JP2012204624A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2012204624A5 JP2012204624A5 JP2011068014A JP2011068014A JP2012204624A5 JP 2012204624 A5 JP2012204624 A5 JP 2012204624A5 JP 2011068014 A JP2011068014 A JP 2011068014A JP 2011068014 A JP2011068014 A JP 2011068014A JP 2012204624 A5 JP2012204624 A5 JP 2012204624A5
- Authority
- JP
- Japan
- Prior art keywords
- aperture
- focusing lens
- array
- charged particle
- drawing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 230000004075 alteration Effects 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011068014A JP2012204624A (ja) | 2011-03-25 | 2011-03-25 | 描画装置、および、物品の製造方法 |
| TW101109328A TW201239943A (en) | 2011-03-25 | 2012-03-19 | Drawing apparatus and method of manufacturing article |
| US13/423,960 US8610082B2 (en) | 2011-03-25 | 2012-03-19 | Drawing apparatus and method of manufacturing article |
| KR1020120029784A KR20120110026A (ko) | 2011-03-25 | 2012-03-23 | 묘화 장치 및 물품 제조 방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011068014A JP2012204624A (ja) | 2011-03-25 | 2011-03-25 | 描画装置、および、物品の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012204624A JP2012204624A (ja) | 2012-10-22 |
| JP2012204624A5 true JP2012204624A5 (enExample) | 2014-05-08 |
Family
ID=47185262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011068014A Pending JP2012204624A (ja) | 2011-03-25 | 2011-03-25 | 描画装置、および、物品の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012204624A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7726090B2 (ja) * | 2022-02-15 | 2025-08-20 | 株式会社ニューフレアテクノロジー | マルチ荷電粒子ビーム装置の光学系調整方法及びプログラム |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6031225A (ja) * | 1983-08-01 | 1985-02-18 | Nippon Telegr & Teleph Corp <Ntt> | 荷電ビ−ム露光装置 |
| JP4756776B2 (ja) * | 2001-05-25 | 2011-08-24 | キヤノン株式会社 | 荷電粒子線露光装置、荷電粒子線露光方法およびデバイス製造方法 |
| KR101368027B1 (ko) * | 2002-10-25 | 2014-02-26 | 마퍼 리쏘그라피 아이피 비.브이. | 리소그라피 장치 |
| JP3803105B2 (ja) * | 2004-09-07 | 2006-08-02 | 株式会社日立ハイテクノロジーズ | 電子ビーム応用装置 |
| JP2011517131A (ja) * | 2008-04-15 | 2011-05-26 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | 小ビームブランカ構成体 |
| JP5315040B2 (ja) * | 2008-12-26 | 2013-10-16 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び荷電粒子線装置による画像取得条件決定方法 |
-
2011
- 2011-03-25 JP JP2011068014A patent/JP2012204624A/ja active Pending