JP2012012700A5 - - Google Patents

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Publication number
JP2012012700A5
JP2012012700A5 JP2011045032A JP2011045032A JP2012012700A5 JP 2012012700 A5 JP2012012700 A5 JP 2012012700A5 JP 2011045032 A JP2011045032 A JP 2011045032A JP 2011045032 A JP2011045032 A JP 2011045032A JP 2012012700 A5 JP2012012700 A5 JP 2012012700A5
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JP
Japan
Prior art keywords
magnet unit
yoke
internal
external
magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2011045032A
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English (en)
Japanese (ja)
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JP2012012700A (ja
JP5730077B2 (ja
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Priority to JP2011045032A priority Critical patent/JP5730077B2/ja
Priority claimed from JP2011045032A external-priority patent/JP5730077B2/ja
Priority to US13/151,759 priority patent/US8673124B2/en
Publication of JP2012012700A publication Critical patent/JP2012012700A/ja
Publication of JP2012012700A5 publication Critical patent/JP2012012700A5/ja
Application granted granted Critical
Publication of JP5730077B2 publication Critical patent/JP5730077B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011045032A 2010-06-03 2011-03-02 磁石ユニットおよびマグネトロンスパッタリング装置 Active JP5730077B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011045032A JP5730077B2 (ja) 2010-06-03 2011-03-02 磁石ユニットおよびマグネトロンスパッタリング装置
US13/151,759 US8673124B2 (en) 2010-06-03 2011-06-02 Magnet unit and magnetron sputtering apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010127642 2010-06-03
JP2010127642 2010-06-03
JP2011045032A JP5730077B2 (ja) 2010-06-03 2011-03-02 磁石ユニットおよびマグネトロンスパッタリング装置

Publications (3)

Publication Number Publication Date
JP2012012700A JP2012012700A (ja) 2012-01-19
JP2012012700A5 true JP2012012700A5 (enExample) 2014-04-10
JP5730077B2 JP5730077B2 (ja) 2015-06-03

Family

ID=45063636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011045032A Active JP5730077B2 (ja) 2010-06-03 2011-03-02 磁石ユニットおよびマグネトロンスパッタリング装置

Country Status (2)

Country Link
US (1) US8673124B2 (enExample)
JP (1) JP5730077B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5873276B2 (ja) 2010-12-27 2016-03-01 キヤノンアネルバ株式会社 磁石ユニットおよびマグネトロンスパッタリング装置
US9580795B2 (en) * 2013-03-05 2017-02-28 Applied Materials, Inc. Sputter source for use in a semiconductor process chamber
US10173334B2 (en) * 2013-05-03 2019-01-08 MagnoGrip Inc. Magnetic utility knife and holder
US20190043701A1 (en) * 2017-08-02 2019-02-07 HIA, Inc. Inverted magnetron for processing of thin film materials
CN111218661B (zh) * 2019-12-31 2022-04-29 四川荣塑管业集团有限责任公司 一种真空镀膜机
US12122559B2 (en) 2021-11-24 2024-10-22 MagnoGrip Inc. Tool holding system, method and device with cover sheet

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1184880A (en) * 1982-11-18 1985-04-02 Kovilvila Ramachandran Sputtering apparatus and method
JPH01114668U (enExample) * 1988-01-22 1989-08-02
TW271490B (enExample) * 1993-05-05 1996-03-01 Varian Associates
JP2912864B2 (ja) * 1995-11-28 1999-06-28 アプライド マテリアルズ インコーポレイテッド スパッタリング装置のマグネトロンユニット
JPH11256326A (ja) * 1998-03-10 1999-09-21 Mitsubishi Chemical Corp マグネトロンスパッタカソード
US6440282B1 (en) * 1999-07-06 2002-08-27 Applied Materials, Inc. Sputtering reactor and method of using an unbalanced magnetron
US6258217B1 (en) * 1999-09-29 2001-07-10 Plasma-Therm, Inc. Rotating magnet array and sputter source
US6358376B1 (en) * 2000-07-10 2002-03-19 Applied Materials, Inc. Biased shield in a magnetron sputter reactor
EP1710829A1 (de) * 2005-04-05 2006-10-11 Applied Films GmbH & Co. KG Magnetanordnung für ein Planar-Magnetron
JP4768689B2 (ja) * 2006-09-22 2011-09-07 株式会社東芝 マグネトロン型スパッタリング装置および半導体装置の製造方法
JP2009007637A (ja) * 2007-06-28 2009-01-15 Fujitsu Ltd マグネトロンスパッタリング装置及び薄膜形成物製造方法

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