JP2012066456A - ガスバリアフィルム - Google Patents
ガスバリアフィルム Download PDFInfo
- Publication number
- JP2012066456A JP2012066456A JP2010212418A JP2010212418A JP2012066456A JP 2012066456 A JP2012066456 A JP 2012066456A JP 2010212418 A JP2010212418 A JP 2010212418A JP 2010212418 A JP2010212418 A JP 2010212418A JP 2012066456 A JP2012066456 A JP 2012066456A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- gas barrier
- resin
- film
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000004888 barrier function Effects 0.000 title claims abstract description 49
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000007789 gas Substances 0.000 claims abstract description 33
- 239000011347 resin Substances 0.000 claims abstract description 33
- 229920005989 resin Polymers 0.000 claims abstract description 33
- 230000003746 surface roughness Effects 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims abstract description 23
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000001301 oxygen Substances 0.000 claims abstract description 15
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 15
- 239000011342 resin composition Substances 0.000 claims abstract description 11
- 239000011248 coating agent Substances 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 7
- 229920001225 polyester resin Polymers 0.000 claims description 6
- 239000004645 polyester resin Substances 0.000 claims description 6
- 239000004925 Acrylic resin Substances 0.000 claims description 5
- 229920000178 Acrylic resin Polymers 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 72
- 239000010408 film Substances 0.000 description 42
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 31
- -1 polyethylene terephthalate Polymers 0.000 description 19
- 238000005259 measurement Methods 0.000 description 17
- 238000004544 sputter deposition Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 230000036314 physical performance Effects 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- 229920002284 Cellulose triacetate Polymers 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 239000003999 initiator Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 1
- QNODIIQQMGDSEF-UHFFFAOYSA-N (1-hydroxycyclohexyl)-phenylmethanone Chemical compound C=1C=CC=CC=1C(=O)C1(O)CCCCC1 QNODIIQQMGDSEF-UHFFFAOYSA-N 0.000 description 1
- XKSUVRWJZCEYQQ-UHFFFAOYSA-N 1,1-dimethoxyethylbenzene Chemical compound COC(C)(OC)C1=CC=CC=C1 XKSUVRWJZCEYQQ-UHFFFAOYSA-N 0.000 description 1
- QWQFVUQPHUKAMY-UHFFFAOYSA-N 1,2-diphenyl-2-propoxyethanone Chemical compound C=1C=CC=CC=1C(OCCC)C(=O)C1=CC=CC=C1 QWQFVUQPHUKAMY-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- WGYZMNBUZFHYRX-UHFFFAOYSA-N 1-(1-methoxypropan-2-yloxy)propan-2-ol Chemical compound COCC(C)OCC(C)O WGYZMNBUZFHYRX-UHFFFAOYSA-N 0.000 description 1
- ILBBNQMSDGAAPF-UHFFFAOYSA-N 1-(6-hydroxy-6-methylcyclohexa-2,4-dien-1-yl)propan-1-one Chemical compound CCC(=O)C1C=CC=CC1(C)O ILBBNQMSDGAAPF-UHFFFAOYSA-N 0.000 description 1
- XUIXZBXRQFZHIT-UHFFFAOYSA-N 1-[1-(1-hydroxypropan-2-yloxy)propan-2-yloxy]-3-methoxypropan-2-ol Chemical compound COCC(O)COC(C)COC(C)CO XUIXZBXRQFZHIT-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- CERJZAHSUZVMCH-UHFFFAOYSA-N 2,2-dichloro-1-phenylethanone Chemical compound ClC(Cl)C(=O)C1=CC=CC=C1 CERJZAHSUZVMCH-UHFFFAOYSA-N 0.000 description 1
