JP2012199224A5 - - Google Patents

Download PDF

Info

Publication number
JP2012199224A5
JP2012199224A5 JP2012014798A JP2012014798A JP2012199224A5 JP 2012199224 A5 JP2012199224 A5 JP 2012199224A5 JP 2012014798 A JP2012014798 A JP 2012014798A JP 2012014798 A JP2012014798 A JP 2012014798A JP 2012199224 A5 JP2012199224 A5 JP 2012199224A5
Authority
JP
Japan
Prior art keywords
sample
charged particle
mirror
fluorescent marker
particle beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012014798A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012199224A (ja
JP6031230B2 (ja
Filing date
Publication date
Priority claimed from US13/017,016 external-priority patent/US8319181B2/en
Application filed filed Critical
Publication of JP2012199224A publication Critical patent/JP2012199224A/ja
Publication of JP2012199224A5 publication Critical patent/JP2012199224A5/ja
Application granted granted Critical
Publication of JP6031230B2 publication Critical patent/JP6031230B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012014798A 2011-01-30 2012-01-27 荷電粒子システム、蛍光マーカー局在化方法、試料分析方法及び画像処理方法 Active JP6031230B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/017,016 2011-01-30
US13/017,016 US8319181B2 (en) 2011-01-30 2011-01-30 System and method for localization of large numbers of fluorescent markers in biological samples

Publications (3)

Publication Number Publication Date
JP2012199224A JP2012199224A (ja) 2012-10-18
JP2012199224A5 true JP2012199224A5 (enExample) 2015-03-05
JP6031230B2 JP6031230B2 (ja) 2016-11-24

Family

ID=45528992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012014798A Active JP6031230B2 (ja) 2011-01-30 2012-01-27 荷電粒子システム、蛍光マーカー局在化方法、試料分析方法及び画像処理方法

Country Status (4)

