JP5749071B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
- Publication number
- JP5749071B2 JP5749071B2 JP2011106983A JP2011106983A JP5749071B2 JP 5749071 B2 JP5749071 B2 JP 5749071B2 JP 2011106983 A JP2011106983 A JP 2011106983A JP 2011106983 A JP2011106983 A JP 2011106983A JP 5749071 B2 JP5749071 B2 JP 5749071B2
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- Japan
- Prior art keywords
- upper electrode
- plasma processing
- processing apparatus
- present
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
Description
102 下部電極
104 チャンバー壁
106 絶縁物
108 処理用ガス供給源
110 第1の供給管
112 排気手段
114 排気管
116 導体板
120 整合器
122 第2の供給管
124 不活性ガス供給源
126 交流電源
128 同軸管
130 バリアブルコンデンサ
132 ヒーター
134 ヒーター
140 第1の空間
142 第2の空間
Claims (2)
- 上部電極と下部電極とが対向してチャンバー内に備えられたプラズマ処理装置であって、
前記上部電極はヒーターを有し、
前記上部電極と、前記上部電極を覆うチャンバー壁との間の空間は、陽圧の不活性ガス雰囲気であり、
前記空間は、冷却された不活性ガス雰囲気であり、
前記上部電極と、前記上部電極を覆う前記チャンバー壁とは、同軸形状であることを特徴とするプラズマ処理装置。 - 請求項1において、
前記上部電極は、整合器と電気的に接続されており、
前記整合器は、前記空間に設けられていることを特徴とするプラズマ処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011106983A JP5749071B2 (ja) | 2010-05-18 | 2011-05-12 | プラズマ処理装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010114377 | 2010-05-18 | ||
JP2010114377 | 2010-05-18 | ||
JP2011106983A JP5749071B2 (ja) | 2010-05-18 | 2011-05-12 | プラズマ処理装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012004108A JP2012004108A (ja) | 2012-01-05 |
JP2012004108A5 JP2012004108A5 (ja) | 2014-06-19 |
JP5749071B2 true JP5749071B2 (ja) | 2015-07-15 |
Family
ID=45535848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011106983A Expired - Fee Related JP5749071B2 (ja) | 2010-05-18 | 2011-05-12 | プラズマ処理装置 |
Country Status (1)
Country | Link |
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JP (1) | JP5749071B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20120043636A (ko) * | 2010-10-26 | 2012-05-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 플라즈마 처리 장치 및 플라즈마 cvd 장치 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60114577A (ja) * | 1983-11-26 | 1985-06-21 | Matsushita Electric Ind Co Ltd | 化学処理装置 |
JP4499005B2 (ja) * | 2004-09-29 | 2010-07-07 | 積水化学工業株式会社 | プラズマ処理装置 |
JP5122805B2 (ja) * | 2006-12-20 | 2013-01-16 | 株式会社アルバック | 成膜装置 |
JP2008186939A (ja) * | 2007-01-29 | 2008-08-14 | Tokyo Electron Ltd | プラズマ処理装置及びプラズマ処理方法並びに記憶媒体 |
US8247315B2 (en) * | 2008-03-17 | 2012-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing apparatus and method for manufacturing semiconductor device |
JP5328685B2 (ja) * | 2010-01-28 | 2013-10-30 | 三菱電機株式会社 | プラズマ処理装置及びプラズマ処理方法 |
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2011
- 2011-05-12 JP JP2011106983A patent/JP5749071B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2012004108A (ja) | 2012-01-05 |
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