JP2011527507A - プラズマ処理チャンバで用いるための真空ギャップを備えたプラズマ対向プローブ装置 - Google Patents
プラズマ処理チャンバで用いるための真空ギャップを備えたプラズマ対向プローブ装置 Download PDFInfo
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- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0046—Arrangements for measuring currents or voltages or for indicating presence or sign thereof characterised by a specific application or detail not covered by any other subgroup of G01R19/00
- G01R19/0061—Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32577—Electrical connecting means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
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Abstract
【解決手段】プラズマ処理チャンバ内のプロセスパラメータを測定するための装置が提供されている。装置は、上側電極の開口部内に配置されたプローブ構造を備える。プローブ構造は、プローブヘッドを備えており、プローブヘッドは、ヘッド部およびフランジ部を備える。装置は、さらに、上側電極とフランジ部との間に配置されたO−リングを備える。装置は、さらに、プローブ構造が上側電極に触れないようにするために、ヘッド部と上側電極の開口部との間に配置される電気絶縁材料から形成されたスペーサを備える。スペーサは、フランジ部の下側を支持するよう構成されたディスク部を備える。スペーサは、さらに、ヘッド部を囲むよう構成された中空円筒部を備える。スペーサは、O−リングと処理チャンバの開口部との間に直角経路を形成して、O−リングと処理チャンバへの開口部との間の直接的な見通し経路を防止する。
【選択図】図2
Description
104…開口部
106…プラズマ対向面
110…ステム
112…支持構造
114…絶縁リング
120…プラズマ対向プローブヘッド
130…O−リング
132…リング
136…ギャップ
202…イオン束プローブ
204…上側電極
206…プローブヘッド
206a…ヘッド部
206b…フランジ部
206c…プラズマ対向面
208…ソケット
210…プラズマ対向面
212…スペーサ
212a…中空円筒部
212b…ディスク部
216a…肩部
216b…肩部
220…開口部
222…ギャップ
226…上面
228…O−リング
230…プラズマ対向層
232…上層
240…スリーブ
240a…雌ねじ切り部
240b…耳部
250…保持リング
252…熱接触リング
254…位置決め孔
Claims (20)
- プラズマ処理システムの処理チャンバ内のプロセスパラメータを測定するための装置であって、
上側電極の開口部内に配置され、プローブヘッドを備えたプローブ構造であって、前記プローブヘッドは、
プラズマ対向面を備えた円筒形のプラグであり、前記上側電極の前記開口部内に配置されたヘッド部と、
前記ヘッド部よりも大きい直径を有する中空の円筒形構造であり、前記上側電極の上面の上方に配置されたフランジ部とを備えるプローブ構造と、
前記上側電極の前記上面と、前記プローブヘッドの前記フランジ部の下側対向面との間に配置されたO−リングと、
前記プローブ構造が前記上側電極の前記開口部内に挿入された時に前記上側電極と接触しないように、前記プローブヘッドの前記ヘッド部の垂直側壁と前記上側電極の前記開口部の垂直側壁との間に配置される電気絶縁材料から形成されたスペーサであって、
前記プローブヘッドの前記フランジ部の下側を支持するように少なくとも構成されたディスク部と、
前記プローブヘッドの前記ヘッド部を囲むよう構成され、前記ディスク部よりも小さい直径を有する中空円筒部とを備えるスペーサと
を備え、
前記スペーサは、前記O−リングと前記処理チャンバへの開口部との間に直角経路を形成することによって、前記O−リングと前記処理チャンバへの前記開口部との間の直接的な見通し経路を防止する、装置。 - 請求項1に記載の装置であって、前記プローブ構造はイオン束プローブである装置。
- 請求項1に記載の装置であって、前記プローブヘッドはシリコンから形成される装置。
- 請求項1に記載の装置であって、前記プローブヘッドの前記プラズマ対向面は、前記上側電極のプラズマ対向面と同一平面上にある装置。
- 請求項1に記載の装置であって、前記スペーサは窒化シリコン(SiN)から形成される装置。
- 請求項1に記載の装置であって、前記スペーサは、前記ヘッド部の前記垂直側壁と前記上側電極の前記開口部の前記垂直側壁との間に高アスペクト比のギャップを形成し、前記高アスペクト比のギャップは、水平方向の幅よりも大きい垂直方向の長さを有する装置。
- 請求項1に記載の装置であって、前記プローブヘッドは、導電材料から形成されたソケットと電気的に接触する装置。
- 請求項7に記載の装置であって、前記プローブヘッドは、導電性のはんだによって前記ソケットに結合される装置。
- 請求項8に記載の装置であって、接点ロッドが前記ソケット内に挿入されており、前記接点ロッドは、前記プローブヘッドから得られた測定データを少なくとも受信して中継するよう構成されている装置。
- 請求項1に記載の装置であって、接点ロッドが前記プローブヘッドに結合されており、前記接点ロッドは、前記プローブヘッドから得られた測定データを少なくとも受信して中継するよう構成されている装置。
- 請求項1に記載の装置であって、前記上側電極は、
シリコンから形成されたプラズマ対向層と、
前記プラズマ対向層に結合され、熱・電気伝導性材料から形成された1組の上層と
を備えるよう構成される装置。 - 請求項11に記載の装置であって、前記1組の上層はアルミニウムから形成される装置。
- 請求項11に記載の装置であって、前記1組の上層はグラファイトから形成される装置。
- 請求項11に記載の装置であって、前記上側電極はスリーブを備え、前記スリーブは、雌ねじ切り部および耳部を備える装置。
- 請求項14に記載の装置であって、前記スリーブはアルミニウムから形成される装置。
- 請求項14に記載の装置であって、前記雌ねじ切り部は、ねじ切り保持リングに係合されることにより、前記O−リングを圧縮して、前記プローブヘッドの前記フランジ部を前記上側電極の前記上面に向かって下方に押しつける装置。
- 請求項16に記載の装置であって、前記ねじ切り保持リングは、ソケットの直径よりも大きい直径を有する内部貫通孔を備え、前記ソケットは、前記プローブヘッドと電気的に接触する装置。
- 請求項17に記載の装置であって、前記フランジ部の上側対向面と前記ねじ切り保持リングの下面との間に、熱接触リングが配置されており、前記熱接触リングは、前記プローブヘッドを前記ねじ切り保持リングから電気的に絶縁する装置。
- 請求項17に記載の装置であって、前記熱接触リングはシリコンポリマから形成される装置。
- 請求項11に記載の装置であって、前記上側電極の前記1組の上層は、雌ねじ切り部を備え、前記雌ねじ切り部は、ねじ切り保持リングに係合されることにより、前記O−リングを圧縮して、前記プローブヘッドの前記フランジ部を前記上側電極の前記上面に向かって下方に押しつける装置。
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US7874508P | 2008-07-07 | 2008-07-07 | |
US61/078,745 | 2008-07-07 | ||
PCT/US2009/049760 WO2010005932A2 (en) | 2008-07-07 | 2009-07-07 | Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber |
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JP2011527507A true JP2011527507A (ja) | 2011-10-27 |
JP5661622B2 JP5661622B2 (ja) | 2015-01-28 |
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JP2011517512A Active JP5661622B2 (ja) | 2008-07-07 | 2009-07-07 | プラズマ処理チャンバで用いるための真空ギャップを備えたプラズマ対向プローブ装置 |
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US (1) | US8547085B2 (ja) |
JP (1) | JP5661622B2 (ja) |
KR (1) | KR101588482B1 (ja) |
CN (1) | CN102084475B (ja) |
TW (1) | TWI494030B (ja) |
WO (1) | WO2010005932A2 (ja) |
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