Country Link
US (3) US8319181B2 (enExample)
EP (1) EP2482061B1 (enExample)
JP (1) JP6031230B2 (enExample)
CN (1) CN102645423B (enExample)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8992816B2 (en) 2008-01-03 2015-03-31 Arcam Ab Method and apparatus for producing three-dimensional objects
US8461557B2 (en) * 2008-06-13 2013-06-11 Carl Zeiss Microscopy, Llc Ion sources, systems and methods
WO2011008143A1 (en) 2009-07-15 2011-01-20 Arcam Ab Method and apparatus for producing three-dimensional objects
US8319181B2 (en) 2011-01-30 2012-11-27 Fei Company System and method for localization of large numbers of fluorescent markers in biological samples
US10189086B2 (en) 2011-12-28 2019-01-29 Arcam Ab Method and apparatus for manufacturing porous three-dimensional articles
WO2013098054A1 (en) 2011-12-28 2013-07-04 Arcam Ab Method and apparatus for detecting defects in freeform fabrication
NL1039512C2 (en) * 2012-04-02 2013-10-03 Univ Delft Tech Integrated optical and charged particle inspection apparatus.
US9012870B2 (en) * 2012-07-23 2015-04-21 Board Of Trustees Of The University Of Illinois Two-photon 3-D FIONA of individual quantum dots
EP2916980B1 (en) 2012-11-06 2016-06-01 Arcam Ab Powder pre-processing for additive manufacturing
JP6040012B2 (ja) * 2012-11-26 2016-12-07 株式会社日立ハイテクノロジーズ 試料台及び荷電粒子線装置及び試料観察方法
US9044781B2 (en) 2012-12-04 2015-06-02 Fei Company Microfluidics delivery systems
US9505172B2 (en) 2012-12-17 2016-11-29 Arcam Ab Method and apparatus for additive manufacturing
GB2522388B (en) 2012-12-17 2017-08-23 Arcam Ab Additive manufacturing method and apparatus
CN103076312B (zh) * 2012-12-17 2015-04-01 深圳先进技术研究院 一种细胞荧光标记方法
US8872105B2 (en) * 2013-02-19 2014-10-28 Fei Company In situ reactivation of fluorescence marker
JP6239246B2 (ja) 2013-03-13 2017-11-29 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材
US9550207B2 (en) 2013-04-18 2017-01-24 Arcam Ab Method and apparatus for additive manufacturing
US9676031B2 (en) 2013-04-23 2017-06-13 Arcam Ab Method and apparatus for forming a three-dimensional article
US9468973B2 (en) 2013-06-28 2016-10-18 Arcam Ab Method and apparatus for additive manufacturing
US9505057B2 (en) 2013-09-06 2016-11-29 Arcam Ab Powder distribution in additive manufacturing of three-dimensional articles
US9676033B2 (en) 2013-09-20 2017-06-13 Arcam Ab Method for additive manufacturing
US10434572B2 (en) 2013-12-19 2019-10-08 Arcam Ab Method for additive manufacturing
US9802253B2 (en) 2013-12-16 2017-10-31 Arcam Ab Additive manufacturing of three-dimensional articles
US10130993B2 (en) 2013-12-18 2018-11-20 Arcam Ab Additive manufacturing of three-dimensional articles
US9789563B2 (en) 2013-12-20 2017-10-17 Arcam Ab Method for additive manufacturing
US9564291B1 (en) * 2014-01-27 2017-02-07 Mochii, Inc. Hybrid charged-particle beam and light beam microscopy
JP6216651B2 (ja) * 2014-02-06 2017-10-18 株式会社日立ハイテクノロジーズ 荷電粒子線装置、画像生成方法、観察システム
NL2012218C2 (en) * 2014-02-06 2015-08-10 Univ Delft Tech Method and apparatus for determining a density of fluorescent markers in a sample.
US9789541B2 (en) 2014-03-07 2017-10-17 Arcam Ab Method for additive manufacturing of three-dimensional articles
JP6291972B2 (ja) * 2014-03-31 2018-03-14 三菱マテリアル株式会社 サンプリング位置表示装置、サンプリング方法
US20150283613A1 (en) 2014-04-02 2015-10-08 Arcam Ab Method for fusing a workpiece
US9478390B2 (en) 2014-06-30 2016-10-25 Fei Company Integrated light optics and gas delivery in a charged particle lens
US20160032281A1 (en) * 2014-07-31 2016-02-04 Fei Company Functionalized grids for locating and imaging biological specimens and methods of using the same
US9341467B2 (en) 2014-08-20 2016-05-17 Arcam Ab Energy beam position verification
US9431211B2 (en) * 2014-08-22 2016-08-30 The United States Of America, As Represented By The Secretary Of Commerce Hybrid electron microscope
EP3203494B1 (en) * 2014-09-24 2019-12-18 National Institute for Materials Science Energy-discrimination electron detector and scanning electron microscope in which same is used
CN104458686B (zh) * 2014-12-02 2017-01-18 公安部第一研究所 一种基于特征分子量内标定量分析的dna荧光光谱采集方法
US10786865B2 (en) 2014-12-15 2020-09-29 Arcam Ab Method for additive manufacturing
US9721755B2 (en) * 2015-01-21 2017-08-01 Arcam Ab Method and device for characterizing an electron beam
