JP2011183483A5 - - Google Patents

Download PDF

Info

Publication number
JP2011183483A5
JP2011183483A5 JP2010049407A JP2010049407A JP2011183483A5 JP 2011183483 A5 JP2011183483 A5 JP 2011183483A5 JP 2010049407 A JP2010049407 A JP 2010049407A JP 2010049407 A JP2010049407 A JP 2010049407A JP 2011183483 A5 JP2011183483 A5 JP 2011183483A5
Authority
JP
Japan
Prior art keywords
image
sharpness
microscope
acquired
peak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010049407A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011183483A (ja
JP5507294B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010049407A priority Critical patent/JP5507294B2/ja
Priority claimed from JP2010049407A external-priority patent/JP5507294B2/ja
Priority to TW100105640A priority patent/TWI438060B/zh
Priority to US13/035,220 priority patent/US8494671B2/en
Priority to KR1020110019240A priority patent/KR101399669B1/ko
Publication of JP2011183483A publication Critical patent/JP2011183483A/ja
Publication of JP2011183483A5 publication Critical patent/JP2011183483A5/ja
Application granted granted Critical
Publication of JP5507294B2 publication Critical patent/JP5507294B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010049407A 2010-03-05 2010-03-05 距離測定機能付きの研削盤 Active JP5507294B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010049407A JP5507294B2 (ja) 2010-03-05 2010-03-05 距離測定機能付きの研削盤
TW100105640A TWI438060B (zh) 2010-03-05 2011-02-21 具有測量距離的功能之研磨機
US13/035,220 US8494671B2 (en) 2010-03-05 2011-02-25 Grinding machine having the function of measuring distance
KR1020110019240A KR101399669B1 (ko) 2010-03-05 2011-03-04 거리 측정 기능을 갖는 연마기

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010049407A JP5507294B2 (ja) 2010-03-05 2010-03-05 距離測定機能付きの研削盤

Publications (3)

Publication Number Publication Date
JP2011183483A JP2011183483A (ja) 2011-09-22
JP2011183483A5 true JP2011183483A5 (enExample) 2013-02-14
JP5507294B2 JP5507294B2 (ja) 2014-05-28

Family

ID=44531742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010049407A Active JP5507294B2 (ja) 2010-03-05 2010-03-05 距離測定機能付きの研削盤

Country Status (4)

Country Link
US (1) US8494671B2 (enExample)
JP (1) JP5507294B2 (enExample)
KR (1) KR101399669B1 (enExample)
TW (1) TWI438060B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5507294B2 (ja) * 2010-03-05 2014-05-28 東芝機械株式会社 距離測定機能付きの研削盤
CN102371519B (zh) * 2011-09-19 2014-06-04 重庆师范大学 微型非球面元件研磨或抛光跟踪加工方法
JP5908327B2 (ja) * 2011-11-01 2016-04-26 東芝機械株式会社 ワークの溝加工方法
CN104470681B (zh) * 2012-06-21 2017-11-21 国立大学法人鹿儿岛大学 观察拍摄装置
CN104191332B (zh) * 2014-08-25 2016-05-11 上海交通大学 大型球面磨削球度误差自动补偿装置及方法
CN104175222B (zh) * 2014-08-25 2016-06-29 上海交通大学 大型球面磨削迹线形貌图像采集装置及球度判别方法
CN105196180A (zh) * 2015-08-24 2015-12-30 哈尔滨工业大学 一种使用小尺寸工具头超精密研抛用的ccd对刀装置
CN107234490A (zh) * 2016-03-28 2017-10-10 沈阳海默数控机床有限公司 一种磨削方法及槽磨的控制装置
JP6912284B2 (ja) * 2017-06-23 2021-08-04 株式会社ディスコ 研削装置
EP3441773B1 (en) * 2017-08-11 2022-11-23 Anton Paar GmbH Characterizing a height profile of a sample by side view imaging
JP7584813B2 (ja) * 2020-12-04 2024-11-18 株式会社メトロール 自動研削システム
AT526928B1 (de) * 2023-05-08 2024-09-15 Univ Linz Vorrichtung zum Bearbeiten einer Probe für eine Untersuchung mithilfe einer Transmissionselektronenmikroskopie

