JP2012182455A - 信頼性を改良するための導電性層間のビア - Google Patents

信頼性を改良するための導電性層間のビア Download PDF

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Publication number
JP2012182455A
JP2012182455A JP2012040338A JP2012040338A JP2012182455A JP 2012182455 A JP2012182455 A JP 2012182455A JP 2012040338 A JP2012040338 A JP 2012040338A JP 2012040338 A JP2012040338 A JP 2012040338A JP 2012182455 A JP2012182455 A JP 2012182455A
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JP
Japan
Prior art keywords
layer
conductive
semiconductor device
wiring
dangling
Prior art date
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Pending
Application number
JP2012040338A
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English (en)
Japanese (ja)
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JP2012182455A5 (enExample
Inventor
S Hoang Tuan
エス．ホアン トゥアン
Sharma Punito
シャルマ プニート
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Publication of JP2012182455A publication Critical patent/JP2012182455A/ja
Publication of JP2012182455A5 publication Critical patent/JP2012182455A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528—Layout of the interconnection structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5226—Via connections in a multilevel interconnection structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Geometry (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)
JP2012040338A 2011-02-28 2012-02-27 信頼性を改良するための導電性層間のビア Pending JP2012182455A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/036,461 2011-02-28
US13/036,461 US8847393B2 (en) 2011-02-28 2011-02-28 Vias between conductive layers to improve reliability

Publications (2)

Publication Number Publication Date
JP2012182455A true JP2012182455A (ja) 2012-09-20
JP2012182455A5 JP2012182455A5 (enExample) 2015-04-16

Family

ID=45607623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012040338A Pending JP2012182455A (ja) 2011-02-28 2012-02-27 信頼性を改良するための導電性層間のビア

Country Status (4)

Country Link
US (1) US8847393B2 (enExample)
EP (1) EP2492960A3 (enExample)
JP (1) JP2012182455A (enExample)
CN (1) CN102651363B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200060670A (ko) * 2018-11-21 2020-06-01 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 단글링 결합들을 갖는 다이들의 결합 구조물
US12482772B2 (en) 2018-11-21 2025-11-25 Taiwan Semiconductor Manufacturing Company, Ltd. Bonding structure of dies with dangling bonds

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9041209B2 (en) 2011-11-18 2015-05-26 Freescale Semiconductor, Inc. Method and apparatus to improve reliability of vias
US11036911B2 (en) * 2019-09-26 2021-06-15 Taiwan Semiconductor Manufacturing Co., Ltd. Charging prevention method and structure

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JPH0897290A (ja) * 1994-09-28 1996-04-12 Kawasaki Steel Corp 半導体集積回路チップのレイアウト設計方法及び半導体集積回路チップ
JP2005268748A (ja) * 2004-02-18 2005-09-29 Nec Electronics Corp 半導体装置及びその製造方法
JP2007129030A (ja) * 2005-11-02 2007-05-24 Seiko Epson Corp 半導体装置及びその製造方法
JP2007305713A (ja) * 2006-05-10 2007-11-22 Matsushita Electric Ind Co Ltd 半導体装置及び配線補助パターン生成方法
JP2009246341A (ja) * 2008-03-11 2009-10-22 Panasonic Corp 半導体集積回路装置