US10018579B1 (en) * 2015-02-18 2018-07-10 Kla-Tencor Corporation System and method for cathodoluminescence-based semiconductor wafer defect inspection
US11014161B2 (en) 2015-04-21 2021-05-25 Arcam Ab Method for additive manufacturing
US9673023B2 (en) * 2015-05-12 2017-06-06 Applied Materials Israel Ltd. System for discharging an area that is scanned by an electron beam
US10103004B2 (en) 2015-07-02 2018-10-16 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics
US10807187B2 (en) 2015-09-24 2020-10-20 Arcam Ab X-ray calibration standard object
US10583483B2 (en) 2015-10-15 2020-03-10 Arcam Ab Method and apparatus for producing a three-dimensional article
EP3159728A1 (en) 2015-10-21 2017-04-26 FEI Company Standing wave interferometric microscope
US10525531B2 (en) 2015-11-17 2020-01-07 Arcam Ab Additive manufacturing of three-dimensional articles
US10610930B2 (en) 2015-11-18 2020-04-07 Arcam Ab Additive manufacturing of three-dimensional articles
JP6386679B2 (ja) * 2015-12-03 2018-09-05 松定プレシジョン株式会社 荷電粒子線装置及び走査電子顕微鏡
US11247274B2 (en) 2016-03-11 2022-02-15 Arcam Ab Method and apparatus for forming a three-dimensional article
US10501851B2 (en) 2016-05-12 2019-12-10 Fei Company Attachment of nano-objects to beam-deposited structures
US11325191B2 (en) 2016-05-24 2022-05-10 Arcam Ab Method for additive manufacturing
US10549348B2 (en) 2016-05-24 2020-02-04 Arcam Ab Method for additive manufacturing
US10525547B2 (en) 2016-06-01 2020-01-07 Arcam Ab Additive manufacturing of three-dimensional articles
JP2017227532A (ja) * 2016-06-22 2017-12-28 株式会社ディスコ 蛍光検出装置
US10792757B2 (en) 2016-10-25 2020-10-06 Arcam Ab Method and apparatus for additive manufacturing
US10141158B2 (en) * 2016-12-05 2018-11-27 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer and DUT inspection apparatus and method using thereof
US10987752B2 (en) 2016-12-21 2021-04-27 Arcam Ab Additive manufacturing of three-dimensional articles
US11059123B2 (en) 2017-04-28 2021-07-13 Arcam Ab Additive manufacturing of three-dimensional articles
CN106981411B (zh) * 2017-05-03 2018-02-13 中国地质大学（北京） 一种聚光系统及其聚光方法
US11292062B2 (en) 2017-05-30 2022-04-05 Arcam Ab Method and device for producing three-dimensional objects
US10168614B1 (en) 2017-06-14 2019-01-01 Applied Materials Israel Ltd. On-axis illumination and alignment for charge control during charged particle beam inspection
US20190099809A1 (en) 2017-09-29 2019-04-04 Arcam Ab Method and apparatus for additive manufacturing
US10529070B2 (en) 2017-11-10 2020-01-07 Arcam Ab Method and apparatus for detecting electron beam source filament wear
US11072117B2 (en) 2017-11-27 2021-07-27 Arcam Ab Platform device
US10821721B2 (en) 2017-11-27 2020-11-03 Arcam Ab Method for analysing a build layer
US11517975B2 (en) 2017-12-22 2022-12-06 Arcam Ab Enhanced electron beam generation
US12350754B2 (en) 2017-12-22 2025-07-08 Arcam Ab Electron beam source and the use of the same
US10692694B2 (en) * 2017-12-27 2020-06-23 Fei Company Method and apparatus for enhancing SE detection in mirror-based light imaging charged particle microscopes
US10896802B2 (en) * 2017-12-27 2021-01-19 Fei Company Combined SEM-CL and FIB-IOE microscopy
US10800101B2 (en) 2018-02-27 2020-10-13 Arcam Ab Compact build tank for an additive manufacturing apparatus
US11267051B2 (en) 2018-02-27 2022-03-08 Arcam Ab Build tank for an additive manufacturing apparatus
US11400519B2 (en) 2018-03-29 2022-08-02 Arcam Ab Method and device for distributing powder material
CN108646167B (zh) * 2018-04-27 2020-12-04 中科晶源微电子技术（北京）有限公司 用于半导体器件的激光辅助的电子束检测设备和方法
US11295410B2 (en) 2019-04-12 2022-04-05 Rocket Innovations, Inc. Writing surface boundary markers for computer vision
EP3792952B1 (en) 2019-09-16 2025-02-19 FEI Company Light guide assembly for an electron microscope
US20240153736A1 (en) * 2021-03-12 2024-05-09 Japan Science And Technology Agency Electron microscope, device for measuring electron-photon correlation, and method for measuring electron-photon correlation
DE102021213930A1 (de) 2021-12-08 2023-02-16 Carl Zeiss Smt Gmbh Transferoptik für röntgenstrahlen in einem elektronenmikroskop
US20240128129A1 (en) * 2022-10-12 2024-04-18 The University Of Hong Kong Luminescence method for the in-line detection of atomic scale defects during fabrication of 4h-sic diodes