- GIMQKKFOOYOQGB-UHFFFAOYSA-N 2,2-diethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)(OCC)C(=O)C1=CC=CC=C1 GIMQKKFOOYOQGB-UHFFFAOYSA-N 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 1
- YHYCMHWTYHPIQS-UHFFFAOYSA-N 2-(2-hydroxyethoxy)-1-methoxyethanol Chemical compound COC(O)COCCO YHYCMHWTYHPIQS-UHFFFAOYSA-N 0.000 description 1
- FPKCTSIVDAWGFA-UHFFFAOYSA-N 2-chloroanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3C(=O)C2=C1 FPKCTSIVDAWGFA-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- 125000004200 2-methoxyethyl group Chemical group [H]C([H])([H])OC([H])([H])C([H])([H])* 0.000 description 1
- UMWZLYTVXQBTTE-UHFFFAOYSA-N 2-pentylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(CCCCC)=CC=C3C(=O)C2=C1 UMWZLYTVXQBTTE-UHFFFAOYSA-N 0.000 description 1
- KTALPKYXQZGAEG-UHFFFAOYSA-N 2-propan-2-ylthioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC(C(C)C)=CC=C3SC2=C1 KTALPKYXQZGAEG-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- YTPSFXZMJKMUJE-UHFFFAOYSA-N 2-tert-butylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(C(C)(C)C)=CC=C3C(=O)C2=C1 YTPSFXZMJKMUJE-UHFFFAOYSA-N 0.000 description 1
- PTKHNBWCIHXVFS-UHFFFAOYSA-N 4-[2-methyl-1-(4-methylsulfanylphenyl)propan-2-yl]morpholine Chemical compound C1=CC(SC)=CC=C1CC(C)(C)N1CCOCC1 PTKHNBWCIHXVFS-UHFFFAOYSA-N 0.000 description 1
- 229920000219 Ethylene vinyl alcohol Polymers 0.000 description 1
- JHWNWJKBPDFINM-UHFFFAOYSA-N Laurolactam Chemical compound O=C1CCCCCCCCCCCN1 JHWNWJKBPDFINM-UHFFFAOYSA-N 0.000 description 1
- 229920000299 Nylon 12 Polymers 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- DBHQYYNDKZDVTN-UHFFFAOYSA-N [4-(4-methylphenyl)sulfanylphenyl]-phenylmethanone Chemical compound C1=CC(C)=CC=C1SC1=CC=C(C(=O)C=2C=CC=CC=2)C=C1 DBHQYYNDKZDVTN-UHFFFAOYSA-N 0.000 description 1
- GUCYFKSBFREPBC-UHFFFAOYSA-N [phenyl-(2,4,6-trimethylbenzoyl)phosphoryl]-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C(=O)C1=C(C)C=C(C)C=C1C GUCYFKSBFREPBC-UHFFFAOYSA-N 0.000 description 1
- 150000008062 acetophenones Chemical class 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 238000000089 atomic force micrograph Methods 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- HXTBYXIZCDULQI-UHFFFAOYSA-N bis[4-(methylamino)phenyl]methanone Chemical compound C1=CC(NC)=CC=C1C(=O)C1=CC=C(NC)C=C1 HXTBYXIZCDULQI-UHFFFAOYSA-N 0.000 description 1
- 125000006226 butoxyethyl group Chemical group 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- MPQXHAGKBWFSNV-UHFFFAOYSA-N oxidophosphanium Chemical class [PH3]=O MPQXHAGKBWFSNV-UHFFFAOYSA-N 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- QCTJRYGLPAFRMS-UHFFFAOYSA-N prop-2-enoic acid;1,3,5-triazine-2,4,6-triamine Chemical compound OC(=O)C=C.NC1=NC(N)=NC(N)=N1 QCTJRYGLPAFRMS-UHFFFAOYSA-N 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000004439 roughness measurement Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
Abstract
【解決手段】ガスバリアフィルム1は、透明なフィルム状の樹脂基材2と、樹脂基材2の一方の面に樹脂組成物をコーティングして形成される層であり、コーティング後の表面粗さをJIS B 0601−2001に規定された算術平均粗さRaでRa≦2.5nmまで平坦化する平坦化処理層3と、樹脂基材2に平坦化処理層3が形成されてから、平坦化処理層3側の面に成膜される層であり、表面粗さはJIS B 0601−2001に規定された算術平均粗さRaで、Ra≦2.5nm、表面における水の接触角は55度以上、且つ、酸素量xは1.6≦x<2.0の範囲内とされたSiOx層4とを備える。
【選択図】図1
Description
さらに、有機物層や無機物層を4層以上にわたって多重に積層することでガスバリア性を改善したフィルムなどもあるが、積層数が過剰に増えると製造プロセスが複雑になり、高コストになる、という問題があった。
