JP6971456B2 - 発光素子および発光素子パッケージ - Google Patents
発光素子および発光素子パッケージ Download PDFInfo
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- JP6971456B2 JP6971456B2 JP2016094424A JP2016094424A JP6971456B2 JP 6971456 B2 JP6971456 B2 JP 6971456B2 JP 2016094424 A JP2016094424 A JP 2016094424A JP 2016094424 A JP2016094424 A JP 2016094424A JP 6971456 B2 JP6971456 B2 JP 6971456B2
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- 239000004065 semiconductor Substances 0.000 claims description 112
- 229910052751 metal Inorganic materials 0.000 claims description 42
- 239000002184 metal Substances 0.000 claims description 42
- 229910045601 alloy Inorganic materials 0.000 claims description 38
- 239000000956 alloy Substances 0.000 claims description 38
- 230000008018 melting Effects 0.000 claims description 13
- 238000002844 melting Methods 0.000 claims description 13
- 229910052737 gold Inorganic materials 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 238000010030 laminating Methods 0.000 claims description 7
- 229910018170 Al—Au Inorganic materials 0.000 claims description 6
- 229910018565 CuAl Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 300
- 238000000034 method Methods 0.000 description 23
- 238000010438 heat treatment Methods 0.000 description 22
- 239000000758 substrate Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 13
- 239000002019 doping agent Substances 0.000 description 12
- 230000008569 process Effects 0.000 description 12
- 229910002704 AlGaN Inorganic materials 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 7
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 6
- 230000020169 heat generation Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- 229910005540 GaP Inorganic materials 0.000 description 4
- -1 InAlGaN Inorganic materials 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 230000005496 eutectics Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229920000106 Liquid crystal polymer Polymers 0.000 description 3
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 3
- 229920006128 poly(nonamethylene terephthalamide) Polymers 0.000 description 3
- 239000010948 rhodium Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000004954 Polyphthalamide Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002952 polymeric resin Substances 0.000 description 2
- 229920006375 polyphtalamide Polymers 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000006089 photosensitive glass Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
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- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/382—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending partially in or entirely through the semiconductor body
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- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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- H01L33/58—Optical field-shaping elements
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- H01L33/64—Heat extraction or cooling elements
- H01L33/647—Heat extraction or cooling elements the elements conducting electric current to or from the semiconductor body
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- Microelectronics & Electronic Packaging (AREA)