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3375251D1 (en) * 1982-07-16 1988-02-11 Lintech Instr Ltd An elektrode system of a retarding-field spectrometer for a voltage measuring electron beam apparatus
JPS6361938A (ja) * 1986-09-02 1988-03-18 Shimadzu Corp カソ−ドルミネツセンス装置
JPH0754684B2 (ja) * 1987-08-28 1995-06-07 株式会社日立製作所 電子顕微鏡
DE3729846A1 (de) * 1987-09-05 1989-03-23 Zeiss Carl Fa Kathodolumineszenzdetektor
US5016173A (en) * 1989-04-13 1991-05-14 Vanguard Imaging Ltd. Apparatus and method for monitoring visually accessible surfaces of the body
US5393976A (en) * 1992-11-26 1995-02-28 Kabushiki Kaisha Topcon Apparatus for displaying a sample image
JP3499286B2 (ja) * 1994-05-11 2004-02-23 株式会社トプコン 形態画像観察装置およびその方法
US6476387B1 (en) * 1998-05-15 2002-11-05 Hitachi, Ltd. Method and apparatus for observing or processing and analyzing using a charged beam
DE69924240T2 (de) * 1999-06-23 2006-02-09 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Ladungsträgerteilchenstrahlvorrichtung
US6373070B1 (en) 1999-10-12 2002-04-16 Fei Company Method apparatus for a coaxial optical microscope with focused ion beam
JP4410367B2 (ja) * 1999-12-24 2010-02-03 キヤノン電子株式会社 金属鏡および金属回転多面鏡およびその製造方法
US6633034B1 (en) * 2000-05-04 2003-10-14 Applied Materials, Inc. Method and apparatus for imaging a specimen using low profile electron detector for charged particle beam imaging apparatus including electrostatic mirrors
JP2002042713A (ja) * 2000-07-28 2002-02-08 Jeol Ltd 対物レンズ内検出器を備えた走査電子顕微鏡
JP2002162350A (ja) * 2000-11-22 2002-06-07 Hitachi Ltd 蛍光測定装置
US7668697B2 (en) * 2006-02-06 2010-02-23 Andrei Volkov Method for analyzing dynamic detectable events at the single molecule level
JP2003157789A (ja) * 2001-11-20 2003-05-30 Hitachi High-Technologies Corp 走査電子顕微鏡等のカソードルミネッセンス検出装置
US7504182B2 (en) * 2002-09-18 2009-03-17 Fei Company Photolithography mask repair
NL1023260C1 (nl) * 2003-04-24 2004-10-27 Fei Co Deeltjes-optisch apparaat met een permanent magnetische lens en een elektrostatische lens.
JP2005005056A (ja) * 2003-06-10 2005-01-06 Hitachi High-Technologies Corp 走査電子顕微鏡
EP1735333A2 (en) 2004-03-24 2006-12-27 Diversa Corporation Chimeric cannulae proteins, nucleic acids encoding them and methods for making and using them
NL1026006C2 (nl) * 2004-04-22 2005-10-25 Fei Co Deeltjes-optisch apparaat voorzien van lenzen met permanent magnetisch materiaal.
DE102004021230A1 (de) 2004-04-30 2005-11-24 Heiko Dr. Schwertner Enzym-und Template-gesteuerte Synthese von Silica aus nicht-organischen Siliciumverbindungen sowie Aminosilanen und Silazanen und Verwendung
NL1027462C2 (nl) * 2004-11-09 2006-05-10 Koninkl Philips Electronics Nv Werkwijze voor het lokaliseren van fluorescente markers.
WO2006118615A2 (en) 2004-12-16 2006-11-09 Brandeis University Clonable tag for purification and electron microscopy labeling
US7960509B2 (en) 2005-01-14 2011-06-14 Trustees Of Tufts College Fibrous protein fusions and use thereof in the formation of advanced organic/inorganic composite materials
EP1724809A1 (en) * 2005-05-18 2006-11-22 FEI Company Particle-optical apparatus for the irradiation of a sample
US7589322B2 (en) * 2005-06-29 2009-09-15 Horiba, Ltd. Sample measuring device
WO2008060307A2 (en) 2006-01-09 2008-05-22 Wyeth Methods of labeling transiently expressed proteins in large-scale eukaryotic cell cultures
JP2010504996A (ja) * 2006-09-26 2010-02-18 ケース ウエスタン リザーブ ユニバーシティ サイトカインシグナリング
WO2008050321A2 (en) * 2006-10-24 2008-05-02 B-Nano Ltd. An interface, a methof for observing an object within a non-vacuum environment and a scanning electron microscope
WO2008140472A2 (en) 2006-10-27 2008-11-20 The Regents Of The University Of California Functionalized molecules comprising an autosilification moiety and methods of making and using same
EP1956633A3 (en) * 2007-02-06 2009-12-16 FEI Company Particle-optical apparatus for simultaneous observing a sample with particles and photons
EP1956632A1 (en) * 2007-02-14 2008-08-13 FEI Company Particle-optical apparatus for simultaneous observing a sample with particles and photons
JP4388101B2 (ja) * 2007-06-19 2009-12-24 株式会社日立ハイテクノロジーズ 荷電粒子線加工装置
US8013300B2 (en) * 2008-06-20 2011-09-06 Carl Zeiss Nts, Llc Sample decontamination
WO2010082466A1 (ja) * 2009-01-15 2010-07-22 株式会社日立ハイテクノロジーズ イオンビーム装置
DE102009015341A1 (de) * 2009-03-27 2010-10-07 Carl Zeiss Ag Verfahren und Vorrichtungen zur optischen Untersuchung von Proben
JP2010281710A (ja) * 2009-06-05 2010-12-16 Sumitomo Electric Ind Ltd 電子スペクトルの測定方法および測定装置
DE102009055271A1 (de) * 2009-12-23 2011-06-30 Carl Zeiss NTS GmbH, 73447 Verfahren zur Erzeugung einer Darstellung eines Objekts mittels eines Teilchenstrahls sowie Teilchenstrahlgerät zur Durchführung des Verfahrens
US8319181B2 (en) * 2011-01-30 2012-11-27 Fei Company System and method for localization of large numbers of fluorescent markers in biological samples
JP5963453B2 (ja) * 2011-03-15 2016-08-03 株式会社荏原製作所 検査装置

