JP2012108409A - 電気光学装置及び電子機器 - Google Patents
電気光学装置及び電子機器 Download PDFInfo
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- JP2012108409A JP2012108409A JP2010258645A JP2010258645A JP2012108409A JP 2012108409 A JP2012108409 A JP 2012108409A JP 2010258645 A JP2010258645 A JP 2010258645A JP 2010258645 A JP2010258645 A JP 2010258645A JP 2012108409 A JP2012108409 A JP 2012108409A
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- 239000003990 capacitor Substances 0.000 claims abstract description 158
- 239000000758 substrate Substances 0.000 claims abstract description 100
- 239000004020 conductor Substances 0.000 claims abstract description 13
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 65
- 238000000034 method Methods 0.000 abstract description 18
- 230000007797 corrosion Effects 0.000 abstract description 15
- 238000005260 corrosion Methods 0.000 abstract description 15
- 239000010410 layer Substances 0.000 description 73
- 239000010408 film Substances 0.000 description 65
- 238000005070 sampling Methods 0.000 description 18
- 229910052782 aluminium Inorganic materials 0.000 description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 15
- 239000011229 interlayer Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 7
- 238000000059 patterning Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 239000003566 sealing material Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Projection Apparatus (AREA)
Abstract
【解決手段】電気光学装置は、基板(10)と、基板上の画素領域(10a)に設けられた走査線(11)及びデータ線(6)と、走査線及びデータ線よりも上層側に、走査線とデータ線との交差に対応して設けられ、透明導電材料からなる画素電極(9)と、画素電極と、前記走査線及び前記データ線との間の層に、画素電極に容量絶縁膜(72)を介して対向するように設けられた蓄積容量電極(71)と、画素電極と同一層からなる第1容量電極(610)と、蓄積容量電極と同一層からなり、データ線と電気的に接続された第2容量電極(620)とを有し、画素領域の外周と基板の外周の間の領域に設けられた付加容量(600)と、前記領域に設けられるとともに第1容量電極と電気的に接続されており、画素電極と同一層からなる端子(106)とを備える。
【選択図】図7
Description
第1実施形態に係る液晶装置について、図1から図8を参照して説明する。
次に、前述した電気光学装置である液晶装置を各種の電子機器に適用する場合について説明する。
Claims (5)
- 基板と、
前記基板上の画素領域に設けられた走査線及びデータ線と、
前記走査線及び前記データ線よりも上層側に、前記走査線と前記データ線との交差に対応して設けられ、透明導電材料からなる画素電極と、
前記画素電極と、前記走査線及び前記データ線との間の層に、前記画素電極に容量絶縁膜を介して対向するように設けられた蓄積容量電極と、
前記画素電極と同一層からなる第1容量電極と、前記蓄積容量電極と同一層からなり、前記データ線と電気的に接続された第2容量電極とを有し、前記画素領域の外周と前記基板の外周の間の領域に設けられた付加容量と、
前記領域に設けられるとともに前記第1容量電極と電気的に接続されており、前記画素電極と同一層からなる端子と
を備えることを特徴とする電気光学装置。 - 前記基板に対向するように配置された対向基板と、
前記対向基板上に前記画素電極に対向するように設けられた対向電極と、
前記基板及び前記対向基板間における前記端子に重なる位置に設けられ、前記端子及び前記対向電極と電気的に接続された導通部材と
を備えることを特徴とする請求項1に記載の電気光学装置。 - 前記端子と前記第1容量電極の間の距離が1500um以内であることを特徴とする電気光学装置。
- 前記透明導電材料は、ITO(Indium Tin Oxide)であることを特徴とする請求項1から3のいずれか一項に記載の電気光学装置。
- 請求項1から4のいずれか一項に記載の電気光学装置を備えることを特徴とする電子機器。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010258645A JP5594084B2 (ja) | 2010-11-19 | 2010-11-19 | 電気光学装置及び電子機器 |
US13/295,258 US8643014B2 (en) | 2010-11-19 | 2011-11-14 | Electro-optical device and electronic apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010258645A JP5594084B2 (ja) | 2010-11-19 | 2010-11-19 | 電気光学装置及び電子機器 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012108409A true JP2012108409A (ja) | 2012-06-07 |
JP2012108409A5 JP2012108409A5 (ja) | 2013-11-21 |
JP5594084B2 JP5594084B2 (ja) | 2014-09-24 |
Family
ID=46063493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2010258645A Expired - Fee Related JP5594084B2 (ja) | 2010-11-19 | 2010-11-19 | 電気光学装置及び電子機器 |
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Country | Link |
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US (1) | US8643014B2 (ja) |
