導体発光素子において、
前記反射層(16)がSiO2であることを特徴とする半導体発光素子。 - 請求項2〜3のいずれか一に記載の半導体発光素子において、
前記透光性導電層(13)がITOであることを特徴とする半導体発光素子。 - 請求項1〜4のいずれか一に記載の半導体発光素子において、
前記中間層(17)が、Nb2O5、Al2O3、TiO2のいずれかであることを特徴とする半導体発光素子。 - 請求項1〜5のいずれか一に記載の半導体発光素子において、
前記中間層(17)の膜厚が、270Å〜540Åであることを特徴とする半導体発光素子。 - 請求項4〜6のいずれか一に記載の半導体発光素子において、
前記中間層(17)が、前記誘電体多層膜(4)を構成する層と同一の材質で構成されてなることを特徴とする半導体発光素子。 - 請求項1〜7のいずれか一に記載の半導体発光素子において、
前記中間層(17)が、Nb2O5であることを特徴とする半導体発光素子。 - 請求項1〜8のいずれか一に記載の半導体発光素子において、
前記第二半導体層と電気的に接続される第二電極を備え、
前記第一電極及び第二電極が、半導体発光素子の第一主面側に設けられ、
前記第一主面を、実装面とし、
前記第一主面と対向する第二主面側を、光取り出し面としてなることを特徴とする半導体発光素子。 - 請求項1〜9のいずれか一に記載の半導体発光素子において、
前記第二半導体層と電気的に接続される第二電極を備え、
前記第一電極及び第二電極が、半導体発光素子の第一主面側に設けられ、
前記第一主面を、光取り出し面とし、
前記第一主面と対向する第二主面側を、実装面としてなることを特徴とする半導体発光素子。 - 第一半導体層と、
前記第一半導体層と異なる導電性を有する第二半導体層と、
前記第一半導体層及び第二半導体層の間に設けられる活性領域と、
前記第一半導体層上に設けられる透光性導電層(13)と、
前記透光性導電層(13)の上に設けられる反射構造(20)と、
前記反射構造(20)の上に設けられ、前記第一半導体層と電気的に接続される第一電極と、を備える半導体発光素子であって、
前記透光性導電層(13)と反射構造(20)との間に、中間層(17)を介在させており、
前記中間層(17)が、Nb2O5、Al2O3、TiO2、SiNのいずれかであることを特徴とする半導体発光素子。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012025525A JP6056150B2 (ja) | 2011-04-08 | 2012-02-08 | 半導体発光素子 |
CN201210080588.7A CN102738348B (zh) | 2011-04-08 | 2012-03-23 | 半导体发光元件 |
EP12163208.7A EP2509121B1 (en) | 2011-04-08 | 2012-04-04 | Semiconductor Light Emitting Device |
US13/441,679 US8686441B2 (en) | 2011-04-08 | 2012-04-06 | Life-improved semiconductor light emitting device |
TW101112344A TWI525857B (zh) | 2011-04-08 | 2012-04-06 | 半導體發光元件 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011086821 | 2011-04-08 | ||
JP2011086821 | 2011-04-08 | ||
JP2012025525A JP6056150B2 (ja) | 2011-04-08 | 2012-02-08 | 半導体発光素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012227512A true JP2012227512A (ja) | 2012-11-15 |
JP6056150B2 JP6056150B2 (ja) | 2017-01-11 |
Family
ID=46000807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012025525A Active JP6056150B2 (ja) | 2011-04-08 | 2012-02-08 | 半導体発光素子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8686441B2 (ja) |
EP (1) | EP2509121B1 (ja) |
JP (1) | JP6056150B2 (ja) |
CN (1) | CN102738348B (ja) |
TW (1) | TWI525857B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015028984A (ja) * | 2013-07-30 | 2015-02-12 | 日亜化学工業株式会社 | 半導体発光素子 |
JP2015095617A (ja) * | 2013-11-14 | 2015-05-18 | 日亜化学工業株式会社 | 発光素子の製造方法 |
JP2018148243A (ja) * | 2013-01-08 | 2018-09-20 | ローム株式会社 | 発光素子および発光素子パッケージ |
JP2019079979A (ja) * | 2017-10-26 | 2019-05-23 | 豊田合成株式会社 | 半導体発光素子とその製造方法 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2003292653A1 (en) * | 2003-01-31 | 2004-08-23 | Shinano Kenshi Kabushiki Kaisha | Valve structure and positive displacement pump using the valve structure |
US20070065308A1 (en) * | 2003-08-04 | 2007-03-22 | Mitsuru Yamamoto | Diaphragm pump and cooling system with the diaphragm pump |
TWI572068B (zh) | 2012-12-07 | 2017-02-21 | 晶元光電股份有限公司 | 發光元件 |
JP5929714B2 (ja) * | 2012-11-07 | 2016-06-08 | 日亜化学工業株式会社 | 半導体発光素子 |
TWI632708B (zh) * | 2012-12-07 | 2018-08-11 | 晶元光電股份有限公司 | 發光元件 |
WO2014126016A1 (ja) * | 2013-02-12 | 2014-08-21 | エルシード株式会社 | Led素子及びその製造方法 |
JP2016528728A (ja) * | 2013-07-18 | 2016-09-15 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 高反射フリップチップledダイ |
KR20160034534A (ko) * | 2014-09-19 | 2016-03-30 | 삼성전자주식회사 | 반도체 발광 소자 |
