JP2012199532A5 - - Google Patents
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- Publication number
- JP2012199532A5 JP2012199532A5 JP2012046433A JP2012046433A JP2012199532A5 JP 2012199532 A5 JP2012199532 A5 JP 2012199532A5 JP 2012046433 A JP2012046433 A JP 2012046433A JP 2012046433 A JP2012046433 A JP 2012046433A JP 2012199532 A5 JP2012199532 A5 JP 2012199532A5
- Authority
- JP
- Japan
- Prior art keywords
- segment
- carbon atoms
- polymer
- hydrophilic segment
- hydrophilic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920000642 polymer Polymers 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- 150000001720 carbohydrates Chemical class 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/039,723 | 2011-03-03 | ||
| US13/039,723 US8435896B2 (en) | 2011-03-03 | 2011-03-03 | Stable, concentratable chemical mechanical polishing composition and methods relating thereto |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012199532A JP2012199532A (ja) | 2012-10-18 |
| JP2012199532A5 true JP2012199532A5 (enExample) | 2015-04-16 |
| JP6118502B2 JP6118502B2 (ja) | 2017-04-19 |
Family
ID=46671508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012046433A Active JP6118502B2 (ja) | 2011-03-03 | 2012-03-02 | 安定した濃縮可能なケミカルメカニカル研磨組成物及びそれに関連する方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8435896B2 (enExample) |
| JP (1) | JP6118502B2 (enExample) |
| KR (1) | KR101829635B1 (enExample) |
| CN (1) | CN102702979B (enExample) |
| DE (1) | DE102012004220A1 (enExample) |
| FR (1) | FR2972196B1 (enExample) |
| TW (1) | TWI609072B (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8609541B2 (en) * | 2007-07-05 | 2013-12-17 | Hitachi Chemical Co., Ltd. | Polishing slurry for metal films and polishing method |
| JP2012146976A (ja) * | 2010-12-24 | 2012-08-02 | Hitachi Chem Co Ltd | 研磨液及びこの研磨液を用いた基板の研磨方法 |
| JP6198740B2 (ja) * | 2012-09-18 | 2017-09-20 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| JP6549927B2 (ja) * | 2015-07-24 | 2019-07-24 | 株式会社ディスコ | ホウ素化合物を添加した切削砥石 |
| WO2018168206A1 (ja) * | 2017-03-14 | 2018-09-20 | 株式会社フジミインコーポレーテッド | 研磨用組成物、その製造方法ならびにこれを用いた研磨方法および基板の製造方法 |
| KR102611598B1 (ko) * | 2017-04-27 | 2023-12-08 | 주식회사 동진쎄미켐 | 화학-기계적 연마용 슬러리 조성물 |
| EP3631045A4 (en) * | 2017-05-25 | 2021-01-27 | Fujifilm Electronic Materials U.S.A., Inc. | CHEMICAL-MECHANICAL POLISHING SLUDGE FOR COBALT APPLICATIONS |
| WO2020091242A1 (ko) * | 2018-10-31 | 2020-05-07 | 영창케미칼 주식회사 | 구리 배리어층 연마용 슬러리 조성물 |
| CN113242890A (zh) * | 2018-12-12 | 2021-08-10 | 巴斯夫欧洲公司 | 含有铜和钌的基材的化学机械抛光 |
| CN114686116A (zh) * | 2020-12-30 | 2022-07-01 | 安集微电子科技（上海）股份有限公司 | 化学机械抛光液及其使用方法 |
| CN112920716A (zh) * | 2021-01-26 | 2021-06-08 | 中国科学院上海微系统与信息技术研究所 | 一种用于氮化钛化学机械抛光的组合物及其使用方法 |
| CN115926629B (zh) * | 2022-12-30 | 2023-12-05 | 昂士特科技(深圳)有限公司 | 具有改进再循环性能的化学机械抛光组合物 |
| LU103163B1 (en) * | 2023-06-30 | 2024-12-30 | Sampochem Gmbh | High-density, sub-zero stable clear liquid composition and the method for producing thereof |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2531431C3 (de) * | 1975-07-14 | 1979-03-01 | Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen | Poliermittel zur Herstellung schleierfreier Halbleiteroberflächen |
| SG99289A1 (en) | 1998-10-23 | 2003-10-27 | Ibm | Chemical-mechanical planarization of metallurgy |
| US6375693B1 (en) | 1999-05-07 | 2002-04-23 | International Business Machines Corporation | Chemical-mechanical planarization of barriers or liners for copper metallurgy |
