JP2011524844A5 - - Google Patents

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Publication number
JP2011524844A5
JP2011524844A5 JP2011513041A JP2011513041A JP2011524844A5 JP 2011524844 A5 JP2011524844 A5 JP 2011524844A5 JP 2011513041 A JP2011513041 A JP 2011513041A JP 2011513041 A JP2011513041 A JP 2011513041A JP 2011524844 A5 JP2011524844 A5 JP 2011524844A5
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JP
Japan
Prior art keywords
metal oxide
soluble salt
salt precursor
substrate
crystalline ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011513041A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011524844A (ja
JP5718810B2 (ja
Filing date
Publication date
Priority claimed from GB0810909A external-priority patent/GB2460877A/en
Priority claimed from GB0810989A external-priority patent/GB0810989D0/en
Priority claimed from GB0823668A external-priority patent/GB0823668D0/en
Application filed filed Critical
Priority claimed from PCT/GB2009/001103 external-priority patent/WO2009090419A2/en
Publication of JP2011524844A publication Critical patent/JP2011524844A/ja
Publication of JP2011524844A5 publication Critical patent/JP2011524844A5/ja
Application granted granted Critical
Publication of JP5718810B2 publication Critical patent/JP5718810B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011513041A 2008-06-13 2009-04-30 セラミック膜の堆積方法 Active JP5718810B2 (ja)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
GB0810909.2 2008-06-13
GB0810909A GB2460877A (en) 2008-06-13 2008-06-13 Method of depositing crystalline ceramic films
GB0810989.4 2008-06-16
GB0810989A GB0810989D0 (en) 2008-06-16 2008-06-16 Method for deposition of ceramic films
US7359808P 2008-06-18 2008-06-18
US61/073,598 2008-06-18
GB0823668A GB0823668D0 (en) 2008-12-30 2008-12-30 Method for deposition of ceramic films
GB0823668.9 2008-12-30
PCT/GB2009/001103 WO2009090419A2 (en) 2008-06-13 2009-04-30 Method for deposition of ceramic films

Publications (3)

Publication Number Publication Date
JP2011524844A JP2011524844A (ja) 2011-09-08
JP2011524844A5 true JP2011524844A5 (enExample) 2012-05-31
JP5718810B2 JP5718810B2 (ja) 2015-05-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011513041A Active JP5718810B2 (ja) 2008-06-13 2009-04-30 セラミック膜の堆積方法

Country Status (14)

Country Link
US (1) US9561987B2 (enExample)
EP (1) EP2318328B1 (enExample)
JP (1) JP5718810B2 (enExample)
KR (1) KR101617007B1 (enExample)
CN (1) CN102119134B (enExample)
BR (1) BRPI0915139A2 (enExample)
CA (1) CA2745575C (enExample)
EA (1) EA021907B1 (enExample)
ES (1) ES2708085T3 (enExample)
GB (1) GB2456445B (enExample)
HU (1) HUE042489T2 (enExample)
TR (1) TR201900926T4 (enExample)
WO (1) WO2009090419A2 (enExample)
ZA (1) ZA201100057B (enExample)

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