JP2012089625A - 接合装置 - Google Patents
接合装置 Download PDFInfo
- Publication number
- JP2012089625A JP2012089625A JP2010233878A JP2010233878A JP2012089625A JP 2012089625 A JP2012089625 A JP 2012089625A JP 2010233878 A JP2010233878 A JP 2010233878A JP 2010233878 A JP2010233878 A JP 2010233878A JP 2012089625 A JP2012089625 A JP 2012089625A
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- plate
- cooling
- heat treatment
- wafer
- adapter
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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Abstract
【解決手段】接合装置10は、下面に開口78が形成された処理容器70と、処理容器70内に配置された、重合ウェハWTを載置して熱処理する第2の熱処理板90と、処理容器70内に第2の熱処理板90に対向して設けられ、重合ウェハWTを第2の熱処理板90側に押圧する加圧機構80と、処理容器70の内面に当該処理容器70の開口78に沿って設けられ、処理容器70と第2の熱処理板90との間を気密に塞ぐ環状の支持台95と、第2の熱処理板90の下方であって支持台95の内側に設けられた冷却機構100を有している。冷却機構100は、その上面が第2の熱処理板90と平行に設けられた冷却板と、冷却板の内部に連通し当該冷却板の内部に空気を供給する連通管と、冷却板を上下動させる昇降機構と、を備えている。
【選択図】図1
Description
10 接合装置
20 熱処理ユニット
21 接合ユニット
22 ゲートバルブ
30 処理容器
35 真空ポンプ
40 第1の熱処理板
41 上部加熱手段
42 搬送機構
43 ヒータ
44 冷媒流路
45 冷媒供給管
46 冷媒排出管
47 空気源
48 冷却水源
49 ミキサー
50 熱交換器
51 循環配管
52 冷凍機
53 昇降ピン
54 貫通孔
55 保持部
60 搬送リング
61 保持部材
62 突出部
70 処理容器
71 容器本体
72 天板
73 シールドベローズ
74 搬入出口
75 吸気口
76 真空ポンプ
77 吸気管
78 底部開口
80 加圧機構
81 押圧部材
81a ヒータ
82 支持部材
83 加圧ベローズ
83a 空気供給管
83b 空気排出管
83c 冷却ジャケット
84 上部アダプタ
85 下部アダプタ
86 くびれ部
87 中間部
88 円盤部
90 第2の熱処理板
95 支持台
100 冷却機構
101 溝部
102 シール材
103 係止部材
104 上部係止部材
105 下部係止部材
106 連結部
110 冷却板
111 連通管
112 冷却水流通板
120 接触部
121 放熱部
122 外周部
123 貫通孔
124 突出部
130 冷却水路
131 冷却水管
200 制御部
JU、JL 接合部
WU 上ウェハ
WL 下ウェハ
WT 重合ウェハ
Claims (3)
- 金属の接合部を有する基板同士を接合する接合装置であって、
下面に開口が形成された処理容器と、
前記処理容器内に配置された、前記基板を載置して熱処理する熱処理板と、
前記処理容器内に前記熱処理板に対向して設けられ、前記基板を前記熱処理板側に押圧する加圧機構と、
前記処理容器の内面に当該処理容器の開口に沿って設けられ、前記処理容器と前記熱処理板との間を気密に塞ぐ、前記熱処理板を支持する環状の支持台と、
前記熱処理板の下方であって前記支持台の内側に設けられた、前記熱処理板を冷却する冷却機構と、を有し、
前記冷却機構は、その上面が前記熱処理板と平行に設けられた、内部が中空な冷却板と、前記冷却板の内部に連通し当該冷却板の内部に空気を供給する連通管と、前記冷却板を上下動させる昇降機構と、を備え、
前記冷却板の下面には、当該冷却板の内部に連通する複数の貫通孔が形成され、
前記連通管から前記冷却板の内部に供給された空気は、前記冷却板の貫通孔から排出されることを特徴とする、接合装置。 - 前記冷却機構は、前記冷却板の下方に当該処理容器の開口の全面を塞ぐように設けられた、その内部に冷却水を流通する冷却水路が形成された冷却水流通板をさらに有し、
前記冷却水流通板には、当該冷却水流通板を鉛直方向に貫通する複数の貫通孔が形成され、
前記冷却板の貫通孔から排出された空気は、前記冷却水流通板の貫通孔を通って当該冷却水流通板の上面から下面に向かって排出されることを特徴とする、請求項1に記載の接合装置。 - 前記加圧機構は、前記処理容器の天板に気密に接続された弾性部材と、前記弾性部材の下端に気密に接続された押圧部材と、前記処理容器の天板、前記弾性部材及び前記押圧部材で囲まれた空間に圧縮空気を供給する空気供給管と、供給された圧縮空気を排出する空気排出管と、を有し、
前記空気排出管には、当該空気排出管の内部を流通する圧縮空気を冷却する冷却ジャケットが設けられていることを特徴とする、請求項1または2のいずれかに記載の接合装置。
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JP2010233878A JP5091296B2 (ja) | 2010-10-18 | 2010-10-18 | 接合装置 |
TW100137455A TWI490933B (zh) | 2010-10-18 | 2011-10-17 | Jointing device |
KR1020110105970A KR101299845B1 (ko) | 2010-10-18 | 2011-10-17 | 접합 장치 |
CN201110317784.7A CN102456589B (zh) | 2010-10-18 | 2011-10-18 | 接合装置 |
US13/275,866 US8210417B2 (en) | 2010-10-18 | 2011-10-18 | Bonding apparatus |
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JP2010233878A JP5091296B2 (ja) | 2010-10-18 | 2010-10-18 | 接合装置 |
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JP5091296B2 JP5091296B2 (ja) | 2012-12-05 |
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JP (1) | JP5091296B2 (ja) |
KR (1) | KR101299845B1 (ja) |
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TW (1) | TWI490933B (ja) |
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US20120091186A1 (en) | 2012-04-19 |
TWI490933B (zh) | 2015-07-01 |
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KR20120040115A (ko) | 2012-04-26 |
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