JP (1) | JP5594084B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014142390A (ja) * | 2013-01-22 | 2014-08-07 | Seiko Epson Corp | 電気光学装置、電気光学装置の製造方法、及び電子機器 |
TWI493224B (zh) * | 2013-03-14 | 2015-07-21 | Pixtronix Inc | 顯示裝置及其製造方法 |
JP2018061044A (ja) * | 2012-08-10 | 2018-04-12 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 薄膜トランジスタ基板 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014013301A (ja) * | 2012-07-04 | 2014-01-23 | Seiko Epson Corp | 電気光学装置、及び電子機器 |
CN103839950B (zh) * | 2014-02-12 | 2017-04-19 | 南京中电熊猫液晶显示科技有限公司 | Tft‑lcd阵列基板及其制造方法 |
Citations (5)
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JP2007024963A (ja) * | 2005-07-12 | 2007-02-01 | Toshiba Matsushita Display Technology Co Ltd | 液晶表示装置 |
JP2007093876A (ja) * | 2005-09-28 | 2007-04-12 | Toshiba Matsushita Display Technology Co Ltd | 液晶表示装置 |
JP2008152236A (ja) * | 2006-11-22 | 2008-07-03 | Mitsubishi Electric Corp | アレイ基板、表示装置、及びその製造方法 |
JP2009122258A (ja) * | 2007-11-13 | 2009-06-04 | Seiko Epson Corp | 電気光学装置及び電子機器 |
JP2010210786A (ja) * | 2009-03-09 | 2010-09-24 | Seiko Epson Corp | 電気光学装置及び電子機器 |
Family Cites Families (8)
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US6313481B1 (en) * | 1998-08-06 | 2001-11-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and a method of manufacturing the same |
US6850292B1 (en) * | 1998-12-28 | 2005-02-01 | Seiko Epson Corporation | Electric-optic device, method of fabricating the same, and electronic apparatus |
US6861670B1 (en) * | 1999-04-01 | 2005-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having multi-layer wiring |
EP1049167A3 (en) * | 1999-04-30 | 2007-10-24 | Sel Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US7525165B2 (en) * | 2000-04-17 | 2009-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and manufacturing method thereof |
JP2008026348A (ja) | 2006-07-18 | 2008-02-07 | Seiko Epson Corp | 電気光学装置及び電子機器 |
JP2009122256A (ja) | 2007-11-13 | 2009-06-04 | Seiko Epson Corp | 電気光学装置及び電子機器 |
JP5589359B2 (ja) | 2009-01-05 | 2014-09-17 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
-
2010
- 2010-11-19 JP JP2010258645A patent/JP5594084B2/ja not_active Expired - Fee Related
-
2011
- 2011-11-14 US US13/295,258 patent/US8643014B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007024963A (ja) * | 2005-07-12 | 2007-02-01 | Toshiba Matsushita Display Technology Co Ltd | 液晶表示装置 |
JP2007093876A (ja) * | 2005-09-28 | 2007-04-12 | Toshiba Matsushita Display Technology Co Ltd | 液晶表示装置 |
JP2008152236A (ja) * | 2006-11-22 | 2008-07-03 | Mitsubishi Electric Corp | アレイ基板、表示装置、及びその製造方法 |
JP2009122258A (ja) * | 2007-11-13 | 2009-06-04 | Seiko Epson Corp | 電気光学装置及び電子機器 |
JP2010210786A (ja) * | 2009-03-09 | 2010-09-24 | Seiko Epson Corp | 電気光学装置及び電子機器 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018061044A (ja) * | 2012-08-10 | 2018-04-12 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 薄膜トランジスタ基板 |
JP2014142390A (ja) * | 2013-01-22 | 2014-08-07 | Seiko Epson Corp | 電気光学装置、電気光学装置の製造方法、及び電子機器 |
TWI493224B (zh) * | 2013-03-14 | 2015-07-21 | Pixtronix Inc | 顯示裝置及其製造方法 |
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Publication number | Publication date |
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US20120126237A1 (en) | 2012-05-24 |
US8643014B2 (en) | 2014-02-04 |
JP5594084B2 (ja) | 2014-09-24 |
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