JP2012219304A - 積層体および積層体の製造方法 - Google Patents
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 27
- 239000010935 stainless steel Substances 0.000 claims description 26
- 229910001220 stainless steel Inorganic materials 0.000 claims description 26
- 229910052802 copper Inorganic materials 0.000 claims description 23
- 239000010949 copper Substances 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000004544 sputter deposition Methods 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 6
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- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 239000011133 lead Substances 0.000 claims description 6
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- 229910052718 tin Inorganic materials 0.000 claims description 6
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C23C28/023—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
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- B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
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Abstract
【解決手段】本発明の積層体10は、金属または合金から形成された基材1と、基材1表面に形成された基材1より軟らかい金属または合金からなる中間層2と、金属または合金の粉末材料を該粉末材料の融点より低い温度に加熱されたガスと共に加速し、中間層2に固相状態のままで吹き付けて堆積させた金属皮膜3と、を備える。
【選択図】図1
Description
基材1は5cm四方のステンレステストピース、中間層2は銅、金属皮膜3は銅を選択した。基材1であるステンレステストピース表面にスパッタリングにより厚さ2μmの銅の中間層2を形成した。コールドスプレー装置60により、中間層2上に幅8mmの金属皮膜3を横縞状に積層した。テストピース上には、金属皮膜3a、3bおよび3cを圧縮ガスの圧力を順次変更してそれぞれ積層した(実施例1、圧縮ガス:窒素、圧縮ガス温度:600℃、ガス圧力:下から順に3、4、5MPa)。
実験例1と同様に、基材1はステンレス、中間層2は銅、金属皮膜3は銅を選択した。スパッタリングにより厚さ2μmの銅の中間層2を形成した基材1に、コールドスプレー装置60により、銅の金属皮膜3を中間層2のステンレス基材1と接する面と反対側の面に積層して(実施例2、圧縮ガス:窒素、圧縮ガス温度:600℃、ガス圧力:4MPa)、積層体10を形成した。また、ステンレスからなる基材1を所定温度に加熱しながら、銅の金属皮膜3を中間層2の基材1と接する面と反対側の面に形成して積層体10を形成した(実施例3および4、圧縮ガス:窒素、圧縮ガス温度:600℃、ガス圧力:4MPa)。
2 中間層
3 金属皮膜
10、10A、10B、10C 積層体
60 コールドスプレー装置
61 ガス加熱器
62 スプレーガン
63 粉末供給装置
64 ガスノズル
70 引張試験装置
71 固定台
71a 孔部
72 アルミピン
73 接着剤
Claims (10)
- 金属または合金から形成された基材と、
前記基材表面に形成された前記基材より軟らかい金属または合金からなる中間層と、
前記中間層の表面に、金属または合金の粉末材料を該粉末材料の融点より低い温度に加熱されたガスと共に加速し、前記中間層に固相状態のままで吹き付けて堆積させた金属皮膜と、
を備えることを特徴とする積層体。 - 前記基材はステンレスであり、
前記中間層は、銀、金、アルミニウム、銅、錫、鉛または亜鉛から選択されるいずれか1種の金属からなることを特徴とする請求項1に記載の積層体。 - 前記金属皮膜は、前記中間層と同一の材料から形成されることを特徴とする請求項1または2に記載の積層体。
- 前記中間層は、0.05〜10μmの厚さを有することを特徴とする請求項1〜3のいずれか一つに記載の積層体。
- 前記中間層は、スパッタリングにより形成されることを特徴とする請求項1〜4のいずれか一つに記載の積層体。
- 前記金属皮膜は、前記中間層が形成された前記基材を加熱しながら、前記中間層の表面に堆積させることを特徴とする請求項1〜5のいずれか一つに記載の積層体。
- 金属または合金から形成された基材の表面に、該基材より柔らかい金属または合金からなる中間層を形成する中間層形成ステップと、
前記中間層の表面に、金属または合金の粉末材料を該粉末材料の融点より低い温度に加熱されたガスと共に加速し、前記中間層に固相状態のままで吹き付けて堆積させて金属皮膜を形成する金属皮膜形成ステップと、
を含むことを特徴とする積層体の製造方法。 - 前記基材はステンレスであり、
前記中間層は、銀、金、アルミニウム、銅、錫、鉛または亜鉛から選択されるいずれか1種の金属からなることを特徴とする請求項7に記載の積層体の製造方法。 - 前記中間層は、スパッタリングにより形成されることを特徴とする請求項7または8に記載の積層体の製造方法。
- 前記金属皮膜形成ステップは、前記中間層が形成された前記基材を加熱しながら、前記中間層の表面に堆積させることを特徴とする請求項7〜9のいずれか一つに記載の積層体の製造方法。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016194106A (ja) * | 2015-03-31 | 2016-11-17 | 日本発條株式会社 | 成形加工用マグネシウム系部材 |