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- Electrodes Of Semiconductors (AREA)
Description
活性層24はIII−V族元素の化合物半導体材料を利用して井戸層と障壁層、例えば、InGaN/GaN、InGaN/InGaN、GaN/AlGaN、InAlGaN/GaN、GaAs(InGaAs)/AlGaAs、GaP(InGaP)/AlGaPのうち、いずれか一つ以上のペア(pair)構造で形成され得るが、これに限定されない。井戸層は障壁層のエネルギーバンドギャップよりも小さいエネルギーバンドギャップを有する物質で形成され得る。
111:第2半導体層
112:活性層
113:第1半導体層
120:中間層
130:第2電極
140:第1電極
150:オーミック接合
151、1510:第1層
152、1520:第2層
153、1530:第3層
154、1540:中間層
Claims (19)
- 第1半導体層、活性層、および第2半導体層を含む発光構造体;
前記発光構造体の一側に配置されて前記第1半導体層と電気的に連結される第1電極;
前記発光構造体の前記一側に配置されて前記第2半導体層と電気的に連結される第2電極;
前記第2電極と前記第2半導体層間に配置され、Alを含む第1層と前記第1層のAlと反応して形成された少なくとも一つのMxAly合金を含む第2層および前記第2層上部に配置され、Auを含む第3層を含むオーミック接合;および
前記発光構造体、前記第1電極、及び、前記第2電極、のうちの少なくとも一つの側面を囲む支持層を含み、
前記オーミック接合は、前記第1層、前記第2層、及び、前記第3層、が前記第2半導体層上に順に積層されることによって構成され、
前記一側は、前記発光構造体の主発光面と反対側であり、
前記第1電極及び前記第2電極は、前記発光構造体の前記一側で所定の距離で互いに離隔され、
前記支持層は、前記第1電極及び前記第2電極の間に配置された絶縁部を含み、
前記Mは、Alの融点よりも高い融点を有する発光素子。 - 前記Mは、Cu、PdおよびAgのうちから選択されるいずれか一つの金属である、請求項1に記載の発光素子。
- 前記MxAlyはCuxAly(1≦x≦9、1≦y≦4)である、請求項1に記載の発光素子。
- 前記CuxAly合金でyはxより大きいか同じ値を有する、請求項3に記載の発光素子。
- 前記CuxAlyは20μΩ・cm以下の電気抵抗(抵抗率)を有する、請求項3に記載の発光素子。
- 前記第2層はCuAl、CuAl2、Cu4Al3、Cu3Al2およびCu9Al4のうちから選択される少なくとも一つの合金を含む、請求項3に記載の発光素子。
- 前記MxAly合金の電気伝導度はAl−Au合金の電気伝導度より大きい、請求項1に記載の発光素子。
- 前記第2層上部に配置されて前記第2層の酸化現象を防止する中間層をさらに含む、請求項1に記載の発光素子。
- 前記中間層はCr、Ni、TiおよびAuのうちから選択される少なくとも一つの金属または合金を含む、請求項8に記載の発光素子。
- 第1半導体層、活性層、および第2半導体層を含む発光構造体;
前記発光構造体の一側に配置されて前記第1半導体層と電気的に連結される第1電極;
前記発光構造体の前記一側に配置されて前記第2半導体層と電気的に連結される第2電極;
前記第2電極と前記第2半導体層間に配置され、Alを含む第1層と前記第1層のAlと反応して形成された少なくとも一つのMxAly合金を含む第2層および前記第2層上部に配置され、Auを含む第3層を含む第1オーミック接合;および
前記発光構造体、前記第1電極、及び、前記第2電極、のうちの少なくとも一つの側面を囲む支持層を含み、
前記発光構造体には前記第1電極を通じてサブマウントと接合しない非接合領域上に非線形インピーダンス(non−ohmic)特性を含む第1領域が配置され、
前記第1オーミック接合は、前記第1層、前記第2層、及び、前記第3層、が前記第2半導体層上に順に積層されることによって構成され、
前記一側は、前記発光構造体の主発光面と反対側であり、
前記第1電極及び前記第2電極は、前記発光構造体の前記一側で所定の距離で互いに離隔され、
前記支持層は、前記第1電極及び前記第2電極の間に配置された絶縁部を含み、
前記Mは、Alの融点よりも高い融点を有する発光素子。 - 前記第1電極および第2電極上には所定間隙離隔して第1バンプと第2バンプがそれぞれ配置されて前記サブマウントの電極と接する、請求項10に記載の発光素子。
- 前記非接合領域は前記第1バンプと第2バンプの間の離隔した領域を含む、請求項11に記載の発光素子。
- 前記第1領域は前記非接合領域と同一垂直線上に配置される、請求項12に記載の発光素子。
- 前記第1領域の長さは前記非接合領域の長さと同一であるか短い、請求項13に記載の発光素子。
- 前記第1電極および第2電極上には中間層が配置され、前記中間層が開放された部分を通じて前記第1バンプと第2バンプはそれぞれ前記第1電極と第2電極に接する、請求項11に記載の発光素子。
- 前記発光構造体は前記第1電極との接合面に配置される第2オーミック接合を含み、前記第1領域は前記第2オーミック接合に配置される、請求項11に記載の発光素子。
- 前記第1領域はp型半導体層の第2オーミック接合に配置される、請求項16に記載の発光素子。
- 前記第1領域は酸化物、窒化物および金属のうち、少なくとも一つを含んで構成される、請求項10に記載の発光素子。
- 請求項1〜請求項18のいずれか一項に記載された発光素子およびサブマウントを含む、発光素子パッケージ。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2015-0065485 | 2015-05-11 | ||
KR1020150065485A KR20160132658A (ko) | 2015-05-11 | 2015-05-11 | 발광 소자 및 발광 소자 패키지 |
KR10-2015-0065483 | 2015-05-11 | ||
KR1020150065483A KR102328472B1 (ko) | 2015-05-11 | 2015-05-11 | 오믹 접합 및 이를 포함하는 발광 소자 |
Publications (3)
Publication Number | Publication Date |
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JP2016213467A JP2016213467A (ja) | 2016-12-15 |
JP2016213467A5 JP2016213467A5 (ja) | 2019-06-13 |
JP6971456B2 true JP6971456B2 (ja) | 2021-11-24 |
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US (1) | US9673368B2 (ja) |
EP (1) | EP3093892B1 (ja) |
JP (1) | JP6971456B2 (ja) |
CN (1) | CN106159053B (ja) |
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