| JP3551238B2 (ja) * | 1999-09-07 | 2004-08-04 | 三菱住友シリコン株式会社 | シリコンウェーハの研磨液及びこれを用いた研磨方法 |
| JP3525824B2 (ja) * | 1999-09-17 | 2004-05-10 | 日立化成工業株式会社 | Ｃｍｐ研磨液 |
| JP2004533115A (ja) | 2001-04-12 | 2004-10-28 | ロデール ホールディングス インコーポレイテッド | 界面活性剤を有する研磨用組成物 |
| US6632259B2 (en) | 2001-05-18 | 2003-10-14 | Rodel Holdings, Inc. | Chemical mechanical polishing compositions and methods relating thereto |
| US6821897B2 (en) * | 2001-12-05 | 2004-11-23 | Cabot Microelectronics Corporation | Method for copper CMP using polymeric complexing agents |
| US6776810B1 (en) * | 2002-02-11 | 2004-08-17 | Cabot Microelectronics Corporation | Anionic abrasive particles treated with positively charged polyelectrolytes for CMP |
| US7427361B2 (en) * | 2003-10-10 | 2008-09-23 | Dupont Air Products Nanomaterials Llc | Particulate or particle-bound chelating agents |
| KR100599327B1 (ko) * | 2004-03-12 | 2006-07-19 | 주식회사 케이씨텍 | Ｃｍｐ용 슬러리 및 그의 제조법 |
| CN1667026B (zh) * | 2004-03-12 | 2011-11-30 | K.C.科技股份有限公司 | 抛光浆料及其制备方法和基板的抛光方法 |
| JP2005285944A (ja) * | 2004-03-29 | 2005-10-13 | Hitachi Chem Co Ltd | 金属用研磨液及び研磨方法 |
| JP4641155B2 (ja) * | 2004-06-03 | 2011-03-02 | 株式会社日本触媒 | 化学機械研磨用の研磨剤 |
| US7303993B2 (en) | 2004-07-01 | 2007-12-04 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing compositions and methods relating thereto |
| US7384871B2 (en) | 2004-07-01 | 2008-06-10 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing compositions and methods relating thereto |
| US20060000808A1 (en) * | 2004-07-01 | 2006-01-05 | Fuji Photo Film Co., Ltd. | Polishing solution of metal and chemical mechanical polishing method |
| US7086935B2 (en) | 2004-11-24 | 2006-08-08 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Cellulose-containing polishing compositions and methods relating thereto |
| JP4390757B2 (ja) * | 2005-08-30 | 2009-12-24 | 花王株式会社 | 研磨液組成物 |
| US7824568B2 (en) | 2006-08-17 | 2010-11-02 | International Business Machines Corporation | Solution for forming polishing slurry, polishing slurry and related methods |
| JP2008091411A (ja) * | 2006-09-29 | 2008-04-17 | Fujifilm Corp | 金属用研磨液 |
| US9633865B2 (en) * | 2008-02-22 | 2017-04-25 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Low-stain polishing composition |
| US20090215266A1 (en) | 2008-02-22 | 2009-08-27 | Thomas Terence M | Polishing Copper-Containing patterned wafers |
| JP4521058B2 (ja) * | 2008-03-24 | 2010-08-11 | 株式会社Adeka | 表面改質コロイダルシリカおよびこれを含有するｃｍｐ用研磨組成物 |
| US8540893B2 (en) | 2008-08-04 | 2013-09-24 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition and methods relating thereto |
| US8440097B2 (en) * | 2011-03-03 | 2013-05-14 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Stable, concentratable, water soluble cellulose free chemical mechanical polishing composition |
-
2011
- 2011-03-03 US US13/039,723 patent/US8435896B2/en not_active Expired - Fee Related
-
2012
- 2012-03-01 DE DE102012004220A patent/DE102012004220A1/de not_active Withdrawn
- 2012-03-02 CN CN201210126850.7A patent/CN102702979B/zh not_active Expired - Fee Related
- 2012-03-02 TW TW101106931A patent/TWI609072B/zh not_active IP Right Cessation
- 2012-03-02 KR KR1020120022020A patent/KR101829635B1/ko not_active Expired - Fee Related
- 2012-03-02 JP JP2012046433A patent/JP6118502B2/ja active Active
- 2012-03-05 FR FR1251978A patent/FR2972196B1/fr not_active Expired - Fee Related
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