JP2016209563A (ja) * | 2015-04-30 | 2016-12-15 | アービンメリトール・テクノロジー,エルエルシー | シャフト釣合いシステムおよびシャフトの釣合いをとる方法 |
JP2017095779A (ja) * | 2015-11-26 | 2017-06-01 | 日本発條株式会社 | 積層体の製造方法 |
JP2019536983A (ja) * | 2016-10-03 | 2019-12-19 | ウエスチングハウス・エレクトリック・カンパニー・エルエルシー | 原子燃料棒の事故耐性二重被膜 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6698674B2 (ja) * | 2015-02-26 | 2020-05-27 | コーニング インコーポレイテッド | 音響性能が増強された薄型積層構造 |
WO2017082368A1 (ja) * | 2015-11-11 | 2017-05-18 | 日本発條株式会社 | 積層体および積層体の製造方法 |
CN106334792A (zh) * | 2016-11-02 | 2017-01-18 | 青岛科技大学 | 一种用于金属低温3d打印材料的制备及其打印成型方法 |
KR101967422B1 (ko) * | 2017-03-10 | 2019-08-13 | 우주용사공업 주식회사 | 금속 용사코팅된 알루미늄 소재 및 그 용사코팅방법 |
US10796727B1 (en) | 2019-05-08 | 2020-10-06 | Seagate Technology Llc | Using solid state deposition in the manufacture of data storage devices, and related devices and components thereof |
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GB202000103D0 (en) * | 2020-01-06 | 2020-02-19 | Rolls Royce Plc | Cold spraying |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002226230A (ja) * | 2001-01-25 | 2002-08-14 | Canon Inc | 光学素子成形用型及びその製造方法 |
JP2003301279A (ja) * | 2002-04-12 | 2003-10-24 | Ford Global Technologies Llc | 運動噴霧を用いる腐食の選択制御方法 |
JP2008231486A (ja) * | 2007-03-19 | 2008-10-02 | Ihi Corp | 合金塗布方法、ロウ材塗布方法、熱交換器の製造方法 |
JP2008302317A (ja) * | 2007-06-08 | 2008-12-18 | Ihi Corp | コールドスプレー方法、コールドスプレー装置 |
JP2009197294A (ja) * | 2008-02-25 | 2009-09-03 | Honda Motor Co Ltd | 積層体の製造方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100767395B1 (ko) * | 1999-10-12 | 2007-10-17 | 토토 가부시키가이샤 | 복합 구조물 |
CN1167824C (zh) | 2001-11-09 | 2004-09-22 | 中国科学院金属研究所 | 一种爆炸喷涂制备热障涂层的方法 |
US20050031876A1 (en) | 2003-07-18 | 2005-02-10 | Songwei Lu | Nanostructured coatings and related methods |
DE10233830A1 (de) * | 2002-07-25 | 2004-02-12 | Creavis Gesellschaft Für Technologie Und Innovation Mbh | Verfahren zur Flammpulverbeschichtung von Oberflächen zur Erzeugung des Lotus-Effektes |
KR20050081252A (ko) * | 2004-02-13 | 2005-08-18 | 고경현 | 다공성 금속 코팅 부재 및 저온 분사법을 이용한 그의제조 방법 |
CN1938451A (zh) * | 2004-03-31 | 2007-03-28 | 东陶机器株式会社 | 使用气溶胶制造被膜的方法、用于该方法的粒子混合物、以及被膜和复合材料 |
EP1645653A1 (de) * | 2004-10-07 | 2006-04-12 | Siemens Aktiengesellschaft | Schichtsystem |
US7632592B2 (en) * | 2004-11-01 | 2009-12-15 | Gm Global Technology Operations, Inc. | Method of fabricating corrosion-resistant bipolar plate |
US20060121187A1 (en) | 2004-12-03 | 2006-06-08 | Haynes Jeffrey D | Vacuum cold spray process |
US7320832B2 (en) * | 2004-12-17 | 2008-01-22 | Integran Technologies Inc. | Fine-grained metallic coatings having the coefficient of thermal expansion matched to the one of the substrate |
US20060134321A1 (en) * | 2004-12-22 | 2006-06-22 | United Technologies Corporation | Blade platform restoration using cold spray |
KR100802328B1 (ko) * | 2005-04-07 | 2008-02-13 | 주식회사 솔믹스 | 내마모성 금속기지 복합체 코팅층 형성방법 및 이를이용하여 제조된 코팅층 |
