JP2011508458A5 - - Google Patents
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- JP2011508458A5 JP2011508458A5 JP2010540945A JP2010540945A JP2011508458A5 JP 2011508458 A5 JP2011508458 A5 JP 2011508458A5 JP 2010540945 A JP2010540945 A JP 2010540945A JP 2010540945 A JP2010540945 A JP 2010540945A JP 2011508458 A5 JP2011508458 A5 JP 2011508458A5
- Authority
- JP
- Japan
- Prior art keywords
- producing
- cnt
- manufacturing
- selectively
- switching element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002041 carbon nanotube Substances 0.000 claims 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 36
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 36
- 238000004519 manufacturing process Methods 0.000 claims 21
- 238000000034 method Methods 0.000 claims 19
- 239000000463 material Substances 0.000 claims 17
- 238000010899 nucleation Methods 0.000 claims 15
- 230000002441 reversible effect Effects 0.000 claims 14
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 11
- 239000004020 conductor Substances 0.000 claims 11
- 239000000758 substrate Substances 0.000 claims 9
- 238000000151 deposition Methods 0.000 claims 8
- 229910052751 metal Inorganic materials 0.000 claims 6
- 239000002184 metal Substances 0.000 claims 6
- 238000005530 etching Methods 0.000 claims 5
- 238000000059 patterning Methods 0.000 claims 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- 238000007788 roughening Methods 0.000 claims 3
- 239000010941 cobalt Substances 0.000 claims 2
- 229910017052 cobalt Inorganic materials 0.000 claims 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 239000003054 catalyst Substances 0.000 claims 1
- 230000007547 defect Effects 0.000 claims 1
- SCCCLDWUZODEKG-UHFFFAOYSA-N germanide Chemical compound [GeH3-] SCCCLDWUZODEKG-UHFFFAOYSA-N 0.000 claims 1
- 229910021332 silicide Inorganic materials 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/968,154 US8236623B2 (en) | 2007-12-31 | 2007-12-31 | Memory cell that employs a selectively fabricated carbon nano-tube reversible resistance-switching element and methods of forming the same |
| PCT/US2008/088584 WO2009088888A2 (en) | 2007-12-31 | 2008-12-30 | Memory cell that employs a selectively fabricated carbon nano-tube reversible resistance-switching element and methods of forming the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011508458A JP2011508458A (ja) | 2011-03-10 |
| JP2011508458A5 true JP2011508458A5 (enExample) | 2011-12-15 |
Family
ID=40798167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010540945A Pending JP2011508458A (ja) | 2007-12-31 | 2008-12-30 | 選択的に製造されたカーボンナノチューブ可逆抵抗切替素子を使用するメモリセルおよびそれを形成する方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8236623B2 (enExample) |
| EP (1) | EP2227824B1 (enExample) |
| JP (1) | JP2011508458A (enExample) |
| KR (1) | KR101494746B1 (enExample) |
| CN (1) | CN101919047B (enExample) |
| TW (1) | TW200943489A (enExample) |
| WO (1) | WO2009088888A2 (enExample) |
Families Citing this family (71)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US9390790B2 (en) | 2005-04-05 | 2016-07-12 | Nantero Inc. | Carbon based nonvolatile cross point memory incorporating carbon based diode select devices and MOSFET select devices for memory and logic applications |
| US9287356B2 (en) * | 2005-05-09 | 2016-03-15 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
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| US8183665B2 (en) * | 2005-11-15 | 2012-05-22 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
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| US7835170B2 (en) * | 2005-05-09 | 2010-11-16 | Nantero, Inc. | Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks |
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| US9911743B2 (en) | 2005-05-09 | 2018-03-06 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
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| EP2263273B1 (en) * | 2008-04-11 | 2012-05-16 | Sandisk 3D LLC | Memory cell that includes a carbon nano-tube reversible resistance-switching element and methods of forming the same |
| US8530318B2 (en) * | 2008-04-11 | 2013-09-10 | Sandisk 3D Llc | Memory cell that employs a selectively fabricated carbon nano-tube reversible resistance-switching element formed over a bottom conductor and methods of forming the same |
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| US8133793B2 (en) | 2008-05-16 | 2012-03-13 | Sandisk 3D Llc | Carbon nano-film reversible resistance-switchable elements and methods of forming the same |
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| US20100032639A1 (en) * | 2008-08-07 | 2010-02-11 | Sandisk 3D Llc | Memory cell that includes a carbon-based memory element and methods of forming the same |
| US9263126B1 (en) | 2010-09-01 | 2016-02-16 | Nantero Inc. | Method for dynamically accessing and programming resistive change element arrays |
| US8188763B2 (en) * | 2008-08-14 | 2012-05-29 | Nantero, Inc. | Nonvolatile nanotube programmable logic devices and a nonvolatile nanotube field programmable gate array using same |
| US8431417B2 (en) * | 2008-08-19 | 2013-04-30 | Sandisk 3D Llc | Methods for increasing carbon nano-tube (CNT) yield in memory devices |
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| US20110210306A1 (en) * | 2010-02-26 | 2011-09-01 | Yubao Li | Memory cell that includes a carbon-based memory element and methods of forming the same |
| US8481394B2 (en) * | 2010-03-04 | 2013-07-09 | Sandisk 3D Llc | Memory cell that includes a carbon-based memory element and methods of forming the same |
| US8471360B2 (en) | 2010-04-14 | 2013-06-25 | Sandisk 3D Llc | Memory cell with carbon switching material having a reduced cross-sectional area and methods for forming the same |
| KR101110543B1 (ko) | 2010-04-21 | 2012-02-09 | 주식회사 하이닉스반도체 | 고집적 반도체 장치 |
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| JP2012019191A (ja) * | 2010-06-10 | 2012-01-26 | Toshiba Corp | 不揮発性記憶装置の製造方法 |
| US8883589B2 (en) | 2010-09-28 | 2014-11-11 | Sandisk 3D Llc | Counter doping compensation methods to improve diode performance |
| CN102117823B (zh) * | 2010-11-04 | 2013-02-13 | 中国科学院上海微系统与信息技术研究所 | 电阻转换存储纳米结构及其自对准制造方法 |
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| US8233308B2 (en) | 2007-06-29 | 2012-07-31 | Sandisk 3D Llc | Memory cell that employs a selectively deposited reversible resistance-switching element and methods of forming the same |
| US8558220B2 (en) | 2007-12-31 | 2013-10-15 | Sandisk 3D Llc | Memory cell that employs a selectively fabricated carbon nano-tube reversible resistance-switching element formed over a bottom conductor and methods of forming the same |
| US20090166610A1 (en) | 2007-12-31 | 2009-07-02 | April Schricker | Memory cell with planarized carbon nanotube layer and methods of forming the same |
-
2007
- 2007-12-31 US US11/968,154 patent/US8236623B2/en not_active Expired - Fee Related
-
2008
- 2008-12-30 KR KR1020107013893A patent/KR101494746B1/ko not_active Expired - Fee Related
- 2008-12-30 WO PCT/US2008/088584 patent/WO2009088888A2/en not_active Ceased
- 2008-12-30 EP EP08869555.6A patent/EP2227824B1/en not_active Not-in-force
- 2008-12-30 CN CN200880123685.1A patent/CN101919047B/zh not_active Expired - Fee Related
- 2008-12-30 JP JP2010540945A patent/JP2011508458A/ja active Pending
- 2008-12-31 TW TW097151907A patent/TW200943489A/zh unknown
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