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US5849637A (en) * 1996-06-10 1998-12-15 Wang; Chin-Kun Integration of spin-on gap filling dielectric with W-plug without outgassing
US6734472B2 (en) * 2002-04-25 2004-05-11 Synplicity, Inc. Power and ground shield mesh to remove both capacitive and inductive signal coupling effects of routing in integrated circuit device
US7943436B2 (en) * 2002-07-29 2011-05-17 Synopsys, Inc. Integrated circuit devices and methods and apparatuses for designing integrated circuit devices
JP2005064226A (ja) 2003-08-12 2005-03-10 Renesas Technology Corp 配線構造
US6864171B1 (en) * 2003-10-09 2005-03-08 Infineon Technologies Ag Via density rules
JP4047324B2 (ja) 2003-12-03 2008-02-13 松下電器産業株式会社 半導体装置及びその製造方法
US7157365B2 (en) 2004-05-10 2007-01-02 Agere Systems Inc. Semiconductor device having a dummy conductive via and a method of manufacture therefor
US7272814B2 (en) * 2004-09-20 2007-09-18 Lsi Corporation Reconfiguring a RAM to a ROM using layers of metallization
JP2007012773A (ja) * 2005-06-29 2007-01-18 Nec Electronics Corp 多層配線を有する半導体装置
JP4671814B2 (ja) * 2005-09-02 2011-04-20 パナソニック株式会社 半導体装置
US7301236B2 (en) 2005-10-18 2007-11-27 International Business Machines Corporation Increasing electromigration lifetime and current density in IC using vertically upwardly extending dummy via
DE102005057076A1 (de) * 2005-11-30 2007-05-31 Advanced Micro Devices, Inc., Sunnyvale Technik zum Verbessern der Haftung von Metallisierungsschichten durch Vorsehen von Platzhalterkontaktdurchführungen
JP5050413B2 (ja) 2006-06-09 2012-10-17 富士通株式会社 設計支援プログラム、該プログラムを記録した記録媒体、設計支援方法、および設計支援装置
US7566652B2 (en) 2006-07-24 2009-07-28 Texas Instruments Incorporated Electrically inactive via for electromigration reliability improvement
JP4303280B2 (ja) * 2006-12-06 2009-07-29 Ｎｅｃエレクトロニクス株式会社 半導体集積回路のレイアウト方法、レイアウトプログラム
JP2010003712A (ja) * 2007-08-09 2010-01-07 Renesas Technology Corp 半導体装置、半導体装置の配置配線方法、及びデータ処理システム
JP2009060034A (ja) 2007-09-03 2009-03-19 Rohm Co Ltd 半導体装置
US20090085120A1 (en) * 2007-09-28 2009-04-02 Texas Instruments Incorporated Method for Reduction of Resist Poisoning in Via-First Trench-Last Dual Damascene Process
US8307321B2 (en) * 2009-03-20 2012-11-06 Taiwan Semiconductor Manufacturing Company, Ltd. Method for dummy metal and dummy via insertion
KR20120138875A (ko) * 2011-06-16 2012-12-27 삼성전자주식회사 배선 구조물 및 이의 제조 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0897290A (ja) * 1994-09-28 1996-04-12 Kawasaki Steel Corp 半導体集積回路チップのレイアウト設計方法及び半導体集積回路チップ
JP2005268748A (ja) * 2004-02-18 2005-09-29 Nec Electronics Corp 半導体装置及びその製造方法
JP2007129030A (ja) * 2005-11-02 2007-05-24 Seiko Epson Corp 半導体装置及びその製造方法
JP2007305713A (ja) * 2006-05-10 2007-11-22 Matsushita Electric Ind Co Ltd 半導体装置及び配線補助パターン生成方法
JP2009246341A (ja) * 2008-03-11 2009-10-22 Panasonic Corp 半導体集積回路装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MASAKI HANEDA ET.AL: "Restraint of Copper Oxidation Using Barrier Restoraton Technique with Cu-Mn Alloy", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. Volume 49, Number 5S2, JPN6016050296, 20 May 2010 (2010-05-20), JP, pages pp.05FA01 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200060670A (ko) * 2018-11-21 2020-06-01 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 단글링 결합들을 갖는 다이들의 결합 구조물
US10861808B2 (en) 2018-11-21 2020-12-08 Taiwan Semiconductor Manufacturing Company, Ltd. Bonding structure of dies with dangling bonds
KR102268935B1 (ko) * 2018-11-21 2021-06-28 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 단글링 결합들을 갖는 다이들의 결합 구조물
US11908817B2 (en) 2018-11-21 2024-02-20 Taiwan Semiconductor Manufacturing Company, Ltd Bonding structure of dies with dangling bonds
US12482772B2 (en) 2018-11-21 2025-11-25 Taiwan Semiconductor Manufacturing Company, Ltd. Bonding structure of dies with dangling bonds

Also Published As

Publication number Publication date
US20120217646A1 (en) 2012-08-30
CN102651363A (zh) 2012-08-29
US8847393B2 (en) 2014-09-30
EP2492960A2 (en) 2012-08-29
EP2492960A3 (en) 2014-08-13
CN102651363B (zh) 2017-05-03

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