JP2007084855A (ja) * | 2005-09-20 | 2007-04-05 | Yamaha Motor Co Ltd | 黒色表面を有するチタン部材およびその製造方法 |
US8187720B2 (en) * | 2005-11-14 | 2012-05-29 | Lawrence Livermore National Security, Llc | Corrosion resistant neutron absorbing coatings |
CN101063204B (zh) | 2006-04-30 | 2010-10-13 | 宝山钢铁股份有限公司 | 镀锌钢板的制造方法 |
DE102006037532A1 (de) * | 2006-08-10 | 2008-02-14 | Siemens Ag | Verfahren zur Erzeugung einer elektrischen Funktionsschicht auf einer Oberfläche eines Substrats |
JP2008127676A (ja) | 2006-11-24 | 2008-06-05 | Toyohashi Univ Of Technology | 金属皮膜の形成方法 |
CN101748404B (zh) * | 2010-01-08 | 2011-06-01 | 南京航空航天大学 | 具有微孔过渡层的涂层结构的制备方法 |
US20120148769A1 (en) * | 2010-12-13 | 2012-06-14 | General Electric Company | Method of fabricating a component using a two-layer structural coating |
JP5730089B2 (ja) * | 2011-03-23 | 2015-06-03 | 日本発條株式会社 | 導電材料、積層体および導電材料の製造方法 |
-
2011
- 2011-04-06 JP JP2011084763A patent/JP5745315B2/ja active Active
-
2012
- 2012-04-06 KR KR1020157030630A patent/KR20150123976A/ko active Search and Examination
- 2012-04-06 CN CN201280016240.XA patent/CN103459671B/zh not_active Expired - Fee Related
- 2012-04-06 US US14/009,420 patent/US9162251B2/en not_active Expired - Fee Related
- 2012-04-06 EP EP12768423.1A patent/EP2695972B1/en active Active
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- 2012-04-06 CN CN201510566349.6A patent/CN105195746B/zh not_active Expired - Fee Related
- 2012-04-06 WO PCT/JP2012/059590 patent/WO2012137950A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002226230A (ja) * | 2001-01-25 | 2002-08-14 | Canon Inc | 光学素子成形用型及びその製造方法 |
JP2003301279A (ja) * | 2002-04-12 | 2003-10-24 | Ford Global Technologies Llc | 運動噴霧を用いる腐食の選択制御方法 |
JP2008231486A (ja) * | 2007-03-19 | 2008-10-02 | Ihi Corp | 合金塗布方法、ロウ材塗布方法、熱交換器の製造方法 |
JP2008302317A (ja) * | 2007-06-08 | 2008-12-18 | Ihi Corp | コールドスプレー方法、コールドスプレー装置 |
JP2009197294A (ja) * | 2008-02-25 | 2009-09-03 | Honda Motor Co Ltd | 積層体の製造方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016194106A (ja) * | 2015-03-31 | 2016-11-17 | 日本発條株式会社 | 成形加工用マグネシウム系部材 |
JP2016209563A (ja) * | 2015-04-30 | 2016-12-15 | アービンメリトール・テクノロジー,エルエルシー | シャフト釣合いシステムおよびシャフトの釣合いをとる方法 |
JP2017095779A (ja) * | 2015-11-26 | 2017-06-01 | 日本発條株式会社 | 積層体の製造方法 |
WO2017090565A1 (ja) * | 2015-11-26 | 2017-06-01 | 日本発條株式会社 | 積層体、および積層体の製造方法 |
KR20180050357A (ko) * | 2015-11-26 | 2018-05-14 | 닛폰 하츠죠 가부시키가이샤 | 적층체, 및 적층체의 제조 방법 |
KR102095138B1 (ko) * | 2015-11-26 | 2020-03-30 | 닛폰 하츠죠 가부시키가이샤 | 적층체, 및 적층체의 제조 방법 |
JP2019536983A (ja) * | 2016-10-03 | 2019-12-19 | ウエスチングハウス・エレクトリック・カンパニー・エルエルシー | 原子燃料棒の事故耐性二重被膜 |
JP7130629B2 (ja) | 2016-10-03 | 2022-09-05 | ウエスチングハウス・エレクトリック・カンパニー・エルエルシー | 原子燃料棒の事故耐性二重被膜の形成方法 |
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US20140023875A1 (en) | 2014-01-23 |
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