JP2012132749A5 - - Google Patents

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Publication number
JP2012132749A5
JP2012132749A5 JP2010284198A JP2010284198A JP2012132749A5 JP 2012132749 A5 JP2012132749 A5 JP 2012132749A5 JP 2010284198 A JP2010284198 A JP 2010284198A JP 2010284198 A JP2010284198 A JP 2010284198A JP 2012132749 A5 JP2012132749 A5 JP 2012132749A5
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JP
Japan
Prior art keywords
shape
measurement points
region
fitting
height
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JP2010284198A
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English (en)
Japanese (ja)
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JP5713660B2 (ja
JP2012132749A (ja
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Priority to JP2010284198A priority Critical patent/JP5713660B2/ja
Priority claimed from JP2010284198A external-priority patent/JP5713660B2/ja
Priority to US13/314,463 priority patent/US8755052B2/en
Priority to EP11193418A priority patent/EP2469219A1/en
Priority to CN201110431514.9A priority patent/CN102589395B/zh
Publication of JP2012132749A publication Critical patent/JP2012132749A/ja
Publication of JP2012132749A5 publication Critical patent/JP2012132749A5/ja
Application granted granted Critical
Publication of JP5713660B2 publication Critical patent/JP5713660B2/ja
Expired - Fee Related legal-status Critical Current
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JP2010284198A 2010-12-21 2010-12-21 形状測定方法 Expired - Fee Related JP5713660B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010284198A JP5713660B2 (ja) 2010-12-21 2010-12-21 形状測定方法
US13/314,463 US8755052B2 (en) 2010-12-21 2011-12-08 Shape measuring method
EP11193418A EP2469219A1 (en) 2010-12-21 2011-12-14 Shape measuring method
CN201110431514.9A CN102589395B (zh) 2010-12-21 2011-12-21 形状测量方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010284198A JP5713660B2 (ja) 2010-12-21 2010-12-21 形状測定方法

Publications (3)

Publication Number Publication Date
JP2012132749A JP2012132749A (ja) 2012-07-12
JP2012132749A5 true JP2012132749A5 (enExample) 2014-02-13
JP5713660B2 JP5713660B2 (ja) 2015-05-07

Family

ID=45217410

Family Applications (1)

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JP2010284198A Expired - Fee Related JP5713660B2 (ja) 2010-12-21 2010-12-21 形状測定方法

Country Status (4)

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US (1) US8755052B2 (enExample)
EP (1) EP2469219A1 (enExample)
JP (1) JP5713660B2 (enExample)
CN (1) CN102589395B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5787678B2 (ja) * 2011-09-07 2015-09-30 キヤノン株式会社 形状評価方法、形状評価装置、プログラム及び記録媒体
CN105300283B (zh) * 2015-11-12 2016-07-06 西安交通大学 一种一维气浮光栅扫描测头
KR101969749B1 (ko) * 2017-09-11 2019-04-17 일륭기공(주) 버니싱장치의 다이스표면 크랙 검출장치
FR3090088B1 (fr) * 2018-12-12 2021-06-18 Saint Gobain Procédé de mesure des écarts géométriques entre les surfaces incurvées d'une pluralité de matériaux à évaluer et une surface incurvée d’un matériau de référence
CN112066900B (zh) * 2020-09-16 2022-04-29 江西财经大学 一种距离测量装置
CN113251950A (zh) * 2021-07-15 2021-08-13 四川大学 基于叶根自基准面的叶片三维轮廓高精度检测方法
CN113758458B (zh) * 2021-08-31 2022-08-19 南京茂莱光学科技股份有限公司 一种复曲面镜的面形测量方法
CN114739293A (zh) * 2022-03-25 2022-07-12 北京博联众睿机器人科技有限公司 车身测量方法、系统、装置以及电子设备
CN117739777B (zh) * 2024-02-21 2024-06-18 成都航利航空科技有限责任公司 一种航空发动机蜂窝组合件快速测量装置及其测量方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5546179A (en) * 1994-10-07 1996-08-13 Cheng; David Method and apparatus for mapping the edge and other characteristics of a workpiece
JP3075981B2 (ja) * 1996-04-05 2000-08-14 松下電器産業株式会社 形状測定装置
US5822877A (en) * 1996-06-20 1998-10-20 Brown & Sharpe Manufacturing Company Multi-probe system for dimensional metrology
TW582549U (en) 1997-09-24 2004-04-01 Matsushita Electric Industrial Co Ltd Calculating apparatus of diffraction efficiency of diffraction lens, lens with optical grating device and reading optical system
JP3853524B2 (ja) 1997-10-03 2006-12-06 松下電器産業株式会社 屈折回折一体型のレンズ、そのレンズを含む光記録情報再生装置、およびそのレンズを含む撮像装置
JP3789672B2 (ja) * 1999-02-19 2006-06-28 独立行政法人科学技術振興機構 研削加工方法
JP3647378B2 (ja) * 2001-03-02 2005-05-11 キヤノン株式会社 マルチプローブを用いた形状測定装置及び測定方法
JP2002350128A (ja) * 2001-05-30 2002-12-04 Canon Inc 立体形状計測装置並びに立体形状計測方法および位置合わせ方法
JP4566534B2 (ja) * 2003-09-12 2010-10-20 キヤノン株式会社 形状測定方法および形状測定装置
CN1950669A (zh) * 2004-05-10 2007-04-18 皇家飞利浦电子股份有限公司 光学精密测量装置和方法
GB0707921D0 (en) 2007-04-24 2007-05-30 Renishaw Plc Apparatus and method for surface measurement
JP5183989B2 (ja) * 2007-07-19 2013-04-17 株式会社ミツトヨ 形状測定装置
US7729873B2 (en) 2007-08-28 2010-06-01 Tokyo Electron Limited Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology
JP4480769B2 (ja) 2008-01-11 2010-06-16 パナソニック株式会社 形状測定方法
JP4611403B2 (ja) * 2008-06-03 2011-01-12 パナソニック株式会社 形状測定装置及び形状測定方法
GB2464509C (en) 2008-10-17 2014-05-21 Taylor Hobson Ltd Surface measurement instrument and method
JP5684712B2 (ja) 2008-10-29 2015-03-18 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 座標測定システムのための方法
GB2474893A (en) * 2009-10-30 2011-05-04 Taylor Hobson Ltd Surface measurement instrument and method
JP4875180B2 (ja) * 2010-03-25 2012-02-15 ファナック株式会社 微細接触力調整機構を有する接触式計測装置
JP5984406B2 (ja) * 2012-02-01 2016-09-06 キヤノン株式会社 測定装置

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