本発明のガスバリアフィルムは、透明なフィルム状の樹脂基材と、前記樹脂基材の一方の面に樹脂組成物をコーティングして形成される層であり、前記コーティング後の表面粗さをJIS B 0601−2001に規定された算術平均粗さRaでRa≦2.5nmまで平坦化する平坦化処理層と、前記樹脂基材に前記平坦化処理層が形成されてから、前記平坦化処理層側の面に成膜される層であり、表面粗さはJIS B 0601−2001に規定された算術平均粗さRaで、Ra≦2.5nm、表面における水の接触角は55度以上、且つ、酸素量xは1.6≦x<2.0の範囲内とされたSiOx層とを備えることを特徴とする。
〔1〕ガスバリアフィルムの構造
図1に例示するガスバリアフィルム1は、樹脂基材2と、平坦化処理層3と、SiOx層4とを積層してなる三層構造のフィルムである。
平坦化処理層3は、樹脂基材2に対して紫外線硬化型のアクリル系樹脂組成物をコーティングするとともに、そこに紫外線を照射して硬化させたもので、本実施形態においては、その厚さが6μmとされている。
上述したガスバリアフィルム1について、その物性及び性能を測定した。物性及び性能の測定に当たっては、製造条件を変えることで物性の異なる試料を多数作製し、それらの試料についてスクリーニングを行い、性能が優れた試料の選定を行った。
これに対し、比較例1として示した試料は、平坦化処理層3の表面粗さが9.0nmと比較的粗く、SiOx層4の表面粗さも9.4nmと比較的粗いものであり、比較例1は、期待するほど高い水蒸気バリア性を示さない結果となった。
以上、本発明の実施形態について説明したが、本発明は上記の具体的な一実施形態に限定されず、この他にも種々の形態で実施することができる。
Claims (3)
- 透明なフィルム状の樹脂基材と、
前記樹脂基材の一方の面に樹脂組成物をコーティングして形成される層であり、前記コーティング後の表面粗さをJIS B 0601−2001に規定された算術平均粗さRaでRa≦2.5nmまで平坦化する平坦化処理層と、
前記樹脂基材に前記平坦化処理層が形成されてから、前記平坦化処理層側の面に成膜される層であり、表面粗さはJIS B 0601−2001に規定された算術平均粗さRaで、Ra≦2.5nm、表面における水の接触角は55度以上、且つ、酸素量xは1.6≦x<2.0の範囲内とされたSiOx層と
を備えることを特徴とするガスバリアフィルム。 - 前記平坦化処理層を形成する樹脂組成物が、エネルギー線硬化型のアクリル系樹脂組成物である
ことを特徴とする請求項1に記載のガスバリアフィルム。 - 前記樹脂基材が、ポリエステル樹脂フィルムである
ことを特徴とする請求項1又は請求項2に記載のガスバリアフィルム。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010212418A JP5245094B2 (ja) | 2010-09-22 | 2010-09-22 | ガスバリアフィルム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010212418A JP5245094B2 (ja) | 2010-09-22 | 2010-09-22 | ガスバリアフィルム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012066456A true JP2012066456A (ja) | 2012-04-05 |
JP5245094B2 JP5245094B2 (ja) | 2013-07-24 |
Family
ID=46164310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010212418A Active JP5245094B2 (ja) | 2010-09-22 | 2010-09-22 | ガスバリアフィルム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5245094B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016193616A1 (fr) * | 2015-06-02 | 2016-12-08 | Saint-Gobain Isover | Membrane multicouche |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9687135B2 (en) | 2009-12-21 | 2017-06-27 | Whirlpool Corporation | Automatic dishwasher with pump assembly |
US9119515B2 (en) | 2010-12-03 | 2015-09-01 | Whirlpool Corporation | Dishwasher with unitary wash module |
US9918609B2 (en) | 2009-12-21 | 2018-03-20 | Whirlpool Corporation | Rotating drum filter for a dishwashing machine |
US9668636B2 (en) | 2010-11-16 | 2017-06-06 | Whirlpool Corporation | Method and apparatus for dishwasher with common heating element for multiple treating chambers |
US8733376B2 (en) | 2011-05-16 | 2014-05-27 | Whirlpool Corporation | Dishwasher with filter assembly |
US9861251B2 (en) | 2011-06-20 | 2018-01-09 | Whirlpool Corporation | Filter with artificial boundary for a dishwashing machine |
US20120318296A1 (en) | 2011-06-20 | 2012-12-20 | Whirlpool Corporation | Ultra micron filter for a dishwasher |
US9005369B2 (en) | 2011-06-20 | 2015-04-14 | Whirlpool Corporation | Filter assembly for a dishwasher |
US9301667B2 (en) | 2012-02-27 | 2016-04-05 | Whirlpool Corporation | Soil chopping system for a dishwasher |
US9730570B2 (en) | 2012-05-30 | 2017-08-15 | Whirlpool Corporation | Reduced sound with a rotating filter for a dishwasher |
US9237836B2 (en) | 2012-05-30 | 2016-01-19 | Whirlpool Corporation | Rotating filter for a dishwasher |
