JP2015023032A5 - - Google Patents

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Publication number
JP2015023032A5
JP2015023032A5 JP2014147844A JP2014147844A JP2015023032A5 JP 2015023032 A5 JP2015023032 A5 JP 2015023032A5 JP 2014147844 A JP2014147844 A JP 2014147844A JP 2014147844 A JP2014147844 A JP 2014147844A JP 2015023032 A5 JP2015023032 A5 JP 2015023032A5
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JP
Japan
Prior art keywords
aperture
detection
signal beam
opening
type opening
Prior art date
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Granted
Application number
JP2014147844A
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English (en)
Japanese (ja)
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JP2015023032A (ja
JP5805831B2 (ja
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Publication date
Priority claimed from EP13177207.1A external-priority patent/EP2827136B1/en
Application filed filed Critical
Publication of JP2015023032A publication Critical patent/JP2015023032A/ja
Publication of JP2015023032A5 publication Critical patent/JP2015023032A5/ja
Application granted granted Critical
Publication of JP5805831B2 publication Critical patent/JP5805831B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014147844A 2013-07-19 2014-07-18 切り換え型マルチパースペクティブ検出器、切り換え型マルチパースペクティブ検出器用光学系、及び切り換え型マルチパースペクティブ検出器の動作方法 Active JP5805831B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13177207.1 2013-07-19
EP13177207.1A EP2827136B1 (en) 2013-07-19 2013-07-19 Switchable multi perspective detector, optics therefore and method of operating thereof

Publications (3)

Publication Number Publication Date
JP2015023032A JP2015023032A (ja) 2015-02-02
JP2015023032A5 true JP2015023032A5 (enExample) 2015-04-30
JP5805831B2 JP5805831B2 (ja) 2015-11-10

Family

ID=48874128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014147844A Active JP5805831B2 (ja) 2013-07-19 2014-07-18 切り換え型マルチパースペクティブ検出器、切り換え型マルチパースペクティブ検出器用光学系、及び切り換え型マルチパースペクティブ検出器の動作方法

Country Status (4)

Country Link
US (1) US8963083B2 (enExample)
EP (1) EP2827136B1 (enExample)
JP (1) JP5805831B2 (enExample)
TW (1) TWI523064B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9805908B2 (en) * 2015-02-18 2017-10-31 Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam
US10643819B2 (en) 2015-03-24 2020-05-05 Kla-Tencor Corporation Method and system for charged particle microscopy with improved image beam stabilization and interrogation
KR102441581B1 (ko) 2015-06-03 2022-09-07 삼성전자주식회사 표면 검사 방법 및 이를 이용한 포토 마스크의 검사 방법
US10103004B2 (en) * 2015-07-02 2018-10-16 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics
CN108738343B (zh) * 2015-11-30 2022-02-01 Asml荷兰有限公司 多个带电粒子束的设备
CN112055886A (zh) * 2018-02-27 2020-12-08 卡尔蔡司MultiSEM有限责任公司 带电粒子多束系统及方法
JP7085258B2 (ja) * 2018-04-13 2022-06-16 株式会社ホロン 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置
US20230112447A1 (en) * 2020-03-11 2023-04-13 Asml Netherlands B.V. Systems and methods for signal electron detection
CN111948697B (zh) * 2020-07-08 2022-11-08 中国科学院国家空间科学中心 一种星载中能电子探测器
US20230377831A1 (en) * 2020-09-22 2023-11-23 Asml Netherlands B.V. Anti-scanning operation mode of secondary-electron projection imaging system for apparatus with plurality of beamlets

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818851A (ja) * 1981-07-24 1983-02-03 Hitachi Ltd 反射電子検出装置
JPH0614453B2 (ja) * 1983-06-30 1994-02-23 三菱電機株式会社 カラ−受像管
US4894212A (en) 1987-07-20 1990-01-16 Mobil Oil Corp. Synthesis of crystalline silicate ZSM-11
JPH0547334A (ja) * 1991-08-12 1993-02-26 Shimadzu Corp ２次元電子分光装置
US5892224A (en) * 1996-05-13 1999-04-06 Nikon Corporation Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams
JP3767341B2 (ja) * 2000-07-21 2006-04-19 株式会社日立製作所 電子線を用いたパターン検査方法及びその装置
EP1271605A4 (en) * 2000-11-02 2009-09-02 Ebara Corp ELECTRON BEAM APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE COMPRISING SAID APPARATUS
JP3906866B2 (ja) * 2005-08-18 2007-04-18 株式会社日立製作所 荷電粒子ビーム検査装置
EP2654069B1 (en) * 2012-04-16 2016-02-24 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Multi channel detector, optics therefore and method of operating thereof
EP2654068B1 (en) * 2012-04-16 2017-05-17 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Switchable multi perspective detector, optics therefore and method of operating thereof

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