Similar Documents

Publication Publication Date Title
JP2012199224A5 (enExample)
JP6031230B2 (ja) 荷電粒子システム、蛍光マーカー局在化方法、試料分析方法及び画像処理方法
CN105321795B (zh) 改进的成像质谱分析方法和装置
JP6299600B2 (ja) 微小粒子測定装置
JP4523558B2 (ja) 分析システムおよび荷電粒子ビームデバイス
CN102229023B (zh) 激光处理系统，载物件和激光处理方法
JP4145651B2 (ja) 空気中のバイオエアロゾル粒子を検出して同定する方法および装置
JP2017515283A (ja) 複数の荷電粒子ビームを用いてサンプルを検査するための装置および方法
NL2005080C2 (en) Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus.
US9134205B2 (en) System and method for removing surface particles from an object
JP2011503581A5 (enExample)
EP2418674A3 (en) Ion sources, systems and methods
TW201820374A (zh) 粒子束系統及物件之粒子光學檢查的方法
JP2020514762A5 (enExample)
CN102608593A (zh) 粒子检测器
JP2016522409A5 (enExample)
JP2020101564A (ja) 分光画像データ処理装置および２次元分光装置
KR20140042016A (ko) 이벤트 기반 비전 센서를 이용한 근접 센서 및 근접 센싱 방법
EP3435072A1 (en) Raman spectrum inspection apparatus
CN104697982A (zh) 高空间分辨激光差动共焦质谱显微成像方法与装置
CN108028161A (zh) 用于带电粒子束装置的分段式检测器
JP3898826B2 (ja) 粒子線結像装置、粒子線結像装置に設けられるスペクトロメータ、粒子線結像方法及び粒子線結像装置の使用方法
WO2020021306A1 (en) Method for material discrimination and respective implementation system
US9268126B2 (en) Observation and analysis unit
US9927343B2 (en) Apparatus and method for determining a size of particles in a spray jet