CN104393151A (zh) * | 2014-10-30 | 2015-03-04 | 大恒新纪元科技股份有限公司 | 一种提高发光效率的led芯片及其制备方法 |
TWI697076B (zh) * | 2016-01-13 | 2020-06-21 | 晶元光電股份有限公司 | 發光元件及其製造方法 |
CN106981553B (zh) * | 2016-01-18 | 2020-02-07 | 晶元光电股份有限公司 | 发光元件及其制造方法 |
JP6683003B2 (ja) * | 2016-05-11 | 2020-04-15 | 日亜化学工業株式会社 | 半導体素子、半導体装置及び半導体素子の製造方法 |
DE102017111123A1 (de) * | 2017-05-22 | 2018-11-22 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterchip und Verfahren zur Herstellung eines optoelektronischen Halbleiterchips |
TWI718358B (zh) * | 2018-02-06 | 2021-02-11 | 晶元光電股份有限公司 | 發光元件 |
TWI804437B (zh) * | 2018-02-06 | 2023-06-01 | 晶元光電股份有限公司 | 發光元件 |
TWI755245B (zh) * | 2018-02-06 | 2022-02-11 | 晶元光電股份有限公司 | 發光元件 |
TWI781867B (zh) * | 2018-02-06 | 2022-10-21 | 晶元光電股份有限公司 | 發光元件 |
CN112736179B (zh) * | 2019-08-06 | 2023-04-07 | 天津三安光电有限公司 | 一种发光二极管及制作工艺、发光装置 |
TWI764341B (zh) * | 2020-04-07 | 2022-05-11 | 億光電子工業股份有限公司 | 發光裝置 |
CN114068786B (zh) * | 2021-10-26 | 2024-03-19 | 厦门三安光电有限公司 | 发光二极管 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6396896A (ja) * | 1986-10-14 | 1988-04-27 | 日立マクセル株式会社 | エレクトロルミネツセンス素子 |
WO2003065464A1 (fr) * | 2002-01-28 | 2003-08-07 | Nichia Corporation | Dispositif a semi-conducteur a base de nitrure comprenant un substrat de support, et son procede de realisation |
JP2006310711A (ja) * | 2005-05-02 | 2006-11-09 | Japan Aerospace Exploration Agency | 太陽電池用の光学薄膜およびその製造方法 |
US20070170596A1 (en) * | 2006-01-26 | 2007-07-26 | Way-Jze Wen | Flip-chip light emitting diode with high light-emitting efficiency |
JP2007300063A (ja) * | 2006-04-03 | 2007-11-15 | Toyoda Gosei Co Ltd | 半導体発光素子 |
JP2009164423A (ja) * | 2008-01-08 | 2009-07-23 | Nichia Corp | 発光素子 |
WO2010134446A1 (ja) * | 2009-05-19 | 2010-11-25 | 三容真空工業株式会社 | 電子部品素子 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10240106A1 (de) * | 2002-08-30 | 2004-03-11 | Infineon Technologies Ag | Ausbildung einer elektrischen Verbindung zwischen Strkturen in einem Halbleitersubstrat |
TWI312582B (en) * | 2003-07-24 | 2009-07-21 | Epistar Corporatio | Led device, flip-chip led package and light reflecting structure |
JP4148264B2 (ja) * | 2003-11-19 | 2008-09-10 | 日亜化学工業株式会社 | 半導体素子及びその製造方法 |
US7375380B2 (en) * | 2004-07-12 | 2008-05-20 | Rohm Co., Ltd. | Semiconductor light emitting device |
KR100661711B1 (ko) * | 2005-08-30 | 2006-12-26 | 엘지이노텍 주식회사 | 반사 전극을 구비한 질화물 반도체 발광소자 및 그 제조방법 |
DE102006015788A1 (de) * | 2006-01-27 | 2007-09-13 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterchip |
JP5232968B2 (ja) * | 2006-02-17 | 2013-07-10 | 豊田合成株式会社 | 発光素子及びその製造方法、並びにランプ |
JP2007287757A (ja) * | 2006-04-12 | 2007-11-01 | Rohm Co Ltd | 窒化物半導体発光素子及び窒化物半導体発光素子の製造方法 |
US7573074B2 (en) | 2006-05-19 | 2009-08-11 | Bridgelux, Inc. | LED electrode |
TW200841393A (en) * | 2007-04-02 | 2008-10-16 | Miin-Jang Chen | Optoelectronic device and method of fabricating the same |
JP2011086821A (ja) | 2009-10-16 | 2011-04-28 | Fuji Electric Systems Co Ltd | 半導体装置およびその製造方法 |
JP5625577B2 (ja) | 2010-07-22 | 2014-11-19 | コニカミノルタ株式会社 | 後処理装置及び画像形成システム |
-
2012
- 2012-02-08 JP JP2012025525A patent/JP6056150B2/ja active Active
- 2012-03-23 CN CN201210080588.7A patent/CN102738348B/zh active Active
- 2012-04-04 EP EP12163208.7A patent/EP2509121B1/en active Active
- 2012-04-06 TW TW101112344A patent/TWI525857B/zh active
- 2012-04-06 US US13/441,679 patent/US8686441B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6396896A (ja) * | 1986-10-14 | 1988-04-27 | 日立マクセル株式会社 | エレクトロルミネツセンス素子 |
WO2003065464A1 (fr) * | 2002-01-28 | 2003-08-07 | Nichia Corporation | Dispositif a semi-conducteur a base de nitrure comprenant un substrat de support, et son procede de realisation |
JP2006310711A (ja) * | 2005-05-02 | 2006-11-09 | Japan Aerospace Exploration Agency | 太陽電池用の光学薄膜およびその製造方法 |
US20070170596A1 (en) * | 2006-01-26 | 2007-07-26 | Way-Jze Wen | Flip-chip light emitting diode with high light-emitting efficiency |
JP2007300063A (ja) * | 2006-04-03 | 2007-11-15 | Toyoda Gosei Co Ltd | 半導体発光素子 |
JP2009164423A (ja) * | 2008-01-08 | 2009-07-23 | Nichia Corp | 発光素子 |
WO2010134446A1 (ja) * | 2009-05-19 | 2010-11-25 | 三容真空工業株式会社 | 電子部品素子 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018148243A (ja) * | 2013-01-08 | 2018-09-20 | ローム株式会社 | 発光素子および発光素子パッケージ |
JP2015028984A (ja) * | 2013-07-30 | 2015-02-12 | 日亜化学工業株式会社 | 半導体発光素子 |
JP2015095617A (ja) * | 2013-11-14 | 2015-05-18 | 日亜化学工業株式会社 | 発光素子の製造方法 |
JP2019079979A (ja) * | 2017-10-26 | 2019-05-23 | 豊田合成株式会社 | 半導体発光素子とその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI525857B (zh) | 2016-03-11 |
CN102738348A (zh) | 2012-10-17 |
US20120256221A1 (en) | 2012-10-11 |
CN102738348B (zh) | 2016-04-06 |
TW201246611A (en) | 2012-11-16 |
EP2509121B1 (en) | 2016-03-09 |
EP2509121A1 (en) | 2012-10-10 |
JP6056150B2 (ja) | 2017-01-11 |
US8686441B2 (en) | 2014-04-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6056150B2 (ja) | 半導体発光素子 | |
JP5634003B2 (ja) | 発光装置 | |
JP5949294B2 (ja) | 半導体発光素子 | |
JP2009164423A (ja) | 発光素子 | |
JP4882792B2 (ja) | 半導体発光素子 | |
JP5040355B2 (ja) | 半導体発光素子及びこれを備えた発光装置 | |
JP5719110B2 (ja) | 発光素子 | |
JP5637210B2 (ja) | 半導体発光素子 | |
TWI381553B (zh) | A light-emitting element and a light-emitting device using the same | |
JP4899825B2 (ja) | 半導体発光素子、発光装置 | |
TWI446589B (zh) | A semiconductor light-emitting element, a light-emitting device using a semiconductor light-emitting element, and an electronic device | |
JP5186800B2 (ja) | 窒化物半導体発光素子、これを備える発光装置及び窒化物半導体発光素子の製造方法 | |
JPWO2009069671A1 (ja) | 発光装置及びその製造方法 | |
JP2015097235A (ja) | 半導体発光装置およびその製造方法 | |
JP2006074036A (ja) | 半導体発光装置およびその製作方法 | |
JP2013030634A (ja) | 半導体発光素子 | |
JP5983068B2 (ja) | 半導体発光素子及び発光装置 | |
JP6964421B2 (ja) | 半導体発光装置 | |
JP6971456B2 (ja) | 発光素子および発光素子パッケージ | |
KR20120019116A (ko) | 발광 소자 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140905 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150623 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150624 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150818 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160119 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160318 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160830 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161014 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20161108 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20161121 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6056150 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |