JP2011513082A - 一体化マイクロニードルアレイおよびその製造方法 - Google Patents
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/0085—Manufacture of substrate-free structures using moulds and master templates, e.g. for hot-embossing
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0023—Drug applicators using microneedles
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- A—HUMAN NECESSITIES
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- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
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- A—HUMAN NECESSITIES
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- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0053—Methods for producing microneedles
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B—PERFORMING OPERATIONS; TRANSPORTING
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Abstract
【選択図】 図18
Description
−マイクロニードルの形状を規定する顕微鏡的大きさを有する一組の切込み部を備え、基板に一体化されたマイクロニードルアレイを提供することが可能な軟質(soft)製造モールドを選択する工程と、
−前記軟質製造モールドの顕微鏡的切込み部を十分に充填するための充填材料を使用し、それにより前記基板に一体化された、所定の形状を持つマイクロニードルアレイを製造する工程と、を備え、
−前記充填材料として、水またはアルコールをベースとするセラミックもしくはポリマー−セラミックスラリが選択される。
−マスク層を塗布したSiウエハの作業表面上に放射線感受性材料の第1の層を堆積する工程と、
−前記第1の層をリソグラフィーにより処理して、前記マスク層に、前記Siウエハの所定の結晶面と協働する、ピッチと幅を有する第1の開口部を形成する工程と、
−前記マスク層をエッチングして前記第1の開口部と協働する第2の開口部を形成する工程と、
−前記Siウエハに前記第2の開口部と協働する一組の空洞部を形成する工程と、
−前記Siウエハの前記一組の空洞部をホトレジスト層で充填する工程と、
−前記ホトレジスト層に一組の反転されたマイクロニードルを生成する工程と、を用いる。
Claims (31)
- マイクロニードルアレイの製造方法であって、
−マイクロニードルの形状を定義する顕微鏡的大きさの、一組の切込み部を備えた軟質製造モールドであって、基板に一体化されたマイクロニードルアレイを生成することが可能なモールドを選択する工程と、
−充填材料を用いて十分に前記顕微鏡的大きさの切込み部を充填し、それにより所定の形状を持ち基板に一体化された前記マイクロニードルアレイを製造する工程と、を備え、
−前記充填材料として水またはアルコールをベースとするセラミックまたはポリマー−セラミックスラリが選択されることを特徴とする方法。 - 前記顕微鏡的大きさの切込み部表面に接着防止層を塗設して前記マイクロニードルアレイを前記軟質製造モールドから取り外し易くする工程をさらに備えることを特徴とする請求項1に記載の方法。
- 前記1つ以上のチャネルを通して物質の輸送を可能にするために前記マイクロニードルアレイの前記マイクロニードルに1つ以上のチャネルを設ける工程をさらに備えることを特徴とする請求項1または2記載の方法。
- 前記顕微鏡的大きさの切込み部のそれぞれの端部を斜面状に形成して、斜めの先端部を持つ前記マイクロニードルアレイを形成する工程をさらに備えることを特徴とする請求項1ないし3のいずれか一項記載の方法。
- 前記充填材料に添加物を補充することにより前記充填材料の性質を適合的に変化させる工程をさらに備える請求項1ないし4のいずれか一項記載の方法。
- 前記添加物として、シリカをベースとする材料、好ましくはカオリンが選択されることを特徴とする請求項5記載の方法。
- 前記軟質製造モールドは中間軟質モールドを介する硬質マスターモールドの二重複製を用いて製造されることを特徴とする請求項1ないし6のいずれか一項記載の方法。
- 前記硬質マスターモールドは、
−マスク層を塗布したSi−ウエハの作業面上に放射線感受性材料の第1の層を堆積する工程と、
−リソグラフィーにより前記第1の層を処理して前記マスク層に、ピッチと幅とを有し、前記Si−ウエハの所定の結晶面と協働する第1の開口部を形成する工程と、
−前記マスク層をエッチングして前記第1の開口部と協働する第2の開口部を形成する工程と、
−前記Si−ウエハに前記第2の開口部と協働する一組の空洞部を形成する工程と、
−前記空洞部にホトレジストの層を充填する工程と、
−前記ホトレジストの層に一組の反転されたマイクロニードルを生成する工程と、を用いて製造されることを特徴とする請求項7記載の方法。 - 前記マスク層として、窒化ケイ素層が用いられることを特徴とする請求項8記載の方法。
- 前記マスク層のエッチングとして、反応性イオンエッチングが用いられることを特徴とする請求項8記載の方法。
- 前記一組の空洞部は、KOHを用いる異方性湿式エッチングを使用して形成されることを特徴とする請求項8記載の方法。
- 前記空洞部を充填している前記ホトレジスト層の厚さは得られるマイクロニードルの長さを決定するように選択されることを特徴とする請求項8記載の方法。
- ケイ化物反射防止層を用いて前記空洞部の表面を変化させる工程を備える請求項8記載の方法。
- −前記第1の材料層を選択的に照射する工程と、
−前記選択的に照射された第1の材料層上に第2の材料層を設ける工程と、
−前記第2の材料層を、前記第1の層の選択的照射領域と一緒に処理して前記マイクロニードルアレイに少なくとも1つのチャネルを形成する工程と、をさらに備えることを特徴とする請求項8ないし13のいずれか一項記載の方法。 - 前記反転されたマイクロニードルは、マスクを用いるリソグラフィーにより生成されることを特徴とする請求項8ないし14のいずれか一項記載の方法。
- 前記マスクのレイアウトが斜めの先端部を持つ反転されたマイクロニードルを生成するように適合可能であることを特徴とする請求項15記載の方法。
- 前記マイクロニードルは、複数のマイクロニードルからなるサブセットを1つ以上備え、前記マスクは、内向きまたは外向きの斜めの先端部を有するマイクロニードルを含む少なくとも1つのサブセットを形成するように変更されていることを特徴とする請求項16記載の方法。
- 基板と、
前記基板と一体化された一組のマイクロニードルと、を備え、
前記マイクロニードルは多孔質セラミック材料または多孔質セラミック複合材料からなることを特徴とするマイクロニードルアレイ。 - 前記マイクロニードルは、実質的に継ぎ目がなく前記基板に移行していることを特徴とする請求項18記載のマイクロニードルアレイ。
- 前記一組のマイクロニードルは、異なる長さのマイクロニードルであることを特徴とする請求項18または19記載のマイクロニードルアレイ。
- 前記一組のマイクロニードルは、前記組の縁辺に実質的に相互に対向して配置された少なくとも第1および第2のマイクロニードルを備え、
前記少なくとも第1および第2のマイクロニードルは前記組の全マイクロニードルに対して長さが増加していることを特徴とする請求項20記載のマイクロニードルアレイ。 - 前記少なくとも第1および第2のマイクロニードルの長さは前記組の前記全マイクロニードルの長さよりも少なくとも1〜10%大きいことを特徴とする請求項21記載のマイクロニードルアレイ。
- 前記マイクロニードルは物質障壁と相互作用すると考えられる斜めの先端部を形成されていることを特徴とする請求項18ないし22のいずれか一項記載のマイクロニードルアレイ。
- 1つ以上のサブセットを備え、マイクロニードルは内向きまたは外向きの斜めの先端部を有することを特徴とする請求項23記載のマイクロニードルアレイ。
- マイクロニードルは異なる形状の先端部を有することを特徴とする請求項18ないし24のいずれか一項記載のマイクロニードルアレイ。
- 少なくとも1つのマイクロニードルが液体を導通させるチャネルを備えることを特徴とする請求項18ないし25のいずれか一項記載のマイクロニードルアレイ。
- 請求項18ないし26のいずれか一項記載のマイクロニードルアレイであって、物質障壁を通して輸送される物質、または前記マイクロニードルを用いて前記物質障壁を介して抽出されるべきさらなる物質に特異的結合性を有する物質を設けられているマイクロニードルアレイを備えることを特徴とする組成物。
- 前記マイクロニードルは前記物質で少なくとも部分的に充填されている気孔を設けられていることを特徴とする請求項27記載の組成物。
- 前記マイクロニードルは異なる機能および/または異なる形状を有するマイクロニードルのサブセットを含むことを特徴とする請求項27または28記載の組成物。
- 請求項18ないし26のいずれか一項記載のマイクロニードルアレイを備えることを特徴とする、物質障壁を通して物質を輸送することを可能にするシステム。
- 電極を用いて電気信号を測定するシステムであって、
前記電極は請求項18ないし26のいずれか一項記載のマイクロニードルアレイのマイクロニードルの少なくとも1つを含むことを特徴とするシステム。
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JP2015521910A (ja) * | 2012-06-29 | 2015-08-03 | イーエルシー マネージメント エルエルシー | 1つ以上の封入された化粧品成分を含む可溶性マイクロニードル |
JP2015107387A (ja) * | 2015-03-09 | 2015-06-11 | 株式会社バイオセレンタック | 頻繁に容易に脱着可能なマイクロニードル用基盤 |
JP2017213171A (ja) * | 2016-05-31 | 2017-12-07 | 富士フイルム株式会社 | 凹状パターンモールド、凹状パターンモールドの製造方法、および、パターンシートの製造方法 |
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CN103691054B (zh) | 2016-07-13 |
WO2009113856A1 (en) | 2009-09-17 |
CN102026910A (zh) | 2011-04-20 |
ES2552722T3 (es) | 2015-12-01 |
PL2262722T3 (pl) | 2016-01-29 |
US20140066855A1 (en) | 2014-03-06 |
US8603384B2 (en) | 2013-12-10 |
CN103691054A (zh) | 2014-04-02 |
JP2014076378A (ja) | 2014-05-01 |
JP5948308B2 (ja) | 2016-07-06 |
EP2262722A1 (en) | 2010-12-22 |
US10413711B2 (en) | 2019-09-17 |
CN102026910B (zh) | 2014-01-29 |
JP5517956B2 (ja) | 2014-06-11 |
EP2262722B1 (en) | 2015-08-12 |
US20110276003A1 (en) | 2011-11-10 |
EP2100850A1 (en) | 2009-09-16 |
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