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2681546B1 (fr) * 1991-09-20 1995-12-08 Essilor Int Procede et machine d'usinage a commande numerique multi-axe.
JPH05288981A (ja) * 1992-04-14 1993-11-05 Sony Corp オートフォーカス装置
JPH0752037A (ja) * 1993-08-17 1995-02-28 San Biruto:Kk 自動厚さ制御石材研磨装置
JPH07147004A (ja) * 1993-11-24 1995-06-06 Daido Steel Co Ltd 基準マークに対する研削端面位置測定方法
JPH07153719A (ja) * 1993-11-26 1995-06-16 Seiko Seiki Co Ltd ダイシング装置
US5741171A (en) * 1996-08-19 1998-04-21 Sagitta Engineering Solutions, Ltd. Precision polishing system
KR100314748B1 (ko) * 1999-05-03 2001-11-23 양재신 실시간 3차원 그래픽 표시기능을 갖는 수치제어시스템 및 방법
JP4069545B2 (ja) * 1999-05-19 2008-04-02 株式会社日立製作所 電子顕微方法及びそれを用いた電子顕微鏡並び生体試料検査方法及び生体検査装置
US6533641B1 (en) * 2000-09-21 2003-03-18 Advanced Micro Devices, Inc. Grinding arrangement and method for real-time viewing of samples during cross-sectioning
JP3668777B2 (ja) * 2002-07-09 2005-07-06 独立行政法人国立高等専門学校機構 研削工具の砥粒突出量測定装置及び測定方法
JP4216565B2 (ja) * 2002-10-28 2009-01-28 株式会社ディスコ 切削装置
TW200703409A (en) * 2005-03-03 2007-01-16 Ebara Corp Mapping projection type electron beam apparatus and defects inspection system using such apparatus
JP2009540343A (ja) * 2006-06-09 2009-11-19 ダブリューディーアイ ワイズ デヴァイス インコーポレイテッド 無限遠補正顕微鏡をオートフォーカスするための方法および装置
JP5162163B2 (ja) * 2007-06-27 2013-03-13 株式会社ディスコ ウェーハのレーザ加工方法
JP5269502B2 (ja) * 2008-07-10 2013-08-21 株式会社ニコンインステック 画像処理方法および顕微鏡装置
JP5276488B2 (ja) * 2009-03-20 2013-08-28 株式会社森精機製作所 工作機械における工作物測定装置およびその方法
JP5507294B2 (ja) * 2010-03-05 2014-05-28 東芝機械株式会社 距離測定機能付きの研削盤

Similar Documents

Publication Publication Date Title
JP2011183483A5 (enExample)
EP2226744A3 (en) Model image acquisition support apparatus and model image acquisition support method
JP2013020212A5 (enExample)
JP2014138691A5 (ja) 画像処理装置、電子機器、内視鏡装置、プログラム及び画像処理装置の作動方法
EP2620096A3 (en) Optical coherence tomographic apparatus, control method for optical coherence tomographic apparatus and storage medium
JP2019505836A5 (enExample)
JP2011185872A5 (enExample)
JP2017006179A5 (enExample)
ATE525929T1 (de) Tastvorrichtung und verfahren zum erfassen einer drei-dimensionalen raumform eines körpers
EP2648082A3 (en) Information processing apparatus comprising an image generation unit and an imaging unit, related program, and method
JP2013503662A5 (enExample)
EP2770724A3 (en) Apparatus and method for positioning image area using image sensor location
EP2665083A3 (en) Scanning microscope having an adaptive scan
JP2013185832A5 (enExample)
EP2458528A3 (en) Image processing apparatus and method, and program
JP2015065975A5 (enExample)
JP2016116774A5 (enExample)
JP2011120657A5 (enExample)
EP2804147A3 (en) Method and apparatus for image registration
JP2013242216A5 (enExample)
US10282837B2 (en) Image measuring apparatus and non-temporary recording medium on which control program of same apparatus is recorded
JP2019032763A5 (enExample)
JP2013109271A5 (enExample)
JP2016027444A5 (enExample)
JP2010268009A5 (enExample)