US9833120B2 (en) | 2012-06-01 | 2017-12-05 | Whirlpool Corporation | Heating air for drying dishes in a dishwasher using an in-line wash liquid heater |
US9532700B2 (en) | 2012-06-01 | 2017-01-03 | Whirlpool Corporation | Dishwasher with overflow conduit |
US9554688B2 (en) | 2012-10-23 | 2017-01-31 | Whirlpool Corporation | Rotating filter for a dishwasher and methods of cleaning a rotating filter |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004001442A (ja) * | 2002-03-29 | 2004-01-08 | Sumitomo Bakelite Co Ltd | ガス・水蒸気バリア性フィルム |
JP2004341541A (ja) * | 1994-02-15 | 2004-12-02 | Dainippon Printing Co Ltd | 光学機能性膜、光学機能性フィルム、防眩性反射防止フィルム、その製造方法、偏光板および液晶表示装置 |
JP2006264118A (ja) * | 2005-03-24 | 2006-10-05 | Fuji Photo Film Co Ltd | プラスチックフィルム、ガスバリアフィルム、およびそれを用いた画像表示素子 |
JP2008246893A (ja) * | 2007-03-30 | 2008-10-16 | Lintec Corp | 高平滑ガスバリアフィルムおよびその製造方法 |
-
2010
- 2010-09-22 JP JP2010212418A patent/JP5245094B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004341541A (ja) * | 1994-02-15 | 2004-12-02 | Dainippon Printing Co Ltd | 光学機能性膜、光学機能性フィルム、防眩性反射防止フィルム、その製造方法、偏光板および液晶表示装置 |
JP2004001442A (ja) * | 2002-03-29 | 2004-01-08 | Sumitomo Bakelite Co Ltd | ガス・水蒸気バリア性フィルム |
JP2006264118A (ja) * | 2005-03-24 | 2006-10-05 | Fuji Photo Film Co Ltd | プラスチックフィルム、ガスバリアフィルム、およびそれを用いた画像表示素子 |
JP2008246893A (ja) * | 2007-03-30 | 2008-10-16 | Lintec Corp | 高平滑ガスバリアフィルムおよびその製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016193616A1 (fr) * | 2015-06-02 | 2016-12-08 | Saint-Gobain Isover | Membrane multicouche |
FR3037000A1 (fr) * | 2015-06-02 | 2016-12-09 | Saint Gobain Isover | Membrane multicouche |
EP3302964A1 (fr) * | 2015-06-02 | 2018-04-11 | Saint-Gobain Isover | Membrane multicouche |
Also Published As
Publication number | Publication date |
---|---|
JP5245094B2 (ja) | 2013-07-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5245094B2 (ja) | ガスバリアフィルム | |
JP4083564B2 (ja) | 有機層の形成方法及びガスバリア性プラスチックフィルム | |
JP5090197B2 (ja) | 積層体の製造方法、バリア性フィルム基板、デバイスおよび光学部材 | |
TW201348002A (zh) | 氣體阻擋膜及其製造方法 | |
JP6070194B2 (ja) | ガスバリア性フィルム | |
JP6465019B2 (ja) | ガスバリア性フィルム | |
JP2008221830A (ja) | バリア性積層体、バリア性フィルム基板、それらの製造方法、およびデバイス | |
JP4536417B2 (ja) | ガスバリア性フィルム | |
TWI464066B (zh) | 積層體 | |
JP4148794B2 (ja) | 蒸着膜用樹脂及びこれを用いたガスバリア性プラスチックフィルム | |
JP2004009395A (ja) | 透明水蒸気バリアフィルム及びその製造方法 | |
JP2009196318A (ja) | 積層体とバリア性フィルム基板の製造方法、バリア材料、デバイスおよび光学部材 | |
JP2003191370A (ja) | 水蒸気バリア性プラスチックフィルム及びこれを用いたエレクトロルミネッセンス用ディスプレイ基板 | |
JP2014087931A (ja) | ガスバリア性フィルム | |
JP2013237264A (ja) | ガスバリア性フィルム | |
JP7334624B2 (ja) | 積層体 | |
JP5874975B2 (ja) | ガスバリア性フィルム | |
TW201601914A (zh) | 阻氣膜積層體及使用其的電子零件 | |
KR20190014419A (ko) | 디스플레이용 플라스틱 필름 | |
JP7543690B2 (ja) | 積層体、積層体の製造方法、および有機素子 | |
JP7017041B2 (ja) | 積層体 | |
KR20160114038A (ko) | 가스 배리어성 필름 | |
JP6343250B2 (ja) | ガスバリアフィルム、有機電子装置、有機電界発光装置用基板、有機電界発光装置 | |
JP2005279974A (ja) | 透明ガスバリアフィルム | |
JP2012171238A (ja) | 透明ガスバリアフィルム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121011 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121106 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130226 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130314 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5245094 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160419 Year of fee payment: 3 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |